JP2022028407A - 基板処理方法および基板処理装置 - Google Patents
基板処理方法および基板処理装置 Download PDFInfo
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- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
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Abstract
Description
図1~図8を参照して、本発明の実施形態1に係る基板処理装置1000および基板処理方法を説明する。実施形態1に係る基板処理装置1000はバッチ式である。従って、基板処理装置1000は、複数の基板Wを一括して処理する。具体的には、基板処理装置1000は、複数のロットを処理する。複数のロットの各々は複数の基板Wからなる。例えば、1ロットは25枚の基板Wからなる。基板Wは、例えば、略円板状である。
図1、図2、図3、図6、図9、および、図10を参照して、本発明の実施形態2に係る基板処理装置1000および基板処理方法を説明する。実施形態2に係る基板処理装置1000および基板処理方法が、槽53内のリンス液に有機溶剤を直接供給して膜73を形成する点で、実施形態2は実施形態1と主に異なる。実施形態2に係る基板処理装置1000の構成は、図1および図2を参照して説明した基板処理装置1000の構成と同様である。従って、実施形態2の説明において、図1および図2が適宜参照される。また、処理対象の一例として、図3に示す基板Wを挙げる。以下、実施形態2が実施形態1と異なる点を主に説明する。
53 槽
55 基板移動部
300 流体供給部
1000 基板処理装置
W 基板
Claims (16)
- リンス液に浸漬された基板が前記リンス液から引き上げられた後に、前記リンス液よりも表面張力の小さい第1有機溶剤を前記基板に付着させつつ、前記基板をチャンバー内の槽に貯留されたリンス液に浸ける工程と、
前記リンス液から前記基板を引き上げる工程と、
前記引き上げられた基板が存在する前記チャンバー内に、前記リンス液よりも表面張力の小さい第2有機溶剤の蒸気を供給する工程と
を含む、基板処理方法。 - 前記基板を前記リンス液に浸ける前記工程よりも前に、前記チャンバー内に、前記第1有機溶剤の蒸気を供給する工程をさらに含み、
前記基板を前記リンス液に浸ける前記工程では、前記基板を下降させて、前記リンス液に、前記第1有機溶剤が付着した前記基板を浸ける、請求項1に記載の基板処理方法。 - 前記第1有機溶剤の蒸気を供給する前記工程において、前記第1有機溶剤の蒸気によって、前記リンス液の液面に前記第1有機溶剤の膜を形成する、請求項2に記載の基板処理方法。
- 前記基板を前記リンス液に浸ける前記工程よりも前に、前記槽に貯留された前記リンス液に対して、前記第1有機溶剤を直接供給することで、前記リンス液の液面に前記第1有機溶剤の膜を形成する工程をさらに含み、
前記基板を前記リンス液に浸ける前記工程では、前記基板を下降させて、前記第1有機溶剤の膜が形成された前記リンス液に前記基板を浸ける、請求項1に記載の基板処理方法。 - 前記基板を前記リンス液に浸ける前記工程と前記基板を引き上げる前記工程とが、交互に複数回実行される、請求項1から請求項4のいずれか1項に記載の基板処理方法。
- 前記基板を引き上げる前記工程であって、最後に実行される前記工程では、前記リンス液から前記基板を引き上げる際の前記基板の上昇速度は、最も小さい、請求項5に記載の基板処理方法。
- 前記基板を前記リンス液に浸ける際の前記基板の下降速度は、前記リンス液から前記基板を引き上げる際の前記基板の上昇速度よりも大きい、請求項1から請求項6のいずれか1項に記載の基板処理方法。
- リンス液に浸漬された基板が前記リンス液から引き上げられた後に、前記リンス液よりも表面張力の小さい第1有機溶剤の膜を液面に有するリンス液に、前記第1有機溶剤の膜を通過させながら前記基板を浸ける工程と、
前記第1有機溶剤の膜を通過させながら、前記リンス液から前記基板を引き上げる工程と、
前記引き上げられた基板が存在するチャンバー内に、前記リンス液よりも表面張力の小さい第2有機溶剤の蒸気を供給する工程と
を含む、基板処理方法。 - チャンバーと、
前記チャンバー内に配置される槽と、
リンス液に浸漬された基板が前記リンス液から引き上げられた後に、前記リンス液よりも表面張力の小さい第1有機溶剤を前記基板に付着させつつ、前記基板を前記槽に貯留されたリンス液に浸ける動作と、前記リンス液から前記基板を引き上げる動作とを実行する基板移動部と、
前記基板移動部によって前記リンス液から引き上げられた前記基板が存在する前記チャンバー内に、前記リンス液よりも表面張力の小さい第2有機溶剤の蒸気を供給する流体供給部と
を備える、基板処理装置。 - 前記基板移動部が前記基板を前記リンス液に浸ける前記動作を実行するよりも前に、前記流体供給部は、前記チャンバー内に、前記第1有機溶剤の蒸気を供給し、
前記基板移動部は、前記基板を下降させて、前記リンス液に、前記第1有機溶剤が付着した前記基板を浸ける、請求項9に記載の基板処理装置。 - 前記基板移動部が前記基板を前記リンス液に浸ける前記動作を実行するよりも前に、前記流体供給部は、前記第1有機溶剤の蒸気によって、前記リンス液の液面に前記第1有機溶剤の膜を形成する、請求項10に記載の基板処理装置。
- 前記基板移動部が前記基板を前記リンス液に浸ける前記動作を実行するよりも前に、前記流体供給部は、前記槽に貯留された前記リンス液に対して、前記第1有機溶剤を直接供給することで、前記リンス液の液面に前記第1有機溶剤の膜を形成し、
前記基板移動部は、前記基板を下降させて、前記第1有機溶剤の膜が形成された前記リンス液に前記基板を浸ける、請求項9に記載の基板処理装置。 - 前記基板移動部は、前記基板を前記リンス液に浸ける前記動作と前記リンス液から前記基板を引き上げる前記動作とを、交互に複数回実行する、請求項9から請求項12のいずれか1項に記載の基板処理装置。
- 前記基板移動部は、前記基板を引き上げる前記動作であって、最後に実行する前記動作では、前記リンス液から前記基板を引き上げる際の前記基板の上昇速度を最も小さくする、請求項13に記載の基板処理装置。
- 前記基板移動部は、前記基板を前記リンス液に浸ける際の前記基板の下降速度を、前記リンス液から前記基板を引き上げる際の前記基板の上昇速度よりも大きくする、請求項9から請求項14のいずれか1項に記載の基板処理装置。
- リンス液に浸漬された基板が前記リンス液から引き上げられた後に、前記リンス液よりも表面張力の小さい第1有機溶剤の膜を液面に有するリンス液に、前記第1有機溶剤の膜を通過させながら前記基板を浸ける動作と、前記第1有機溶剤の膜を通過させながら、前記リンス液から前記基板を引き上げる動作とを実行する基板移動部と、
前記基板移動部によって前記リンス液から引き上げられた前記基板が存在するチャンバー内に、前記リンス液よりも表面張力の小さい第2有機溶剤の蒸気を供給する流体供給部と
を備える、基板処理装置。
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