KR20230042364A - 가열식 밸브 매니폴드 조립체를 구비한 시스템 및 그 제조 방법 - Google Patents

가열식 밸브 매니폴드 조립체를 구비한 시스템 및 그 제조 방법 Download PDF

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Publication number
KR20230042364A
KR20230042364A KR1020237006978A KR20237006978A KR20230042364A KR 20230042364 A KR20230042364 A KR 20230042364A KR 1020237006978 A KR1020237006978 A KR 1020237006978A KR 20237006978 A KR20237006978 A KR 20237006978A KR 20230042364 A KR20230042364 A KR 20230042364A
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KR
South Korea
Prior art keywords
thermally conductive
conductive plate
valve manifold
valves
tubes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
KR1020237006978A
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English (en)
Korean (ko)
Inventor
크리스토퍼 데이비드 폰타나
데이비드 칼 에셀만
유스라 파티마
토머스 윌리엄 필츠
메이슨 세이델
Original Assignee
버슘머트리얼즈 유에스, 엘엘씨
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 버슘머트리얼즈 유에스, 엘엘씨 filed Critical 버슘머트리얼즈 유에스, 엘엘씨
Publication of KR20230042364A publication Critical patent/KR20230042364A/ko
Pending legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K49/00—Means in or on valves for heating or cooling
    • F16K49/002—Electric heating means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/003—Housing formed from a plurality of the same valve elements
    • H01L21/67017—
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/20—Heating elements having extended surface area substantially in a two-dimensional [2D] plane, e.g. plate-heater
    • H05B3/22—Heating elements having extended surface area substantially in a two-dimensional [2D] plane, e.g. plate-heater non-flexible
    • H05B3/28—Heating elements having extended surface area substantially in a two-dimensional [2D] plane, e.g. plate-heater non-flexible heating conductor embedded in insulating material
    • H05B3/283—Heating elements having extended surface area substantially in a two-dimensional [2D] plane, e.g. plate-heater non-flexible heating conductor embedded in insulating material the insulating material being an inorganic material, e.g. ceramic
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0402—Apparatus for fluid treatment
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/6851—With casing, support, protector or static constructional installations
    • Y10T137/7036—Jacketed

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Details Of Valves (AREA)
  • Branch Pipes, Bends, And The Like (AREA)
  • Pipe Accessories (AREA)
KR1020237006978A 2020-07-28 2020-09-28 가열식 밸브 매니폴드 조립체를 구비한 시스템 및 그 제조 방법 Pending KR20230042364A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US202063057872P 2020-07-28 2020-07-28
US63/057,872 2020-07-28
PCT/US2020/053069 WO2022025950A1 (en) 2020-07-28 2020-09-28 Systems having heated valve manifold assemblies, methods of manufacture of same

Publications (1)

Publication Number Publication Date
KR20230042364A true KR20230042364A (ko) 2023-03-28

Family

ID=80036646

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020237006978A Pending KR20230042364A (ko) 2020-07-28 2020-09-28 가열식 밸브 매니폴드 조립체를 구비한 시스템 및 그 제조 방법

Country Status (8)

Country Link
US (1) US12565942B2 (https=)
EP (1) EP4169060A4 (https=)
JP (2) JP2023540004A (https=)
KR (1) KR20230042364A (https=)
CN (1) CN115997477A (https=)
IL (1) IL300012A (https=)
TW (1) TWI761973B (https=)
WO (1) WO2022025950A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2022025950A1 (en) 2020-07-28 2022-02-03 Versum Materials Us, Llc Systems having heated valve manifold assemblies, methods of manufacture of same
CN116006728A (zh) * 2022-12-31 2023-04-25 聚光科技(杭州)股份有限公司 一种紧凑型多通道气体选向阀

Family Cites Families (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3878658A (en) * 1973-08-29 1975-04-22 Chicago Bridge & Iron Co Foam board insulation system
US3858632A (en) * 1973-12-10 1975-01-07 Rhodes Joseph S Insulating cover for ground faucets
US4562857A (en) * 1983-09-19 1986-01-07 Ball Randell D Thermal insulation article
US4792162A (en) * 1986-12-23 1988-12-20 Swagelok Quick Connect Co. Protective device for quick connect coupling
US5451258A (en) * 1994-05-11 1995-09-19 Materials Research Corporation Apparatus and method for improved delivery of vaporized reactant gases to a reaction chamber
JP3317114B2 (ja) * 1995-11-28 2002-08-26 三菱マテリアル株式会社 タンク保護容器
JP3752578B2 (ja) 1997-04-21 2006-03-08 株式会社フジキン 流体制御器用加熱装置
US6257626B1 (en) * 1999-04-27 2001-07-10 Flow-Rite Controls, Ltd. Connector for fluid handling system
US6283143B1 (en) 2000-03-31 2001-09-04 Lam Research Corporation System and method for providing an integrated gas stick
US6578600B1 (en) * 2000-10-31 2003-06-17 International Business Machines Corporation Gas isolation box
JP4487135B2 (ja) * 2001-03-05 2010-06-23 東京エレクトロン株式会社 流体制御装置
JP2004340199A (ja) 2003-05-14 2004-12-02 Fujikin Inc 加熱装置付き流体制御装置
JP2005098347A (ja) 2003-09-24 2005-04-14 Fujikin Inc 流体制御器の加熱方法
JP2005096923A (ja) 2003-09-24 2005-04-14 Shin Meiwa Ind Co Ltd 塵芥貯留排出装置
JP4753173B2 (ja) * 2005-06-17 2011-08-24 株式会社フジキン 流体制御装置
US7775508B2 (en) * 2006-10-31 2010-08-17 Applied Materials, Inc. Ampoule for liquid draw and vapor draw with a continuous level sensor
KR101285562B1 (ko) * 2011-12-15 2013-07-12 주식회사 플로웰 반도체 제조 공정용 블록형 가스 케비넷
US9140466B2 (en) 2012-07-17 2015-09-22 Eemax, Inc. Fluid heating system and instant fluid heating device
US9469976B1 (en) * 2015-03-25 2016-10-18 Douglas W. Banks Housing for drain outlet
JP6627464B2 (ja) 2015-03-30 2020-01-08 東京エレクトロン株式会社 原料ガス供給装置及び成膜装置
WO2017002241A1 (ja) * 2015-07-01 2017-01-05 ニチアス株式会社 ヒータ装置及びそれを用いた被加熱体の加熱方法
WO2018179999A1 (ja) * 2017-03-29 2018-10-04 日立金属株式会社 気化器
CN110914959A (zh) 2017-07-25 2020-03-24 株式会社富士金 流体控制装置
WO2022025950A1 (en) 2020-07-28 2022-02-03 Versum Materials Us, Llc Systems having heated valve manifold assemblies, methods of manufacture of same

Also Published As

Publication number Publication date
IL300012A (en) 2023-03-01
EP4169060A4 (en) 2024-07-24
CN115997477A (zh) 2023-04-21
TW202204794A (zh) 2022-02-01
JP2023540004A (ja) 2023-09-21
JP2025172963A (ja) 2025-11-26
US12565942B2 (en) 2026-03-03
TWI761973B (zh) 2022-04-21
WO2022025950A1 (en) 2022-02-03
US20230287992A1 (en) 2023-09-14
EP4169060A1 (en) 2023-04-26

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