JP2023536165A5 - - Google Patents

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Publication number
JP2023536165A5
JP2023536165A5 JP2023506355A JP2023506355A JP2023536165A5 JP 2023536165 A5 JP2023536165 A5 JP 2023536165A5 JP 2023506355 A JP2023506355 A JP 2023506355A JP 2023506355 A JP2023506355 A JP 2023506355A JP 2023536165 A5 JP2023536165 A5 JP 2023536165A5
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JP
Japan
Prior art keywords
signal
pll
waveform
ftw
control unit
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JP2023506355A
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English (en)
Japanese (ja)
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JP7793597B2 (ja
JP2023536165A (ja
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Priority claimed from EP20190074.3A external-priority patent/EP3952113B1/en
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Publication of JP2023536165A5 publication Critical patent/JP2023536165A5/ja
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Publication of JP7793597B2 publication Critical patent/JP7793597B2/ja
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JP2023506355A 2020-08-07 2021-08-03 制御ユニット、無線周波数電力発生器、配置、および同期無線周波数出力信号の生成方法 Active JP7793597B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP20190074.3 2020-08-07
EP20190074.3A EP3952113B1 (en) 2020-08-07 2020-08-07 Control unit, radio frequency power generator, and method for generating synchronized radio frequency output signals
PCT/EP2021/071675 WO2022029125A1 (en) 2020-08-07 2021-08-03 Control unit, radio frequency power generator, and method for generating synchronized radio frequency output signals

Publications (3)

Publication Number Publication Date
JP2023536165A JP2023536165A (ja) 2023-08-23
JP2023536165A5 true JP2023536165A5 (https=) 2024-07-16
JP7793597B2 JP7793597B2 (ja) 2026-01-05

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ID=71995858

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023506355A Active JP7793597B2 (ja) 2020-08-07 2021-08-03 制御ユニット、無線周波数電力発生器、配置、および同期無線周波数出力信号の生成方法

Country Status (7)

Country Link
US (1) US12126347B2 (https=)
EP (1) EP3952113B1 (https=)
JP (1) JP7793597B2 (https=)
KR (1) KR20230044215A (https=)
CN (1) CN116057837A (https=)
TW (1) TWI911252B (https=)
WO (1) WO2022029125A1 (https=)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7588721B2 (ja) * 2020-12-30 2024-11-22 コメット アーゲー Ｒｆ信号生成方法、コントローラ、ｒｆ生成器及びプラズマ装置
CN116170932B (zh) * 2023-02-17 2024-02-13 上海励兆科技有限公司 一种支持脉冲监测功能的射频等离子体源
KR102926950B1 (ko) * 2023-07-21 2026-02-12 주식회사 셀트론 신호 발생기
KR102822579B1 (ko) * 2023-11-22 2025-06-20 (주)에이에스이 멀티 리액터 장비에 사용되는 cex 제어장치
CN117997339B (zh) * 2024-02-04 2024-08-09 深圳市恒运昌真空技术股份有限公司 相位同步装置和方法、射频电源及等离子体设备
CN120934522B (zh) * 2025-10-14 2025-12-12 杭州逻辑比特科技有限公司 一种多通道高速数模转换模块的同步方法

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1041816A (ja) * 1996-07-24 1998-02-13 Advantest Corp 信号発生器
JP3619352B2 (ja) * 1997-08-28 2005-02-09 株式会社ルネサステクノロジ 半導体集積回路装置
GB2369940B (en) * 2000-12-09 2004-10-20 Mitel Corp Multiple input phase lock loop with hitless reference switching
WO2004068713A2 (ja) * 2002-11-19 2004-08-12 Fujitsu Limited 周波数合成器
JP4679872B2 (ja) * 2004-10-13 2011-05-11 パナソニック株式会社 クロック発生装置
US7545224B2 (en) * 2007-04-12 2009-06-09 Teradyne, Inc. Cost effective low noise single loop synthesizer
DE102008044355A1 (de) * 2008-12-04 2010-06-10 Robert Bosch Gmbh Modulares Radarsystem
US7825719B2 (en) 2008-12-29 2010-11-02 Advanced Energy Industries, Inc. System and method for wideband phase-adjustable common excitation
US8842704B2 (en) 2011-12-28 2014-09-23 Coherent, Inc. Multiple phase-locked loops for high-power RF-power combiners
CN202679346U (zh) * 2012-08-04 2013-01-16 成都联帮微波通信工程有限公司 多路相参信号频率合成器
US20140139293A1 (en) * 2012-11-19 2014-05-22 Cymatics Laboratories Corp. Integrated reference frequency generator
US20150116016A1 (en) * 2013-10-31 2015-04-30 Keysight Technologies, Inc. Dead-Zone Free Charge Pump Phase-Frequency Detector
CA2913076C (en) * 2013-11-28 2016-12-20 Smart Energy Instruments Inc. Methods and devices for error correction of a signal using delta sigma modulation
US10057051B2 (en) * 2015-05-29 2018-08-21 Silicon Laboratories Inc. Dual path timing wander removal
CN208752198U (zh) * 2018-07-06 2019-04-16 中国计量大学 一种带反馈校正的多通道超声波任意波形信号发生器
EP3758235B1 (en) * 2019-06-25 2025-03-19 Comet AG Device and method for synchronizing a high frequency power signal and an external reference signal

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