JP2022140415A - 研磨パッド、研磨パッドの製造方法およびこれを用いた半導体素子の製造方法 - Google Patents
研磨パッド、研磨パッドの製造方法およびこれを用いた半導体素子の製造方法 Download PDFInfo
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- JP2022140415A JP2022140415A JP2022038668A JP2022038668A JP2022140415A JP 2022140415 A JP2022140415 A JP 2022140415A JP 2022038668 A JP2022038668 A JP 2022038668A JP 2022038668 A JP2022038668 A JP 2022038668A JP 2022140415 A JP2022140415 A JP 2022140415A
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- WPBNNNQJVZRUHP-UHFFFAOYSA-L manganese(2+);methyl n-[[2-(methoxycarbonylcarbamothioylamino)phenyl]carbamothioyl]carbamate;n-[2-(sulfidocarbothioylamino)ethyl]carbamodithioate Chemical compound [Mn+2].[S-]C(=S)NCCNC([S-])=S.COC(=O)NC(=S)NC1=CC=CC=C1NC(=S)NC(=O)OC WPBNNNQJVZRUHP-UHFFFAOYSA-L 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 238000000120 microwave digestion Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000000178 monomer Substances 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- DILRJUIACXKSQE-UHFFFAOYSA-N n',n'-dimethylethane-1,2-diamine Chemical compound CN(C)CCN DILRJUIACXKSQE-UHFFFAOYSA-N 0.000 description 1
- IJDNQMDRQITEOD-UHFFFAOYSA-N n-butane Chemical compound CCCC IJDNQMDRQITEOD-UHFFFAOYSA-N 0.000 description 1
- VXPJBVRYAHYMNY-UHFFFAOYSA-N n-methyl-2-[2-(methylamino)ethoxy]ethanamine Chemical compound CNCCOCCNC VXPJBVRYAHYMNY-UHFFFAOYSA-N 0.000 description 1
- SLCVBVWXLSEKPL-UHFFFAOYSA-N neopentyl glycol Chemical compound OCC(C)(C)CO SLCVBVWXLSEKPL-UHFFFAOYSA-N 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 125000005474 octanoate group Chemical group 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 150000002894 organic compounds Chemical class 0.000 description 1
- 150000002902 organometallic compounds Chemical class 0.000 description 1
- UKODFQOELJFMII-UHFFFAOYSA-N pentamethyldiethylenetriamine Chemical compound CN(C)CCN(C)CCN(C)C UKODFQOELJFMII-UHFFFAOYSA-N 0.000 description 1
- 239000012466 permeate Substances 0.000 description 1
- 239000003208 petroleum Substances 0.000 description 1
- 229920002857 polybutadiene Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 229920005906 polyester polyol Polymers 0.000 description 1
- 229920000570 polyether Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 239000002861 polymer material Substances 0.000 description 1
- 230000000379 polymerizing effect Effects 0.000 description 1
- 229920005749 polyurethane resin Polymers 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 239000001294 propane Substances 0.000 description 1
- ULWHHBHJGPPBCO-UHFFFAOYSA-N propane-1,1-diol Chemical compound CCC(O)O ULWHHBHJGPPBCO-UHFFFAOYSA-N 0.000 description 1
- 238000010926 purge Methods 0.000 description 1
- 238000009877 rendering Methods 0.000 description 1
- 230000000979 retarding effect Effects 0.000 description 1
- 239000005060 rubber Substances 0.000 description 1
- 238000001878 scanning electron micrograph Methods 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 229920003048 styrene butadiene rubber Polymers 0.000 description 1
- 229920000468 styrene butadiene styrene block copolymer Polymers 0.000 description 1
- 229920001935 styrene-ethylene-butadiene-styrene Polymers 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- BFKJFAAPBSQJPD-UHFFFAOYSA-N tetrafluoroethene Chemical group FC(F)=C(F)F BFKJFAAPBSQJPD-UHFFFAOYSA-N 0.000 description 1
- CZDYPVPMEAXLPK-UHFFFAOYSA-N tetramethylsilane Chemical compound C[Si](C)(C)C CZDYPVPMEAXLPK-UHFFFAOYSA-N 0.000 description 1
- 229920001169 thermoplastic Polymers 0.000 description 1
- 239000004416 thermosoftening plastic Substances 0.000 description 1
- CYRMSUTZVYGINF-UHFFFAOYSA-N trichlorofluoromethane Chemical compound FC(Cl)(Cl)Cl CYRMSUTZVYGINF-UHFFFAOYSA-N 0.000 description 1
- 229940029284 trichlorofluoromethane Drugs 0.000 description 1
- WDIWAJVQNKHNGJ-UHFFFAOYSA-N trimethyl(propan-2-yl)silane Chemical compound CC(C)[Si](C)(C)C WDIWAJVQNKHNGJ-UHFFFAOYSA-N 0.000 description 1
- WNWMJFBAIXMNOF-UHFFFAOYSA-N trimethyl(propyl)silane Chemical compound CCC[Si](C)(C)C WNWMJFBAIXMNOF-UHFFFAOYSA-N 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
- B24B37/042—Lapping machines or devices; Accessories designed for working plane surfaces operating processes therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
- B24B37/20—Lapping pads for working plane surfaces
- B24B37/24—Lapping pads for working plane surfaces characterised by the composition or properties of the pad materials
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
- B24B37/042—Lapping machines or devices; Accessories designed for working plane surfaces operating processes therefor
- B24B37/044—Lapping machines or devices; Accessories designed for working plane surfaces operating processes therefor characterised by the composition of the lapping agent
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
- B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
- B24B37/10—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping
- B24B37/105—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping the workpieces or work carriers being actively moved by a drive, e.g. in a combined rotary and translatory movement
- B24B37/107—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping the workpieces or work carriers being actively moved by a drive, e.g. in a combined rotary and translatory movement in a rotary movement only, about an axis being stationary during lapping
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
- B24B37/20—Lapping pads for working plane surfaces
- B24B37/22—Lapping pads for working plane surfaces characterised by a multi-layered structure
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
- B24B37/20—Lapping pads for working plane surfaces
- B24B37/26—Lapping pads for working plane surfaces characterised by the shape of the lapping pad surface, e.g. grooved
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D11/00—Constructional features of flexible abrasive materials; Special features in the manufacture of such materials
- B24D11/001—Manufacture of flexible abrasive materials
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D18/00—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
- B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
- B24D3/04—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/30625—With simultaneous mechanical treatment, e.g. mechanico-chemical polishing
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67092—Apparatus for mechanical treatment
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
Description
DSは、CMP polishing装置を用い、対象膜質はシリコンオキサイド、研磨荷重4.0psi、前記研磨パッドが取り付けられた定盤の回転速度150rpm、か焼セリアスラリーの注入速度250ml/min、および研磨時間60秒の条件で研磨工程後、発生したディフェクトおよびスクラッチの数であり、
RRは、前記研磨工程によるシリコンオキサイドの研磨率(Å/min)であり、
DMgは、前記研磨層の全体重量に対するMgの含有量(ppm)であり、
DS×DMg/RRは、単位を除いた数値間の比率である。
D10は、10%体積累積分布上の気孔の直径であり、
D50は、50%体積累積分布上の気孔の直径である。
研磨パッドの製造
TDI、H12MDI、ポリテトラメチレンエーテルグリコール(Polytetramethylene ether glycol)、およびジエチレングリコール(Diethylene glycol)を4口フラスコに投入後、80℃、3時間反応して、NCO%が8~12%のプレポリマーを製造した。
TDI、H12MDI、ポリテトラメチレンエーテルグリコール(Polytetramethylene ether glycol)、およびジエチレングリコール(Diethylene glycol)を4口フラスコに投入後、80℃、3時間反応して、NCO%が8~12%のプレポリマーを製造した。
前記比較例1で使用された固相発泡剤の種類および含有量を異ならせたことを除き、比較例1と同一の方式で製造した。
研磨層の物性評価
前記実施例および比較例により製造された研磨パッドのShore D硬度を測定し、研磨パッドを2cm×2cm(厚さ:2mm)の大きさに切断した後、温度25℃および湿度50±5%の環境で16時間静置した。以後、硬度計(D型硬度計)を用いて研磨パッドの硬度を測定した。
前記実施例および比較例により製造された研磨パッドそれぞれに対して、万能試験機(UTM)を用いて500mm/分の速度でテストしながら破断直前の最大変形量を測定した後、最初の長さに対する最大変形量の比率をパーセント(%)で表した。
前記実施例および比較例により製造された研磨パッドそれぞれに対して、万能試験機(UTM)を用いて500mm/分の速度でテストしながら破断直前の最高強度値を取得した後、取得した値によりStrain-Stress曲線の20~70%領域での傾きを計算した。
前記実施例および比較例により製造されたウィンドウの比重を測定し、研磨パッドを2cm×2cm(厚さ:2mm)の大きさに切断した後、温度25℃および湿度50±5%の環境で16時間静置した。その後、Electronic densimeterを用いて初期の重量と水に浸漬させた時の重量を測定後、密度を計算した。
Micro wave digestion(Anton paar Muiti wave PRO社)を用いて前処理した。具体的には、製造された研磨層サンプルをチューブに投入した後、強酸(塩酸および硝酸の混合)を混合した。その後、浸漬(digestion)させて、前処理した。
研磨層の気孔サイズの測定
研磨パッドの研磨性能の測定
(1)研磨率の測定
研磨後のディフェクトの測定結果、研磨層内のMg含有量および計算されたシリコンオキサイドに対する研磨率を用いて下記式1の値を確認した。
DSは、CMP polishing装置を用い、対象膜質はシリコンオキサイド、研磨荷重4.0psi、前記研磨パッドが取り付けられた定盤の回転速度150rpm、か焼セリアスラリーの注入速度250ml/min、および研磨時間60秒の条件で研磨工程後、発生したディフェクトおよびスクラッチの数であり、
RRは、前記研磨工程によるシリコンオキサイドの研磨率(Å/min)であり、
DMgは、前記研磨層の全体重量に対するMgの含有量(ppm)であり、
DS×DMg/RRは、単位を除いた数値間の比率である。
11:非膨張した粒子の外皮
11':外皮の重合のためのモノマー
12:膨張誘発成分
13:安定化剤
20:膨張した粒子
30:硬化工程
40:研磨層内の気孔
110:研磨パッド
120:定盤
130:半導体基板
140:ノズル
150:研磨スラリー
160:研磨ヘッド
170:コンディショナ
Claims (11)
- 研磨層を含み、
前記研磨層は、外皮を有する複数の微細気孔および無機成分を含み、
前記無機成分はMgであり、研磨層の全体重量に対して90ppm未満で含む
研磨パッド。 - 前記研磨層の微細気孔は、D10~D100の測定値に対する標準偏差が4~10である、
請求項1に記載の研磨パッド。 - 前記外皮は、膨張可能な(Expandable)固相発泡剤によって由来するものである、
請求項1に記載の研磨パッド。 - 前記固相発泡剤は、pH8以下である、
請求項5に記載の研磨パッド。 - 前記外皮は、塩化ビニリデン系共重合体、アクリロニトリル系共重合体、メタクリロニトリル系共重合体、およびアクリル系共重合体からなる群より選択された1種以上である、
請求項1に記載の研磨パッド。 - 前記研磨パッドは、CMP polishing装置を用い、対象膜質はシリコンオキサイド、研磨荷重4.0psi、前記研磨パッドが取り付けられた定盤の回転速度150rpm、か焼セリアスラリーの注入速度250ml/min、および研磨時間60秒の条件で研磨工程の進行時、
前記研磨工程による前記シリコンオキサイドの研磨率が2,000~4,000Å/minである、
請求項1に記載の研磨パッド。 - i)プレポリマー組成物を製造するステップと、
ii)前記プレポリマー組成物、発泡剤、および硬化剤を含む研磨層製造用組成物を製造するステップと、
iii)前記研磨層製造用組成物を硬化して研磨層を製造するステップとを含み、
前記研磨層は、外皮を有する複数の微細気孔および無機成分を含み、
前記無機成分はMgであり、研磨層の全体重量に対して90ppm未満で含む
研磨パッドの製造方法。 - 前記発泡剤は、
膨張可能な(Expandable)固相発泡剤であり、
前記iii)ステップの硬化工程によって膨張して複数の気孔を形成する、
請求項9に記載の研磨パッドの製造方法。 - 1)研磨層を含む研磨パッドを提供するステップと、
2)前記研磨層の研磨面に半導体基板の被研磨面が当接するように相対回転させながら前記半導体基板を研磨させるステップとを含み、
前記研磨層は、外皮を有する複数の微細気孔および無機成分を含み、
前記無機成分はMgであり、研磨層の全体重量に対して90ppm未満で含む
半導体素子の製造方法。
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Citations (10)
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US5976000A (en) * | 1996-05-28 | 1999-11-02 | Micron Technology, Inc. | Polishing pad with incompressible, highly soluble particles for chemical-mechanical planarization of semiconductor wafers |
JP2013173945A (ja) * | 2012-01-25 | 2013-09-05 | Matsumoto Yushi Seiyaku Co Ltd | 熱膨張性微小球および用途 |
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TW202235507A (zh) | 2022-09-16 |
US20220288743A1 (en) | 2022-09-15 |
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