JP2023528363A5 - - Google Patents

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Publication number
JP2023528363A5
JP2023528363A5 JP2022572695A JP2022572695A JP2023528363A5 JP 2023528363 A5 JP2023528363 A5 JP 2023528363A5 JP 2022572695 A JP2022572695 A JP 2022572695A JP 2022572695 A JP2022572695 A JP 2022572695A JP 2023528363 A5 JP2023528363 A5 JP 2023528363A5
Authority
JP
Japan
Prior art keywords
temperature sensor
sheet substrate
vacuum apparatus
vacuum
sensor assembly
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2022572695A
Other languages
English (en)
Japanese (ja)
Other versions
JP2023528363A (ja
JP7631374B2 (ja
Filing date
Publication date
Priority claimed from GB2007793.9A external-priority patent/GB2595640A/en
Application filed filed Critical
Publication of JP2023528363A publication Critical patent/JP2023528363A/ja
Publication of JP2023528363A5 publication Critical patent/JP2023528363A5/ja
Application granted granted Critical
Publication of JP7631374B2 publication Critical patent/JP7631374B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2022572695A 2020-05-26 2021-05-26 真空装置の温度センサ組立体 Active JP7631374B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB2007793.9A GB2595640A (en) 2020-05-26 2020-05-26 Vacuum apparatus temperature sensor assembly
GB2007793.9 2020-05-26
PCT/IB2021/054562 WO2021240378A1 (en) 2020-05-26 2021-05-26 Vacuum apparatus temperature sensor assembly

Publications (3)

Publication Number Publication Date
JP2023528363A JP2023528363A (ja) 2023-07-04
JP2023528363A5 true JP2023528363A5 (https=) 2024-04-17
JP7631374B2 JP7631374B2 (ja) 2025-02-18

Family

ID=71406269

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022572695A Active JP7631374B2 (ja) 2020-05-26 2021-05-26 真空装置の温度センサ組立体

Country Status (8)

Country Link
US (1) US12320710B2 (https=)
EP (1) EP4158293B1 (https=)
JP (1) JP7631374B2 (https=)
CN (1) CN115552206B (https=)
GB (1) GB2595640A (https=)
IL (1) IL298435B2 (https=)
TW (1) TWI899237B (https=)
WO (1) WO2021240378A1 (https=)

Family Cites Families (31)

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FR2561382A1 (fr) * 1984-03-16 1985-09-20 Chauvin Arnoux Sa Capteur thermometrique pour mesure de temperature de surface
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US7723649B2 (en) * 2002-08-05 2010-05-25 Steed Technology, Inc. Vacuum thermal annealer
JP5374521B2 (ja) * 2009-01-28 2013-12-25 株式会社アルバック 温度検出装置、加熱装置、基板加熱方法
TW201135845A (en) * 2009-10-09 2011-10-16 Canon Anelva Corp Acuum heating and cooling apparatus
US20130209272A1 (en) * 2010-10-07 2013-08-15 Edwards Limited Vacuum pump control device and vacuum pump
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JP2014532164A (ja) * 2011-09-15 2014-12-04 エリコン・トレーディング・アクチェンゲゼルシャフト,トリュープバッハOerlikon Trading AG,Truebbach 真空室内における基板の温度測定方法
KR20130053760A (ko) * 2011-11-16 2013-05-24 임연희 탈부착이 용이한 온도센서
CN202547812U (zh) * 2012-04-24 2012-11-21 上海北玻镀膜技术工业有限公司 一种真空系统的接触式测温机构
DE202013005207U1 (de) * 2013-06-10 2014-09-11 Biffar Energiespartechnik Gmbh Temperatursensor zur Bestimmung der Temperatur eines in der Rohrleitung strömenden Mediums
DE102013224977A1 (de) 2013-10-23 2015-04-23 Siemens Vai Metals Technologies Gmbh Stranggießkokille mit einem Temperatursensor und Herstellungsverfahren für die Stranggießkokille mit dem Temperatursensor
US9686821B2 (en) 2014-04-28 2017-06-20 Mks Instruments, Inc. Streamlined heater assembly with front and intermediate daisy chain power injection, shielding, and water resistant features
US9993956B2 (en) * 2015-01-06 2018-06-12 Jason Pendergraft Apparatus for thermally insulating a cylindrical barrel and monitoring the temperature thereof
US10184689B2 (en) * 2015-07-30 2019-01-22 Edwards Vacuum Llc Fault detecting circuits for electric heaters, pipe heaters and pipe heating systems including fault detecting circuits and methods of indicating that an electrical energy supply to an electric resistance heater has been interrupted
US20170030503A1 (en) * 2015-07-30 2017-02-02 Edwards Vacuum Llc Apparatus and method for securing pipe heaters and pipe insulation to pipe systems
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JP6790950B2 (ja) * 2017-03-22 2020-11-25 Tdk株式会社 状態検出装置
WO2018186748A1 (en) * 2017-04-04 2018-10-11 Cura8 As Sensor system and method for continuous and wireless monitoring and analysis of temperature in organisms
CN112384776B (zh) * 2018-05-22 2024-01-30 沃特洛电气制造公司 具有双重密封和压缩元件的光纤电缆探头
CN208253031U (zh) * 2018-05-23 2018-12-18 大庆东油睿佳石油科技有限公司 一种便携式输油管道加热装置
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