GB2595640A - Vacuum apparatus temperature sensor assembly - Google Patents

Vacuum apparatus temperature sensor assembly Download PDF

Info

Publication number
GB2595640A
GB2595640A GB2007793.9A GB202007793A GB2595640A GB 2595640 A GB2595640 A GB 2595640A GB 202007793 A GB202007793 A GB 202007793A GB 2595640 A GB2595640 A GB 2595640A
Authority
GB
United Kingdom
Prior art keywords
vacuum apparatus
temperature sensor
sheet substrate
sensor assembly
sheet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
GB2007793.9A
Other languages
English (en)
Other versions
GB202007793D0 (en
Inventor
Edward Faulkner Budd
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards Vacuum LLC
Original Assignee
Edwards Vacuum LLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Edwards Vacuum LLC filed Critical Edwards Vacuum LLC
Priority to GB2007793.9A priority Critical patent/GB2595640A/en
Publication of GB202007793D0 publication Critical patent/GB202007793D0/en
Priority to PCT/IB2021/054562 priority patent/WO2021240378A1/en
Priority to CN202180038065.3A priority patent/CN115552206B/zh
Priority to KR1020227040952A priority patent/KR102957336B1/ko
Priority to EP21728653.3A priority patent/EP4158293B1/en
Priority to US17/999,632 priority patent/US12320710B2/en
Priority to TW110119056A priority patent/TWI899237B/zh
Priority to IL298435A priority patent/IL298435B2/en
Priority to JP2022572695A priority patent/JP7631374B2/ja
Publication of GB2595640A publication Critical patent/GB2595640A/en
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K1/00—Details of thermometers not specially adapted for particular types of thermometer
    • G01K1/16—Special arrangements for conducting heat from the object to the sensitive element
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L53/00—Heating of pipes or pipe systems; Cooling of pipes or pipe systems
    • F16L53/30—Heating of pipes or pipe systems
    • F16L53/35—Ohmic-resistance heating
    • F16L53/38—Ohmic-resistance heating using elongate electric heating elements, e.g. wires or ribbons
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L53/00—Heating of pipes or pipe systems; Cooling of pipes or pipe systems
    • F16L53/70—Cooling of pipes or pipe systems
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K1/00—Details of thermometers not specially adapted for particular types of thermometer
    • G01K1/14—Supports; Fastening devices; Arrangements for mounting thermometers in particular locations
    • G01K1/143—Supports; Fastening devices; Arrangements for mounting thermometers in particular locations for measuring surface temperatures
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/16—Vessels; Containers

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measuring Fluid Pressure (AREA)
  • Measuring Temperature Or Quantity Of Heat (AREA)
GB2007793.9A 2020-05-26 2020-05-26 Vacuum apparatus temperature sensor assembly Withdrawn GB2595640A (en)

Priority Applications (9)

Application Number Priority Date Filing Date Title
GB2007793.9A GB2595640A (en) 2020-05-26 2020-05-26 Vacuum apparatus temperature sensor assembly
JP2022572695A JP7631374B2 (ja) 2020-05-26 2021-05-26 真空装置の温度センサ組立体
EP21728653.3A EP4158293B1 (en) 2020-05-26 2021-05-26 Method and vacuum apparatus temperature sensor assembly
CN202180038065.3A CN115552206B (zh) 2020-05-26 2021-05-26 真空装置温度传感器组件
KR1020227040952A KR102957336B1 (ko) 2020-05-26 2021-05-26 진공 장치 온도 센서 조립체
PCT/IB2021/054562 WO2021240378A1 (en) 2020-05-26 2021-05-26 Vacuum apparatus temperature sensor assembly
US17/999,632 US12320710B2 (en) 2020-05-26 2021-05-26 Vacuum apparatus temperature sensor assembly
TW110119056A TWI899237B (zh) 2020-05-26 2021-05-26 量測真空裝置之溫度之方法及真空裝置溫度感測器總成
IL298435A IL298435B2 (en) 2020-05-26 2021-05-26 Vacuum apparatus temperature sensor assembly

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB2007793.9A GB2595640A (en) 2020-05-26 2020-05-26 Vacuum apparatus temperature sensor assembly

Publications (2)

Publication Number Publication Date
GB202007793D0 GB202007793D0 (en) 2020-07-08
GB2595640A true GB2595640A (en) 2021-12-08

Family

ID=71406269

Family Applications (1)

Application Number Title Priority Date Filing Date
GB2007793.9A Withdrawn GB2595640A (en) 2020-05-26 2020-05-26 Vacuum apparatus temperature sensor assembly

Country Status (8)

Country Link
US (1) US12320710B2 (https=)
EP (1) EP4158293B1 (https=)
JP (1) JP7631374B2 (https=)
CN (1) CN115552206B (https=)
GB (1) GB2595640A (https=)
IL (1) IL298435B2 (https=)
TW (1) TWI899237B (https=)
WO (1) WO2021240378A1 (https=)

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB410572A (en) * 1933-02-08 1934-05-24 Chance Brothers & Co Ltd An instrument for use in thermal measurements
DE3126931A1 (de) * 1981-07-08 1983-02-03 Ultrakust Gerätebau GmbH & Co KG, 8375 Ruhmannsfelden Haltevorrichtung fuer einen temperaturfuehler
FR2561382A1 (fr) * 1984-03-16 1985-09-20 Chauvin Arnoux Sa Capteur thermometrique pour mesure de temperature de surface
US20160193772A1 (en) * 2015-01-06 2016-07-07 Jason Pendergraft Apparatus for thermally insulating a cylindrical barrel and monitoring the temperature thereof
US20170030503A1 (en) * 2015-07-30 2017-02-02 Edwards Vacuum Llc Apparatus and method for securing pipe heaters and pipe insulation to pipe systems
US20170034873A1 (en) * 2015-07-30 2017-02-02 Edwards Vacuum Llc Fault detecting circuits for electric heaters, pipe heaters and pipe heating systems including fault detecting circuits and methods of indicating that an electrical energy supply to an electric resistance heater has been interrupted
CN208253031U (zh) * 2018-05-23 2018-12-18 大庆东油睿佳石油科技有限公司 一种便携式输油管道加热装置
EP3605027A1 (en) * 2017-03-22 2020-02-05 TDK Corporation State detecting device

Family Cites Families (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3336804A (en) * 1964-03-09 1967-08-22 Heinz F Poppendiek Means and techniques useful in fluid flow determinations
JPS54138686U (https=) * 1978-03-18 1979-09-26
US4346864A (en) * 1980-11-21 1982-08-31 Wilgood Corporation Means and method for mounting temperature sensors
JPH02171625A (ja) * 1988-12-24 1990-07-03 Nippon Signal Co Ltd:The 熱感知器
JP2705431B2 (ja) * 1992-02-20 1998-01-28 日本鋼管株式会社 真空装置のベーキング方法
JPH06221928A (ja) * 1993-01-25 1994-08-12 Furukawa Electric Co Ltd:The パイプタイプケーブルのケーブルコア温度測定方法
US7723649B2 (en) * 2002-08-05 2010-05-25 Steed Technology, Inc. Vacuum thermal annealer
JP5374521B2 (ja) * 2009-01-28 2013-12-25 株式会社アルバック 温度検出装置、加熱装置、基板加熱方法
TW201135845A (en) * 2009-10-09 2011-10-16 Canon Anelva Corp Acuum heating and cooling apparatus
US20130209272A1 (en) * 2010-10-07 2013-08-15 Edwards Limited Vacuum pump control device and vacuum pump
JP5494833B2 (ja) * 2011-01-07 2014-05-21 株式会社村田製作所 温度センサおよび温度センサ取り付け構造
JP2014532164A (ja) * 2011-09-15 2014-12-04 エリコン・トレーディング・アクチェンゲゼルシャフト，トリュープバッハＯｅｒｌｉｋｏｎ Ｔｒａｄｉｎｇ ＡＧ，Ｔｒｕｅｂｂａｃｈ 真空室内における基板の温度測定方法
KR20130053760A (ko) * 2011-11-16 2013-05-24 임연희 탈부착이 용이한 온도센서
CN202547812U (zh) * 2012-04-24 2012-11-21 上海北玻镀膜技术工业有限公司 一种真空系统的接触式测温机构
DE202013005207U1 (de) * 2013-06-10 2014-09-11 Biffar Energiespartechnik Gmbh Temperatursensor zur Bestimmung der Temperatur eines in der Rohrleitung strömenden Mediums
DE102013224977A1 (de) 2013-10-23 2015-04-23 Siemens Vai Metals Technologies Gmbh Stranggießkokille mit einem Temperatursensor und Herstellungsverfahren für die Stranggießkokille mit dem Temperatursensor
US9686821B2 (en) 2014-04-28 2017-06-20 Mks Instruments, Inc. Streamlined heater assembly with front and intermediate daisy chain power injection, shielding, and water resistant features
CN105784183B (zh) * 2016-05-06 2018-08-31 中国工程物理研究院激光聚变研究中心 一种贴片式温度传感器及其制备工艺
WO2018186748A1 (en) * 2017-04-04 2018-10-11 Cura8 As Sensor system and method for continuous and wireless monitoring and analysis of temperature in organisms
CN112384776B (zh) * 2018-05-22 2024-01-30 沃特洛电气制造公司 具有双重密封和压缩元件的光纤电缆探头
EP3653885B1 (de) 2019-11-06 2022-01-05 Pfeiffer Vacuum Gmbh Verfahren zum ermitteln einer zustandsinformation in einem vakuumgerät
CN111102735A (zh) 2019-12-26 2020-05-05 佛山市海德精工电子科技有限公司 用于液体加热装置的内管及液体加热装置、制造方法
DE102021115573A1 (de) * 2021-06-16 2022-12-22 Tdk Electronics Ag Anordnung zum Schutz einer Sonsorvorrichtung

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB410572A (en) * 1933-02-08 1934-05-24 Chance Brothers & Co Ltd An instrument for use in thermal measurements
DE3126931A1 (de) * 1981-07-08 1983-02-03 Ultrakust Gerätebau GmbH & Co KG, 8375 Ruhmannsfelden Haltevorrichtung fuer einen temperaturfuehler
FR2561382A1 (fr) * 1984-03-16 1985-09-20 Chauvin Arnoux Sa Capteur thermometrique pour mesure de temperature de surface
US20160193772A1 (en) * 2015-01-06 2016-07-07 Jason Pendergraft Apparatus for thermally insulating a cylindrical barrel and monitoring the temperature thereof
US20170030503A1 (en) * 2015-07-30 2017-02-02 Edwards Vacuum Llc Apparatus and method for securing pipe heaters and pipe insulation to pipe systems
US20170034873A1 (en) * 2015-07-30 2017-02-02 Edwards Vacuum Llc Fault detecting circuits for electric heaters, pipe heaters and pipe heating systems including fault detecting circuits and methods of indicating that an electrical energy supply to an electric resistance heater has been interrupted
EP3605027A1 (en) * 2017-03-22 2020-02-05 TDK Corporation State detecting device
CN208253031U (zh) * 2018-05-23 2018-12-18 大庆东油睿佳石油科技有限公司 一种便携式输油管道加热装置

Also Published As

Publication number Publication date
TW202146867A (zh) 2021-12-16
GB202007793D0 (en) 2020-07-08
KR20230014703A (ko) 2023-01-30
JP2023528363A (ja) 2023-07-04
JP7631374B2 (ja) 2025-02-18
IL298435B2 (en) 2025-08-01
EP4158293A1 (en) 2023-04-05
IL298435A (en) 2023-01-01
US20230236070A1 (en) 2023-07-27
US12320710B2 (en) 2025-06-03
EP4158293B1 (en) 2024-07-03
WO2021240378A1 (en) 2021-12-02
CN115552206B (zh) 2025-09-23
IL298435B1 (en) 2025-04-01
TWI899237B (zh) 2025-10-01
CN115552206A (zh) 2022-12-30

Similar Documents

Publication Publication Date Title
JP4502256B2 (ja) 流量センサ
CN105358949B (zh) 用于测量热通量的方法及系统
JP7639016B2 (ja) ヒータアセンブリ
JP2008243990A (ja) 基板加熱装置
JP7638283B2 (ja) ヒーターアセンブリ
CN110631630A (zh) 热界面材料片、制造热界面材料片的方法和电气装置
GB2062860A (en) Temperature sensing assembly
EP4158293B1 (en) Method and vacuum apparatus temperature sensor assembly
KR102957336B1 (ko) 진공 장치 온도 센서 조립체
CN219777545U (zh) 隔热性能测试装置
CN222671252U (zh) 一种温度检测结构和方向盘
CN112136022A (zh) 具有传感器布置结构的金属管结构
CN108088580A (zh) 可实现小插深精密测量的测温元件
CN118066405A (zh) 航天器管道的加热结构及其制备方法
JPH0530742U (ja) 温度モニター用複合センサー基板
JP2022014482A (ja) 温度センサ
SU1643953A1 (ru) Термодатчик Смыслова
JP2023528363A5 (https=)
CN117629440A (zh) 温度测量装置及测量方法
JPH0793126B2 (ja) 絶縁チューブ被包電気素子及びその製造方法

Legal Events

Date Code Title Description
WAP Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1)