JP2023531029A - フリップチップスタッキング構造体およびそれを形成するための方法 - Google Patents
フリップチップスタッキング構造体およびそれを形成するための方法 Download PDFInfo
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Abstract
Description
202 キャリア基板
204 第1のパッケージ
205 パッケージ境界
206 第2のパッケージ
208 コンタクトパッド
208a コンタクトパッド
208b コンタクトパッド
208c コンタクトパッド
208d コンタクトパッド
210 側面図
220 平面図
310 誘電体層
314 ブロッキング層
418 垂直方向相互接続部
502 第1の階段層
504 第2の階段層
506 第3の階段層
508 第4の階段層
510 誘電体層
514 ブロッキング層
518 水平方向相互接続部
519 ステップ
602 誘電体層
604 誘電体層
610 ブロッキング層
612 ブロッキング層
618 垂直方向相互接続部
620 水平方向相互接続部
702 誘電体層
710 ブロッキング層
712 ブロッキング層
714 誘電体層
718 垂直方向相互接続部
720 水平方向相互接続部
732 誘電体層
740 ブロッキング層
742 ブロッキング層
754 誘電体層
758 垂直方向相互接続部
760 水平方向相互接続部
916 ピラーバンプ
918 ピラーベース
920 ピラー本体部
926 ピラーバンプ
930 ピラー本体部
936 ピラーバンプ
938 ピラーベース
940 ピラー本体部
946 チップ
948 集積回路
950 キャリア
956 ピラーバンプ
958 ピラーベース
960 ピラー本体部
1046 チップ
1048 集積回路
1050 キャリア
1146 チップ
1148 集積回路
1160 チップ
1180 モールディングコンパウンド
1202 再分配層(RDL)
1204 金属バンプ
1246 チップ
1300 パッケージング構造体
1304 第1のパッケージ
1305 パッケージ境界
1306 第2のパッケージ
1316 ピラーバンプ
1326 ピラーバンプ
1346 チップ
1402 RDL
1404 金属バンプ
1500 パッケージング構造体
1502 階段層
1504 階段層
L1 長さ
L2 長さ
Claims (26)
- 半導体パッケージであって、
複数の入力/出力(I/O)コンタクトに接触している第1の表面、および、前記第1の表面とは反対側の第2の表面を含む再分配層(RDL)と;
階段相互接続構造体であって、前記階段相互接続構造体は、前記RDLの前記第2の表面の上に形成されており、前記RDLと電気的に接続されており、
前記階段相互接続構造体は、複数の階段層を含み、前記複数の階段層は、第1の階段層、および、前記第1の階段層の上部表面の上にスタックされた第2の階段層を含み;
前記第2の階段層は、前記第1の階段層の前記上部表面の一部分をカバーしており、前記第1の階段層の前記上部表面の残りの部分が露出されるようになっている、階段相互接続構造体と;
前記階段相互接続構造体を介して前記RDLに電気的に接続されている複数の集積回路(IC)チップであって、前記複数のICチップのうちの第1のICチップは、前記第1の階段層の前記上部表面の前記残りの部分を通して、前記RDLに電気的に接続されている、複数の集積回路(IC)チップと
を含む、半導体パッケージ。 - 前記複数の階段層は、前記第2の階段層の上部表面の上にスタックされた第3の階段層をさらに含み、前記第3の階段層は、前記第2の階段層の前記上部表面の一部分をカバーしており、前記第2の階段層の前記上部表面の残りの部分が露出されるようになっている、請求項1に記載の半導体パッケージ。
- 前記第2の階段層の幅は、前記第1の階段層の幅よりも小さく;
前記第3の階段層の幅は、前記第2の階段層の前記幅よりも小さい、請求項2に記載の半導体パッケージ。 - 前記複数のICチップは、前記第2の階段層の前記上部表面の前記残りの部分を通して前記RDLに電気的に接続されている第2のICチップをさらに含む、請求項2に記載の半導体パッケージ。
- 前記第2のICチップは、前記第1のICチップからオフセットされており、前記第2のICチップの1つまたは複数の端子が、前記第2の階段層の前記上部表面の前記残りの部分の真上にあるようになっている、請求項4に記載の半導体パッケージ。
- 前記第1のICチップは、1つまたは複数のピラーバンプを通して前記第1の階段層に電気的に接続されている、請求項4に記載の半導体パッケージ。
- 前記1つまたは複数のピラーバンプは、前記第2の階段層と同じ水平方向のレベルに配設されている、請求項6に記載の半導体パッケージ。
- 前記複数のICチップは、1つまたは複数のピラーバンプの上にフリップマウントされた第3のICチップをさらに含む、請求項4に記載の半導体パッケージ。
- 前記1つまたは複数のピラーバンプおよび前記第1のICチップは、前記第3の階段層と同じ水平方向のレベルに配設されている、請求項8に記載の半導体パッケージ。
- 前記第3のICチップは、前記1つまたは複数のピラーバンプを通して、前記第2の階段層の前記上部表面の露出された部分に電気的に接続されている、請求項8に記載の半導体パッケージ。
- 前記第1および第2のICチップは、NANDフラッシュメモリチップを含む、請求項3に記載の半導体パッケージ。
- 前記RDLの前記第2の表面の上に配設されている複数のコンタクトパッドと;
前記コンタクトパッドの上にフリップマウントされた第2のICチップと
をさらに含む、請求項1に記載の半導体パッケージ。 - 前記第1のICチップは、前記第2のICチップからオフセットされており、前記第1のICチップの1つまたは複数の端子が、前記第1の階段層の前記上部表面の前記残りの部分の真上にあるようになっている、請求項12に記載の半導体パッケージ。
- 前記複数のICチップは、前記階段相互接続構造体によって前記RDLの上にフリップマウントされている、請求項1に記載の半導体パッケージ。
- 前記第1の階段層は、第1の複数の垂直方向相互接続部および第1の複数の水平方向相互接続部を含み、前記第1の複数の垂直方向相互接続部は、前記RDLと接触している第1の端部と、前記第1の複数の水平方向相互接続部と接触している第2の端部とを含む、請求項1に記載の半導体パッケージ。
- 前記第2の階段層は、第2の複数の垂直方向相互接続部および第2の複数の水平方向相互接続部を含み、前記第2の複数の垂直方向相互接続部は、前記第1の複数の水平方向相互接続部と接触している、請求項15に記載の半導体パッケージ。
- 前記階段相互接続構造体および前記複数のICチップをカプセル化するモールディングコンパウンドをさらに含む、請求項1に記載の半導体パッケージ。
- 前記複数のI/Oコンタクトは、複数の金属バンプを含む、請求項1に記載の半導体パッケージ。
- 半導体パッケージ構造体を形成するための方法であって、前記方法は、
キャリア基板を提供するステップと;
前記キャリア基板の上に階段相互接続構造体を形成するステップであって、形成する前記ステップは、
第1の階段層を形成するステップ、および、
前記第1の階段層の上部表面の上に第2の階段層を形成するステップであって、前記第2の階段層は、前記第1の階段層の前記上部表面の一部分をカバーしており、前記第1の階段層の前記上部表面の残りの部分が露出されるようになっている、ステップ
を含む、ステップと;
前記キャリア基板の上におよび前記階段相互接続構造体の上に複数の集積回路(IC)チップをフリップマウントするステップであって、フリップマウントする前記ステップは、前記第1の階段層の前記上部表面の前記残りの部分を通して、前記複数のICチップのうちの第1のICチップを前記第1の階段層に電気的に接続するステップを含む、ステップと;
前記キャリア基板を再分配層(RDL)と交換するステップと;
前記階段相互接続構造体を通して前記複数のICチップを前記RDLに電気的に接続するステップであって、電気的に接続する前記ステップは、前記第1の階段層の前記上部表面の前記残りの部分を通して、前記第1のICチップを前記RDLに電気的に接続するステップを含む、ステップと
を含む、方法。 - 前記第2の階段層の上部表面の上に第3の階段層をスタックさせるステップであって、前記第3の階段層は、前記第2の階段層の前記上部表面の一部分をカバーしており、前記第2の階段層の前記上部表面の残りの部分が露出されるようになっている、ステップと;
前記第2の階段層の前記上部表面の前記残りの部分の上に1つまたは複数のピラーバンプを形成するステップと;
前記1つまたは複数のピラーバンプの上に前記複数のICチップの第2のICチップをフリップマウントするステップと
をさらに含む、請求項19に記載の方法。 - 第1の階段層を形成するステップは、前記キャリア基板の上に第1の誘電体層を堆積させるステップと、前記第1の誘電体層の中に複数の垂直方向相互接続部を形成するステップとを含む、請求項19に記載の方法。
- 前記第1の階段層を形成するステップは、前記第1の誘電体層の上に第2の誘電体層を堆積させるステップと、前記第2の誘電体層の中に複数の水平方向相互接続部を形成するステップとをさらに含む、請求項21に記載の方法。
- 複数の水平方向相互接続部を形成するステップは、
前記第2の誘電体層の中に複数の開口部を形成するステップであって、前記複数の開口部のうちの少なくとも1つの開口部は、前記複数の垂直方向相互接続部のうちの少なくとも1つの垂直方向相互接続部を露出させる、ステップと;
前記複数の開口部の中に導電性材料を堆積させるステップと
を含む、請求項22に記載の方法。 - 前記キャリア基板の上に2行以上のコンタクトパッドを堆積させるステップをさらに含む、請求項19に記載の方法。
- 前記2行以上のコンタクトパッドの上に前記複数のICチップのうちの第2のICチップをフリップマウントするステップをさらに含む、請求項24に記載の方法。
- 前記複数のICチップをフリップマウントするステップは、前記第2のICチップの上に前記第1のICチップをフリップマウントするステップを含む、請求項25に記載の方法。
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Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7569421B2 (en) * | 2007-05-04 | 2009-08-04 | Stats Chippac, Ltd. | Through-hole via on saw streets |
KR100945504B1 (ko) * | 2007-06-26 | 2010-03-09 | 주식회사 하이닉스반도체 | 스택 패키지 및 그의 제조 방법 |
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US8552546B2 (en) * | 2009-10-06 | 2013-10-08 | Samsung Electronics Co., Ltd. | Semiconductor package, semiconductor package structure including the semiconductor package, and mobile phone including the semiconductor package structure |
US9082632B2 (en) * | 2012-05-10 | 2015-07-14 | Oracle International Corporation | Ramp-stack chip package with variable chip spacing |
US9449914B2 (en) * | 2014-07-17 | 2016-09-20 | Taiwan Semiconductor Manufacturing Company, Ltd. | Stacked integrated circuits with redistribution lines |
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US10566310B2 (en) * | 2016-04-11 | 2020-02-18 | Invensas Corporation | Microelectronic packages having stacked die and wire bond interconnects |
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US11469215B2 (en) * | 2016-07-13 | 2022-10-11 | Taiwan Semiconductor Manufacturing Co., Ltd. | Chip package structure with molding layer and method for forming the same |
WO2018058548A1 (en) * | 2016-09-30 | 2018-04-05 | Intel Corporation | Stair-stacked dice device in system in package, and methods of making same |
US10115632B1 (en) * | 2017-04-17 | 2018-10-30 | Sandisk Technologies Llc | Three-dimensional memory device having conductive support structures and method of making thereof |
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DE112017008335T5 (de) * | 2017-12-28 | 2020-09-03 | Intel Corporation | Multi-Die, Vertikal-Draht-Package-in-Package-Vorrichtung und Verfahren zum Herstellen desselben |
WO2020029216A1 (en) * | 2018-08-10 | 2020-02-13 | Yangtze Memory Technologies Co., Ltd. | Multi-division 3d nand memory device |
KR102628536B1 (ko) * | 2019-02-01 | 2024-01-25 | 에스케이하이닉스 주식회사 | 적층 칩 구조를 가지는 반도체 패키지 |
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CN110957284A (zh) * | 2019-12-04 | 2020-04-03 | 中芯长电半导体(江阴)有限公司 | 芯片的三维封装结构及其封装方法 |
WO2022021022A1 (en) * | 2020-07-27 | 2022-02-03 | Yangtze Memory Technologies Co., Ltd. | Staircase structures for word line contacts in three-dimensional memory |
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