TWI899237B - 量測真空裝置之溫度之方法及真空裝置溫度感測器總成 - Google Patents

量測真空裝置之溫度之方法及真空裝置溫度感測器總成

Info

Publication number
TWI899237B
TWI899237B TW110119056A TW110119056A TWI899237B TW I899237 B TWI899237 B TW I899237B TW 110119056 A TW110119056 A TW 110119056A TW 110119056 A TW110119056 A TW 110119056A TW I899237 B TWI899237 B TW I899237B
Authority
TW
Taiwan
Prior art keywords
vacuum device
temperature sensor
thin
substrate
temperature
Prior art date
Application number
TW110119056A
Other languages
English (en)
Chinese (zh)
Other versions
TW202146867A (zh
Inventor
巴德 艾德華 弗克納
Original Assignee
美商艾德華真空有限責任公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 美商艾德華真空有限責任公司 filed Critical 美商艾德華真空有限責任公司
Publication of TW202146867A publication Critical patent/TW202146867A/zh
Application granted granted Critical
Publication of TWI899237B publication Critical patent/TWI899237B/zh

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L53/00—Heating of pipes or pipe systems; Cooling of pipes or pipe systems
    • F16L53/30—Heating of pipes or pipe systems
    • F16L53/35—Ohmic-resistance heating
    • F16L53/38—Ohmic-resistance heating using elongate electric heating elements, e.g. wires or ribbons
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L53/00—Heating of pipes or pipe systems; Cooling of pipes or pipe systems
    • F16L53/70—Cooling of pipes or pipe systems
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K1/00—Details of thermometers not specially adapted for particular types of thermometer
    • G01K1/14—Supports; Fastening devices; Arrangements for mounting thermometers in particular locations
    • G01K1/143—Supports; Fastening devices; Arrangements for mounting thermometers in particular locations for measuring surface temperatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K1/00—Details of thermometers not specially adapted for particular types of thermometer
    • G01K1/16—Special arrangements for conducting heat from the object to the sensitive element
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/16—Vessels; Containers

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measuring Fluid Pressure (AREA)
  • Measuring Temperature Or Quantity Of Heat (AREA)
TW110119056A 2020-05-26 2021-05-26 量測真空裝置之溫度之方法及真空裝置溫度感測器總成 TWI899237B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB2007793.9A GB2595640A (en) 2020-05-26 2020-05-26 Vacuum apparatus temperature sensor assembly
GB2007793.9 2020-05-26

Publications (2)

Publication Number Publication Date
TW202146867A TW202146867A (zh) 2021-12-16
TWI899237B true TWI899237B (zh) 2025-10-01

Family

ID=71406269

Family Applications (1)

Application Number Title Priority Date Filing Date
TW110119056A TWI899237B (zh) 2020-05-26 2021-05-26 量測真空裝置之溫度之方法及真空裝置溫度感測器總成

Country Status (8)

Country Link
US (1) US12320710B2 (https=)
EP (1) EP4158293B1 (https=)
JP (1) JP7631374B2 (https=)
CN (1) CN115552206B (https=)
GB (1) GB2595640A (https=)
IL (1) IL298435B2 (https=)
TW (1) TWI899237B (https=)
WO (1) WO2021240378A1 (https=)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9316546B2 (en) * 2011-01-07 2016-04-19 Murata Manufacturing Co., Ltd. Temperature sensor and temperature sensor attaching structure
US20170034873A1 (en) * 2015-07-30 2017-02-02 Edwards Vacuum Llc Fault detecting circuits for electric heaters, pipe heaters and pipe heating systems including fault detecting circuits and methods of indicating that an electrical energy supply to an electric resistance heater has been interrupted
EP3060364B1 (de) * 2013-10-23 2018-03-14 Primetals Technologies Austria GmbH Stranggiesskokille mit einem temperatursensor und herstellungsverfahren für die stranggiesskokille mit dem temperatursensor
US20190343397A1 (en) * 2017-04-04 2019-11-14 ONiO AS Sensor system and method for continuous and wireless monitoring and analysis of temperature in organisms
EP3653885A1 (de) * 2019-11-06 2020-05-20 Pfeiffer Vacuum Gmbh Verfahren zum ermitteln einer zustandsinformation in einem vakuumgerät

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GB410572A (en) * 1933-02-08 1934-05-24 Chance Brothers & Co Ltd An instrument for use in thermal measurements
US3336804A (en) * 1964-03-09 1967-08-22 Heinz F Poppendiek Means and techniques useful in fluid flow determinations
JPS54138686U (https=) * 1978-03-18 1979-09-26
US4346864A (en) * 1980-11-21 1982-08-31 Wilgood Corporation Means and method for mounting temperature sensors
DE3126931A1 (de) * 1981-07-08 1983-02-03 Ultrakust Gerätebau GmbH & Co KG, 8375 Ruhmannsfelden Haltevorrichtung fuer einen temperaturfuehler
FR2561382A1 (fr) * 1984-03-16 1985-09-20 Chauvin Arnoux Sa Capteur thermometrique pour mesure de temperature de surface
JPH02171625A (ja) * 1988-12-24 1990-07-03 Nippon Signal Co Ltd:The 熱感知器
JP2705431B2 (ja) * 1992-02-20 1998-01-28 日本鋼管株式会社 真空装置のベーキング方法
JPH06221928A (ja) * 1993-01-25 1994-08-12 Furukawa Electric Co Ltd:The パイプタイプケーブルのケーブルコア温度測定方法
US7723649B2 (en) * 2002-08-05 2010-05-25 Steed Technology, Inc. Vacuum thermal annealer
JP5374521B2 (ja) * 2009-01-28 2013-12-25 株式会社アルバック 温度検出装置、加熱装置、基板加熱方法
TW201135845A (en) * 2009-10-09 2011-10-16 Canon Anelva Corp Acuum heating and cooling apparatus
US20130209272A1 (en) * 2010-10-07 2013-08-15 Edwards Limited Vacuum pump control device and vacuum pump
JP2014532164A (ja) * 2011-09-15 2014-12-04 エリコン・トレーディング・アクチェンゲゼルシャフト，トリュープバッハＯｅｒｌｉｋｏｎ Ｔｒａｄｉｎｇ ＡＧ，Ｔｒｕｅｂｂａｃｈ 真空室内における基板の温度測定方法
KR20130053760A (ko) * 2011-11-16 2013-05-24 임연희 탈부착이 용이한 온도센서
CN202547812U (zh) * 2012-04-24 2012-11-21 上海北玻镀膜技术工业有限公司 一种真空系统的接触式测温机构
DE202013005207U1 (de) * 2013-06-10 2014-09-11 Biffar Energiespartechnik Gmbh Temperatursensor zur Bestimmung der Temperatur eines in der Rohrleitung strömenden Mediums
US9686821B2 (en) 2014-04-28 2017-06-20 Mks Instruments, Inc. Streamlined heater assembly with front and intermediate daisy chain power injection, shielding, and water resistant features
US9993956B2 (en) * 2015-01-06 2018-06-12 Jason Pendergraft Apparatus for thermally insulating a cylindrical barrel and monitoring the temperature thereof
US20170030503A1 (en) * 2015-07-30 2017-02-02 Edwards Vacuum Llc Apparatus and method for securing pipe heaters and pipe insulation to pipe systems
CN105784183B (zh) * 2016-05-06 2018-08-31 中国工程物理研究院激光聚变研究中心 一种贴片式温度传感器及其制备工艺
JP6790950B2 (ja) * 2017-03-22 2020-11-25 Tdk株式会社 状態検出装置
CN112384776B (zh) * 2018-05-22 2024-01-30 沃特洛电气制造公司 具有双重密封和压缩元件的光纤电缆探头
CN208253031U (zh) * 2018-05-23 2018-12-18 大庆东油睿佳石油科技有限公司 一种便携式输油管道加热装置
CN111102735A (zh) 2019-12-26 2020-05-05 佛山市海德精工电子科技有限公司 用于液体加热装置的内管及液体加热装置、制造方法
DE102021115573A1 (de) * 2021-06-16 2022-12-22 Tdk Electronics Ag Anordnung zum Schutz einer Sonsorvorrichtung

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9316546B2 (en) * 2011-01-07 2016-04-19 Murata Manufacturing Co., Ltd. Temperature sensor and temperature sensor attaching structure
EP3060364B1 (de) * 2013-10-23 2018-03-14 Primetals Technologies Austria GmbH Stranggiesskokille mit einem temperatursensor und herstellungsverfahren für die stranggiesskokille mit dem temperatursensor
US20170034873A1 (en) * 2015-07-30 2017-02-02 Edwards Vacuum Llc Fault detecting circuits for electric heaters, pipe heaters and pipe heating systems including fault detecting circuits and methods of indicating that an electrical energy supply to an electric resistance heater has been interrupted
US20190343397A1 (en) * 2017-04-04 2019-11-14 ONiO AS Sensor system and method for continuous and wireless monitoring and analysis of temperature in organisms
EP3653885A1 (de) * 2019-11-06 2020-05-20 Pfeiffer Vacuum Gmbh Verfahren zum ermitteln einer zustandsinformation in einem vakuumgerät

Also Published As

Publication number Publication date
TW202146867A (zh) 2021-12-16
GB202007793D0 (en) 2020-07-08
KR20230014703A (ko) 2023-01-30
JP2023528363A (ja) 2023-07-04
JP7631374B2 (ja) 2025-02-18
IL298435B2 (en) 2025-08-01
EP4158293A1 (en) 2023-04-05
IL298435A (en) 2023-01-01
US20230236070A1 (en) 2023-07-27
US12320710B2 (en) 2025-06-03
EP4158293B1 (en) 2024-07-03
GB2595640A (en) 2021-12-08
WO2021240378A1 (en) 2021-12-02
CN115552206B (zh) 2025-09-23
IL298435B1 (en) 2025-04-01
CN115552206A (zh) 2022-12-30

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