JP2022542959A5 - - Google Patents
Info
- Publication number
- JP2022542959A5 JP2022542959A5 JP2022506110A JP2022506110A JP2022542959A5 JP 2022542959 A5 JP2022542959 A5 JP 2022542959A5 JP 2022506110 A JP2022506110 A JP 2022506110A JP 2022506110 A JP2022506110 A JP 2022506110A JP 2022542959 A5 JP2022542959 A5 JP 2022542959A5
- Authority
- JP
- Japan
- Prior art keywords
- pixels
- phase
- map
- subset
- inspection system
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201962880341P | 2019-07-30 | 2019-07-30 | |
| US62/880,341 | 2019-07-30 | ||
| US16/688,539 US11035665B2 (en) | 2019-07-30 | 2019-11-19 | System and method for enhancing data processing throughput using less effective pixel while maintaining wafer warp coverage |
| US16/688,539 | 2019-11-19 | ||
| PCT/US2020/043924 WO2021021838A1 (en) | 2019-07-30 | 2020-07-29 | System and method for enhancing data processing throughput using less effective pixel while maintaining wafer warp coverage |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2022542959A JP2022542959A (ja) | 2022-10-07 |
| JP2022542959A5 true JP2022542959A5 (https=) | 2023-07-21 |
| JP7362893B2 JP7362893B2 (ja) | 2023-10-17 |
Family
ID=74228636
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022506110A Active JP7362893B2 (ja) | 2019-07-30 | 2020-07-29 | ウェーハワープ適用範囲を維持しながら効率が劣るピクセルを用いてデータ処理スループットを向上させるシステム及び方法 |
Country Status (7)
| Country | Link |
|---|---|
| US (2) | US11035665B2 (https=) |
| JP (1) | JP7362893B2 (https=) |
| KR (1) | KR102932684B1 (https=) |
| CN (1) | CN114096798B (https=) |
| IL (2) | IL301483B2 (https=) |
| TW (2) | TWI841765B (https=) |
| WO (1) | WO2021021838A1 (https=) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11035665B2 (en) * | 2019-07-30 | 2021-06-15 | Kla Corporation | System and method for enhancing data processing throughput using less effective pixel while maintaining wafer warp coverage |
| US11469571B2 (en) | 2019-11-21 | 2022-10-11 | Kla Corporation | Fast phase-shift interferometry by laser frequency shift |
| DE102020201958B3 (de) * | 2020-02-17 | 2021-01-07 | Carl Zeiss Smt Gmbh | Messvorrichtung zur interferometrischen Formvermessung |
| WO2022225897A1 (en) * | 2021-04-20 | 2022-10-27 | Nikon Corporation | Systems and methods for measuring height properties of surfaces |
| US11629952B2 (en) * | 2021-06-02 | 2023-04-18 | Kla Corporation | Detection aided two-stage phase unwrapping on pattern wafer geometry measurement |
Family Cites Families (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6107953A (en) * | 1999-03-10 | 2000-08-22 | Veridian Erim International, Inc. | Minimum-gradient-path phase unwrapping |
| US7385707B2 (en) | 2002-03-14 | 2008-06-10 | Taylor Hobson Limited | Surface profiling apparatus |
| US6703835B2 (en) | 2002-04-11 | 2004-03-09 | Ge Medical Systems Global Technology Co. Llc | System and method for unwrapping phase difference images |
| US7324214B2 (en) * | 2003-03-06 | 2008-01-29 | Zygo Corporation | Interferometer and method for measuring characteristics of optically unresolved surface features |
| US6847458B2 (en) | 2003-03-20 | 2005-01-25 | Phase Shift Technology, Inc. | Method and apparatus for measuring the shape and thickness variation of polished opaque plates |
| EP1664932B1 (en) * | 2003-09-15 | 2015-01-28 | Zygo Corporation | Interferometric analysis of surfaces |
| JP5087253B2 (ja) | 2006-09-27 | 2012-12-05 | 株式会社ミツトヨ | 干渉縞解析における位相接続方法 |
| CN100565498C (zh) * | 2008-05-05 | 2009-12-02 | 南京大学 | 基于相位不连续区域检测的最小不连续二维相位展开方法 |
| CN101655357B (zh) * | 2009-09-11 | 2011-05-04 | 南京大学 | 一种用于二维相位展开的相位梯度相关质量图获取方法 |
| JP2011141251A (ja) | 2010-01-08 | 2011-07-21 | Nikon Corp | 位相接続方法およびその方法を用いる干渉測定装置 |
| CN102032877B (zh) * | 2010-11-30 | 2012-05-23 | 东南大学 | 基于小波变换的三维测量方法 |
| US8643847B1 (en) * | 2011-05-08 | 2014-02-04 | Bruker Nano Inc. | Interferometric technique for measuring patterned sapphire substrates |
| US8949057B1 (en) | 2011-10-27 | 2015-02-03 | Kla-Tencor Corporation | Method for compensating for wafer shape measurement variation due to variation of environment temperature |
| US9121684B2 (en) | 2012-01-17 | 2015-09-01 | Kla-Tencor Corporation | Method for reducing wafer shape and thickness measurement errors resulted from cavity shape changes |
| US9020293B2 (en) | 2012-02-07 | 2015-04-28 | National Cheung Kung University | Integration of filters and phase unwrapping algorithms for removing noise in image reconstruction |
| US8463077B1 (en) * | 2012-03-26 | 2013-06-11 | National Cheng Kung University | Rotation phase unwrapping algorithm for image reconstruction |
| US10352691B1 (en) | 2014-04-18 | 2019-07-16 | Kla-Tencor Corporation | Systems and methods for wafer structure uniformity monitoring using interferometry wafer geometry tool |
| US9897433B2 (en) * | 2015-10-30 | 2018-02-20 | KLA—Tencor Corporation | Method and system for regional phase unwrapping with pattern-assisted correction |
| JP6766995B2 (ja) * | 2016-11-09 | 2020-10-14 | 株式会社ミツトヨ | 位相シフト干渉計 |
| US10571543B2 (en) | 2017-01-18 | 2020-02-25 | Shanghai United Imaging Healthcare Co., Ltd | Methods and apparatuses for phase unwrapping |
| CN109870129A (zh) * | 2019-03-25 | 2019-06-11 | 中国计量大学 | 一种基于相位偏折原理的晶圆表面粗糙度检测装置 |
| US11035665B2 (en) * | 2019-07-30 | 2021-06-15 | Kla Corporation | System and method for enhancing data processing throughput using less effective pixel while maintaining wafer warp coverage |
-
2019
- 2019-11-19 US US16/688,539 patent/US11035665B2/en active Active
-
2020
- 2020-07-22 TW TW109124751A patent/TWI841765B/zh active
- 2020-07-22 TW TW112149803A patent/TWI857889B/zh active
- 2020-07-29 WO PCT/US2020/043924 patent/WO2021021838A1/en not_active Ceased
- 2020-07-29 IL IL301483A patent/IL301483B2/en unknown
- 2020-07-29 CN CN202080049425.5A patent/CN114096798B/zh active Active
- 2020-07-29 KR KR1020227005930A patent/KR102932684B1/ko active Active
- 2020-07-29 JP JP2022506110A patent/JP7362893B2/ja active Active
-
2021
- 2021-05-14 US US17/320,537 patent/US11668557B2/en active Active
-
2022
- 2022-01-12 IL IL289780A patent/IL289780B2/en unknown
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