CN114630718B - 具有改善的带宽的膜式换能器 - Google Patents

具有改善的带宽的膜式换能器 Download PDF

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Publication number
CN114630718B
CN114630718B CN202080076479.0A CN202080076479A CN114630718B CN 114630718 B CN114630718 B CN 114630718B CN 202080076479 A CN202080076479 A CN 202080076479A CN 114630718 B CN114630718 B CN 114630718B
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CN
China
Prior art keywords
membrane
vibration
displacement
piezoelectric transducer
towards
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CN202080076479.0A
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English (en)
Chinese (zh)
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CN114630718A (zh
Inventor
保罗·路易斯·玛莉亚·约瑟夫·万妮尔
阿尔诺·威廉·弗雷德里克·佛尔克
希尔克·布勒·阿克曼
格温·赫尔曼纳斯·格林克
安东尼斯·玛丽亚·B·范默尔
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Netherlands Organization For Applied Scientific Research
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Netherlands Organization For Applied Scientific Research
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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0207—Driving circuits
    • B06B1/0223—Driving circuits for generating signals continuous in time
    • B06B1/0269—Driving circuits for generating signals continuous in time for generating multiple frequencies
    • B06B1/0276—Driving circuits for generating signals continuous in time for generating multiple frequencies with simultaneous generation, e.g. with modulation, harmonics
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0603—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a piezoelectric bender, e.g. bimorph
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0607—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements
    • B06B1/0611—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements in a pile
    • B06B1/0614—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements in a pile for generating several frequencies
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0644—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Micromachines (AREA)
CN202080076479.0A 2019-10-30 2020-10-29 具有改善的带宽的膜式换能器 Active CN114630718B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP19206202.4A EP3815795A1 (en) 2019-10-30 2019-10-30 Membrane transducer with improved bandwidth
EP19206202.4 2019-10-30
PCT/NL2020/050670 WO2021086184A1 (en) 2019-10-30 2020-10-29 Membrane transducer with improved bandwidth

Publications (2)

Publication Number Publication Date
CN114630718A CN114630718A (zh) 2022-06-14
CN114630718B true CN114630718B (zh) 2024-08-23

Family

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CN202080076479.0A Active CN114630718B (zh) 2019-10-30 2020-10-29 具有改善的带宽的膜式换能器

Country Status (5)

Country Link
US (1) US20240139772A1 (https=)
EP (2) EP3815795A1 (https=)
JP (1) JP7682867B2 (https=)
CN (1) CN114630718B (https=)
WO (1) WO2021086184A1 (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3858498A1 (en) 2020-02-03 2021-08-04 Nederlandse Organisatie voor toegepast- natuurwetenschappelijk Onderzoek TNO Ultrasonic transducer with stacked membranes
US11991497B1 (en) * 2022-10-28 2024-05-21 xMEMS Labs, Inc. Acoustic device and holder flattening frequency response
EP4559588A1 (en) * 2023-11-21 2025-05-28 Dyconex AG Ultrasound transducing device

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101854866A (zh) * 2007-11-16 2010-10-06 株式会社日立制作所 超声波摄像装置
US20160016198A1 (en) * 2013-03-05 2016-01-21 University Of Manitoba Capacitive micromachined ultrasonic transducer with multiple deflectable membranes
US20170194934A1 (en) * 2014-05-09 2017-07-06 Chirp Microsystems, Inc. Micromachined ultrasound transducer using multiple piezoelectric materials

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JPS4829420A (https=) * 1971-08-20 1973-04-19
FR2835981B1 (fr) * 2002-02-13 2005-04-29 Commissariat Energie Atomique Microresonateur mems a ondes acoustiques de volume accordable
US6958255B2 (en) * 2002-08-08 2005-10-25 The Board Of Trustees Of The Leland Stanford Junior University Micromachined ultrasonic transducers and method of fabrication
JP4269869B2 (ja) 2003-10-02 2009-05-27 セイコーエプソン株式会社 超音波トランスデューサ
JP2006025109A (ja) 2004-07-07 2006-01-26 Seiko Epson Corp ハイブリッド型超音波トランスデューサ、超音波スピーカ、およびハイブリッド型超音波トランスデューサの制御方法
JP2012119831A (ja) 2010-11-30 2012-06-21 Ingen Msl:Kk 超音波振動子ユニット、及び超音波プローブ
JP2012142652A (ja) 2010-12-28 2012-07-26 Nec Casio Mobile Communications Ltd 発振装置
US9402137B2 (en) * 2011-11-14 2016-07-26 Infineon Technologies Ag Sound transducer with interdigitated first and second sets of comb fingers
EP3110628B1 (en) * 2014-02-28 2019-07-03 The Regents of the University of California Variable thickness diaphragm for a wideband robust piezoelectric micromachined ultrasonic transducer (pmut)
US9987661B2 (en) * 2015-12-02 2018-06-05 Butterfly Network, Inc. Biasing of capacitive micromachined ultrasonic transducers (CMUTs) and related apparatus and methods
US10367430B2 (en) * 2016-01-11 2019-07-30 Infineon Technologies Ag System and method for a variable flow transducer
JP6691002B2 (ja) 2016-06-16 2020-04-28 日本セラミック株式会社 超音波送受波器
JP7278287B2 (ja) * 2017-12-19 2023-05-19 ザ ユニヴァーシティ オブ ブリティッシュ コロンビア 層状構造及び層状構造を製造するための方法
CN114269484B (zh) * 2019-08-21 2023-10-27 维蒙股份公司 频率可调谐的超声设备

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101854866A (zh) * 2007-11-16 2010-10-06 株式会社日立制作所 超声波摄像装置
US20160016198A1 (en) * 2013-03-05 2016-01-21 University Of Manitoba Capacitive micromachined ultrasonic transducer with multiple deflectable membranes
US20170194934A1 (en) * 2014-05-09 2017-07-06 Chirp Microsystems, Inc. Micromachined ultrasound transducer using multiple piezoelectric materials

Also Published As

Publication number Publication date
EP4051441A1 (en) 2022-09-07
WO2021086184A1 (en) 2021-05-06
EP3815795A1 (en) 2021-05-05
JP7682867B2 (ja) 2025-05-26
US20240139772A1 (en) 2024-05-02
JP2023500043A (ja) 2023-01-04
EP4051441B1 (en) 2025-12-03
CN114630718A (zh) 2022-06-14
EP4051441C0 (en) 2025-12-03

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