JP2023134567A5 - - Google Patents
Info
- Publication number
- JP2023134567A5 JP2023134567A5 JP2023110746A JP2023110746A JP2023134567A5 JP 2023134567 A5 JP2023134567 A5 JP 2023134567A5 JP 2023110746 A JP2023110746 A JP 2023110746A JP 2023110746 A JP2023110746 A JP 2023110746A JP 2023134567 A5 JP2023134567 A5 JP 2023134567A5
- Authority
- JP
- Japan
- Prior art keywords
- single crystal
- layer containing
- arcsec
- laminate
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2021178650 | 2021-11-01 | ||
| JP2021178650 | 2021-11-01 | ||
| JP2023512692A JP7380948B2 (ja) | 2021-11-01 | 2022-10-28 | β-Ga2O3/β-Ga2O3積層体の製造方法 |
| PCT/JP2022/040309 WO2023074836A1 (ja) | 2021-11-01 | 2022-10-28 | β-Ga2O3/β-Ga2O3積層体の製造方法 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023512692A Division JP7380948B2 (ja) | 2021-11-01 | 2022-10-28 | β-Ga2O3/β-Ga2O3積層体の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2023134567A JP2023134567A (ja) | 2023-09-27 |
| JP2023134567A5 true JP2023134567A5 (https=) | 2025-09-16 |
Family
ID=86159992
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023512692A Active JP7380948B2 (ja) | 2021-11-01 | 2022-10-28 | β-Ga2O3/β-Ga2O3積層体の製造方法 |
| JP2023110746A Pending JP2023134567A (ja) | 2021-11-01 | 2023-07-05 | β-Ga2O3/β-Ga2O3積層体の製造方法 |
Family Applications Before (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023512692A Active JP7380948B2 (ja) | 2021-11-01 | 2022-10-28 | β-Ga2O3/β-Ga2O3積層体の製造方法 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US20240417881A1 (https=) |
| EP (1) | EP4411028B1 (https=) |
| JP (2) | JP7380948B2 (https=) |
| KR (1) | KR102927254B1 (https=) |
| CN (1) | CN118159694A (https=) |
| TW (1) | TW202328516A (https=) |
| WO (1) | WO2023074836A1 (https=) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPWO2025177952A1 (https=) * | 2024-02-22 | 2025-08-28 | ||
| CN119041012B (zh) * | 2024-10-30 | 2025-01-28 | 安徽科瑞思创晶体材料有限责任公司 | 一种利用液相外延制备稀土掺杂铁石榴石薄膜的方法 |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3679097B2 (ja) * | 2002-05-31 | 2005-08-03 | 株式会社光波 | 発光素子 |
| EP1997941B1 (en) * | 2006-03-01 | 2014-12-17 | Mitsubishi Gas Chemical Company, Inc. | PROCESS FOR PRODUCING ZnO SINGLE CRYSTAL ACCORDING TO METHOD OF LIQUID PHASE GROWTH |
| JP2010280533A (ja) * | 2009-06-04 | 2010-12-16 | Mitsubishi Gas Chemical Co Inc | 液相エピタキシャル成長法による励起子発光型ZnOシンチレータの製造方法 |
| JP5794955B2 (ja) * | 2012-07-11 | 2015-10-14 | 信越化学工業株式会社 | β−Ga2O3単結晶膜付基板の製造方法 |
| JP5747110B1 (ja) * | 2014-06-30 | 2015-07-08 | 株式会社タムラ製作所 | Ga2O3系単結晶基板 |
| JP6744523B2 (ja) * | 2015-12-16 | 2020-08-19 | 株式会社タムラ製作所 | 半導体基板、並びにエピタキシャルウエハ及びその製造方法 |
| JP6714760B2 (ja) * | 2019-07-31 | 2020-06-24 | 株式会社タムラ製作所 | Ga2O3系単結晶基板 |
-
2022
- 2022-10-28 KR KR1020247008343A patent/KR102927254B1/ko active Active
- 2022-10-28 US US18/703,762 patent/US20240417881A1/en active Pending
- 2022-10-28 JP JP2023512692A patent/JP7380948B2/ja active Active
- 2022-10-28 WO PCT/JP2022/040309 patent/WO2023074836A1/ja not_active Ceased
- 2022-10-28 CN CN202280071198.5A patent/CN118159694A/zh active Pending
- 2022-10-28 EP EP22887161.2A patent/EP4411028B1/en active Active
- 2022-10-31 TW TW111141303A patent/TW202328516A/zh unknown
-
2023
- 2023-07-05 JP JP2023110746A patent/JP2023134567A/ja active Pending
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