JP2022185184A - 樹脂封止装置及び樹脂封止方法 - Google Patents
樹脂封止装置及び樹脂封止方法 Download PDFInfo
- Publication number
- JP2022185184A JP2022185184A JP2021092689A JP2021092689A JP2022185184A JP 2022185184 A JP2022185184 A JP 2022185184A JP 2021092689 A JP2021092689 A JP 2021092689A JP 2021092689 A JP2021092689 A JP 2021092689A JP 2022185184 A JP2022185184 A JP 2022185184A
- Authority
- JP
- Japan
- Prior art keywords
- resin
- pressing member
- mold
- film
- cavity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229920005989 resin Polymers 0.000 title claims abstract description 239
- 239000011347 resin Substances 0.000 title claims abstract description 239
- 238000007789 sealing Methods 0.000 title claims abstract description 118
- 238000000034 method Methods 0.000 title claims abstract description 48
- 230000007246 mechanism Effects 0.000 claims abstract description 70
- 238000010438 heat treatment Methods 0.000 claims abstract description 29
- 239000000463 material Substances 0.000 claims abstract description 13
- 230000008569 process Effects 0.000 claims abstract description 11
- 238000003825 pressing Methods 0.000 claims description 88
- 230000002093 peripheral effect Effects 0.000 claims description 18
- 238000001179 sorption measurement Methods 0.000 claims description 14
- 238000005538 encapsulation Methods 0.000 claims description 11
- 239000008187 granular material Substances 0.000 claims description 4
- 239000000843 powder Substances 0.000 claims description 3
- 238000004381 surface treatment Methods 0.000 claims description 3
- 238000000465 moulding Methods 0.000 abstract description 19
- 239000002184 metal Substances 0.000 abstract description 3
- 239000000047 product Substances 0.000 description 30
- 238000010586 diagram Methods 0.000 description 17
- 238000012545 processing Methods 0.000 description 10
- 238000003860 storage Methods 0.000 description 7
- 238000004804 winding Methods 0.000 description 6
- -1 carrier plates Substances 0.000 description 5
- 238000000748 compression moulding Methods 0.000 description 5
- 239000000758 substrate Substances 0.000 description 5
- 239000002245 particle Substances 0.000 description 3
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 3
- 239000004810 polytetrafluoroethylene Substances 0.000 description 3
- 229920001187 thermosetting polymer Polymers 0.000 description 3
- 230000032258 transport Effects 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 210000000078 claw Anatomy 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 230000002950 deficient Effects 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 238000005485 electric heating Methods 0.000 description 2
- 239000006260 foam Substances 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 230000007723 transport mechanism Effects 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 1
- 239000004593 Epoxy Substances 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- 229910001315 Tool steel Inorganic materials 0.000 description 1
- 239000002390 adhesive tape Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000006837 decompression Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 229920000840 ethylene tetrafluoroethylene copolymer Polymers 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 238000007667 floating Methods 0.000 description 1
- 238000005187 foaming Methods 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 239000012466 permeate Substances 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 230000007306 turnover Effects 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/02—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles
- B29C43/18—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles incorporating preformed parts or layers, e.g. compression moulding around inserts or for coating articles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/32—Component parts, details or accessories; Auxiliary operations
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
- Casting Or Compression Moulding Of Plastics Or The Like (AREA)
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2021092689A JP2022185184A (ja) | 2021-06-02 | 2021-06-02 | 樹脂封止装置及び樹脂封止方法 |
PCT/JP2022/002512 WO2022254776A1 (ja) | 2021-06-02 | 2022-01-25 | 樹脂封止装置及び樹脂封止方法 |
TW111107344A TW202249128A (zh) | 2021-06-02 | 2022-03-01 | 樹脂密封裝置以及樹脂密封方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2021092689A JP2022185184A (ja) | 2021-06-02 | 2021-06-02 | 樹脂封止装置及び樹脂封止方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2022185184A true JP2022185184A (ja) | 2022-12-14 |
JP2022185184A5 JP2022185184A5 (zh) | 2023-06-14 |
Family
ID=84324077
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2021092689A Pending JP2022185184A (ja) | 2021-06-02 | 2021-06-02 | 樹脂封止装置及び樹脂封止方法 |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP2022185184A (zh) |
TW (1) | TW202249128A (zh) |
WO (1) | WO2022254776A1 (zh) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI831670B (zh) * | 2023-04-12 | 2024-02-01 | 頎邦科技股份有限公司 | 散熱片的取放治具 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0740572B2 (ja) * | 1986-11-14 | 1995-05-01 | 株式会社村田製作所 | 電子部品の樹脂外装方法 |
JP3378374B2 (ja) * | 1993-09-14 | 2003-02-17 | 株式会社東芝 | 樹脂封止型半導体装置の製造方法、樹脂封止型半導体装置及び封止用樹脂シート |
JP2004146556A (ja) * | 2002-10-24 | 2004-05-20 | Towa Corp | 樹脂封止方法、樹脂封止装置、及び樹脂シート |
JP2010092983A (ja) * | 2008-10-06 | 2010-04-22 | Renesas Technology Corp | 半導体装置およびその製造方法ならびに半導体製造装置 |
WO2016196189A1 (en) * | 2015-05-31 | 2016-12-08 | Skyworks Solutions, Inc. | Shielded module having compression overmold |
-
2021
- 2021-06-02 JP JP2021092689A patent/JP2022185184A/ja active Pending
-
2022
- 2022-01-25 WO PCT/JP2022/002512 patent/WO2022254776A1/ja active Application Filing
- 2022-03-01 TW TW111107344A patent/TW202249128A/zh unknown
Also Published As
Publication number | Publication date |
---|---|
WO2022254776A1 (ja) | 2022-12-08 |
TW202249128A (zh) | 2022-12-16 |
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Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20230605 |
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