CN116057837A - 用于生成同步射频输出信号的控制单元、射频功率发生器和方法 - Google Patents

用于生成同步射频输出信号的控制单元、射频功率发生器和方法 Download PDF

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Publication number
CN116057837A
CN116057837A CN202180058716.5A CN202180058716A CN116057837A CN 116057837 A CN116057837 A CN 116057837A CN 202180058716 A CN202180058716 A CN 202180058716A CN 116057837 A CN116057837 A CN 116057837A
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CN
China
Prior art keywords
signal
pll
waveform
output
signals
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Pending
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CN202180058716.5A
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English (en)
Chinese (zh)
Inventor
曼努埃尔·福尔·德姆·布罗克
罗兰·施利夫
安德烈·格雷德
丹尼尔·格鲁纳
安东·拉班克
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Comet AG
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Comet AG
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Application filed by Comet AG filed Critical Comet AG
Publication of CN116057837A publication Critical patent/CN116057837A/zh
Pending legal-status Critical Current

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    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03L—AUTOMATIC CONTROL, STARTING, SYNCHRONISATION OR STABILISATION OF GENERATORS OF ELECTRONIC OSCILLATIONS OR PULSES
    • H03L7/00—Automatic control of frequency or phase; Synchronisation
    • H03L7/06—Automatic control of frequency or phase; Synchronisation using a reference signal applied to a frequency- or phase-locked loop
    • H03L7/08—Details of the phase-locked loop
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03L—AUTOMATIC CONTROL, STARTING, SYNCHRONISATION OR STABILISATION OF GENERATORS OF ELECTRONIC OSCILLATIONS OR PULSES
    • H03L7/00—Automatic control of frequency or phase; Synchronisation
    • H03L7/06—Automatic control of frequency or phase; Synchronisation using a reference signal applied to a frequency- or phase-locked loop
    • H03L7/08—Details of the phase-locked loop
    • H03L7/099—Details of the phase-locked loop concerning mainly the controlled oscillator of the loop
    • H03L7/0991—Details of the phase-locked loop concerning mainly the controlled oscillator of the loop the oscillator being a digital oscillator, e.g. composed of a fixed oscillator followed by a variable frequency divider
    • H03L7/0994—Details of the phase-locked loop concerning mainly the controlled oscillator of the loop the oscillator being a digital oscillator, e.g. composed of a fixed oscillator followed by a variable frequency divider comprising an accumulator
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03K—PULSE TECHNIQUE
    • H03K5/00—Manipulating of pulses not covered by one of the other main groups of this subclass
    • H03K5/22—Circuits having more than one input and one output for comparing pulses or pulse trains with each other according to input signal characteristics, e.g. slope, integral
    • H03K5/24—Circuits having more than one input and one output for comparing pulses or pulse trains with each other according to input signal characteristics, e.g. slope, integral the characteristic being amplitude
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03L—AUTOMATIC CONTROL, STARTING, SYNCHRONISATION OR STABILISATION OF GENERATORS OF ELECTRONIC OSCILLATIONS OR PULSES
    • H03L7/00—Automatic control of frequency or phase; Synchronisation
    • H03L7/06—Automatic control of frequency or phase; Synchronisation using a reference signal applied to a frequency- or phase-locked loop
    • H03L7/08—Details of the phase-locked loop
    • H03L7/10—Details of the phase-locked loop for assuring initial synchronisation or for broadening the capture range
    • H03L7/104—Details of the phase-locked loop for assuring initial synchronisation or for broadening the capture range using an additional signal from outside the loop for setting or controlling a parameter in the loop
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03L—AUTOMATIC CONTROL, STARTING, SYNCHRONISATION OR STABILISATION OF GENERATORS OF ELECTRONIC OSCILLATIONS OR PULSES
    • H03L7/00—Automatic control of frequency or phase; Synchronisation
    • H03L7/06—Automatic control of frequency or phase; Synchronisation using a reference signal applied to a frequency- or phase-locked loop
    • H03L7/16—Indirect frequency synthesis, i.e. generating a desired one of a number of predetermined frequencies using a frequency- or phase-locked loop

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Stabilization Of Oscillater, Synchronisation, Frequency Synthesizers (AREA)
CN202180058716.5A 2020-08-07 2021-08-03 用于生成同步射频输出信号的控制单元、射频功率发生器和方法 Pending CN116057837A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP20190074.3 2020-08-07
EP20190074.3A EP3952113B1 (en) 2020-08-07 2020-08-07 Control unit, radio frequency power generator, and method for generating synchronized radio frequency output signals
PCT/EP2021/071675 WO2022029125A1 (en) 2020-08-07 2021-08-03 Control unit, radio frequency power generator, and method for generating synchronized radio frequency output signals

Publications (1)

Publication Number Publication Date
CN116057837A true CN116057837A (zh) 2023-05-02

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CN202180058716.5A Pending CN116057837A (zh) 2020-08-07 2021-08-03 用于生成同步射频输出信号的控制单元、射频功率发生器和方法

Country Status (7)

Country Link
US (1) US12126347B2 (https=)
EP (1) EP3952113B1 (https=)
JP (1) JP7793597B2 (https=)
KR (1) KR20230044215A (https=)
CN (1) CN116057837A (https=)
TW (1) TWI911252B (https=)
WO (1) WO2022029125A1 (https=)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7588721B2 (ja) * 2020-12-30 2024-11-22 コメット アーゲー Ｒｆ信号生成方法、コントローラ、ｒｆ生成器及びプラズマ装置
CN116170932B (zh) * 2023-02-17 2024-02-13 上海励兆科技有限公司 一种支持脉冲监测功能的射频等离子体源
KR102926950B1 (ko) * 2023-07-21 2026-02-12 주식회사 셀트론 신호 발생기
KR102822579B1 (ko) * 2023-11-22 2025-06-20 (주)에이에스이 멀티 리액터 장비에 사용되는 cex 제어장치
CN117997339B (zh) * 2024-02-04 2024-08-09 深圳市恒运昌真空技术股份有限公司 相位同步装置和方法、射频电源及等离子体设备
CN120934522B (zh) * 2025-10-14 2025-12-12 杭州逻辑比特科技有限公司 一种多通道高速数模转换模块的同步方法

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JPH1041816A (ja) * 1996-07-24 1998-02-13 Advantest Corp 信号発生器
JP3619352B2 (ja) * 1997-08-28 2005-02-09 株式会社ルネサステクノロジ 半導体集積回路装置
GB2369940B (en) * 2000-12-09 2004-10-20 Mitel Corp Multiple input phase lock loop with hitless reference switching
WO2004068713A2 (ja) * 2002-11-19 2004-08-12 Fujitsu Limited 周波数合成器
JP4679872B2 (ja) * 2004-10-13 2011-05-11 パナソニック株式会社 クロック発生装置
US7545224B2 (en) * 2007-04-12 2009-06-09 Teradyne, Inc. Cost effective low noise single loop synthesizer
DE102008044355A1 (de) * 2008-12-04 2010-06-10 Robert Bosch Gmbh Modulares Radarsystem
US7825719B2 (en) 2008-12-29 2010-11-02 Advanced Energy Industries, Inc. System and method for wideband phase-adjustable common excitation
US8842704B2 (en) 2011-12-28 2014-09-23 Coherent, Inc. Multiple phase-locked loops for high-power RF-power combiners
CN202679346U (zh) * 2012-08-04 2013-01-16 成都联帮微波通信工程有限公司 多路相参信号频率合成器
US20140139293A1 (en) * 2012-11-19 2014-05-22 Cymatics Laboratories Corp. Integrated reference frequency generator
US20150116016A1 (en) * 2013-10-31 2015-04-30 Keysight Technologies, Inc. Dead-Zone Free Charge Pump Phase-Frequency Detector
CA2913076C (en) * 2013-11-28 2016-12-20 Smart Energy Instruments Inc. Methods and devices for error correction of a signal using delta sigma modulation
US10057051B2 (en) * 2015-05-29 2018-08-21 Silicon Laboratories Inc. Dual path timing wander removal
CN208752198U (zh) * 2018-07-06 2019-04-16 中国计量大学 一种带反馈校正的多通道超声波任意波形信号发生器
EP3758235B1 (en) * 2019-06-25 2025-03-19 Comet AG Device and method for synchronizing a high frequency power signal and an external reference signal

Also Published As

Publication number Publication date
TW202207633A (zh) 2022-02-16
EP3952113A1 (en) 2022-02-09
WO2022029125A1 (en) 2022-02-10
JP7793597B2 (ja) 2026-01-05
TWI911252B (zh) 2026-01-11
US12126347B2 (en) 2024-10-22
EP3952113B1 (en) 2026-04-08
US20230283282A1 (en) 2023-09-07
JP2023536165A (ja) 2023-08-23
KR20230044215A (ko) 2023-04-03

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