JP6496258B2 - 導電性ポリマー複合体及び基板 - Google Patents
導電性ポリマー複合体及び基板 Download PDFInfo
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- JP6496258B2 JP6496258B2 JP2016028285A JP2016028285A JP6496258B2 JP 6496258 B2 JP6496258 B2 JP 6496258B2 JP 2016028285 A JP2016028285 A JP 2016028285A JP 2016028285 A JP2016028285 A JP 2016028285A JP 6496258 B2 JP6496258 B2 JP 6496258B2
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- 125000000542 sulfonic acid group Chemical group 0.000 description 4
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Classifications
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Description
しかし、このような従来の導電性ポリマーは合成直後では分散液中で粒子が凝集しており、さらに塗布材料として高導電化剤となる有機溶剤を加えるとさらに凝集が促進され、濾過性が悪化する。濾過をせずにスピンコートを行うと、粒子凝集体の影響により平坦な膜が得られず、結果として塗布不良が引き起こされるという問題がある。
(A)π共役系ポリマー、及び
(B)下記一般式(1)で示される繰り返し単位aを含み、重量平均分子量が1,000〜500,000の範囲のものであるドーパントポリマー、
を含む導電性ポリマー複合体を提供する。
このように、本発明の導電性ポリマー複合体は基板等に塗布・成膜することで導電膜とすることができる。
また、このような導電性ポリマー複合体によって形成された導電膜は、導電性、透明性等に優れるため、透明電極層として機能するものとすることができる。
(A)π共役系ポリマー、及び
(B)下記一般式(1)で示される繰り返し単位aを含み、重量平均分子量が1,000〜500,000の範囲のものであるドーパントポリマー、
を含む導電性ポリマー複合体である。
本発明の導電性ポリマー複合体は、(A)成分としてπ共役系ポリマーを含む。この(A)成分は、π共役系連鎖(単結合と二重結合が交互に連続した構造)を形成する前駆体モノマー(有機モノマー分子)が重合したもの(重合物)であればよい。
このような前駆体モノマーとしては、例えば、ピロール類、チオフェン類、チオフェンビニレン類、セレノフェン類、テルロフェン類、フェニレン類、フェニレンビニレン類、アニリン類等の単環式芳香族類;アセン類等の多環式芳香族類;アセチレン類等が挙げられ、これらのモノマーの単一重合体又は共重合体を(A)成分として用いることができる。
上記モノマーの中でも、重合の容易さ、空気中での安定性の点から、ピロール、チオフェン、セレノフェン、テルロフェン、アニリン、多環式芳香族化合物、及びこれらの誘導体が好ましく、ピロール、チオフェン、アニリン、及びこれらの誘導体が特に好ましいが、これらに限定されない。
また、(A)成分の分子量としては、130〜5,000程度が好ましい。
本発明の導電性ポリマー複合体は、(B)成分としてドーパントポリマーを含む。この(B)成分のドーパントポリマーは、下記一般式(1)で示される繰り返し単位aを含む。即ち、(B)成分のドーパントポリマーは、片側にフッ素化されたアルキル基が結合したスルホン基を有し、もう片側にスルホン基を有する構造のビススルホンイミド基を含む強酸性ポリマーである。
R2は単結合、エステル基、あるいはエーテル基、エステル基のいずれか又はこれらの両方を有していてもよい炭素数1〜12の直鎖状、分岐状、環状の炭化水素基のいずれかであるが、R2中のエーテル基が式中の硫黄原子と直接結合する場合を除く。炭化水素基としては、例えばアルキレン基、アリーレン基(例えば、フェニレン基、ナフチレン基等)、アルケニレン基等が挙げられる。
R3は炭素数1〜4の直鎖状、分岐状のアルキル基であり、R3中の水素原子のうち、1つ以上がフッ素原子で置換されている。
Zは単結合、フェニレン基、ナフチレン基、エーテル基、エステル基のいずれかである。ただし、R2が単結合又はエステル基である場合、Zはエーテル基ではない。
aは0<a≦1.0であり、好ましくは0.2≦a≦1.0である。
さらに、繰り返し単位aと繰り返し単位bの割合は、0.2≦a≦0.8かつ0.2≦b≦0.8であることが好ましく、0.3≦a≦0.6かつ0.4≦b≦0.7であることがより好ましい。
また、繰り返し単位aを与えるモノマーを2種類以上用いる場合は、それぞれのモノマーはランダムに共重合されていてもよいし、ブロックで共重合されていてもよい。ブロック共重合ポリマー(ブロックコポリマー)とした場合は、2種類以上の繰り返し単位aからなる繰り返し部分同士が凝集して海島構造を形成することによってドーパントポリマー周辺に特異な構造が発生し、導電率が向上するメリットが期待される。
なお、(B)成分のドーパントポリマーにおいては、分子量分布(Mw/Mn)は1.0〜2.0であることが好ましく、特に1.0〜1.5と狭分散であることが好ましい。狭分散であれば、これを用いた導電性ポリマー複合体によって形成した導電膜の透過率が低くなるのを防ぐことができる。
なお、a+b+c=1であることが好ましい。
本発明の導電性ポリマー複合体は、上述の(A)成分であるπ共役系ポリマーと(B)成分であるドーパントポリマーを含むものであり、(B)成分のドーパントポリマーは、(A)成分のπ共役系ポリマーに配位することで、複合体を形成する。
(A)成分と(B)成分の複合体は、例えば、(B)成分の水溶液又は(B)成分の水・有機溶媒混合溶液中に、(A)成分の原料となるモノマー(好ましくは、ピロール、チオフェン、アニリン、又はこれらの誘導体モノマー)を加え、酸化剤及び場合により酸化触媒を添加し、酸化重合を行うことで得ることができる。
細粒化には、高い剪断力を付与できる混合分散機を用いることが好ましい。混合分散機としては、例えば、ホモジナイザ、高圧ホモジナイザ、ビーズミル等が挙げられ、中でも高圧ホモジナイザが好ましい。
高圧ホモジナイザを用いた分散処理としては、例えば、分散処理を施す前の複合体溶液を高圧で対向衝突させる処理、オリフィスやスリットに高圧で通す処理等が挙げられる。
(界面活性剤)
本発明では、基板等の被加工体への濡れ性を上げるため、界面活性剤を添加してもよい。このような界面活性剤としては、ノニオン系、カチオン系、アニオン系の各種界面活性剤が挙げられる。具体的には例えば、ポリオキシエチレンアルキルエーテル、ポリオキシエチレンアルキルフェニルエーテル、ポリオキシエチレンカルボン酸エステル、ソルビタンエステル、ポリオキシエチレンソルビタンエステル等のノニオン系界面活性剤、アルキルトリメチルアンモニウムクロライド、アルキルベンジルアンモニウムクロライド等のカチオン系界面活性剤、アルキル又はアルキルアリル硫酸塩、アルキル又はアルキルアリルスルホン酸塩、ジアルキルスルホコハク酸塩等のアニオン系界面活性剤、アミノ酸型、ベタイン型等の両性イオン型界面活性剤、アセチレンアルコール系界面活性剤、ヒドロキシ基がポリエチレンオキシド又はポリプロピレンオキシド化されたアセチレンアルコール系界面活性剤等を挙げることができる。
本発明では、導電性ポリマー複合体の導電率向上を目的として、主溶剤とは別に有機溶剤を添加してもよい。このような添加溶剤としては、極性溶剤が挙げられ、具体的には、エチレングリコール、ジエチレングリコール、ポリエチレングリコール、プロピレングリコール、ジメチルスルホキシド(DMSO)、ジメチルホルムアミド(DMF)、N−メチル−2−ピロリドン(NMP)、スルホラン及びこれらの混合物を挙げることができる。添加量は1.0〜30.0質量%であることが好ましく、特に3.0〜10.0質量%であることが好ましい。
本発明では、導電性ポリマー複合体の水溶液中のpHは酸性を示す。これを中和する目的で、特開2006−96975号公報中の段落[0033]〜[0045]に記載の窒素含有芳香族性環式化合物、アミノ酸系化合物、特許第5264723号記載の段落[0127]に記載の陽イオンや、セシウム、ルビジウム、バリウム等の分子量の大きなアルカリ金属塩、アルカリ土類金属を添加してpHを中性にコントロールすることもできる。溶液のpHを中性近くにすることによって、印刷機に適用した場合に錆の発生を防止することができる。
上述のようにして得られた導電性ポリマー複合体(溶液)は、基板等の被加工体に塗布することにより導電膜を形成できる。導電性ポリマー複合体(溶液)の塗布方法としては、例えば、スピンコーター等による塗布、バーコーター、浸漬、コンマコート、スプレーコート、ロールコート、スクリーン印刷、フレキソ印刷、グラビア印刷、インクジェット印刷等が挙げられる。塗布後、熱風循環炉、ホットプレート等による加熱処理、IR、UV照射等を行って導電膜を形成することができる。
また、本発明では上述の本発明の導電性ポリマー複合体によって導電膜が形成された基板を提供する。
基板としては、ガラス基板、石英基板、フォトマスクブランク基板、樹脂基板、シリコンウエハー、ガリウム砒素ウエハー、インジウムリンウエハー等の化合物半導体ウエハー、フレキシブル基板等が挙げられる。また、フォトレジスト膜上に塗布して帯電防止トップコートとして使用することも可能である。
また、このような導電性ポリマー複合体によって形成された導電膜は、導電性、透明性等に優れるため、透明電極層として機能するものとすることができる。
[合成例1]
窒素雰囲気下、64℃で撹拌したメタノール37.5gに、モノマー1の35.2gと2,2’−アゾビス(イソ酪酸)ジメチル5.13gをメタノール112.5gに溶かした溶液を4時間かけて滴下した。さらに64℃で4時間撹拌した。室温まで冷却した後、1,000gの酢酸エチルに激しく撹拌しながら滴下した。生じた固形物を濾過して取り、50℃で15時間真空乾燥して、白色重合体25.9gを得た。
得られた白色重合体を純水912gに溶解し、イオン交換樹脂を用いてカリウム塩をビススルホンイミド基に変換した。得られた重合体を19F−NMR,1H−NMR及びGPC測定したところ、以下の分析結果となった。
重量平均分子量(Mw)=31,000
分子量分布(Mw/Mn)=1.51
この高分子化合物を(ドーパントポリマー1)とする。
窒素雰囲気下、64℃で撹拌したメタノール37.5gに、モノマー1の17.6gとスチレンスルホン酸リチウム9.5gと2,2’−アゾビス(イソ酪酸)ジメチル5.13gをメタノール112.5gに溶かした溶液を4時間かけて滴下した。さらに64℃で4時間撹拌した。室温まで冷却した後、1,000gの酢酸エチルに激しく撹拌しながら滴下した。生じた固形物を濾過して取り、50℃で15時間真空乾燥して白色重合体21.7gを得た。
得られた白色重合体を純水912gに溶解し、イオン交換樹脂を用いてカリウム塩とリチウム塩をビススルホンイミド基とスルホ基にそれぞれ変換した。得られた重合体を19F−NMR,1H−NMR及びGPC測定したところ、以下の分析結果となった。
共重合組成比(モル比) モノマー1:スチレンスルホン酸=1:1
重量平均分子量(Mw)=38,000
分子量分布(Mw/Mn)=1.58
この高分子化合物を(ドーパントポリマー2)とする。
窒素雰囲気下、64℃で撹拌したメタノール37.5gに、モノマー1の17.6gとスチレンスルホン酸リチウム5.7gと4−(1,1,1,3,3,3−ヘキサフルオロ−2−プロパノール)スチレン13.5gと2,2’−アゾビス(イソ酪酸)ジメチル5.13gをメタノール112.5gに溶かした溶液を4時間かけて滴下した。さらに64℃で4時間撹拌した。室温まで冷却した後、1,000gの酢酸エチルに激しく撹拌しながら滴下した。生じた固形物を濾過して取り、50℃で15時間真空乾燥して白色重合体26.7gを得た。
得られた白色重合体を純水912gに溶解し、イオン交換樹脂を用いてカリウム塩とリチウム塩をビススルホンイミド基とスルホ基にそれぞれ変換した。得られた重合体を19F−NMR,1H−NMR及びGPC測定したところ、以下の分析結果となった。
共重合組成比(モル比) モノマー1:スチレンスルホン酸:4−(1,1,1,3,3,3−ヘキサフルオロ−2−プロパノール)スチレン=5:3:2
重量平均分子量(Mw)=31,000
分子量分布(Mw/Mn)=1.63
この高分子化合物を(ドーパントポリマー3)とする。
窒素雰囲気下、64℃で撹拌したメタノール37.5gに、モノマー1の17.6gとスチレンスルホン酸リチウム6.7gとメタクリル酸−3,5−ジ(2−ヒドロキシ−1,1,1,3,3,3−ヘキサフルオロ−2−プロピル)シクロヘキシル7.5gと2,2’−アゾビス(イソ酪酸)ジメチル5.13gをメタノール112.5gに溶かした溶液を4時間かけて滴下した。さらに64℃で4時間撹拌した。室温まで冷却した後、1,000gの酢酸エチルに激しく撹拌しながら滴下した。生じた固形物を濾過して取り、50℃で15時間真空乾燥して白色重合体25.4gを得た。
得られた白色重合体を純水912gに溶解し、イオン交換樹脂を用いてカリウム塩とリチウム塩をビススルホンイミド基とスルホ基にそれぞれ変換した。得られた重合体を19F−NMR,1H−NMR及びGPC測定したところ、以下の分析結果となった。
共重合組成比(モル比) モノマー1:スチレンスルホン酸:メタクリル酸−3,5−ジ(2−ヒドロキシ−1,1,1,3,3,3−ヘキサフルオロ−2−プロピル)シクロヘキシル=10:7:3
重量平均分子量(Mw)=39,000
分子量分布(Mw/Mn)=1.55
この高分子化合物を(ドーパントポリマー4)とする。
(調製例1)
3.82gの3,4−エチレンジオキシチオフェンと、12.5gのドーパントポリマー1を1,000mLの超純水に溶かした溶液とを30℃で混合した。
これにより得られた混合溶液を30℃に保ち、撹拌しながら、100mLの超純水に溶かした8.40gの過硫酸ナトリウムと2.3gの硫酸第二鉄の酸化触媒溶液とをゆっくり添加し、4時間撹拌して反応させた。
得られた反応液に1,000mLの超純水を添加し、限外濾過法を用いて約1,000mLの溶液を除去した。この操作を3回繰り返した。
そして、上記濾過処理が行われた処理液に200mLの10質量%に希釈した硫酸と2,000mLのイオン交換水を加え、限外濾過法を用いて約2,000mLの処理液を除去し、これに2,000mLのイオン交換水を加え、限外濾過法を用いて約2,000mLの液を除去した。この操作を3回繰り返した。
さらに、得られた処理液に2,000mLのイオン交換水を加え、限外濾過法を用いて約2,000mLの処理液を除去した。この操作を5回繰り返し、1.3質量%の青色の導電性ポリマー複合体分散液1を得た。
限外濾過膜の分画分子量:30K
クロスフロー式
供給液流量:3,000mL/分
膜分圧:0.12Pa
なお、他の調製例でも同様の条件で限外濾過を行った。
12.5gのドーパントポリマー1を14.0gのドーパントポリマー2に変更し、3,4−エチレンジオキシチオフェンの配合量を2.41g、過硫酸ナトリウムの配合量を5.31g、硫酸第二鉄の配合量を1.50gに変更する以外は調製例1と同様の方法で調製を行い、導電性ポリマー複合体分散液2を得た。
3.87gの3,4−ジメトキシチオフェンと、14.0gのドーパントポリマー3を1,000mLの超純水に溶かした溶液とを30℃で混合した。
これにより得られた混合溶液を30℃に保ち、撹拌しながら、100mLの超純水に溶かした8.40gの過硫酸ナトリウムと2.3gの硫酸第二鉄の酸化触媒溶液とをゆっくり添加し、4時間撹拌して反応させた。
得られた反応液に1,000mLの超純水を添加し、限外濾過法を用いて約1,000mLの溶液を除去した。この操作を3回繰り返した。
そして、上記濾過処理が行われた処理液に200mLの10質量%に希釈した硫酸と2,000mLのイオン交換水を加え、限外濾過法を用いて約2,000mLの処理液を除去し、これに2,000mLのイオン交換水を加え、限外濾過法を用いて約2,000mLの液を除去した。この操作を3回繰り返した。
さらに、得られた処理液に2,000mLのイオン交換水を加え、限外濾過法を用いて約2,000mLの処理液を除去した。この操作を5回繰り返し、1.3質量%の青色の導電性ポリマー複合体分散液3を得た。
4.62gの(2,3−ジヒドロチエノ[3,4−b][1,4]ジオキシン−2−イル)メタノールと、14.0gのドーパントポリマー4を1,000mLの超純水に溶かした溶液とを30℃で混合した。
これにより得られた混合溶液を30℃に保ち、撹拌しながら、100mLの超純水に溶かした8.40gの過硫酸ナトリウムと2.3gの硫酸第二鉄の酸化触媒溶液とをゆっくり添加し、4時間撹拌して反応させた。
得られた反応液に1,000mLの超純水を添加し、限外濾過法を用いて約1,000mLの溶液を除去した。この操作を3回繰り返した。
そして、上記濾過処理が行われた処理液に200mLの10質量%に希釈した硫酸と2,000mLのイオン交換水を加え、限外濾過法を用いて約2,000mLの処理液を除去し、これに2,000mLのイオン交換水を加え、限外濾過法を用いて約2,000mLの液を除去した。この操作を3回繰り返した。
さらに、得られた処理液に2,000mLのイオン交換水を加え、限外濾過法を用いて約2,000mLの処理液を除去した。この操作を5回繰り返し、1.3質量%の青色の導電性ポリマー複合体分散液4を得た。
4.16gの3,4−プロピレンジオキシチオフェンと、14.0gのドーパントポリマー2を1,000mLの超純水に溶かした溶液とを30℃で混合した。
これにより得られた混合溶液を30℃に保ち、撹拌しながら、100mLの超純水に溶かした8.40gの過硫酸ナトリウムと2.3gの硫酸第二鉄の酸化触媒溶液とをゆっくり添加し、4時間撹拌して反応させた。
得られた反応液に1,000mLの超純水を添加し、限外濾過法を用いて約1,000mLの溶液を除去した。この操作を3回繰り返した。
そして、上記濾過処理が行われた処理液に200mLの10質量%に希釈した硫酸と2,000mLのイオン交換水を加え、限外濾過法を用いて約2,000mLの処理液を除去し、これに2,000mLのイオン交換水を加え、限外濾過法を用いて約2,000mLの液を除去した。この操作を3回繰り返した。
さらに、得られた処理液に2,000mLのイオン交換水を加え、限外濾過法を用いて約2,000mLの処理液を除去した。この操作を5回繰り返し、1.3質量%の青色の導電性ポリマー複合体分散液5を得た。
5.0gの3,4−エチレンジオキシチオフェンと、83.3gのポリスチレンスルホン酸水溶液(Aldrich製18.0質量%)を250mLのイオン交換水で希釈した溶液とを30℃で混合した。それ以外は調製例1と同様の方法で調製を行い、1.3質量%の青色の比較導電性ポリマー複合体分散液1(PEDOT−PSS分散液)を得た。この比較導電性ポリマー複合体分散液1は、ドーパントポリマーとしてポリスチレンスルホン酸のみを含むものである。
調製例1〜5で得た1.3質量%の導電性ポリマー複合体分散液1〜5を20g、ジメチルスルホキシド5g、界面活性剤兼消泡剤のサーフィノール465の0.5gをそれぞれ混合し、その後、孔径0.45μmの再生セルロースフィルター(ADVANTEC社製)を用いて濾過して導電性ポリマー組成物を調製し、それぞれ実施例1〜5とした。
比較調製例1で得た比較導電性ポリマー複合体分散液1から実施例と同様にして導電性ポリマー組成物を調製して、比較例1とした。
上記の実施例及び比較例の導電性ポリマー組成物の調製において、孔径0.45μmの再生セルロースフィルターを用いて濾過を行った際に、濾過できたものを○、フィルターが目詰まりを起こし濾過できなかったものを×として表1に示す。
まず、導電性ポリマー組成物を、1H−360S SPINCOATER(MIKASA製)を用いて膜厚が100±5nmとなるように、Siウエハー上に回転塗布(スピンコート)した。次に、精密恒温器にて120℃、5分間ベークを行い、溶媒を除去することにより導電膜を得た。この導電膜に対して、入射角度可変の分光エリプソメーター VASE(J.A.ウーラム社製)で波長636nmにおける屈折率(n,k)を求めた。均一膜を形成できたものを○、屈折率の測定はできたが膜にパーティクル由来の欠陥や部分的にストリエーションが発生したものを×として表1に示す。
分光光度計を用い、膜厚100nmにおける波長550nmの光線に対する透過率を求めた。その結果を表1に示す。
まず、一辺が10cmの四角形で厚さが100μmのフレキシブルガラス上に、導電性ポリマー組成物1.0mLを滴下後、10秒後にスピンナーを用いて全体に回転塗布した。回転塗布条件は膜厚が100±5nmとなるよう調節した。次に、精密恒温器にて80℃、5分間ベークを行い、溶媒を除去することにより導電膜を得た。
得られた導電膜の導電率(S/cm)は、Hiresta−UP MCP−HT450、Loresta−GP MCP−T610(いずれも三菱化学社製)を用いて測定した表面抵抗率(Ω/□)と膜厚の実測値から求めた。その結果を表1に示す。
導電率の評価方法と同様にして、直径4インチ(100mm)のSiO2ウエハー上に導電膜を得た。AFM NANO−IM−8(イメージメトロロジー社製)により、RMS(二乗平均平方根粗さ)を測定した。その結果を表1に示す。
導電性ポリマー組成物を塗布したフレキシブルガラスを90度の角度に曲げて水平に戻す操作を10回繰り返し、導電膜にクラックが入っているかどうかを目視で観察し、クラックがないものを良好とした。その結果を表1に示す。
Claims (12)
- (A)π共役系ポリマー、及び
(B)下記一般式(1)で示される繰り返し単位aと下記一般式(2)で示される繰り返し単位bとを含み、重量平均分子量が1,000〜500,000の範囲のものであるドーパントポリマー、
を含むものであることを特徴とする導電性ポリマー複合体。
- 前記(B)成分が、ブロックコポリマーであることを特徴とする請求項1又は請求項2に記載の導電性ポリマー複合体。
- 前記(A)成分は、ピロール、チオフェン、セレノフェン、テルロフェン、アニリン、多環式芳香族化合物、及びこれらの誘導体からなる群から選択される1種以上の前駆体モノマーの重合物であることを特徴とする請求項1から請求項3のいずれか一項に記載の導電性ポリマー複合体。
- 前記導電性ポリマー複合体は、水又は有機溶剤に分散性をもつものであることを特徴とする請求項1から請求項4のいずれか一項に記載の導電性ポリマー複合体。
- (A)π共役系ポリマー、及び
(B)下記一般式(1)で示される繰り返し単位aを含み、重量平均分子量が1,000〜500,000の範囲のものであるドーパントポリマー、
を含む導電性ポリマー複合体によって導電膜が形成されたものであることを特徴とする基板。
- 前記(B)成分が、ブロックコポリマーであることを特徴とする請求項6から請求項8のいずれか一項に記載の基板。
- 前記(A)成分は、ピロール、チオフェン、セレノフェン、テルロフェン、アニリン、多環式芳香族化合物、及びこれらの誘導体からなる群から選択される1種以上の前駆体モノマーの重合物であることを特徴とする請求項6から請求項9のいずれか一項に記載の基板。
- 前記導電性ポリマー複合体は、水又は有機溶剤に分散性をもつものであることを特徴とする請求項6から請求項10のいずれか一項に記載の基板。
- 前記導電膜が、透明電極層として機能するものであることを特徴とする請求項6から請求項11のいずれか一項に記載の基板。
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EP4372765A1 (en) | 2022-11-17 | 2024-05-22 | Shin-Etsu Chemical Co., Ltd. | Bio-electrode, bio-electrode composition, and method for manufacturing bio-electrode |
EP4383279A1 (en) | 2022-12-05 | 2024-06-12 | Shin-Etsu Chemical Co., Ltd. | Bio-electrode composition, bio-electrode, and method for manufacturing bio-electrode |
KR20240121670A (ko) | 2023-02-02 | 2024-08-09 | 신에쓰 가가꾸 고교 가부시끼가이샤 | 생체 전극, 및 생체 전극의 제조 방법 |
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US20170233596A1 (en) | 2017-08-17 |
JP2017145323A (ja) | 2017-08-24 |
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