JP2022529486A - 垂直プローブアレイ用のキャリア構造上のプローブ - Google Patents
垂直プローブアレイ用のキャリア構造上のプローブ Download PDFInfo
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- JP2022529486A JP2022529486A JP2021562102A JP2021562102A JP2022529486A JP 2022529486 A JP2022529486 A JP 2022529486A JP 2021562102 A JP2021562102 A JP 2021562102A JP 2021562102 A JP2021562102 A JP 2021562102A JP 2022529486 A JP2022529486 A JP 2022529486A
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- Prior art keywords
- probe
- space transformer
- vertical
- flatness
- flexible member
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
- G01R1/06716—Elastic
- G01R1/06727—Cantilever beams
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
- G01R1/06733—Geometry aspects
- G01R1/06738—Geometry aspects related to tip portion
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
- G01R1/07314—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being perpendicular to test object, e.g. bed of nails or probe with bump contacts on a rigid support
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
- G01R1/07357—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with flexible bodies, e.g. buckling beams
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
- G01R1/07364—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch
- G01R1/07378—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch using an intermediate adapter, e.g. space transformers
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Geometry (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Measuring Leads Or Probes (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
Abstract
Description
Claims (8)
- 電気デバイスを試験するためのプローブアレイであって、
スペーストランスフォーマと、
前記スペーストランスフォーマ上、または前記スペーストランスフォーマに近接して配置された2以上のプローブキャリアプレートとを備え、
前記プローブキャリアプレートのそれぞれは、その上に配置された2以上の垂直プローブを有し、
前記垂直プローブのそれぞれは、前記スペーストランスフォーマに電気的に接触する第1の可撓性部材を有し、
前記垂直プローブのそれぞれは、試験中のデバイスに一時的に電気的に接触するように構成された第2の可撓性部材を有することを特徴とするプローブアレイ。 - 前記スペーストランスフォーマに取り付けられた機械的補強部材をさらに備えることを特徴とする請求項1に記載のプローブアレイ。
- 前記プローブキャリアプレートは前記スペーストランスフォーマ上に配置され、
前記機械的補強部材は、前記スペーストランスフォーマの熱膨張と、前記スペーストランスフォーマの平坦度からの逸脱との両方を制限するように構成されることを特徴とする請求項2に記載のプローブアレイ。 - 前記プローブキャリアプレートは前記機械的補強部材上に配置され、
前記垂直プローブの前記第1の可撓性部材は、前記スペーストランスフォーマの熱膨張と、前記スペーストランスフォーマの平坦度からの逸脱との両方に適応するように構成されることを特徴とする請求項2に記載のプローブアレイ。 - 前記垂直プローブは2次元MEMSプローブであることを特徴とする請求項1に記載のプローブアレイ。
- 前記スペーストランスフォーマはセラミック基板を含むことを特徴とする請求項1に記載のプローブアレイ。
- 前記スペーストランスフォーマはプリント基板を含むことを特徴とする請求項1に記載のプローブアレイ。
- 前記垂直プローブの前記第2の可撓性部材の先端部は、25μm以下の公差まで平坦であることを特徴とする請求項1に記載のプローブアレイ。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201962839480P | 2019-04-26 | 2019-04-26 | |
US62/839,480 | 2019-04-26 | ||
PCT/US2020/030031 WO2020220012A1 (en) | 2019-04-26 | 2020-04-27 | Probe on carrier architecture for vertical probe arrays |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2022529486A true JP2022529486A (ja) | 2022-06-22 |
JP7302011B2 JP7302011B2 (ja) | 2023-07-03 |
Family
ID=72922512
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2021562102A Active JP7302011B2 (ja) | 2019-04-26 | 2020-04-27 | 垂直プローブアレイ用のキャリア構造上のプローブ |
Country Status (4)
Country | Link |
---|---|
US (1) | US11293947B2 (ja) |
EP (1) | EP3959524A4 (ja) |
JP (1) | JP7302011B2 (ja) |
WO (1) | WO2020220012A1 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI797004B (zh) * | 2022-04-29 | 2023-03-21 | 中華精測科技股份有限公司 | 懸臂式探針卡及其承載座 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0766252A (ja) * | 1993-08-25 | 1995-03-10 | Tokyo Electron Ltd | プローブカード |
JPH07321168A (ja) * | 1994-05-27 | 1995-12-08 | Tokyo Electron Ltd | プローブカード |
JP2007024555A (ja) * | 2005-07-13 | 2007-02-01 | Tokyo Electron Ltd | プローブカード |
JP2008281564A (ja) * | 2007-05-11 | 2008-11-20 | Amst Co Ltd | プローブカード及びその製造方法 |
US20090237099A1 (en) * | 2008-03-20 | 2009-09-24 | Touchdown Technologies, Inc. | Probe card substrate with bonded via |
JP2011106980A (ja) * | 2009-11-18 | 2011-06-02 | Advantest Corp | プローブカード |
Family Cites Families (20)
Publication number | Priority date | Publication date | Assignee | Title |
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JPS6180067A (ja) | 1984-09-21 | 1986-04-23 | インタ−ナショナル ビジネス マシ−ンズ コ−ポレ−ション | テスト・プロ−ブ装置 |
US5806181A (en) | 1993-11-16 | 1998-09-15 | Formfactor, Inc. | Contact carriers (tiles) for populating larger substrates with spring contacts |
US7064566B2 (en) | 1993-11-16 | 2006-06-20 | Formfactor, Inc. | Probe card assembly and kit |
US6066957A (en) | 1997-09-11 | 2000-05-23 | Delaware Capital Formation, Inc. | Floating spring probe wireless test fixture |
US6419500B1 (en) * | 1999-03-08 | 2002-07-16 | Kulicke & Soffa Investment, Inc. | Probe assembly having floatable buckling beam probes and apparatus for abrading the same |
US7349223B2 (en) | 2000-05-23 | 2008-03-25 | Nanonexus, Inc. | Enhanced compliant probe card systems having improved planarity |
US6426638B1 (en) | 2000-05-02 | 2002-07-30 | Decision Track Llc | Compliant probe apparatus |
US6870382B2 (en) | 2002-05-03 | 2005-03-22 | Texas Instruments Incorporated | System and method for evaluating the planarity and parallelism of an array of probe tips |
US6965244B2 (en) * | 2002-05-08 | 2005-11-15 | Formfactor, Inc. | High performance probe system |
US7084650B2 (en) * | 2002-12-16 | 2006-08-01 | Formfactor, Inc. | Apparatus and method for limiting over travel in a probe card assembly |
US7071715B2 (en) * | 2004-01-16 | 2006-07-04 | Formfactor, Inc. | Probe card configuration for low mechanical flexural strength electrical routing substrates |
US7459795B2 (en) | 2004-08-19 | 2008-12-02 | Formfactor, Inc. | Method to build a wirebond probe card in a many at a time fashion |
US7876087B2 (en) | 2006-09-12 | 2011-01-25 | Innoconnex, Inc. | Probe card repair using coupons with spring contacts and separate atachment points |
KR100791945B1 (ko) * | 2007-08-23 | 2008-01-04 | (주)기가레인 | 프로브 카드 |
US7960989B2 (en) * | 2008-12-03 | 2011-06-14 | Formfactor, Inc. | Mechanical decoupling of a probe card assembly to improve thermal response |
US20100176831A1 (en) | 2009-01-14 | 2010-07-15 | Palcisko William M | Probe Test Card with Flexible Interconnect Structure |
KR102213726B1 (ko) | 2013-05-06 | 2021-02-08 | 폼팩터, 인크. | 전자 디바이스들을 테스트하기 위한 프로브 카드 조립체 |
US9459288B2 (en) * | 2014-01-16 | 2016-10-04 | Infineon Technologies Ag | Wide interposer for an electronic testing system |
JP6637909B2 (ja) | 2014-03-06 | 2020-01-29 | テクノプローベ エス.ピー.エー. | 電子デバイステスト装置用極端温度プローブカード |
WO2019046419A1 (en) * | 2017-08-30 | 2019-03-07 | Formfactor, Inc. | VERTICAL PROBE ARRANGEMENT COMPRISING A SPACE TRANSFORMER WITH MEMBRANE JUXTAPOSÉ |
-
2020
- 2020-04-27 US US16/858,976 patent/US11293947B2/en active Active
- 2020-04-27 EP EP20794523.9A patent/EP3959524A4/en active Pending
- 2020-04-27 JP JP2021562102A patent/JP7302011B2/ja active Active
- 2020-04-27 WO PCT/US2020/030031 patent/WO2020220012A1/en unknown
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0766252A (ja) * | 1993-08-25 | 1995-03-10 | Tokyo Electron Ltd | プローブカード |
JPH07321168A (ja) * | 1994-05-27 | 1995-12-08 | Tokyo Electron Ltd | プローブカード |
JP2007024555A (ja) * | 2005-07-13 | 2007-02-01 | Tokyo Electron Ltd | プローブカード |
JP2008281564A (ja) * | 2007-05-11 | 2008-11-20 | Amst Co Ltd | プローブカード及びその製造方法 |
US20090237099A1 (en) * | 2008-03-20 | 2009-09-24 | Touchdown Technologies, Inc. | Probe card substrate with bonded via |
JP2011106980A (ja) * | 2009-11-18 | 2011-06-02 | Advantest Corp | プローブカード |
Also Published As
Publication number | Publication date |
---|---|
EP3959524A4 (en) | 2023-01-18 |
JP7302011B2 (ja) | 2023-07-03 |
US11293947B2 (en) | 2022-04-05 |
US20200341030A1 (en) | 2020-10-29 |
WO2020220012A1 (en) | 2020-10-29 |
EP3959524A1 (en) | 2022-03-02 |
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