TWI911252B - 用於產生同步的射頻輸出訊號的控制單元、射頻功率產生器及方法 - Google Patents

用於產生同步的射頻輸出訊號的控制單元、射頻功率產生器及方法

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Publication number
TWI911252B
TWI911252B TW110128694A TW110128694A TWI911252B TW I911252 B TWI911252 B TW I911252B TW 110128694 A TW110128694 A TW 110128694A TW 110128694 A TW110128694 A TW 110128694A TW I911252 B TWI911252 B TW I911252B
Authority
TW
Taiwan
Prior art keywords
signal
pll
signals
output
ftw
Prior art date
Application number
TW110128694A
Other languages
English (en)
Chinese (zh)
Other versions
TW202207633A (zh
Inventor
曼努埃爾 佛丹柏克
羅蘭 施利耶夫
安得烈 格雷德
丹尼爾 格魯納
安東 拉班克
Original Assignee
瑞士商卡美特公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 瑞士商卡美特公司 filed Critical 瑞士商卡美特公司
Publication of TW202207633A publication Critical patent/TW202207633A/zh
Application granted granted Critical
Publication of TWI911252B publication Critical patent/TWI911252B/zh

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Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03L—AUTOMATIC CONTROL, STARTING, SYNCHRONISATION OR STABILISATION OF GENERATORS OF ELECTRONIC OSCILLATIONS OR PULSES
    • H03L7/00—Automatic control of frequency or phase; Synchronisation
    • H03L7/06—Automatic control of frequency or phase; Synchronisation using a reference signal applied to a frequency- or phase-locked loop
    • H03L7/08—Details of the phase-locked loop
    • H03L7/099—Details of the phase-locked loop concerning mainly the controlled oscillator of the loop
    • H03L7/0991—Details of the phase-locked loop concerning mainly the controlled oscillator of the loop the oscillator being a digital oscillator, e.g. composed of a fixed oscillator followed by a variable frequency divider
    • H03L7/0994—Details of the phase-locked loop concerning mainly the controlled oscillator of the loop the oscillator being a digital oscillator, e.g. composed of a fixed oscillator followed by a variable frequency divider comprising an accumulator
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03L—AUTOMATIC CONTROL, STARTING, SYNCHRONISATION OR STABILISATION OF GENERATORS OF ELECTRONIC OSCILLATIONS OR PULSES
    • H03L7/00—Automatic control of frequency or phase; Synchronisation
    • H03L7/06—Automatic control of frequency or phase; Synchronisation using a reference signal applied to a frequency- or phase-locked loop
    • H03L7/08—Details of the phase-locked loop
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03K—PULSE TECHNIQUE
    • H03K5/00—Manipulating of pulses not covered by one of the other main groups of this subclass
    • H03K5/22—Circuits having more than one input and one output for comparing pulses or pulse trains with each other according to input signal characteristics, e.g. slope, integral
    • H03K5/24—Circuits having more than one input and one output for comparing pulses or pulse trains with each other according to input signal characteristics, e.g. slope, integral the characteristic being amplitude
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03L—AUTOMATIC CONTROL, STARTING, SYNCHRONISATION OR STABILISATION OF GENERATORS OF ELECTRONIC OSCILLATIONS OR PULSES
    • H03L7/00—Automatic control of frequency or phase; Synchronisation
    • H03L7/06—Automatic control of frequency or phase; Synchronisation using a reference signal applied to a frequency- or phase-locked loop
    • H03L7/08—Details of the phase-locked loop
    • H03L7/10—Details of the phase-locked loop for assuring initial synchronisation or for broadening the capture range
    • H03L7/104—Details of the phase-locked loop for assuring initial synchronisation or for broadening the capture range using an additional signal from outside the loop for setting or controlling a parameter in the loop
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03L—AUTOMATIC CONTROL, STARTING, SYNCHRONISATION OR STABILISATION OF GENERATORS OF ELECTRONIC OSCILLATIONS OR PULSES
    • H03L7/00—Automatic control of frequency or phase; Synchronisation
    • H03L7/06—Automatic control of frequency or phase; Synchronisation using a reference signal applied to a frequency- or phase-locked loop
    • H03L7/16—Indirect frequency synthesis, i.e. generating a desired one of a number of predetermined frequencies using a frequency- or phase-locked loop

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Stabilization Of Oscillater, Synchronisation, Frequency Synthesizers (AREA)
TW110128694A 2020-08-07 2021-08-04 用於產生同步的射頻輸出訊號的控制單元、射頻功率產生器及方法 TWI911252B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP20190074.3 2020-08-07
EP20190074.3A EP3952113B1 (en) 2020-08-07 2020-08-07 Control unit, radio frequency power generator, and method for generating synchronized radio frequency output signals

Publications (2)

Publication Number Publication Date
TW202207633A TW202207633A (zh) 2022-02-16
TWI911252B true TWI911252B (zh) 2026-01-11

Family

ID=71995858

Family Applications (1)

Application Number Title Priority Date Filing Date
TW110128694A TWI911252B (zh) 2020-08-07 2021-08-04 用於產生同步的射頻輸出訊號的控制單元、射頻功率產生器及方法

Country Status (7)

Country Link
US (1) US12126347B2 (https=)
EP (1) EP3952113B1 (https=)
JP (1) JP7793597B2 (https=)
KR (1) KR20230044215A (https=)
CN (1) CN116057837A (https=)
TW (1) TWI911252B (https=)
WO (1) WO2022029125A1 (https=)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7588721B2 (ja) * 2020-12-30 2024-11-22 コメット アーゲー Ｒｆ信号生成方法、コントローラ、ｒｆ生成器及びプラズマ装置
CN116170932B (zh) * 2023-02-17 2024-02-13 上海励兆科技有限公司 一种支持脉冲监测功能的射频等离子体源
KR102926950B1 (ko) * 2023-07-21 2026-02-12 주식회사 셀트론 신호 발생기
KR102822579B1 (ko) * 2023-11-22 2025-06-20 (주)에이에스이 멀티 리액터 장비에 사용되는 cex 제어장치
CN117997339B (zh) * 2024-02-04 2024-08-09 深圳市恒运昌真空技术股份有限公司 相位同步装置和方法、射频电源及等离子体设备
CN120934522B (zh) * 2025-10-14 2025-12-12 杭州逻辑比特科技有限公司 一种多通道高速数模转换模块的同步方法

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US20080252384A1 (en) * 2007-04-12 2008-10-16 Colin Ka Ho Chow Cost effective low noise single loop synthesizer
US20100171648A1 (en) * 2008-12-04 2010-07-08 Armin Himmelstoss Modular radar system
US20130170512A1 (en) * 2011-12-28 2013-07-04 Coherent, Inc. Multiple phase-locked loops for high-power rf-power combiners

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JPH1041816A (ja) * 1996-07-24 1998-02-13 Advantest Corp 信号発生器
JP3619352B2 (ja) * 1997-08-28 2005-02-09 株式会社ルネサステクノロジ 半導体集積回路装置
GB2369940B (en) * 2000-12-09 2004-10-20 Mitel Corp Multiple input phase lock loop with hitless reference switching
WO2004068713A2 (ja) * 2002-11-19 2004-08-12 Fujitsu Limited 周波数合成器
JP4679872B2 (ja) * 2004-10-13 2011-05-11 パナソニック株式会社 クロック発生装置
US7825719B2 (en) 2008-12-29 2010-11-02 Advanced Energy Industries, Inc. System and method for wideband phase-adjustable common excitation
CN202679346U (zh) * 2012-08-04 2013-01-16 成都联帮微波通信工程有限公司 多路相参信号频率合成器
US20140139293A1 (en) * 2012-11-19 2014-05-22 Cymatics Laboratories Corp. Integrated reference frequency generator
US20150116016A1 (en) * 2013-10-31 2015-04-30 Keysight Technologies, Inc. Dead-Zone Free Charge Pump Phase-Frequency Detector
CA2913076C (en) * 2013-11-28 2016-12-20 Smart Energy Instruments Inc. Methods and devices for error correction of a signal using delta sigma modulation
US10057051B2 (en) * 2015-05-29 2018-08-21 Silicon Laboratories Inc. Dual path timing wander removal
CN208752198U (zh) * 2018-07-06 2019-04-16 中国计量大学 一种带反馈校正的多通道超声波任意波形信号发生器
EP3758235B1 (en) * 2019-06-25 2025-03-19 Comet AG Device and method for synchronizing a high frequency power signal and an external reference signal

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20080252384A1 (en) * 2007-04-12 2008-10-16 Colin Ka Ho Chow Cost effective low noise single loop synthesizer
US20100171648A1 (en) * 2008-12-04 2010-07-08 Armin Himmelstoss Modular radar system
US20130170512A1 (en) * 2011-12-28 2013-07-04 Coherent, Inc. Multiple phase-locked loops for high-power rf-power combiners

Also Published As

Publication number Publication date
TW202207633A (zh) 2022-02-16
CN116057837A (zh) 2023-05-02
EP3952113A1 (en) 2022-02-09
WO2022029125A1 (en) 2022-02-10
JP7793597B2 (ja) 2026-01-05
US12126347B2 (en) 2024-10-22
EP3952113B1 (en) 2026-04-08
US20230283282A1 (en) 2023-09-07
JP2023536165A (ja) 2023-08-23
KR20230044215A (ko) 2023-04-03

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