JP2023001193A5 - - Google Patents
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- JP2023001193A5 JP2023001193A5 JP2022171671A JP2022171671A JP2023001193A5 JP 2023001193 A5 JP2023001193 A5 JP 2023001193A5 JP 2022171671 A JP2022171671 A JP 2022171671A JP 2022171671 A JP2022171671 A JP 2022171671A JP 2023001193 A5 JP2023001193 A5 JP 2023001193A5
- Authority
- JP
- Japan
- Prior art keywords
- content
- mass
- chemical solution
- oxide particles
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- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2024166177A JP2024169664A (ja) | 2018-08-21 | 2024-09-25 | 薬液、薬液収容体 |
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2018154496 | 2018-08-21 | ||
| JP2018154496 | 2018-08-21 | ||
| JP2020538330A JPWO2020040003A1 (ja) | 2018-08-21 | 2019-08-13 | 薬液、薬液収容体 |
| PCT/JP2019/031855 WO2020040003A1 (ja) | 2018-08-21 | 2019-08-13 | 薬液、薬液収容体 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2020538330A Division JPWO2020040003A1 (ja) | 2018-08-21 | 2019-08-13 | 薬液、薬液収容体 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2024166177A Division JP2024169664A (ja) | 2018-08-21 | 2024-09-25 | 薬液、薬液収容体 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2023001193A JP2023001193A (ja) | 2023-01-04 |
| JP2023001193A5 true JP2023001193A5 (https=) | 2023-01-20 |
| JP7836256B2 JP7836256B2 (ja) | 2026-03-26 |
Family
ID=69592604
Family Applications (3)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2020538330A Pending JPWO2020040003A1 (ja) | 2018-08-21 | 2019-08-13 | 薬液、薬液収容体 |
| JP2022171671A Active JP7836256B2 (ja) | 2018-08-21 | 2022-10-26 | 薬液、薬液収容体 |
| JP2024166177A Pending JP2024169664A (ja) | 2018-08-21 | 2024-09-25 | 薬液、薬液収容体 |
Family Applications Before (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2020538330A Pending JPWO2020040003A1 (ja) | 2018-08-21 | 2019-08-13 | 薬液、薬液収容体 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2024166177A Pending JP2024169664A (ja) | 2018-08-21 | 2024-09-25 | 薬液、薬液収容体 |
Country Status (4)
| Country | Link |
|---|---|
| JP (3) | JPWO2020040003A1 (https=) |
| KR (2) | KR102901692B1 (https=) |
| TW (1) | TWI875707B (https=) |
| WO (1) | WO2020040003A1 (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7691260B2 (ja) * | 2021-04-01 | 2025-06-11 | 富士フイルム株式会社 | 収容体の製造方法、及び、樹脂組成物の保管方法 |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009188333A (ja) * | 2008-02-08 | 2009-08-20 | Tokyo Electron Ltd | パーティクル検出方法及び処理装置 |
| US20160066581A1 (en) * | 2014-09-08 | 2016-03-10 | Michael N. Young | Silver ion solution agricultural formulations |
| JP2015084122A (ja) | 2015-01-08 | 2015-04-30 | 富士フイルム株式会社 | 化学増幅型レジスト膜のパターニング用有機系処理液 |
| CN108348327B (zh) * | 2015-11-04 | 2021-10-01 | 克拉维斯塔医疗有限公司 | 模块化人工晶状体设计、工具和方法 |
| WO2017169569A1 (ja) * | 2016-03-30 | 2017-10-05 | 富士フイルム株式会社 | 保護膜形成用組成物、保護膜形成用組成物の製造方法、パターン形成方法、および、電子デバイスの製造方法 |
| KR102245548B1 (ko) * | 2016-03-31 | 2021-04-28 | 후지필름 가부시키가이샤 | 반도체 제조용 처리액, 그 제조 방법, 패턴 형성 방법 및 전자 디바이스의 제조 방법 |
| TWI725162B (zh) * | 2016-04-08 | 2021-04-21 | 日商富士軟片股份有限公司 | 處理液、其製造方法、圖案形成方法及電子器件的製造方法 |
| JPWO2018079449A1 (ja) * | 2016-10-27 | 2019-09-19 | 富士フイルム株式会社 | 感活性光線性又は感放射線性樹脂組成物、レジスト膜、パターン形成方法、電子デバイスの製造方法 |
| WO2018142888A1 (ja) * | 2017-02-01 | 2018-08-09 | 富士フイルム株式会社 | 薬液の製造方法、及び、薬液の製造装置 |
-
2019
- 2019-08-13 KR KR1020247005844A patent/KR102901692B1/ko active Active
- 2019-08-13 KR KR1020217004143A patent/KR102640614B1/ko active Active
- 2019-08-13 JP JP2020538330A patent/JPWO2020040003A1/ja active Pending
- 2019-08-13 WO PCT/JP2019/031855 patent/WO2020040003A1/ja not_active Ceased
- 2019-08-16 TW TW108129296A patent/TWI875707B/zh active
-
2022
- 2022-10-26 JP JP2022171671A patent/JP7836256B2/ja active Active
-
2024
- 2024-09-25 JP JP2024166177A patent/JP2024169664A/ja active Pending
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