JP2023540004A5 - - Google Patents
Info
- Publication number
- JP2023540004A5 JP2023540004A5 JP2023506017A JP2023506017A JP2023540004A5 JP 2023540004 A5 JP2023540004 A5 JP 2023540004A5 JP 2023506017 A JP2023506017 A JP 2023506017A JP 2023506017 A JP2023506017 A JP 2023506017A JP 2023540004 A5 JP2023540004 A5 JP 2023540004A5
- Authority
- JP
- Japan
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2025150978A JP2025172963A (ja) | 2020-07-28 | 2025-09-11 | 加熱バルブ多岐管組立品を有するシステム、そのシステムの製造方法 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US202063057872P | 2020-07-28 | 2020-07-28 | |
| US63/057,872 | 2020-07-28 | ||
| PCT/US2020/053069 WO2022025950A1 (en) | 2020-07-28 | 2020-09-28 | Systems having heated valve manifold assemblies, methods of manufacture of same |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2025150978A Division JP2025172963A (ja) | 2020-07-28 | 2025-09-11 | 加熱バルブ多岐管組立品を有するシステム、そのシステムの製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2023540004A JP2023540004A (ja) | 2023-09-21 |
| JPWO2022025950A5 JPWO2022025950A5 (https=) | 2025-02-19 |
| JP2023540004A5 true JP2023540004A5 (https=) | 2025-02-19 |
Family
ID=80036646
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023506017A Withdrawn JP2023540004A (ja) | 2020-07-28 | 2020-09-28 | 加熱バルブ多岐菅組立品を有するシステム、そのシステムの製造方法 |
| JP2025150978A Pending JP2025172963A (ja) | 2020-07-28 | 2025-09-11 | 加熱バルブ多岐管組立品を有するシステム、そのシステムの製造方法 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2025150978A Pending JP2025172963A (ja) | 2020-07-28 | 2025-09-11 | 加熱バルブ多岐管組立品を有するシステム、そのシステムの製造方法 |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US12565942B2 (https=) |
| EP (1) | EP4169060A4 (https=) |
| JP (2) | JP2023540004A (https=) |
| KR (1) | KR20230042364A (https=) |
| CN (1) | CN115997477A (https=) |
| IL (1) | IL300012A (https=) |
| TW (1) | TWI761973B (https=) |
| WO (1) | WO2022025950A1 (https=) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2022025950A1 (en) | 2020-07-28 | 2022-02-03 | Versum Materials Us, Llc | Systems having heated valve manifold assemblies, methods of manufacture of same |
| CN116006728A (zh) * | 2022-12-31 | 2023-04-25 | 聚光科技(杭州)股份有限公司 | 一种紧凑型多通道气体选向阀 |
Family Cites Families (24)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3878658A (en) * | 1973-08-29 | 1975-04-22 | Chicago Bridge & Iron Co | Foam board insulation system |
| US3858632A (en) * | 1973-12-10 | 1975-01-07 | Rhodes Joseph S | Insulating cover for ground faucets |
| US4562857A (en) * | 1983-09-19 | 1986-01-07 | Ball Randell D | Thermal insulation article |
| US4792162A (en) * | 1986-12-23 | 1988-12-20 | Swagelok Quick Connect Co. | Protective device for quick connect coupling |
| US5451258A (en) * | 1994-05-11 | 1995-09-19 | Materials Research Corporation | Apparatus and method for improved delivery of vaporized reactant gases to a reaction chamber |
| JP3317114B2 (ja) * | 1995-11-28 | 2002-08-26 | 三菱マテリアル株式会社 | タンク保護容器 |
| JP3752578B2 (ja) | 1997-04-21 | 2006-03-08 | 株式会社フジキン | 流体制御器用加熱装置 |
| US6257626B1 (en) * | 1999-04-27 | 2001-07-10 | Flow-Rite Controls, Ltd. | Connector for fluid handling system |
| US6283143B1 (en) | 2000-03-31 | 2001-09-04 | Lam Research Corporation | System and method for providing an integrated gas stick |
| US6578600B1 (en) * | 2000-10-31 | 2003-06-17 | International Business Machines Corporation | Gas isolation box |
| JP4487135B2 (ja) * | 2001-03-05 | 2010-06-23 | 東京エレクトロン株式会社 | 流体制御装置 |
| JP2004340199A (ja) | 2003-05-14 | 2004-12-02 | Fujikin Inc | 加熱装置付き流体制御装置 |
| JP2005098347A (ja) | 2003-09-24 | 2005-04-14 | Fujikin Inc | 流体制御器の加熱方法 |
| JP2005096923A (ja) | 2003-09-24 | 2005-04-14 | Shin Meiwa Ind Co Ltd | 塵芥貯留排出装置 |
| JP4753173B2 (ja) * | 2005-06-17 | 2011-08-24 | 株式会社フジキン | 流体制御装置 |
| US7775508B2 (en) * | 2006-10-31 | 2010-08-17 | Applied Materials, Inc. | Ampoule for liquid draw and vapor draw with a continuous level sensor |
| KR101285562B1 (ko) * | 2011-12-15 | 2013-07-12 | 주식회사 플로웰 | 반도체 제조 공정용 블록형 가스 케비넷 |
| US9140466B2 (en) | 2012-07-17 | 2015-09-22 | Eemax, Inc. | Fluid heating system and instant fluid heating device |
| US9469976B1 (en) * | 2015-03-25 | 2016-10-18 | Douglas W. Banks | Housing for drain outlet |
| JP6627464B2 (ja) | 2015-03-30 | 2020-01-08 | 東京エレクトロン株式会社 | 原料ガス供給装置及び成膜装置 |
| WO2017002241A1 (ja) * | 2015-07-01 | 2017-01-05 | ニチアス株式会社 | ヒータ装置及びそれを用いた被加熱体の加熱方法 |
| WO2018179999A1 (ja) * | 2017-03-29 | 2018-10-04 | 日立金属株式会社 | 気化器 |
| CN110914959A (zh) | 2017-07-25 | 2020-03-24 | 株式会社富士金 | 流体控制装置 |
| WO2022025950A1 (en) | 2020-07-28 | 2022-02-03 | Versum Materials Us, Llc | Systems having heated valve manifold assemblies, methods of manufacture of same |
-
2020
- 2020-09-28 WO PCT/US2020/053069 patent/WO2022025950A1/en not_active Ceased
- 2020-09-28 JP JP2023506017A patent/JP2023540004A/ja not_active Withdrawn
- 2020-09-28 US US18/007,240 patent/US12565942B2/en active Active
- 2020-09-28 IL IL300012A patent/IL300012A/en unknown
- 2020-09-28 EP EP20947601.9A patent/EP4169060A4/en active Pending
- 2020-09-28 CN CN202080103683.7A patent/CN115997477A/zh active Pending
- 2020-09-28 KR KR1020237006978A patent/KR20230042364A/ko active Pending
- 2020-09-29 TW TW109133793A patent/TWI761973B/zh active
-
2025
- 2025-09-11 JP JP2025150978A patent/JP2025172963A/ja active Pending