JP2022511299A - 中間ブレークスルー処理を用いたハイブリッドレーザスクライビング及びプラズマエッチング手法を使用するウエハダイシング - Google Patents
中間ブレークスルー処理を用いたハイブリッドレーザスクライビング及びプラズマエッチング手法を使用するウエハダイシング Download PDFInfo
- Publication number
- JP2022511299A JP2022511299A JP2021512937A JP2021512937A JP2022511299A JP 2022511299 A JP2022511299 A JP 2022511299A JP 2021512937 A JP2021512937 A JP 2021512937A JP 2021512937 A JP2021512937 A JP 2021512937A JP 2022511299 A JP2022511299 A JP 2022511299A
- Authority
- JP
- Japan
- Prior art keywords
- breakthrough
- plasma etching
- directional
- mask
- isotropic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims abstract description 223
- 238000001020 plasma etching Methods 0.000 title claims abstract description 84
- 238000012545 processing Methods 0.000 title claims description 14
- 230000008569 process Effects 0.000 claims abstract description 184
- 239000004065 semiconductor Substances 0.000 claims abstract description 89
- 238000000059 patterning Methods 0.000 claims abstract description 16
- 238000005530 etching Methods 0.000 claims description 65
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 44
- 229910052710 silicon Inorganic materials 0.000 claims description 44
- 239000010703 silicon Substances 0.000 claims description 44
- 239000007789 gas Substances 0.000 claims description 17
- 230000000737 periodic effect Effects 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 abstract description 136
- 238000010586 diagram Methods 0.000 abstract description 10
- 239000010410 layer Substances 0.000 description 104
- 239000000758 substrate Substances 0.000 description 61
- 239000000463 material Substances 0.000 description 41
- 210000002381 plasma Anatomy 0.000 description 32
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 28
- 238000004140 cleaning Methods 0.000 description 15
- 239000002184 metal Substances 0.000 description 15
- 229910052751 metal Inorganic materials 0.000 description 15
- 229920002120 photoresistant polymer Polymers 0.000 description 15
- 239000002609 medium Substances 0.000 description 14
- 239000000377 silicon dioxide Substances 0.000 description 13
- 235000012239 silicon dioxide Nutrition 0.000 description 13
- 238000000608 laser ablation Methods 0.000 description 12
- 238000003860 storage Methods 0.000 description 12
- 239000003989 dielectric material Substances 0.000 description 11
- 239000010949 copper Substances 0.000 description 9
- 238000000151 deposition Methods 0.000 description 9
- 150000002739 metals Chemical class 0.000 description 9
- 238000002679 ablation Methods 0.000 description 8
- 238000005520 cutting process Methods 0.000 description 8
- 238000001459 lithography Methods 0.000 description 8
- 230000035515 penetration Effects 0.000 description 8
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 7
- 229910052802 copper Inorganic materials 0.000 description 7
- 230000006378 damage Effects 0.000 description 7
- 230000032798 delamination Effects 0.000 description 7
- 230000008021 deposition Effects 0.000 description 7
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 7
- 238000010521 absorption reaction Methods 0.000 description 6
- 238000013459 approach Methods 0.000 description 6
- 229910021419 crystalline silicon Inorganic materials 0.000 description 6
- 230000006870 function Effects 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 6
- 229910003460 diamond Inorganic materials 0.000 description 5
- 239000010432 diamond Substances 0.000 description 5
- 230000003287 optical effect Effects 0.000 description 5
- 229920000642 polymer Polymers 0.000 description 5
- 230000008901 benefit Effects 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 4
- 239000013078 crystal Substances 0.000 description 4
- 150000002500 ions Chemical class 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- 239000004809 Teflon Substances 0.000 description 3
- 229920006362 Teflon® Polymers 0.000 description 3
- 244000309466 calf Species 0.000 description 3
- 230000007547 defect Effects 0.000 description 3
- 238000005137 deposition process Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000009499 grossing Methods 0.000 description 3
- 238000001465 metallisation Methods 0.000 description 3
- 238000009623 Bosch process Methods 0.000 description 2
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- 239000002313 adhesive film Substances 0.000 description 2
- 229910021486 amorphous silicon dioxide Inorganic materials 0.000 description 2
- 239000007864 aqueous solution Substances 0.000 description 2
- 229910014558 c-SiO Inorganic materials 0.000 description 2
- 238000003486 chemical etching Methods 0.000 description 2
- 230000003749 cleanliness Effects 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 239000000356 contaminant Substances 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 229910021488 crystalline silicon dioxide Inorganic materials 0.000 description 2
- 229910052731 fluorine Inorganic materials 0.000 description 2
- 239000011737 fluorine Substances 0.000 description 2
- 229910052732 germanium Inorganic materials 0.000 description 2
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000010329 laser etching Methods 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 239000011368 organic material Substances 0.000 description 2
- 238000004806 packaging method and process Methods 0.000 description 2
- 230000000704 physical effect Effects 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 238000001228 spectrum Methods 0.000 description 2
- 230000003068 static effect Effects 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 230000003685 thermal hair damage Effects 0.000 description 2
- 238000009834 vaporization Methods 0.000 description 2
- 230000008016 vaporization Effects 0.000 description 2
- KXGFMDJXCMQABM-UHFFFAOYSA-N 2-methoxy-6-methylphenol Chemical compound [CH]OC1=CC=CC([CH])=C1O KXGFMDJXCMQABM-UHFFFAOYSA-N 0.000 description 1
- -1 902) Inorganic materials 0.000 description 1
- 229920002307 Dextran Polymers 0.000 description 1
- 206010034972 Photosensitivity reaction Diseases 0.000 description 1
- 229920003171 Poly (ethylene oxide) Polymers 0.000 description 1
- 229920002845 Poly(methacrylic acid) Polymers 0.000 description 1
- 229920002873 Polyethylenimine Polymers 0.000 description 1
- 239000004372 Polyvinyl alcohol Substances 0.000 description 1
- 229920002125 Sokalan® Polymers 0.000 description 1
- 239000003929 acidic solution Substances 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000012670 alkaline solution Substances 0.000 description 1
- 239000012736 aqueous medium Substances 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 238000009412 basement excavation Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 229940114081 cinnamate Drugs 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 238000004590 computer program Methods 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000013500 data storage Methods 0.000 description 1
- 239000008367 deionised water Substances 0.000 description 1
- 229910021641 deionized water Inorganic materials 0.000 description 1
- URQUNWYOBNUYJQ-UHFFFAOYSA-N diazonaphthoquinone Chemical compound C1=CC=C2C(=O)C(=[N]=[N])C=CC2=C1 URQUNWYOBNUYJQ-UHFFFAOYSA-N 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000008030 elimination Effects 0.000 description 1
- 238000003379 elimination reaction Methods 0.000 description 1
- 239000012634 fragment Substances 0.000 description 1
- 230000014509 gene expression Effects 0.000 description 1
- 230000007274 generation of a signal involved in cell-cell signaling Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 239000002346 layers by function Substances 0.000 description 1
- 230000031700 light absorption Effects 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 230000000873 masking effect Effects 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 230000000116 mitigating effect Effects 0.000 description 1
- 238000001208 nuclear magnetic resonance pulse sequence Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000005011 phenolic resin Substances 0.000 description 1
- 229920001568 phenolic resin Polymers 0.000 description 1
- 230000036211 photosensitivity Effects 0.000 description 1
- 238000009832 plasma treatment Methods 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- 239000004584 polyacrylic acid Substances 0.000 description 1
- 229920002451 polyvinyl alcohol Polymers 0.000 description 1
- 239000004800 polyvinyl chloride Substances 0.000 description 1
- 229920000915 polyvinyl chloride Polymers 0.000 description 1
- 230000006798 recombination Effects 0.000 description 1
- 238000005215 recombination Methods 0.000 description 1
- 238000009877 rendering Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 239000002195 soluble material Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- WBYWAXJHAXSJNI-VOTSOKGWSA-M trans-cinnamate Chemical compound [O-]C(=O)\C=C\C1=CC=CC=C1 WBYWAXJHAXSJNI-VOTSOKGWSA-M 0.000 description 1
- 229920002554 vinyl polymer Polymers 0.000 description 1
- 238000001429 visible spectrum Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
- 238000003079 width control Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/3065—Plasma etching; Reactive-ion etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
- H01L21/321—After treatment
- H01L21/3213—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer
- H01L21/32133—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by chemical means only
- H01L21/32135—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by chemical means only by vapour etching only
- H01L21/32136—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by chemical means only by vapour etching only using plasmas
- H01L21/32137—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by chemical means only by vapour etching only using plasmas of silicon-containing layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
- H01L21/321—After treatment
- H01L21/3213—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer
- H01L21/32139—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer using masks
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67063—Apparatus for fluid treatment for etching
- H01L21/67069—Apparatus for fluid treatment for etching for drying etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67092—Apparatus for mechanical treatment
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Optics & Photonics (AREA)
- Mechanical Engineering (AREA)
- Dicing (AREA)
- Drying Of Semiconductors (AREA)
- Laser Beam Processing (AREA)
Abstract
Description
本出願は、2018年9月13日に出願された米国仮出願第62/730,827号の優先権を主張する2019年7月19日に提出された米国非仮出願第16/516,926号に対する優先権を主張するものである。これらの出願の内容は全て、参照することにより本明細書に組み込まれる。
Claims (15)
- 複数の集積回路を含む半導体ウエハをダイシングする方法であって、
前記集積回路を覆い保護する層を含むマスクを前記半導体ウエハの上に形成することと、
間隙を有するパターニングされたマスクを提供して、前記半導体ウエハの前記集積回路間の領域を露出させるために、レーザスクライビングプロセスで前記マスクをパターニングすることと、
前記マスクをパターニングした後に、第1の物理的衝撃工程と、第2の反復等方性及び指向性プラズマエッチング工程と、第3の指向性ブレークスルー工程とを含むブレークスルー処理を実施することと、
前記ブレークスルー処理を実施した後に、前記集積回路を単一化するために、前記パターニングされたマスクの前記間隙を通して前記半導体ウエハをプラズマエッチングすることと
を含む方法。 - 前記ブレークスルー処理の前記第1の物理的衝撃工程が、約1500Wを上回るソース電力で、約200Wのバイアス電力を用いて10秒から120秒の持続時間にわたって実施される、Arのみの物理的衝撃プロセスを含む、請求項1に記載の方法。
- 前記ブレークスルー処理の前記第1の物理的衝撃工程により、前記間隙から物理的に付着した破片が除去される、請求項1に記載の方法。
- 前記ブレークスルー処理の前記第2の反復等方性及び指向性プラズマエッチング工程が、SF6ガスのみを使用する反復等方性及び指向性プラズマエッチングプロセスを含み、前記指向性エッチングが、約1000Wのソース電力及び約200Wのバイアス電力を使用して0.4から1.5秒の範囲の持続時間にわたって実施され、前記等方性エッチング部分は、約0Wのバイアス電力を使用して0.1から0.6秒の範囲の持続時間にわたって実施される、請求項1に記載の方法。
- 5から60秒の範囲の総処理時間にわたる周期的エッチング処理を提供するために、前記等方性及び指向性プラズマエッチングプロセスが反復的に交互に行われる、請求項4に記載の方法。
- 前記ブレークスルー処理の前記第3の指向性ブレークスルー工程が、約1500Wのソース電力及び約200WのバイアスでのAr及びSF6ガスの組み合わせを含み、3から10秒の範囲の持続時間にわたって実施される、請求項1に記載の方法。
- SF6の総量が、SF6/Arの総体積の約20から40%である、請求項6に記載の方法。
- 前記ブレークスルー処理の前記第1の物理的衝撃工程が、約1500Wを上回るソース電力で、約200Wのバイアス電力を用いて10秒から120秒の持続時間にわたって実施される、Arのみの物理的衝撃プロセスを含み、前記ブレークスルー処理の前記第2の反復等方性及び指向性プラズマエッチング工程は、SF6ガスのみを使用する反復等方性及び指向性プラズマエッチングプロセスを含み、前記指向性エッチングは、約1000Wのソース電力及び約200Wのバイアス電力を使用して0.4から1.5秒の範囲の持続時間にわたって実施され、前記等方性エッチング部分は、約0Wのバイアス電力を使用して0.1から0.6秒の範囲の持続時間にわたって実施され、前記ブレークスルー処理の前記第3の指向性ブレークスルー工程は、約1500Wのソース電力と約200WのバイアスでのArガス及びSF6ガスの組み合わせを含み、3から10秒の範囲の持続時間にわたって実施される、請求項1に記載の方法。
- 複数の集積回路を含む半導体ウエハをダイシングするためのシステムであって、
ファクトリインターフェースと、
前記ファクトリインターフェースに連結され、レーザを含むレーザスクライブ装置と、
前記ファクトリインターフェースに連結され、ブレークスルー処理を実施するように構成された第1のプラズマエッチングチャンバであって、前記ブレークスルー処理は、第1の物理的衝撃工程と、第2の反復等方性及び指向性プラズマエッチング工程と、第3の指向性ブレークスルー工程とを含む、第1のプラズマエッチングチャンバと、
前記ファクトリインターフェースに連結され、ディープシリコンプラズマエッチング工程を実施するように構成された第2のプラズマエッチングチャンバと
を備えるシステム。 - 前記ブレークスルー処理の前記第1の物理的衝撃工程が、約1500Wを上回るソース電力で、約200Wのバイアス電力を用いて10秒から120秒の持続時間にわたって実施される、Arのみの物理的衝撃プロセスを含む、請求項9に記載のシステム。
- 前記ブレークスルー処理の前記第1の物理的衝撃工程により、物理的に付着した破片が間隙から除去される、請求項9に記載のシステム。
- 前記ブレークスルー処理の前記第2の反復等方性及び指向性プラズマエッチング工程は、SF6ガスのみを使用する反復等方性及び指向性プラズマエッチングプロセスを含み、前記指向性エッチングは、約1000Wのソース電力及び約200Wのバイアス電力を使用して0.4から1.5秒の範囲の持続時間にわたって実施され、前記等方性エッチング部分は、約0Wのバイアス電力を使用して0.1から0.6秒の範囲の持続時間にわたって実施される、請求項9に記載のシステム。
- 5から60秒の範囲の総処理時間にわたる周期的エッチング処理を提供するために、前記等方性及び指向性プラズマエッチングプロセスが反復的に交互に行われる、請求項12に記載のシステム。
- 前記ブレークスルー処理の前記第3の指向性ブレークスルー工程は、約1500Wのソース電力及び約200WのバイアスでのAr及びSF6ガスの組み合わせを含み、3から10秒の範囲の持続時間にわたって実施される、請求項9に記載のシステム。
- SF6の総量が、SF6/Arの総体積の約20から40%である、請求項14に記載のシステム。
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201862730827P | 2018-09-13 | 2018-09-13 | |
US62/730,827 | 2018-09-13 | ||
US16/516,926 | 2019-07-19 | ||
US16/516,926 US11355394B2 (en) | 2018-09-13 | 2019-07-19 | Wafer dicing using hybrid laser scribing and plasma etch approach with intermediate breakthrough treatment |
PCT/US2019/044889 WO2020055523A1 (en) | 2018-09-13 | 2019-08-02 | Wafer dicing using hybrid laser scribing and plasma etch approach with intermediate breakthrough treatment |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2022511299A true JP2022511299A (ja) | 2022-01-31 |
JP7470104B2 JP7470104B2 (ja) | 2024-04-17 |
Family
ID=69773027
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2021512937A Active JP7470104B2 (ja) | 2018-09-13 | 2019-08-02 | 中間ブレークスルー処理を用いたハイブリッドレーザスクライビング及びプラズマエッチング手法を使用するウエハダイシング |
Country Status (8)
Country | Link |
---|---|
US (1) | US11355394B2 (ja) |
EP (1) | EP3850661A4 (ja) |
JP (1) | JP7470104B2 (ja) |
KR (1) | KR20210044900A (ja) |
CN (1) | CN112689892A (ja) |
SG (1) | SG11202101588UA (ja) |
TW (1) | TW202025265A (ja) |
WO (1) | WO2020055523A1 (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11804416B2 (en) * | 2020-09-08 | 2023-10-31 | UTAC Headquarters Pte. Ltd. | Semiconductor device and method of forming protective layer around cavity of semiconductor die |
US20220157657A1 (en) * | 2020-11-13 | 2022-05-19 | International Business Machines Corporation | Singulating individual chips from wafers having small chips and small separation channels |
CN116779411B (zh) * | 2023-08-17 | 2023-11-03 | 成都超迈光电科技有限公司 | 一种物理化学效应复合的多功能等离子刻蚀机 |
Family Cites Families (88)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4049944A (en) | 1973-02-28 | 1977-09-20 | Hughes Aircraft Company | Process for fabricating small geometry semiconductive devices including integrated components |
US4339528A (en) | 1981-05-19 | 1982-07-13 | Rca Corporation | Etching method using a hardened PVA stencil |
US4684437A (en) | 1985-10-31 | 1987-08-04 | International Business Machines Corporation | Selective metal etching in metal/polymer structures |
KR100215338B1 (ko) | 1991-03-06 | 1999-08-16 | 가나이 쓰도무 | 반도체 장치의 제조방법 |
US5691794A (en) | 1993-02-01 | 1997-11-25 | Canon Kabushiki Kaisha | Liquid crystal display device |
US5593606A (en) | 1994-07-18 | 1997-01-14 | Electro Scientific Industries, Inc. | Ultraviolet laser system and method for forming vias in multi-layered targets |
DE69725245T2 (de) | 1996-08-01 | 2004-08-12 | Surface Technoloy Systems Plc | Verfahren zur Ätzung von Substraten |
US6426484B1 (en) | 1996-09-10 | 2002-07-30 | Micron Technology, Inc. | Circuit and method for heating an adhesive to package or rework a semiconductor die |
US5920973A (en) | 1997-03-09 | 1999-07-13 | Electro Scientific Industries, Inc. | Hole forming system with multiple spindles per station |
JP3230572B2 (ja) | 1997-05-19 | 2001-11-19 | 日亜化学工業株式会社 | 窒化物系化合物半導体素子の製造方法及び半導体発光素子 |
US6057180A (en) | 1998-06-05 | 2000-05-02 | Electro Scientific Industries, Inc. | Method of severing electrically conductive links with ultraviolet laser output |
JP2001044144A (ja) | 1999-08-03 | 2001-02-16 | Tokyo Seimitsu Co Ltd | 半導体チップの製造プロセス |
JP2001110811A (ja) | 1999-10-08 | 2001-04-20 | Oki Electric Ind Co Ltd | 半導体装置の製造方法 |
JP4387007B2 (ja) | 1999-10-26 | 2009-12-16 | 株式会社ディスコ | 半導体ウェーハの分割方法 |
JP2001144126A (ja) | 1999-11-12 | 2001-05-25 | Matsushita Electric Ind Co Ltd | 半導体装置の製造方法および半導体装置 |
JP2001148358A (ja) | 1999-11-19 | 2001-05-29 | Disco Abrasive Syst Ltd | 半導体ウェーハ及び該半導体ウェーハの分割方法 |
US6300593B1 (en) | 1999-12-07 | 2001-10-09 | First Solar, Llc | Apparatus and method for laser scribing a coated substrate |
KR100830128B1 (ko) | 2000-01-10 | 2008-05-20 | 일렉트로 싸이언티픽 인더스트리이즈 인코포레이티드 | 초단 펄스 폭을 가진 레이저 펄스의 버스트로 메모리링크를 처리하기 위한 레이저 시스템 및 방법 |
US6887804B2 (en) | 2000-01-10 | 2005-05-03 | Electro Scientific Industries, Inc. | Passivation processing over a memory link |
WO2001074529A2 (en) | 2000-03-30 | 2001-10-11 | Electro Scientific Industries, Inc. | Laser system and method for single pass micromachining of multilayer workpieces |
DE10196418B4 (de) | 2000-07-12 | 2010-07-22 | Electro Scientific Industries, Inc., Portland | Lasersystem zum Bearbeiten von Verbindungen eines IC-Bauelements, Verfahren zum Bearbeiten von Verbindungen eines IC-Bauelements und Verfahren zum Ausrichten eines Laserbearbeitungsstrahls auf eine Verbindung eines IC-Bauelements |
US6676878B2 (en) | 2001-01-31 | 2004-01-13 | Electro Scientific Industries, Inc. | Laser segmented cutting |
US6759275B1 (en) | 2001-09-04 | 2004-07-06 | Megic Corporation | Method for making high-performance RF integrated circuits |
US6642127B2 (en) | 2001-10-19 | 2003-11-04 | Applied Materials, Inc. | Method for dicing a semiconductor wafer |
JP3910843B2 (ja) | 2001-12-13 | 2007-04-25 | 東京エレクトロン株式会社 | 半導体素子分離方法及び半導体素子分離装置 |
US6706998B2 (en) | 2002-01-11 | 2004-03-16 | Electro Scientific Industries, Inc. | Simulated laser spot enlargement |
AU2003246348A1 (en) | 2002-02-25 | 2003-09-09 | Disco Corporation | Method for dividing semiconductor wafer |
KR100451950B1 (ko) | 2002-02-25 | 2004-10-08 | 삼성전자주식회사 | 이미지 센서 소자 웨이퍼 소잉 방법 |
JP2003257896A (ja) | 2002-02-28 | 2003-09-12 | Disco Abrasive Syst Ltd | 半導体ウェーハの分割方法 |
ATE316691T1 (de) | 2002-04-19 | 2006-02-15 | Xsil Technology Ltd | Laser-behandlung |
JP2004031526A (ja) | 2002-06-24 | 2004-01-29 | Toyoda Gosei Co Ltd | 3族窒化物系化合物半導体素子の製造方法 |
US6582983B1 (en) | 2002-07-12 | 2003-06-24 | Keteca Singapore Singapore | Method and wafer for maintaining ultra clean bonding pads on a wafer |
JP4286497B2 (ja) | 2002-07-17 | 2009-07-01 | 新光電気工業株式会社 | 半導体装置の製造方法 |
JP3908148B2 (ja) | 2002-10-28 | 2007-04-25 | シャープ株式会社 | 積層型半導体装置 |
US7531842B2 (en) * | 2002-12-20 | 2009-05-12 | Analog Devices, Inc. | Method for etching a tapered bore in a silicon substrate, and a semiconductor wafer comprising the substrate |
US20040157457A1 (en) | 2003-02-12 | 2004-08-12 | Songlin Xu | Methods of using polymer films to form micro-structures |
JP2004273895A (ja) | 2003-03-11 | 2004-09-30 | Disco Abrasive Syst Ltd | 半導体ウエーハの分割方法 |
US7087452B2 (en) | 2003-04-22 | 2006-08-08 | Intel Corporation | Edge arrangements for integrated circuit chips |
JP2004322168A (ja) | 2003-04-25 | 2004-11-18 | Disco Abrasive Syst Ltd | レーザー加工装置 |
JP4231349B2 (ja) | 2003-07-02 | 2009-02-25 | 株式会社ディスコ | レーザー加工方法およびレーザー加工装置 |
JP4408361B2 (ja) | 2003-09-26 | 2010-02-03 | 株式会社ディスコ | ウエーハの分割方法 |
US7128806B2 (en) | 2003-10-21 | 2006-10-31 | Applied Materials, Inc. | Mask etch processing apparatus |
JP4471632B2 (ja) | 2003-11-18 | 2010-06-02 | 株式会社ディスコ | ウエーハの加工方法 |
JP2005203541A (ja) | 2004-01-15 | 2005-07-28 | Disco Abrasive Syst Ltd | ウエーハのレーザー加工方法 |
US7459377B2 (en) | 2004-06-08 | 2008-12-02 | Panasonic Corporation | Method for dividing substrate |
US7804043B2 (en) | 2004-06-15 | 2010-09-28 | Laserfacturing Inc. | Method and apparatus for dicing of thin and ultra thin semiconductor wafer using ultrafast pulse laser |
US7687740B2 (en) | 2004-06-18 | 2010-03-30 | Electro Scientific Industries, Inc. | Semiconductor structure processing using multiple laterally spaced laser beam spots delivering multiple blows |
US7507638B2 (en) | 2004-06-30 | 2009-03-24 | Freescale Semiconductor, Inc. | Ultra-thin die and method of fabricating same |
JP4018088B2 (ja) | 2004-08-02 | 2007-12-05 | 松下電器産業株式会社 | 半導体ウェハの分割方法及び半導体素子の製造方法 |
US7199050B2 (en) | 2004-08-24 | 2007-04-03 | Micron Technology, Inc. | Pass through via technology for use during the manufacture of a semiconductor device |
JP4018096B2 (ja) | 2004-10-05 | 2007-12-05 | 松下電器産業株式会社 | 半導体ウェハの分割方法、及び半導体素子の製造方法 |
US20060088984A1 (en) | 2004-10-21 | 2006-04-27 | Intel Corporation | Laser ablation method |
US20060086898A1 (en) | 2004-10-26 | 2006-04-27 | Matsushita Electric Industrial Co., Ltd. | Method and apparatus of making highly repetitive micro-pattern using laser writer |
US20060146910A1 (en) | 2004-11-23 | 2006-07-06 | Manoochehr Koochesfahani | Method and apparatus for simultaneous velocity and temperature measurements in fluid flow |
JP4288229B2 (ja) | 2004-12-24 | 2009-07-01 | パナソニック株式会社 | 半導体チップの製造方法 |
US7875898B2 (en) | 2005-01-24 | 2011-01-25 | Panasonic Corporation | Semiconductor device |
JP2006253402A (ja) | 2005-03-10 | 2006-09-21 | Nec Electronics Corp | 半導体装置の製造方法 |
US7361990B2 (en) | 2005-03-17 | 2008-04-22 | Taiwan Semiconductor Manufacturing Company, Ltd. | Reducing cracking of high-lead or lead-free bumps by matching sizes of contact pads and bump pads |
JP4478053B2 (ja) | 2005-03-29 | 2010-06-09 | 株式会社ディスコ | 半導体ウエーハ処理方法 |
JP4285455B2 (ja) | 2005-07-11 | 2009-06-24 | パナソニック株式会社 | 半導体チップの製造方法 |
JP4599243B2 (ja) | 2005-07-12 | 2010-12-15 | 株式会社ディスコ | レーザー加工装置 |
JP4769560B2 (ja) | 2005-12-06 | 2011-09-07 | 株式会社ディスコ | ウエーハの分割方法 |
JP4372115B2 (ja) | 2006-05-12 | 2009-11-25 | パナソニック株式会社 | 半導体装置の製造方法、および半導体モジュールの製造方法 |
JP4480728B2 (ja) | 2006-06-09 | 2010-06-16 | パナソニック株式会社 | Memsマイクの製造方法 |
JP4544231B2 (ja) | 2006-10-06 | 2010-09-15 | パナソニック株式会社 | 半導体チップの製造方法 |
US20080213978A1 (en) | 2007-03-03 | 2008-09-04 | Dynatex | Debris management for wafer singulation |
JP4840174B2 (ja) | 2007-02-08 | 2011-12-21 | パナソニック株式会社 | 半導体チップの製造方法 |
JP4840200B2 (ja) | 2007-03-09 | 2011-12-21 | パナソニック株式会社 | 半導体チップの製造方法 |
US7926410B2 (en) | 2007-05-01 | 2011-04-19 | J.R. Automation Technologies, L.L.C. | Hydraulic circuit for synchronized horizontal extension of cylinders |
JP5205012B2 (ja) | 2007-08-29 | 2013-06-05 | 株式会社半導体エネルギー研究所 | 表示装置及び当該表示装置を具備する電子機器 |
KR100925054B1 (ko) | 2007-09-06 | 2009-11-03 | 주식회사 래디언테크 | 웨이퍼 식각 방법 |
JP4858395B2 (ja) | 2007-10-12 | 2012-01-18 | パナソニック株式会社 | プラズマ処理装置 |
US7859084B2 (en) | 2008-02-28 | 2010-12-28 | Panasonic Corporation | Semiconductor substrate |
JP2009260272A (ja) | 2008-03-25 | 2009-11-05 | Panasonic Corp | 基板の加工方法および半導体チップの製造方法ならびに樹脂接着層付き半導体チップの製造方法 |
WO2009126907A2 (en) | 2008-04-10 | 2009-10-15 | Applied Materials, Inc. | Laser-scribing platform and hybrid writing strategy |
US20100013036A1 (en) | 2008-07-16 | 2010-01-21 | Carey James E | Thin Sacrificial Masking Films for Protecting Semiconductors From Pulsed Laser Process |
US8609512B2 (en) | 2009-03-27 | 2013-12-17 | Electro Scientific Industries, Inc. | Method for laser singulation of chip scale packages on glass substrates |
US8642448B2 (en) | 2010-06-22 | 2014-02-04 | Applied Materials, Inc. | Wafer dicing using femtosecond-based laser and plasma etch |
US8802545B2 (en) | 2011-03-14 | 2014-08-12 | Plasma-Therm Llc | Method and apparatus for plasma dicing a semi-conductor wafer |
US8993414B2 (en) | 2012-07-13 | 2015-03-31 | Applied Materials, Inc. | Laser scribing and plasma etch for high die break strength and clean sidewall |
US9018079B1 (en) | 2014-01-29 | 2015-04-28 | Applied Materials, Inc. | Wafer dicing using hybrid laser scribing and plasma etch approach with intermediate reactive post mask-opening clean |
US9012305B1 (en) | 2014-01-29 | 2015-04-21 | Applied Materials, Inc. | Wafer dicing using hybrid laser scribing and plasma etch approach with intermediate non-reactive post mask-opening clean |
US9299611B2 (en) * | 2014-01-29 | 2016-03-29 | Applied Materials, Inc. | Method of wafer dicing using hybrid laser scribing and plasma etch approach with mask plasma treatment for improved mask etch resistance |
US20150287638A1 (en) | 2014-04-04 | 2015-10-08 | Jungrae Park | Hybrid wafer dicing approach using collimated laser scribing process and plasma etch |
GB201406135D0 (en) | 2014-04-04 | 2014-05-21 | Spts Technologies Ltd | Method of etching |
US8975163B1 (en) | 2014-04-10 | 2015-03-10 | Applied Materials, Inc. | Laser-dominated laser scribing and plasma etch hybrid wafer dicing |
US9972575B2 (en) | 2016-03-03 | 2018-05-15 | Applied Materials, Inc. | Hybrid wafer dicing approach using a split beam laser scribing process and plasma etch process |
GB201620680D0 (en) | 2016-12-05 | 2017-01-18 | Spts Technologies Ltd | Method of smoothing a surface |
-
2019
- 2019-07-19 US US16/516,926 patent/US11355394B2/en active Active
- 2019-08-02 CN CN201980059540.8A patent/CN112689892A/zh active Pending
- 2019-08-02 WO PCT/US2019/044889 patent/WO2020055523A1/en unknown
- 2019-08-02 JP JP2021512937A patent/JP7470104B2/ja active Active
- 2019-08-02 SG SG11202101588UA patent/SG11202101588UA/en unknown
- 2019-08-02 EP EP19858858.4A patent/EP3850661A4/en active Pending
- 2019-08-02 KR KR1020217010764A patent/KR20210044900A/ko active Search and Examination
- 2019-08-30 TW TW108131258A patent/TW202025265A/zh unknown
Also Published As
Publication number | Publication date |
---|---|
US11355394B2 (en) | 2022-06-07 |
WO2020055523A1 (en) | 2020-03-19 |
JP7470104B2 (ja) | 2024-04-17 |
EP3850661A1 (en) | 2021-07-21 |
SG11202101588UA (en) | 2021-03-30 |
EP3850661A4 (en) | 2022-05-25 |
CN112689892A (zh) | 2021-04-20 |
TW202025265A (zh) | 2020-07-01 |
KR20210044900A (ko) | 2021-04-23 |
US20200091001A1 (en) | 2020-03-19 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP6516470B2 (ja) | 水溶性ダイアタッチフィルムを用いたレーザ・プラズマエッチングウェハダイシング | |
KR102250628B1 (ko) | 높은 다이 파괴 강도 및 평활한 측벽을 위한 레이저 스크라이빙 및 플라즈마 에칭 | |
KR102365042B1 (ko) | 높은 다이 파괴 강도 및 매끈한 측벽을 위한 레이저 스크라이빙 및 플라즈마 에칭 | |
JP5688453B2 (ja) | フェムト秒レーザ及びプラズマエッチングを用いたウェハダイシング | |
US11217536B2 (en) | Hybrid wafer dicing approach using a split beam laser scribing process and plasma etch process | |
US8975163B1 (en) | Laser-dominated laser scribing and plasma etch hybrid wafer dicing | |
JP6543466B2 (ja) | 物理的に除去可能なマスクを用いたレーザ・プラズマエッチングウェハダイシング | |
US9018079B1 (en) | Wafer dicing using hybrid laser scribing and plasma etch approach with intermediate reactive post mask-opening clean | |
KR20160055933A (ko) | 웨이퍼 후면 및 전면으로부터의 웨이퍼 다이싱 | |
US9012305B1 (en) | Wafer dicing using hybrid laser scribing and plasma etch approach with intermediate non-reactive post mask-opening clean | |
US20160027697A1 (en) | Hybrid wafer dicing approach using a rectangular shaped two-dimensional top hat laser beam profile or a linear shaped one-dimensiional top hat laser beam profile laser scribing process and plasma etch process | |
KR102476266B1 (ko) | 다중 통과 레이저 스크라이빙 프로세스 및 플라즈마 에칭 프로세스를 사용하는 하이브리드 웨이퍼 다이싱 접근법 | |
US9721839B2 (en) | Etch-resistant water soluble mask for hybrid wafer dicing using laser scribing and plasma etch | |
US9355907B1 (en) | Hybrid wafer dicing approach using a line shaped laser beam profile laser scribing process and plasma etch process | |
JP7470104B2 (ja) | 中間ブレークスルー処理を用いたハイブリッドレーザスクライビング及びプラズマエッチング手法を使用するウエハダイシング | |
WO2015130575A1 (en) | Hybrid wafer dicing approach using temporally-controlled laser scribing process and plasma etch | |
KR20230027244A (ko) | 하이브리드 레이저 스크라이빙 및 플라즈마 에칭 방식을 사용한 웨이퍼 다이싱에서 레이저 스크라이빙 트렌치 개구 제어 | |
US20220246476A1 (en) | Hybrid wafer dicing approach using an actively-focused laser beam laser scribing process and plasma etch process |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20220801 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20230926 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20231010 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20240110 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20240319 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20240405 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 7470104 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |