JP2022501207A5 - - Google Patents

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Publication number
JP2022501207A5
JP2022501207A5 JP2021515551A JP2021515551A JP2022501207A5 JP 2022501207 A5 JP2022501207 A5 JP 2022501207A5 JP 2021515551 A JP2021515551 A JP 2021515551A JP 2021515551 A JP2021515551 A JP 2021515551A JP 2022501207 A5 JP2022501207 A5 JP 2022501207A5
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spectrum
insite
monitoring system
measurement
controller
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JP2022501207A (ja
JP7472111B2 (ja
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Priority claimed from PCT/US2019/048636 external-priority patent/WO2020068345A1/en
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JP2021515551A 2018-09-24 2019-08-28 Ｃｍｐプロセス制御アルゴリズムへの入力としてのマシンビジョン Active JP7472111B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201862735772P 2018-09-24 2018-09-24
US62/735,772 2018-09-24
PCT/US2019/048636 WO2020068345A1 (en) 2018-09-24 2019-08-28 Machine vision as input to a cmp process control algorithm

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JP2022501207A JP2022501207A (ja) 2022-01-06
JP2022501207A5 true JP2022501207A5 (enExample) 2022-09-07
JP7472111B2 JP7472111B2 (ja) 2024-04-22

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US (3) US11577356B2 (enExample)
JP (1) JP7472111B2 (enExample)
KR (2) KR20250076661A (enExample)
CN (2) CN117001534A (enExample)
TW (1) TWI848004B (enExample)
WO (1) WO2020068345A1 (enExample)

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JP7472111B2 (ja) 2018-09-24 2024-04-22 アプライド マテリアルズ インコーポレイテッド Ｃｍｐプロセス制御アルゴリズムへの入力としてのマシンビジョン

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