JP2022528738A - 新規ジアロイルカルバゾール化合物、及び増感剤としてのその使用 - Google Patents

新規ジアロイルカルバゾール化合物、及び増感剤としてのその使用 Download PDF

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JP2022528738A
JP2022528738A JP2021560178A JP2021560178A JP2022528738A JP 2022528738 A JP2022528738 A JP 2022528738A JP 2021560178 A JP2021560178 A JP 2021560178A JP 2021560178 A JP2021560178 A JP 2021560178A JP 2022528738 A JP2022528738 A JP 2022528738A
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JP2022528738A5 (https=
JPWO2020253283A5 (https=
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文超 ▲趙▼
家▲斉▼ 李
忠利 麻
辰▲竜▼ 王
永林 王
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艾▲堅▼蒙（安▲慶▼）科技▲発▼展有限公司
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    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
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    • G03F7/029—Inorganic compounds; Onium compounds; Organic compounds having hetero atoms other than oxygen, nitrogen or sulfur
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