JP2021524998A5 - - Google Patents

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Publication number
JP2021524998A5
JP2021524998A5 JP2020563502A JP2020563502A JP2021524998A5 JP 2021524998 A5 JP2021524998 A5 JP 2021524998A5 JP 2020563502 A JP2020563502 A JP 2020563502A JP 2020563502 A JP2020563502 A JP 2020563502A JP 2021524998 A5 JP2021524998 A5 JP 2021524998A5
Authority
JP
Japan
Prior art keywords
integrated circuit
layer
dielectric layer
silicon dioxide
plate
Prior art date
Application number
JP2020563502A
Other languages
English (en)
Japanese (ja)
Other versions
JP2021524998A (ja
JPWO2019217611A5 (https=
Filing date
Publication date
Priority claimed from US15/977,712 external-priority patent/US10622073B2/en
Application filed filed Critical
Publication of JP2021524998A publication Critical patent/JP2021524998A/ja
Publication of JPWO2019217611A5 publication Critical patent/JPWO2019217611A5/ja
Publication of JP2021524998A5 publication Critical patent/JP2021524998A5/ja
Priority to JP2025107196A priority Critical patent/JP2025123554A/ja
Pending legal-status Critical Current

Links

JP2020563502A 2018-05-11 2019-05-09 垂直コンデンサを含む集積回路 Pending JP2021524998A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2025107196A JP2025123554A (ja) 2018-05-11 2025-06-25 垂直コンデンサを含む集積回路

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US15/977,712 US10622073B2 (en) 2018-05-11 2018-05-11 Integrated circuit including vertical capacitors
US15/977,712 2018-05-11
PCT/US2019/031417 WO2019217611A1 (en) 2018-05-11 2019-05-09 Integrated circuit including vertical capacitors

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2025107196A Division JP2025123554A (ja) 2018-05-11 2025-06-25 垂直コンデンサを含む集積回路

Publications (3)

Publication Number Publication Date
JP2021524998A JP2021524998A (ja) 2021-09-16
JPWO2019217611A5 JPWO2019217611A5 (https=) 2022-05-24
JP2021524998A5 true JP2021524998A5 (https=) 2022-05-24

Family

ID=68465262

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2020563502A Pending JP2021524998A (ja) 2018-05-11 2019-05-09 垂直コンデンサを含む集積回路
JP2025107196A Pending JP2025123554A (ja) 2018-05-11 2025-06-25 垂直コンデンサを含む集積回路

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2025107196A Pending JP2025123554A (ja) 2018-05-11 2025-06-25 垂直コンデンサを含む集積回路

Country Status (5)

Country Link
US (2) US10622073B2 (https=)
EP (1) EP3791428A4 (https=)
JP (2) JP2021524998A (https=)
CN (1) CN112106195B (https=)
WO (1) WO2019217611A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102765313B1 (ko) * 2019-04-02 2025-02-07 삼성전자주식회사 수직 커패시터 구조 및 이를 포함하는 비휘발성 메모리 장치
CN111968983B (zh) * 2019-05-20 2023-10-17 联华电子股份有限公司 存储器元件的结构及其制造方法

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US6518618B1 (en) * 1999-12-03 2003-02-11 Intel Corporation Integrated memory cell and method of fabrication
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