JP2023500043A5 - - Google Patents

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Publication number
JP2023500043A5
JP2023500043A5 JP2022521975A JP2022521975A JP2023500043A5 JP 2023500043 A5 JP2023500043 A5 JP 2023500043A5 JP 2022521975 A JP2022521975 A JP 2022521975A JP 2022521975 A JP2022521975 A JP 2022521975A JP 2023500043 A5 JP2023500043 A5 JP 2023500043A5
Authority
JP
Japan
Prior art keywords
membrane
ultrasonic transducer
vibration
transducer according
control element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2022521975A
Other languages
English (en)
Japanese (ja)
Other versions
JP7682867B2 (ja
JP2023500043A (ja
Filing date
Publication date
Priority claimed from EP19206202.4A external-priority patent/EP3815795A1/en
Application filed filed Critical
Publication of JP2023500043A publication Critical patent/JP2023500043A/ja
Publication of JP2023500043A5 publication Critical patent/JP2023500043A5/ja
Application granted granted Critical
Publication of JP7682867B2 publication Critical patent/JP7682867B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2022521975A 2019-10-30 2020-10-29 帯域幅が改善されたメンブレントランスデューサ Active JP7682867B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP19206202.4A EP3815795A1 (en) 2019-10-30 2019-10-30 Membrane transducer with improved bandwidth
EP19206202.4 2019-10-30
PCT/NL2020/050670 WO2021086184A1 (en) 2019-10-30 2020-10-29 Membrane transducer with improved bandwidth

Publications (3)

Publication Number Publication Date
JP2023500043A JP2023500043A (ja) 2023-01-04
JP2023500043A5 true JP2023500043A5 (https=) 2023-11-06
JP7682867B2 JP7682867B2 (ja) 2025-05-26

Family

ID=68424604

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022521975A Active JP7682867B2 (ja) 2019-10-30 2020-10-29 帯域幅が改善されたメンブレントランスデューサ

Country Status (5)

Country Link
US (1) US20240139772A1 (https=)
EP (2) EP3815795A1 (https=)
JP (1) JP7682867B2 (https=)
CN (1) CN114630718B (https=)
WO (1) WO2021086184A1 (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3858498A1 (en) 2020-02-03 2021-08-04 Nederlandse Organisatie voor toegepast- natuurwetenschappelijk Onderzoek TNO Ultrasonic transducer with stacked membranes
US11991497B1 (en) * 2022-10-28 2024-05-21 xMEMS Labs, Inc. Acoustic device and holder flattening frequency response
EP4559588A1 (en) * 2023-11-21 2025-05-28 Dyconex AG Ultrasound transducing device

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4829420A (https=) * 1971-08-20 1973-04-19
FR2835981B1 (fr) * 2002-02-13 2005-04-29 Commissariat Energie Atomique Microresonateur mems a ondes acoustiques de volume accordable
US6958255B2 (en) * 2002-08-08 2005-10-25 The Board Of Trustees Of The Leland Stanford Junior University Micromachined ultrasonic transducers and method of fabrication
JP4269869B2 (ja) 2003-10-02 2009-05-27 セイコーエプソン株式会社 超音波トランスデューサ
JP2006025109A (ja) 2004-07-07 2006-01-26 Seiko Epson Corp ハイブリッド型超音波トランスデューサ、超音波スピーカ、およびハイブリッド型超音波トランスデューサの制御方法
US20100256498A1 (en) * 2007-11-16 2010-10-07 Hiroki Tanaka Ultrasonic imaging device
JP2012119831A (ja) 2010-11-30 2012-06-21 Ingen Msl:Kk 超音波振動子ユニット、及び超音波プローブ
JP2012142652A (ja) 2010-12-28 2012-07-26 Nec Casio Mobile Communications Ltd 発振装置
US9402137B2 (en) * 2011-11-14 2016-07-26 Infineon Technologies Ag Sound transducer with interdigitated first and second sets of comb fingers
US9925561B2 (en) * 2013-03-05 2018-03-27 The University Of Manitoba Capacitive micromachined ultrasonic transducer with multiple deflectable membranes
EP3110628B1 (en) * 2014-02-28 2019-07-03 The Regents of the University of California Variable thickness diaphragm for a wideband robust piezoelectric micromachined ultrasonic transducer (pmut)
WO2015171224A1 (en) * 2014-05-09 2015-11-12 Chirp Microsystems, Inc. Micromachined ultrasound transducer using multiple piezoelectric materials
US9987661B2 (en) * 2015-12-02 2018-06-05 Butterfly Network, Inc. Biasing of capacitive micromachined ultrasonic transducers (CMUTs) and related apparatus and methods
US10367430B2 (en) * 2016-01-11 2019-07-30 Infineon Technologies Ag System and method for a variable flow transducer
JP6691002B2 (ja) 2016-06-16 2020-04-28 日本セラミック株式会社 超音波送受波器
JP7278287B2 (ja) * 2017-12-19 2023-05-19 ザ ユニヴァーシティ オブ ブリティッシュ コロンビア 層状構造及び層状構造を製造するための方法
CN114269484B (zh) * 2019-08-21 2023-10-27 维蒙股份公司 频率可调谐的超声设备

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