JP2023531986A5 - - Google Patents

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Publication number
JP2023531986A5
JP2023531986A5 JP2022579787A JP2022579787A JP2023531986A5 JP 2023531986 A5 JP2023531986 A5 JP 2023531986A5 JP 2022579787 A JP2022579787 A JP 2022579787A JP 2022579787 A JP2022579787 A JP 2022579787A JP 2023531986 A5 JP2023531986 A5 JP 2023531986A5
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JP
Japan
Prior art keywords
superconducting metal
layer
depositing
superconducting
metal layer
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JP2022579787A
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English (en)
Japanese (ja)
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JP7705897B2 (ja
JP2023531986A (ja
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Priority claimed from PCT/US2021/038519 external-priority patent/WO2021262741A1/en
Publication of JP2023531986A publication Critical patent/JP2023531986A/ja
Publication of JP2023531986A5 publication Critical patent/JP2023531986A5/ja
Application granted granted Critical
Publication of JP7705897B2 publication Critical patent/JP7705897B2/ja
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JP2022579787A 2020-06-23 2021-06-22 超伝導集積回路を製造する方法 Active JP7705897B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US202063042865P 2020-06-23 2020-06-23
US63/042,865 2020-06-23
PCT/US2021/038519 WO2021262741A1 (en) 2020-06-23 2021-06-22 Methods for fabricating superconducting integrated circuits

Publications (3)

Publication Number Publication Date
JP2023531986A JP2023531986A (ja) 2023-07-26
JP2023531986A5 true JP2023531986A5 (https=) 2024-06-26
JP7705897B2 JP7705897B2 (ja) 2025-07-10

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ID=79281777

Family Applications (1)

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JP2022579787A Active JP7705897B2 (ja) 2020-06-23 2021-06-22 超伝導集積回路を製造する方法

Country Status (3)

Country Link
US (1) US20230240154A1 (https=)
JP (1) JP7705897B2 (https=)
WO (1) WO2021262741A1 (https=)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9768371B2 (en) 2012-03-08 2017-09-19 D-Wave Systems Inc. Systems and methods for fabrication of superconducting integrated circuits
EP4443484A3 (en) 2017-02-01 2025-01-08 D-Wave Systems Inc. Systems and methods for fabrication of superconducting integrated circuits
US20200152851A1 (en) 2018-11-13 2020-05-14 D-Wave Systems Inc. Systems and methods for fabricating superconducting integrated circuits
WO2020168097A1 (en) 2019-02-15 2020-08-20 D-Wave Systems Inc. Kinetic inductance for couplers and compact qubits
US12367412B2 (en) 2019-12-05 2025-07-22 1372934 B.C. Ltd. Systems and methods for fabricating flux trap mitigating superconducting integrated circuits
US12376501B2 (en) 2020-05-11 2025-07-29 1372934 B.C. Ltd. Kinetic inductance devices, methods for fabricating kinetic inductance devices, and articles employing the same
JP2024526085A (ja) 2021-06-11 2024-07-17 シーク， インコーポレイテッド 超伝導量子回路のための磁束バイアスのシステム及び方法
US12392823B2 (en) 2021-11-05 2025-08-19 D-Wave Systems Inc. Systems and methods for on-chip noise measurements
US20240145537A1 (en) * 2022-10-31 2024-05-02 Wolfspeed, Inc. Semiconductor devices with additional mesa structures for reduced surface roughness
CN117460398B (zh) * 2023-10-30 2026-01-13 本源量子计算科技（合肥）股份有限公司 超导线路及其制造方法

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS613481A (ja) * 1984-06-15 1986-01-09 Nippon Telegr & Teleph Corp <Ntt> トンネル型ジヨセフソン素子及びその作製方法
US5290761A (en) * 1992-10-19 1994-03-01 E. I. Du Pont De Nemours And Company Process for making oxide superconducting films by pulsed excimer laser ablation
JP3395299B2 (ja) * 1993-11-08 2003-04-07 ソニー株式会社 半導体装置の配線構造及び配線形成方法
JPH0936112A (ja) * 1995-07-24 1997-02-07 Oki Electric Ind Co Ltd Ａｌ配線の形成方法
JP2004235252A (ja) * 2003-01-28 2004-08-19 Fujitsu Ltd 超伝導素子及び超伝導機器
EP3098865B1 (en) * 2009-02-27 2018-10-03 D-Wave Systems Inc. Method for fabricating a superconducting integrated circuit
US10003005B2 (en) * 2016-08-23 2018-06-19 Northrop Grumman Systems Corporation Superconductor device interconnect
EP4443484A3 (en) * 2017-02-01 2025-01-08 D-Wave Systems Inc. Systems and methods for fabrication of superconducting integrated circuits
US10276504B2 (en) * 2017-05-17 2019-04-30 Northrop Grumman Systems Corporation Preclean and deposition methodology for superconductor interconnects
US10763419B2 (en) * 2017-06-02 2020-09-01 Northrop Grumman Systems Corporation Deposition methodology for superconductor interconnects
US11276727B1 (en) * 2017-06-19 2022-03-15 Rigetti & Co, Llc Superconducting vias for routing electrical signals through substrates and their methods of manufacture
US10243132B1 (en) * 2018-03-23 2019-03-26 International Business Machines Corporation Vertical josephson junction superconducting device
US20200152851A1 (en) * 2018-11-13 2020-05-14 D-Wave Systems Inc. Systems and methods for fabricating superconducting integrated circuits

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