JP2023075173A - プラズマ処理源および基板バイアスの同期パルス化 - Google Patents
プラズマ処理源および基板バイアスの同期パルス化 Download PDFInfo
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- 238000012545 processing Methods 0.000 title claims abstract description 212
- 239000000758 substrate Substances 0.000 title claims abstract description 98
- 230000001360 synchronised effect Effects 0.000 title description 14
- 238000000034 method Methods 0.000 claims abstract description 48
- 150000002500 ions Chemical class 0.000 claims description 92
- 230000005284 excitation Effects 0.000 claims description 76
- 230000000737 periodic effect Effects 0.000 claims description 48
- 210000002381 plasma Anatomy 0.000 description 159
- 230000001939 inductive effect Effects 0.000 description 20
- 230000001276 controlling effect Effects 0.000 description 15
- 238000005530 etching Methods 0.000 description 15
- 238000010586 diagram Methods 0.000 description 12
- 230000006870 function Effects 0.000 description 12
- 238000009826 distribution Methods 0.000 description 9
- 238000012544 monitoring process Methods 0.000 description 9
- 230000008569 process Effects 0.000 description 8
- 238000005315 distribution function Methods 0.000 description 6
- 230000004907 flux Effects 0.000 description 6
- 230000003287 optical effect Effects 0.000 description 6
- 238000000151 deposition Methods 0.000 description 5
- 238000006116 polymerization reaction Methods 0.000 description 5
- 230000001052 transient effect Effects 0.000 description 5
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 4
- 238000013459 approach Methods 0.000 description 4
- 238000004891 communication Methods 0.000 description 4
- 230000008021 deposition Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 239000007789 gas Substances 0.000 description 4
- 238000009832 plasma treatment Methods 0.000 description 4
- 230000009286 beneficial effect Effects 0.000 description 3
- 229910052799 carbon Inorganic materials 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- 238000004590 computer program Methods 0.000 description 3
- 238000000295 emission spectrum Methods 0.000 description 3
- 230000001965 increasing effect Effects 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 229920000642 polymer Polymers 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- -1 C2F6 or C4F6 Chemical compound 0.000 description 2
- 230000004075 alteration Effects 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 2
- 238000000429 assembly Methods 0.000 description 2
- 230000000712 assembly Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 230000006378 damage Effects 0.000 description 2
- 238000010494 dissociation reaction Methods 0.000 description 2
- 230000005593 dissociations Effects 0.000 description 2
- 230000009977 dual effect Effects 0.000 description 2
- 229910052731 fluorine Inorganic materials 0.000 description 2
- 239000011737 fluorine Substances 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000000379 polymerizing effect Effects 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 230000002441 reversible effect Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- BSYNRYMUTXBXSQ-UHFFFAOYSA-N Aspirin Chemical compound CC(=O)OC1=CC=CC=C1C(O)=O BSYNRYMUTXBXSQ-UHFFFAOYSA-N 0.000 description 1
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910003481 amorphous carbon Inorganic materials 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 239000013626 chemical specie Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000032798 delamination Effects 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 238000009616 inductively coupled plasma Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 229930002839 ionone Natural products 0.000 description 1
- 150000002499 ionone derivatives Chemical class 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 238000011282 treatment Methods 0.000 description 1
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Abstract
Description
特許に関する本願は、「Synchronized Pulsing of Plasma Processing Source and Substrate Bias」と題され、2017年11月17日に出願され、本願の譲受人に譲渡され、本明細書を参照することによって本明細書に明確に組み込まれる、仮出願第62/588,187号の優先権を主張する。
本発明は、例えば、以下の項目を提供する。
(項目1)
プラズマ処理のための方法であって、前記方法は、
第1の処理ステップの間に電力をプラズマ処理チャンバに印加するステップと、
前記第1の処理ステップの間に非対称周期電圧波形を基板支持体に印加し、基板とプラズマとの間に第1のプラズマシース電圧を生じるステップと、
第2の処理ステップの間に電力を前記プラズマ処理チャンバに印加するステップであって、前記第2の処理ステップは、前記第1の処理ステップに続く、ステップと、
前記第2の処理ステップの間に異なる非対称周期電圧波形を前記基板支持体に印加し、前記基板と前記プラズマとの間に異なるプラズマシース電圧を生じるステップと
を含む、方法。
(項目2)
前記第1の処理ステップの間の前記電力は、連続波電力であり、
前記第2の処理ステップの間の前記電力は、パルス化電力であり、
前記第2の処理ステップの間の前記シース電圧の大きさは、前記第1の処理ステップの間の前記シース電圧の大きさを上回る、項目1に記載の方法。
(項目3)
前記第2の処理ステップの間の前記電力の電圧は、前記第1の処理ステップの間の前記電力の電圧よりも低い、項目2に記載の方法。
(項目4)
前記第2の処理ステップの間に前記異なるプラズマシース電圧を発生させるステップは、前記第2の処理ステップの間にある範囲のシース電圧を発生させるステップを含む、項目1に記載の方法。
(項目5)
前記ある範囲のシース電圧を発生させるステップは、前記基板の表面に衝突するイオンのイオン電流を上回るか、または下回るかの少なくとも1つである電流を前記基板のための支持体に提供するステップを含む、項目4に記載の方法。
(項目6)
前記第1の処理ステップの間の前記電力は、第1のデューティサイクルを伴うパルス化電力であり、
前記第2の処理ステップの間の前記電力は、第2のデューティサイクルを伴うパルス化電力であり、
前記第2の処理ステップの間の前記シース電圧の大きさは、前記第1の処理ステップの間の前記シース電圧の大きさと異なる、項目1に記載の方法。
(項目7)
前記第1のデューティサイクルは、前記第2のデューティサイクルよりも長く、前記第2の処理ステップの間の前記シース電圧の大きさは、前記第1の処理ステップの間の前記シース電圧の大きさを下回る、項目6に記載の方法。
(項目8)
プラズマ処理システムであって、前記システムは、
プラズマ処理チャンバと、
励起源であって、前記励起源は、電力を前記プラズマ処理チャンバに印加し、前記プラズマ処理チャンバ内にプラズマを生じるように構成される、励起源と、
バイアス供給源であって、前記バイアス供給源は、基板支持体への非対称周期電圧波形を印加および修正し、前記プラズマ処理チャンバ内で前記プラズマと基板との間のシース電圧を修正するように構成される、バイアス供給源と、
少なくとも1つのコントローラであって、前記少なくとも1つのコントローラは、複数の処理ステップのそれぞれの間に、前記励起源および前記バイアス供給源の動作を同期させるように構成される、少なくとも1つのコントローラと
を備える、システム。
(項目9)
前記少なくとも1つのコントローラは、
連続波電力として第1の処理ステップの間に電力を印加するように前記励起源を制御することと、
パルス化電力として第2の処理ステップの間に電力を印加するように前記励起源を制御することと、
前記第1の処理ステップの間のシース電圧の大きさを上回る前記第2の処理ステップの間の前記シース電圧を生じるように前記バイアス供給源を制御することと
を行うように構成される、項目8に記載のプラズマ処理システム。
(項目10)
前記少なくとも1つのコントローラは、前記第1の処理ステップの間の前記電力の電圧よりも低いレベルにおける前記第2の処理ステップの間の前記電力の電圧を印加するように前記励起源を制御するように構成される、項目9に記載のプラズマ処理システム。
(項目11)
前記少なくとも1つのコントローラは、第2の処理ステップの間にある範囲のシース電圧を生じるように前記バイアス供給源を制御するように構成される、項目8に記載のプラズマ処理システム。
(項目12)
前記少なくとも1つのコントローラは、前記基板の表面に衝突するイオンのイオン電流を上回るか、または下回るかの少なくとも1つである電流を前記基板のための支持体に提供し、前記ある範囲のシース電圧を生じるように前記バイアス供給源を制御するように構成される、項目11に記載のプラズマ処理システム。
(項目13)
前記少なくとも1つのコントローラは、
第1のデューティサイクルを伴うパルス化電力として第1の処理ステップの間にRF電力を生じるように前記励起源を制御することと、
第2のデューティサイクルを伴うパルス化電力として第2の処理ステップの間に電力を生じるように前記励起源を制御することと、
前記第1の処理ステップの間の前記シース電圧の大きさと異なる前記第2の処理ステップの間の前記シース電圧の大きさを生じるように前記バイアス供給源を制御することと
を行うように構成される、項目8に記載のプラズマ処理システム。
(項目14)
前記少なくとも1つのコントローラは、前記第1のデューティサイクルが前記第2のデューティサイクルよりも長く、前記第2の処理ステップの間の前記シース電圧の大きさが前記第1の処理ステップの間の前記シース電圧の大きさを下回るように前記励起源を制御するように構成される、項目13に記載のプラズマ処理システム。
(項目15)
前記少なくとも1つのコントローラは、プロセッサまたはフィールドプログラマブルゲートアレイのうちの少なくとも1つを含み、前記少なくとも1つのコントローラは、非一過性コンピュータ可読媒体を含み、前記非一過性コンピュータ可読媒体は、その上に記憶される命令を備え、前記命令は、前記プロセッサによる実行のために、または前記フィールドプログラマブルゲートアレイを構成するために、
連続波電力として第1の処理ステップの間に電力を印加するように前記励起源を制御することと、
パルス化電力として第2の処理ステップの間に電力を印加するように前記励起源を制御することと、
前記第1の処理ステップの間のシース電圧の大きさを上回る前記第2の処理ステップの間の前記シース電圧を生じるように前記バイアス供給源を制御することと
を行う、項目8に記載のプラズマ処理システム。
(項目16)
非一過性コンピュータ可読媒体であって、前記非一過性コンピュータ可読媒体は、その上に記憶される命令を備え、前記命令は、プロセッサによる実行のために、またはフィールドプログラマブルゲートアレイを構成するために、プラズマ処理を実施し、前記命令は、
第1の処理ステップの間に電力をプラズマ処理チャンバに印加することと、
前記第1の処理ステップの間に非対称周期電圧波形を基板支持体に印加し、基板とプラズマとの間に第1のプラズマシース電圧を生じることと、
第2の処理ステップの間に電力を前記プラズマ処理チャンバに印加することであって、前記第2の処理ステップは、前記第1の処理ステップに続く、ことと、
前記第2の処理ステップの間に異なる非対称周期電圧波形を前記基板支持体に印加し、前記基板と前記プラズマとの間に異なるプラズマシース電圧を生じることと
を行うための命令を含む、非一過性コンピュータ可読媒体。
Claims (15)
- プラズマ処理のための方法であって、前記方法は、
第1の処理ステップの間に励起源を用いて第1のデューティサイクルでパルス化電力をプラズマ処理チャンバに印加することと、
前記第1の処理ステップの間にバイアス供給源を用いて非対称周期電圧波形を基板支持体に印加し、基板とプラズマとの間に第1のプラズマシース電圧を生じることと、
第2の処理ステップの間に前記励起源を用いて第2のデューティサイクルでパルス化電力を前記プラズマ処理チャンバに印加することであって、前記第2の処理ステップは、前記第1の処理ステップに続き、前記第2のデューティサイクルは、前記第1のデューティサイクルとは異なる、ことと、
前記第2の処理ステップの間に前記バイアス供給源を用いて異なる非対称周期電圧波形を前記基板支持体に印加し、前記基板と前記プラズマとの間に異なるプラズマシース電圧を生じることと
を含む、方法。 - 前記第1のデューティサイクルは、前記第2のデューティサイクルよりも長く、
前記第2の処理ステップの間の前記シース電圧の大きさは、前記第1の処理ステップの間の前記シース電圧の大きさよりも小さい、請求項1に記載の方法。 - 前記第2の処理ステップの間の前記パルス化電力の電圧は、前記第1の処理ステップの間の前記パルス化電力の電圧よりも低い、請求項1に記載の方法。
- 前記処理ステップのうちの一方または両方の間に前記異なるプラズマシース電圧波形を発生させることは、ある範囲のシース電圧を発生させることを含む、請求項1に記載の方法。
- 前記範囲のシース電圧を発生させることは、前記基板の表面に衝突するイオンのイオン電流を上回るか、または下回るかの少なくとも一方である電流を前記基板のための支持体に提供することを含む、請求項4に記載の方法。
- プラズマ処理システムであって、前記プラズマ処理システムは、
バイアス供給源であって、前記バイアス供給源は、基板支持体への非対称周期電圧波形を印加および修正し、プラズマ処理チャンバ内で前記プラズマと基板との間のプラズマシース電圧を修正するように構成される、バイアス供給源と、
少なくとも1つのコントローラであって、前記少なくとも1つのコントローラは、
前記励起源が第1のデューティサイクルでパルス化電力を生じているときに、第1の処理ステップの間に前記バイアス供給源を励起源と同期させることにより、プラズマシース電圧を生じることと、
前記励起源が第2のデューティサイクルでパルス化電力を生じているときに、第2の処理ステップの間に前記バイアス供給源を前記励起源と同期させ、前記非対称周期電圧波形を印加することにより、前記第2の処理ステップの間に異なる大きさの前記プラズマシース電圧を生じることと
を行うように構成される、少なくとも1つのコントローラと
を備える、プラズマ処理システム。 - 前記少なくとも1つのコントローラは、
前記第1のデューティサイクルが前記第2のデューティサイクルよりも長いように前記励起源を制御することと、
前記第2の処理ステップの間の前記プラズマシース電圧の大きさが前記第1の処理ステップの間の前記プラズマシース電圧の大きさよりも小さいように前記バイアス供給源を制御することと
を行うように構成される、請求項6に記載のプラズマ処理システム。 - 前記少なくとも1つのコントローラは、前記第1および第2の処理ステップのうちの一方または両方の間に、ある範囲のプラズマシース電圧を生じるように前記バイアス供給源を制御するように構成される、請求項6に記載のプラズマ処理システム。
- 前記少なくとも1つのコントローラは、前記基板の表面に衝突するイオンのイオン電流を上回るか、または下回るかの少なくとも一方である電流を前記基板のための支持体に提供し、前記範囲のプラズマシース電圧を生じるように前記バイアス供給源を制御するように構成される、請求項8に記載のプラズマ処理システム。
- 前記少なくとも1つのコントローラは、プロセッサまたはフィールドプログラマブルゲートアレイのうちの少なくとも1つを含み、前記少なくとも1つのコントローラは、非一過性コンピュータ可読媒体を含み、前記非一過性コンピュータ可読媒体は、前記プロセッサによる実行のために、または前記フィールドプログラマブルゲートアレイを構成するために、前記バイアス供給源を制御するためのその上に記憶される命令を備える、請求項6に記載のプラズマ処理システム。
- 非一過性コンピュータ可読媒体であって、前記非一過性コンピュータ可読媒体は、プロセッサによる実行のために、またはフィールドプログラマブルゲートアレイを構成するために、プラズマ処理を実施するためのその上に記憶される命令を備え、前記命令は、
第1の処理ステップの間に励起源を用いて第1のデューティサイクルでパルス化電力をプラズマ処理チャンバに印加することと、
前記第1の処理ステップの間に非対称周期電圧波形を基板支持体に印加し、基板とプラズマとの間に第1のプラズマシース電圧を生じることと、
第2の処理ステップの間に前記励起源を用いて第2のデューティサイクルでパルス化電力を前記プラズマ処理チャンバに印加することであって、前記第2の処理ステップは、前記第1の処理ステップに続く、ことと、
前記第2の処理ステップの間に異なる非対称周期電圧波形を前記基板支持体に印加し、前記基板と前記プラズマとの間に異なるプラズマシース電圧を生じることと
を行うための命令を含む、非一過性コンピュータ可読媒体。 - 前記第1のデューティサイクルは、前記第2のデューティサイクルよりも長く、
前記第2の処理ステップの間の前記シース電圧の大きさは、前記第1の処理ステップの間の前記シース電圧の大きさよりも小さい、請求項11に記載の非一過性コンピュータ可読媒体。 - 前記第2の処理ステップの間の前記パルス化電力の電圧は、前記第1の処理ステップの間の前記パルス化電力の電圧よりも低い、請求項11に記載の非一過性コンピュータ可読媒体。
- 前記処理ステップのうちの一方または両方の間に前記異なるプラズマシース電圧を発生させることは、ある範囲のシース電圧を発生させることを含む、請求項11に記載の非一過性コンピュータ可読媒体。
- 前記範囲のシース電圧を発生させることは、前記基板の表面に衝突するイオンのイオン電流を上回るか、または下回るかの少なくとも一方である電流を前記基板のための支持体に提供することを含む、請求項14に記載の非一過性コンピュータ可読媒体。
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- 2018-11-16 KR KR1020207017359A patent/KR20200100641A/ko not_active Application Discontinuation
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Also Published As
Publication number | Publication date |
---|---|
EP4231328A1 (en) | 2023-08-23 |
US20190157040A1 (en) | 2019-05-23 |
EP3711080A4 (en) | 2021-09-29 |
CN111868873B (zh) | 2023-06-16 |
WO2019099870A1 (en) | 2019-05-23 |
US10607813B2 (en) | 2020-03-31 |
US10896807B2 (en) | 2021-01-19 |
CN111868873A (zh) | 2020-10-30 |
US20200203128A1 (en) | 2020-06-25 |
TWI726258B (zh) | 2021-05-01 |
EP3711080B1 (en) | 2023-06-21 |
US11610761B2 (en) | 2023-03-21 |
TW202135128A (zh) | 2021-09-16 |
KR20200100641A (ko) | 2020-08-26 |
EP3711080A1 (en) | 2020-09-23 |
JP7235761B2 (ja) | 2023-03-08 |
TW201937532A (zh) | 2019-09-16 |
TWI804836B (zh) | 2023-06-11 |
PL3711080T3 (pl) | 2023-12-11 |
JP7432781B2 (ja) | 2024-02-16 |
JP2021503700A (ja) | 2021-02-12 |
US20210134562A1 (en) | 2021-05-06 |
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