JP2022515347A5 - - Google Patents

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Publication number
JP2022515347A5
JP2022515347A5 JP2021533442A JP2021533442A JP2022515347A5 JP 2022515347 A5 JP2022515347 A5 JP 2022515347A5 JP 2021533442 A JP2021533442 A JP 2021533442A JP 2021533442 A JP2021533442 A JP 2021533442A JP 2022515347 A5 JP2022515347 A5 JP 2022515347A5
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JP
Japan
Prior art keywords
liner
chamber body
ion beam
processing space
manufactured
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JP2021533442A
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English (en)
Japanese (ja)
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JP2022515347A (ja
JP7447118B2 (ja
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Priority claimed from PCT/US2019/066780 external-priority patent/WO2020131831A1/en
Publication of JP2022515347A publication Critical patent/JP2022515347A/ja
Publication of JP2022515347A5 publication Critical patent/JP2022515347A5/ja
Application granted granted Critical
Publication of JP7447118B2 publication Critical patent/JP7447118B2/ja
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JP2021533442A 2018-12-17 2019-12-17 光学装置製造のためのイオンビーム源 Active JP7447118B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201862780792P 2018-12-17 2018-12-17
US201862780805P 2018-12-17 2018-12-17
US62/780,792 2018-12-17
US62/780,805 2018-12-17
PCT/US2019/066780 WO2020131831A1 (en) 2018-12-17 2019-12-17 Ion beam source for optical device fabrication

Publications (3)

Publication Number Publication Date
JP2022515347A JP2022515347A (ja) 2022-02-18
JP2022515347A5 true JP2022515347A5 (enExample) 2022-12-23
JP7447118B2 JP7447118B2 (ja) 2024-03-11

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ID=71071206

Family Applications (4)

Application Number Title Priority Date Filing Date
JP2021533442A Active JP7447118B2 (ja) 2018-12-17 2019-12-17 光学装置製造のためのイオンビーム源
JP2021533786A Active JP7447119B2 (ja) 2018-12-17 2019-12-17 光学装置製造のための電子ビーム装置
JP2021533444A Active JP7555340B2 (ja) 2018-12-17 2019-12-17 イオンビーム源を使用した光学装置の製造方法
JP2021533791A Active JP7410951B2 (ja) 2018-12-17 2019-12-17 電子ビーム装置を使用した光学装置の製造方法

Family Applications After (3)

Application Number Title Priority Date Filing Date
JP2021533786A Active JP7447119B2 (ja) 2018-12-17 2019-12-17 光学装置製造のための電子ビーム装置
JP2021533444A Active JP7555340B2 (ja) 2018-12-17 2019-12-17 イオンビーム源を使用した光学装置の製造方法
JP2021533791A Active JP7410951B2 (ja) 2018-12-17 2019-12-17 電子ビーム装置を使用した光学装置の製造方法

Country Status (7)

Country Link
US (5) US11810755B2 (enExample)
EP (4) EP3900008A4 (enExample)
JP (4) JP7447118B2 (enExample)
KR (4) KR102841149B1 (enExample)
CN (4) CN113227859B (enExample)
TW (5) TWI826899B (enExample)
WO (4) WO2020131839A1 (enExample)

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