JP2022184946A - 導電性高分子組成物、被覆品、及びパターン形成方法 - Google Patents
導電性高分子組成物、被覆品、及びパターン形成方法 Download PDFInfo
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- 229910052708 sodium Inorganic materials 0.000 description 1
- 125000004436 sodium atom Chemical group 0.000 description 1
- 159000000000 sodium salts Chemical class 0.000 description 1
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- 238000003860 storage Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229950000244 sulfanilic acid Drugs 0.000 description 1
- 150000003871 sulfonates Chemical class 0.000 description 1
- 150000003460 sulfonic acids Chemical class 0.000 description 1
- RWSOTUBLDIXVET-UHFFFAOYSA-O sulfonium Chemical compound [SH3+] RWSOTUBLDIXVET-UHFFFAOYSA-O 0.000 description 1
- 150000003467 sulfuric acid derivatives Chemical class 0.000 description 1
- 239000003930 superacid Substances 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 235000002906 tartaric acid Nutrition 0.000 description 1
- 239000011975 tartaric acid Substances 0.000 description 1
- WMOVHXAZOJBABW-UHFFFAOYSA-N tert-butyl acetate Chemical compound CC(=O)OC(C)(C)C WMOVHXAZOJBABW-UHFFFAOYSA-N 0.000 description 1
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- 150000003623 transition metal compounds Chemical class 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- 229920000428 triblock copolymer Polymers 0.000 description 1
- YNJBWRMUSHSURL-UHFFFAOYSA-N trichloroacetic acid Chemical compound OC(=O)C(Cl)(Cl)Cl YNJBWRMUSHSURL-UHFFFAOYSA-N 0.000 description 1
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- 229920003169 water-soluble polymer Polymers 0.000 description 1
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Abstract
Description
(A)下記一般式(1)で表される繰り返し単位を二種類以上有するポリアニリン系導電性高分子、
(B)下記一般式(2)で表される繰り返し単位を有し、重量平均分子量が1,000~500,000の範囲のものであるドーパントポリマー、
を含む導電性高分子組成物を提供する。
(A)下記一般式(1)で表される繰り返し単位を二種類以上有するポリアニリン系導電性高分子、
(B)下記一般式(2)で表される繰り返し単位を有し、重量平均分子量が1,000~500,000の範囲のものであるドーパントポリマー、
を含む導電性高分子組成物である。
[(A)ポリアニリン系導電性高分子]
本発明の導電性高分子組成物に含まれるポリアニリン系導電性高分子は、下記一般式(1)で示される繰り返し単位を二種類以上有するポリアニリン系導電性高分子(A)である。
本発明の導電性高分子組成物は、(B)成分としてポリアニオンとなるドーパントポリマーを含む。この(B)成分のドーパントポリマーは、下記一般式(2)で示される繰り返し単位bを含み、重量平均分子量が1,000~500,000の範囲のものである。
(B)成分のホモポリマーを合成する方法としては、例えば上述の繰り返し単位bおよびcを与えるモノマーのうち所望のモノマーを、有機溶剤中、ラジカル重合開始剤を加えて加熱重合を行い、(共)重合体のドーパントポリマーを得る方法が挙げられる。
なお、(B)成分のドーパントポリマーにおいては、分子量分布(Mw/Mn)は1.0~2.0、特に1.0~1.5と狭分散であることが好ましい。狭分散であれば、これを用いた導電性高分子組成物によって形成した導電膜の透過率が低くなるのを防ぐことができる。
本発明の導電性高分子組成物は、(C)成分として両性イオン化合物を含んでもよい。本発明に用いられる両性イオン化合物は、下記一般式(3)で示されるものであることが好ましい。両性イオン化合物は、1種類のみを用いても良いし、2種類以上を混合して用いても良い。
(界面活性剤)
本発明では、基板等の被加工体への濡れ性を上げるため、界面活性剤を添加してもよい。このような界面活性剤としては、ノニオン系、カチオン系、アニオン系の各種界面活性剤が挙げられるが、導電性高分子の安定性からノニオン系界面活性剤が特に好ましい。具体的には、例えば、ポリオキシエチレンアルキルエーテル、ポリオキシエチレンアルキルフェニルエーテル、ポリオキシエチレンカルボン酸エステル、ソルビタンエステル、ポリオキシエチレンソルビタンエステル等のノニオン系界面活性剤が好適で、アルキルトリメチルアンモニウムクロライド、アルキルベンジルアンモニウムクロライド等のカチオン系界面活性剤、アルキル又はアルキルアリル硫酸塩、アルキル又はアルキルアリルスルホン酸塩、ジアルキルスルホコハク酸塩等のアニオン系界面活性剤、アミノ酸型、ベタイン型等の両性イオン型界面活性剤等を挙げることができる。添加量は0.005~0.5質量%、特に0.01~0.3質量%であることが好ましい。
(A)成分と(B)成分の複合体(導電性高分子複合体)は、例えば、(B)成分の水溶液又は水・有機溶媒混合溶液中に、(A)成分の原料となる二種類以上のアニリンモノマーを加え、酸化剤及び場合により酸化触媒を添加し、酸化重合を行うことで得ることができる。
また、本発明は、被加工体上に本発明の導電性高分子組成物が成膜された被覆品を提供する。本発明の導電性高分子組成物から形成される導電膜は、帯電防止能に優れていることから、このような帯電防止膜を様々な被加工体上に被覆することにより、質の高い被覆品を得ることができる。
更に、本発明は、化学増幅型レジスト膜を備える基板の該レジスト膜上に、本発明の導電性高分子組成物を用いて帯電防止膜を形成する工程、電子線をパターン照射する工程、及びH2O又はアルカリ性現像液を用いて現像してレジストパターンを得る工程を含むパターン形成方法を提供する。
A-2:2-メトキシアニリン
A-3:2-エトキシアニリン
B-1:スチレン-4-スルフォニックアシッド
B-2:1,1,3,3,3-ペンタフルオロ-2-(4-ビニルベンゾイルオキシ)-プロパン-1-スルホネート
B-3:1,1,3,3,3-ペンタフルオロ-2-(3-メタクリロイルオキシ-アダマンタン-1-カルボニルオキシ)-プロパン-1-スルホネート
B-4:1,1,3,3,3-ペンタフルオロ-2-(3-メタクリロイルオキシ)-プロパン-1-スルホネート
B-5:2-メチル-アクリリックアシッド-3-ヒドロキシアダマンタン-1-イルエステル
B-6:2-メチル-アクリリックアシッド-3,5-ビス(2,2,2-トリフルオロ-1-ヒドロキシ-1-トリフルオロメチル-エチル)-シクロへキシルエステル
(ドーパントポリマー1)
1,000mlのイオン交換水に206gの(B-1)のナトリウム塩を溶解し、80℃で攪拌しながら、予め10mlの水に溶解した1.14gの過硫酸アンモニウム酸化剤溶液を20分間滴下し、この溶液を2時間攪拌した。
窒素雰囲気下、64℃で撹拌したメタノール30.0gに、(B-1)のリチウム塩33.3mmolと(B-2)のベンジルトリメチルアンモニウム塩33.3mmolと2,2’-アゾビス(イソ酪酸)ジメチル6.66mmolをメタノール90.0gに溶かした溶液を4時間かけて滴下した。さらに64℃で4時間撹拌した。室温まで冷却した後、120gのイソプロピルエーテルに激しく撹拌しながら滴下した。生じた固形物を濾過して取り、50℃で15時間真空乾燥して白色重合体21.6gを得た。
(B-1)のリチウム塩20.0mmolと(B-2)のベンジルトリメチルアンモニウム塩46.6mmolを用いた以外は、ドーパントポリマー2の重合処方と同様に合成を行い、白色重合体26.6gを得た。得られた白色重合体をメタノール160gに溶解し、イオン交換樹脂を用いてアンモニウム塩とリチウム塩をスルホ基に変換してドーパントポリマー3を得た。得られた重合体の19F,1H-NMR、及びGPCにより分析を行い、共重合組成比(モル比)、重量平均分子量(Mw)、分子量分布(Mw/Mn)を決定した。
(B-1)のリチウム塩46.6mmolと(B-2)のベンジルトリメチルアンモニウム塩20.0mmolを用いた以外は、ドーパントポリマー2の重合処方と同様に合成を行い、白色重合体18.1gを得た。得られた白色重合体をメタノール160gに溶解し、イオン交換樹脂を用いてアンモニウム塩とリチウム塩をスルホ基に変換してドーパントポリマー4を得た。得られた重合体の19F,1H-NMR、及びGPCの分析を行い、共重合組成比(モル比)、重量平均分子量(Mw)、分子量分布(Mw/Mn)を決定した。
(B-2)のベンジルトリメチルアンモニウム塩66.6mmolのみを用いた以外は、ドーパントポリマー2の重合処方と同様に合成を行い、白色重合体33.5gを得た。得られた白色重合体をメタノール160gに溶解し、イオン交換樹脂を用いてアンモニウム塩をスルホ基に変換してドーパントポリマー5を得た。得られた重合体の19F,1H-NMR、及びGPCの分析を行い、共重合組成比(モル比)、重量平均分子量(Mw)、分子量分布(Mw/Mn)を決定した。
(B-1)のリチウム塩33.3mmolと(B-3)のベンジルトリメチルアンモニウム塩33.3mmolを用いた以外は、ドーパントポリマー2の重合処方と同様に合成を行い、白色重合体26.8gを得た。得られた白色重合体をメタノール160gに溶解し、イオン交換樹脂を用いてアンモニウム塩とリチウム塩をスルホ基に変換してドーパントポリマー6を得た。得られた重合体の19F,1H-NMR、及びGPCの分析を行い、共重合組成比(モル比)、重量平均分子量(Mw)、分子量分布(Mw/Mn)を決定した。
(B-1)のリチウム塩20.0mmolと(B-3)のベンジルトリメチルアンモニウム塩46.6mmolを用いた以外は、ドーパントポリマー2の重合処方と同様に合成を行い、白色重合体32.5gを得た。得られた白色重合体をメタノール160gに溶解し、イオン交換樹脂を用いてアンモニウム塩とリチウム塩をスルホ基に変換してドーパントポリマー7を得た。得られた重合体の19F,1H-NMR、及びGPCの分析を行い、共重合組成比(モル比)、重量平均分子量(Mw)、分子量分布(Mw/Mn)を決定した。
(B-1)のリチウム塩46.6mmolと(B-3)のベンジルトリメチルアンモニウム塩20.0mmolを用いた以外は、ドーパントポリマー2の重合処方と同様に合成を行い、白色重合体20.5gを得た。得られた白色重合体をメタノール160gに溶解し、イオン交換樹脂を用いてアンモニウム塩とリチウム塩をスルホ基に変換してドーパントポリマー8を得た。得られた重合体の19F,1H-NMR、及びGPCの分析を行い、共重合組成比(モル比)、重量平均分子量(Mw)、分子量分布(Mw/Mn)を決定した。
(B-3)のベンジルトリメチルアンモニウム塩66.6mmolのみを用いた以外は、ドーパントポリマー2の重合処方と同様に合成を行い、白色重合体41.5gを得た。得られた白色重合体をメタノール160gに溶解し、イオン交換樹脂を用いてアンモニウム塩をスルホ基に変換してドーパントポリマー9を得た。得られた重合体の19F,1H-NMR、及びGPCの分析を行い、共重合組成比(モル比)、重量平均分子量(Mw)、分子量分布(Mw/Mn)を決定した。
(B-1)のリチウム塩33.3mmolと(B-4)のベンジルトリメチルアンモニウム塩33.3mmolを用いた以外は、ドーパントポリマー2の重合処方と同様に合成を行い、白色重合体25.8gを得た。得られた白色重合体をメタノール160gに溶解し、イオン交換樹脂を用いてアンモニウム塩とリチウム塩をスルホ基に変換してドーパントポリマー10を得た。得られた重合体の19F,1H-NMR、及びGPCの分析を行い、共重合組成比(モル比)、重量平均分子量(Mw)、分子量分布(Mw/Mn)を決定した。
(B-1)のリチウム塩20.0mmolと(B-4)のベンジルトリメチルアンモニウム塩46.6mmolを用いた以外は、ドーパントポリマー2の重合処方と同様に合成を行い、白色重合体32.3gを得た。得られた白色重合体をメタノール160gに溶解し、イオン交換樹脂を用いてアンモニウム塩とリチウム塩をスルホ基に変換してドーパントポリマー11を得た。得られた重合体の19F,1H-NMR、及びGPCの分析を行い、共重合組成比(モル比)、重量平均分子量(Mw)、分子量分布(Mw/Mn)を決定した。
(B-1)のリチウム塩46.6mmolと(B-4)のベンジルトリメチルアンモニウム塩20.0mmolを用いた以外は、ドーパントポリマー2の重合処方と同様に合成を行い、白色重合体21.0gを得た。得られた白色重合体をメタノール160gに溶解し、イオン交換樹脂を用いてアンモニウム塩とリチウム塩をスルホ基に変換してドーパントポリマー12を得た。得られた重合体の19F,1H-NMR、及びGPCの分析を行い、共重合組成比(モル比)、重量平均分子量(Mw)、分子量分布(Mw/Mn)を決定した。
(B-4)のベンジルトリメチルアンモニウム塩66.6mmolのみを用いた以外は、ドーパントポリマー2の重合処方と同様に合成を行い、白色重合体28.8gを得た。得られた白色重合体をメタノール160gに溶解し、イオン交換樹脂を用いてアンモニウム塩をスルホ基に変換してドーパントポリマー13を得た。得られた重合体の19F,1H-NMR、及びGPCの分析を行い、共重合組成比(モル比)、重量平均分子量(Mw)、分子量分布(Mw/Mn)を決定した。
窒素雰囲気下、64℃で撹拌したメタノール30.0gに、(B-1)のリチウム塩26.6mmolと(B-2)のベンジルトリメチルアンモニウム塩26.6mmol、(B-5)13.4mmol、2,2’-アゾビス(イソ酪酸)ジメチル6.66mmolをメタノール90.0gに溶かした溶液を4時間かけて滴下した。さらに64℃で4時間撹拌した。室温まで冷却した後、120gのイソプロピルエーテルに激しく撹拌しながら滴下した。生じた固形物を濾過して取り、50℃で15時間真空乾燥して、重合体21.6gを得た。得られた白色重合体をメタノール160gに溶解し、イオン交換樹脂を用いてアンモニウム塩とリチウム塩をスルホ基に変換してドーパントポリマー14を得た。得られた重合体の19F,1H-NMR、及びGPCの分析を行い、共重合組成比(モル比)、重量平均分子量(Mw)、分子量分布(Mw/Mn)を決定した。
(B-1)のリチウム塩26.6mmolと(B-3)のベンジルトリメチルアンモニウム塩26.6mmolと(B-5)13.4mmolを用いた以外は、ドーパントポリマー14の重合処方と同様に合成を行い、白色重合体24.5gを得た。得られた白色重合体をメタノール160gに溶解し、イオン交換樹脂を用いてアンモニウム塩とリチウム塩をスルホ基に変換しドーパントポリマー15を得た。得られた重合体の19F,1H-NMR、及びGPCの分析を行い、共重合組成比(モル比)、重量平均分子量(Mw)、分子量分布(Mw/Mn)を決定した。
(B-1)のリチウム塩26.6mmolと(B-4)のベンジルトリメチルアンモニウム塩26.6mmolと(B-5)13.4mmolを用いた以外は、ドーパントポリマー14の重合処方と同様に合成を行い、白色重合体19.5gを得た。得られた白色重合体をメタノール160gに溶解し、イオン交換樹脂を用いてアンモニウム塩とリチウム塩をスルホ基に変換してドーパントポリマー16を得た。得られた重合体の19F,1H-NMR、及びGPCの分析を行い、共重合組成比(モル比)、重量平均分子量(Mw)、分子量分布(Mw/Mn)を決定した。
(B-1)のリチウム塩26.6mmolと(B-2)のベンジルトリメチルアンモニウム塩26.6mmolと(B-6)13.4mmolを用いた以外は、ドーパントポリマー14の重合処方と同様に合成を行い、白色重合体25.0gを得た。得られた白色重合体をメタノール160gに溶解し、イオン交換樹脂を用いてアンモニウム塩とリチウム塩をスルホ基に変換しドーパントポリマー17を得た。得られた重合体の19F,1H-NMR、及びGPCの分析を行い、共重合組成比(モル比)、重量平均分子量(Mw)、分子量分布(Mw/Mn)を決定した。
(B-1)のリチウム塩26.6mmolと(B-3)のベンジルトリメチルアンモニウム塩26.6mmolと(B-6)13.4mmolを用いた以外は、ドーパントポリマー14の重合処方と同様に合成を行い、白色重合体24.7gを得た。得られた白色重合体をメタノール160gに溶解し、イオン交換樹脂を用いてアンモニウム塩とリチウム塩をスルホ基に変換してドーパントポリマー18を得た。得られた重合体の19F,1H-NMR、及びGPCの分析を行い、共重合組成比(モル比)、重量平均分子量(Mw)、分子量分布(Mw/Mn)を決定した。
(B-1)のリチウム塩26.6mmolと(B-4)のベンジルトリメチルアンモニウム塩26.6mmolと(B-6)13.4mmolを用いた以外は、ドーパントポリマー14の重合処方と同様に合成を行い、白色重合体20.2gを得た。得られた白色重合体をメタノール160gに溶解し、イオン交換樹脂を用いてアンモニウム塩とリチウム塩をスルホ基に変換してドーパントポリマー19を得た。得られた重合体の19F,1H-NMR、及びGPCの分析を行い、共重合組成比(モル比)、重量平均分子量(Mw)、分子量分布(Mw/Mn)を決定した。
ポリアニリン系導電性高分子(A)を構成する繰り返し単位のアニリンモノマーと、(A)と複合体を形成する(B)成分のドーパントポリマー1~19を用いた、アニリンとドーパントポリマーを含む導電性高分子複合体の合成例1~76を以下に示す。
213.8mmolの(A-1)と11.3mmolの(A-2)を、225.0mmolのドーパントポリマー1を1,000mLの超純水に溶かした溶液に25℃で混合した。
クロスフロー式
供給液流量:3,000mL/分
膜分圧:0.12Pa
合成例1で用いたのと同量の(A-1)及び(A-2)、同mol量のドーパントポリマー2-19を用いた以外は、ポリアニリン導電性高分子複合体1と同様に合成を行い、導電性高分子複合体を得た。
180.0mmolの(A-1)と45.0mmolの(A-2)を用いた以外は、ポリアニリン導電性高分子複合体1と同様に合成を行い、導電性高分子複合体を得た。
合成例20で用いたのと同量の(A-1)および(A-2)、同mol量のドーパントポリマー2-19を用いた以外は、ポリアニリン導電性高分子複合体1と同様に合成を行い、導電性高分子複合体を得た。
213.8mmolの(A-1)と11.3mmolの(A-3)を用いた以外は、ポリアニリン導電性高分子複合体1と同様に合成を行い、導電性高分子複合体を得た。
合成例39で用いたのと同量の(A-1)および(A-3)、同mol量のドーパントポリマー2-19を用いた以外は、ポリアニリン導電性高分子複合体1と同様に合成を行い、導電性高分子複合体を得た。
180.0mmolの(A-1)と45.0mmolの(A-3)を用いた以外は、ポリアニリン導電性高分子複合体1と同様に合成を行い、導電性高分子複合体を得た。
合成例58で用いたのと同量の(A-1)および(A-3)、同mol量のドーパントポリマー2-19を用いた以外は、ポリアニリン導電性高分子複合体1と同様に合成を行い、導電性高分子複合体を得た。
合成例1~76で得たポリアニリン系導電性複合体の緑色粉末を、アセチレングリコール系界面活性剤サーフィノール465(日信化学工業製)を溶かした超純水にそれぞれ3.5wt%の濃度になる様に分散させ調製例1~76を調製した。また、調製液1~76にさらに両性イオン化合物(C)成分を添加したものを調製例77~152とした。調製例1~76の組成組み合わせを表6、7に、調製例77~152の組成組み合わせを表8、9に示す。
ポリアニリン系導電性高分子(A)を構成する繰り返し単位のアニリンモノマーと、(A)と複合体を形成する(B)成分のドーパントポリマー1~19を用いた、アニリンとドーパントポリマーを含む導電性高分子複合体の比較合成例1~57を表10に示す。
225.0mmolの(A-1)のみを用いた以外は、ポリアニリン導電性高分子複合体1と同様に合成を行い、導電性高分子複合体を得た。
比較合成例1で用いたのと同量の(A-2)又は(A-3)、同mol量のドーパントポリマー2-19を用いた以外は、ポリアニリン導電性高分子複合体比較合成例1と同様に合成を行い、導電性高分子複合体を得た。
比較合成例1~57で得たポリアニリン系導電性複合体の緑色粉末を、アセチレングリコール系界面活性剤サーフィノール465(日信化学工業製)を溶かした超純水にそれぞれ3.5wt%の濃度になる様に分散させ比較調製例1~57を調製した。また、前記比較調製液1~19に対し、さらに両性イオン化合物(C)成分を添加したものを比較調製例58~76とした。比較調製例1~76の組成組み合わせを表11、12に示す。
前記調製例において得られたそれぞれの導電性高分子組成物について、孔径3.0μmの再生セルロースフィルター(ADVANTEC社製)を用いて予備濾過を行って精製した後、孔径1.0から0.02μmの再生セルロース又は親水処理をしたUPEフィルター(Entegris社製)を用いて段階的に濾過を行った。当該濾過工程において、フィルターが目詰まりを起さずに通液できるフィルターの限界孔径を調べた。上記調製例1~152において、導電性高分子組成物の濾過を行ったフィルターの通液限界を表13~16に示す。
前記の調製例において得られたそれぞれの導電性高分子組成物を、MS-A200 SPINCOATER(MIKASA製)を用いて膜厚が80±5nmとなるように、Siウエハー上に回転塗布(スピンコート)した。次に、精密高温機にて120℃、5分間ベークを行い、溶媒を除去することにより導電膜を得た。均一膜を形成できたものを○、膜にパーティクル由来の欠陥や部分的にストリエーションが発生したものを×として表13~16に示す。
調製例において得られたそれぞれの導電性高分子組成物について、前記塗布性試験と同様の成膜工程により形成された帯電防止膜に、超純水5.0mlを回転塗布して剥離試験を行った。5.0mlの帯電防止膜が均一に剥がれたものを○、不均一剥離やフレーク状膜崩壊が生じたものを×とする基準で評価を行った。その結果を表13~16に示す。
前記調製例1~152の導電性高分子組成物のpHをpHメーターD-52(堀場製作所製)を用いて測定した。その結果を表13~16に示す。
直径4インチ(100mm)のSiO2ウエハー上に、前記調製例1~152の導電性高分子組成物を2.0mLを滴下後、MS-A200 SPINCOATER(MIKASA製)を用いて全体に回転塗布した。回転塗布条件は膜厚が100±5nmとなるよう調節した。精密高温機にて120℃、5分間ベークを行い、溶媒を除去することにより導電膜を得た。
Claims (14)
- 下記(A)、(B)成分;
(A)下記一般式(1)で表される繰り返し単位を二種類以上有するポリアニリン系導電性高分子、
(B)下記一般式(2)で表される繰り返し単位を有し、重量平均分子量が1,000~500,000の範囲のものであるドーパントポリマー、
を含むものであり、かつ、
前記(A)成分の全繰り返し単位中、RA1~RA4がすべて水素原子である繰り返し単位のモル比率a1が、50<a1<100%であることを特徴とする導電性高分子組成物。
- 前記(A)成分の全繰り返し単位中、RA1~RA4がすべて水素原子である繰り返し単位のモル比率a1が、80≦a1<100%であることを特徴とする請求項1に記載の導電性高分子組成物。
- 前記導電性高分子組成物が、(C)成分として、下記一般式(3)で示される、両性イオン化合物を含有することを特徴とする請求項1から請求項3のいずれか一項に記載の導電性高分子組成物。
- 前記(C)成分の含有量が、前記(A)成分と前記(B)成分との複合体100質量部に対して1質量部から70質量部であることを特徴とする請求項4又は請求項5に記載の導電性高分子組成物。
- 前記導電性高分子組成物が、更にノニオン系界面活性剤を含有するものであることを特徴とする請求項1から請求項6のいずれか一項に記載の導電性高分子組成物。
- 前記ノニオン系界面活性剤の含有量が、前記(A)成分と前記(B)成分との複合体100質量部に対して、1質量部から50質量部であることを特徴とする請求項7に記載の導電性高分子組成物。
- 前記導電性高分子組成物が、有機薄膜デバイスにおけるデバイス構成要素としての積層膜形成用材料であることを特徴とする請求項1から請求項8のいずれか一項に記載の導電性高分子組成物。
- 前記導電性高分子組成物が、電極膜形成用材料又はキャリア移動膜形成用材料であることを特徴とする請求項9に記載の導電性高分子組成物。
- 被加工体上に請求項1から請求項10のいずれか一項に記載の導電性高分子組成物が成膜されたものであることを特徴とする被覆品。
- 前記被加工体は、化学増幅型レジスト膜を備える基板であることを特徴とする請求項11に記載の被覆品。
- 前記被加工体は、電子線をパターン照射してレジストパターンを得るための基板であることを特徴とする請求項12に記載の被覆品。
- 化学増幅型レジスト膜を備える基板の該レジスト膜上に、請求項1から請求項8のいずれか一項に記載の導電性高分子組成物を用いて帯電防止膜を形成する工程、電子線をパターン照射する工程、及びアルカリ性現像液を用いて現像してレジストパターンを得る工程を含むことを特徴とするパターン形成方法。
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