CN115997477A - 具有加热的阀歧管组件的系统及其制造方法 - Google Patents

具有加热的阀歧管组件的系统及其制造方法 Download PDF

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Publication number
CN115997477A
CN115997477A CN202080103683.7A CN202080103683A CN115997477A CN 115997477 A CN115997477 A CN 115997477A CN 202080103683 A CN202080103683 A CN 202080103683A CN 115997477 A CN115997477 A CN 115997477A
Authority
CN
China
Prior art keywords
thermally conductive
conductive plate
valve manifold
valves
heated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202080103683.7A
Other languages
English (en)
Chinese (zh)
Inventor
C·D·丰塔纳
D·C·埃谢尔曼
Y·法蒂玛
T·W·皮尔兹
M·赛德尔
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Versum Materials US LLC
Original Assignee
Versum Materials US LLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Versum Materials US LLC filed Critical Versum Materials US LLC
Publication of CN115997477A publication Critical patent/CN115997477A/zh
Pending legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K49/00—Means in or on valves for heating or cooling
    • F16K49/002—Electric heating means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/003—Housing formed from a plurality of the same valve elements
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/20—Heating elements having extended surface area substantially in a two-dimensional [2D] plane, e.g. plate-heater
    • H05B3/22—Heating elements having extended surface area substantially in a two-dimensional [2D] plane, e.g. plate-heater non-flexible
    • H05B3/28—Heating elements having extended surface area substantially in a two-dimensional [2D] plane, e.g. plate-heater non-flexible heating conductor embedded in insulating material
    • H05B3/283—Heating elements having extended surface area substantially in a two-dimensional [2D] plane, e.g. plate-heater non-flexible heating conductor embedded in insulating material the insulating material being an inorganic material, e.g. ceramic
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0402—Apparatus for fluid treatment
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/6851—With casing, support, protector or static constructional installations
    • Y10T137/7036—Jacketed

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Details Of Valves (AREA)
  • Branch Pipes, Bends, And The Like (AREA)
  • Pipe Accessories (AREA)
CN202080103683.7A 2020-07-28 2020-09-28 具有加热的阀歧管组件的系统及其制造方法 Pending CN115997477A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US202063057872P 2020-07-28 2020-07-28
US63/057,872 2020-07-28
PCT/US2020/053069 WO2022025950A1 (en) 2020-07-28 2020-09-28 Systems having heated valve manifold assemblies, methods of manufacture of same

Publications (1)

Publication Number Publication Date
CN115997477A true CN115997477A (zh) 2023-04-21

Family

ID=80036646

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202080103683.7A Pending CN115997477A (zh) 2020-07-28 2020-09-28 具有加热的阀歧管组件的系统及其制造方法

Country Status (8)

Country Link
US (1) US12565942B2 (https=)
EP (1) EP4169060A4 (https=)
JP (2) JP2023540004A (https=)
KR (1) KR20230042364A (https=)
CN (1) CN115997477A (https=)
IL (1) IL300012A (https=)
TW (1) TWI761973B (https=)
WO (1) WO2022025950A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2022025950A1 (en) 2020-07-28 2022-02-03 Versum Materials Us, Llc Systems having heated valve manifold assemblies, methods of manufacture of same
CN116006728A (zh) * 2022-12-31 2023-04-25 聚光科技(杭州)股份有限公司 一种紧凑型多通道气体选向阀

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5451258A (en) * 1994-05-11 1995-09-19 Materials Research Corporation Apparatus and method for improved delivery of vaporized reactant gases to a reaction chamber
US20180156373A1 (en) * 2015-07-01 2018-06-07 Nichias Corporation Heating device and method of heating an heated object using the same

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US3878658A (en) * 1973-08-29 1975-04-22 Chicago Bridge & Iron Co Foam board insulation system
US3858632A (en) * 1973-12-10 1975-01-07 Rhodes Joseph S Insulating cover for ground faucets
US4562857A (en) * 1983-09-19 1986-01-07 Ball Randell D Thermal insulation article
US4792162A (en) * 1986-12-23 1988-12-20 Swagelok Quick Connect Co. Protective device for quick connect coupling
JP3317114B2 (ja) * 1995-11-28 2002-08-26 三菱マテリアル株式会社 タンク保護容器
JP3752578B2 (ja) 1997-04-21 2006-03-08 株式会社フジキン 流体制御器用加熱装置
US6257626B1 (en) * 1999-04-27 2001-07-10 Flow-Rite Controls, Ltd. Connector for fluid handling system
US6283143B1 (en) 2000-03-31 2001-09-04 Lam Research Corporation System and method for providing an integrated gas stick
US6578600B1 (en) * 2000-10-31 2003-06-17 International Business Machines Corporation Gas isolation box
JP4487135B2 (ja) * 2001-03-05 2010-06-23 東京エレクトロン株式会社 流体制御装置
JP2004340199A (ja) 2003-05-14 2004-12-02 Fujikin Inc 加熱装置付き流体制御装置
JP2005098347A (ja) 2003-09-24 2005-04-14 Fujikin Inc 流体制御器の加熱方法
JP2005096923A (ja) 2003-09-24 2005-04-14 Shin Meiwa Ind Co Ltd 塵芥貯留排出装置
JP4753173B2 (ja) * 2005-06-17 2011-08-24 株式会社フジキン 流体制御装置
US7775508B2 (en) * 2006-10-31 2010-08-17 Applied Materials, Inc. Ampoule for liquid draw and vapor draw with a continuous level sensor
KR101285562B1 (ko) * 2011-12-15 2013-07-12 주식회사 플로웰 반도체 제조 공정용 블록형 가스 케비넷
US9140466B2 (en) 2012-07-17 2015-09-22 Eemax, Inc. Fluid heating system and instant fluid heating device
US9469976B1 (en) * 2015-03-25 2016-10-18 Douglas W. Banks Housing for drain outlet
JP6627464B2 (ja) 2015-03-30 2020-01-08 東京エレクトロン株式会社 原料ガス供給装置及び成膜装置
WO2018179999A1 (ja) * 2017-03-29 2018-10-04 日立金属株式会社 気化器
CN110914959A (zh) 2017-07-25 2020-03-24 株式会社富士金 流体控制装置
WO2022025950A1 (en) 2020-07-28 2022-02-03 Versum Materials Us, Llc Systems having heated valve manifold assemblies, methods of manufacture of same

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5451258A (en) * 1994-05-11 1995-09-19 Materials Research Corporation Apparatus and method for improved delivery of vaporized reactant gases to a reaction chamber
US20180156373A1 (en) * 2015-07-01 2018-06-07 Nichias Corporation Heating device and method of heating an heated object using the same

Also Published As

Publication number Publication date
IL300012A (en) 2023-03-01
KR20230042364A (ko) 2023-03-28
EP4169060A4 (en) 2024-07-24
TW202204794A (zh) 2022-02-01
JP2023540004A (ja) 2023-09-21
JP2025172963A (ja) 2025-11-26
US12565942B2 (en) 2026-03-03
TWI761973B (zh) 2022-04-21
WO2022025950A1 (en) 2022-02-03
US20230287992A1 (en) 2023-09-14
EP4169060A1 (en) 2023-04-26

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