JP2021504939A - 窒化ケイ素膜のドライエッチング速度の低減 - Google Patents
窒化ケイ素膜のドライエッチング速度の低減 Download PDFInfo
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Abstract
Description
Claims (15)
- 窒化ケイ素膜を形成する方法であって、
表面を含む基板をチャンバ内に配置することと、
ケイ素含有ガス及び第1の窒素含有ガスを、第1の総流量で前記チャンバ内に流すことと、
前記ケイ素含有ガス及び前記第1の窒素含有ガスに第1の電力レベルの第1の高周波(RF)電力を印加することによって、前記基板の前記表面上にケイ素及び窒素含有層を堆積させることと、
前記ケイ素含有ガス及び前記第1の窒素含有ガスの流れを中断して、前記第1の総流量よりも高い流量で第2の窒素含有ガスを前記チャンバ内に流すことと、
前記第2の窒素含有ガスに前記第1の電力レベルよりも高い第2の電力レベルの第2のRF電力を印加することによって、前記ケイ素及び窒素含有層を処理することと、
所定の厚さの膜が形成されるまで、前記ケイ素含有ガス及び前記第1の窒素含有ガスを流すことと、前記ケイ素及び窒素含有層を堆積させることと、前記ケイ素含有ガス及び前記第1の窒素含有ガスの流れを中断して前記第2の窒素含有ガスを流すことと、前記ケイ素及び窒素含有層を処理することとを、繰り返すことと
を含む方法。 - 前記ケイ素含有ガスはシラン(SiH4)を含み、
前記ケイ素含有ガスは、毎分約10標準立方センチメートル(sccm)から約50sccmの流量で流され、
前記第1の窒素含有ガスは、アンモニア(NH3)及び二原子窒素ガス(N2)の少なくとも1つを含み、
前記第1の窒素含有ガスの前記アンモニアは、約30sccmから約1500sccmの流量で流され、
前記第1の窒素含有ガスの前記二原子窒素ガスは、約500sccmから約3000sccmの流量で流され、
前記第2の窒素含有ガスは、二原子窒素ガス(N2)を含み、
前記第2の窒素含有ガスは、約10000sccmから約20000sccmの流量で流される、請求項1に記載の方法。 - 前記チャンバの圧力が6トール以下であり、前記ケイ素及び窒素含有層の前記処理中の前記チャンバ内の圧力が、前記ケイ素及び窒素含有層の前記堆積中の前記チャンバ内の圧力よりも高い、請求項1に記載の方法。
- 前記第1の電力レベルは、約50ワット(W)から約100Wであり、
前記第1のRF電力は、約1秒から約5秒の持続時間にわたって印加され、
前記第2の電力レベルは、約80Wから約120Wであり、
前記第2のRF電力は、約5秒から15秒の持続時間にわたって印加される、
請求項1に記載の方法。 - 酸素含有ガスを前記チャンバ内に流すことと、
前記ケイ素及び窒素含有層の前記処理中に前記酸素含有ガスに前記第2のRF電力を印加すること、又は、前記ケイ素及び窒素含有層の前記処理後に前記酸素含有ガスに前記第2のRF電力を印加することと
を更に含み、前記ケイ素及び窒素含有層の前記処理後の前記第2のRF電力は、約2秒から約10秒の持続時間にわたって前記第2の電力レベルで印加される、請求項4に記載の方法。 - 窒化ケイ素膜を形成する方法であって、
表面を含む基板をチャンバ内に配置することと、
ケイ素含有ガス及び第1の窒素含有ガスを含み、二原子水素ガスを含まない、第1の処理ガスセットを前記チャンバ内に流すことと、
前記第1の処理ガスセットに第2の周波数と第3の電力レベルの第3の高周波(RF)電力を印加することによって前記基板の前記表面上に開始層を堆積させることと、
前記第1の処理ガスセットの前記第1の窒素含有ガスの流れを中断して、前記ケイ素含有ガス、第2の窒素含有ガス、及び水素含有ガスを含み、二原子窒素ガスを含まない、第2の処理ガスセットを前記チャンバ内に流すことと、
前記第2の処理ガスセットに前記第2の周波数よりも高い第1の周波数と前記第3の電力レベルよりも高い第1の電力レベルの第1のRF電力を印加することによって、前記開始層上にバルク窒化ケイ素層を堆積させることと
を含む方法。 - 前記ケイ素含有ガスが、シラン(SiH4)を含み、
前記第1の処理ガスセットを流している間に、毎分約10標準立方センチメートル(sccm)から約50sccmの流量で前記ケイ素含有ガスが流され、
前記第1の窒素含有ガスが、アンモニア(NH3)及び二原子窒素ガス(N2)を含み、
前記第1の処理ガスセットを流している間に、約100sccmから約200sccmの流量でアンモニアが流され、約1000から約3000sccmの流量で前記二原子窒素ガス(N2)が流され、
前記第2の窒素含有ガスが、アンモニア(NH3)を含み、
前記第2の処理ガスセットを流している間に、約100sccmから約200sccmの流量で前記第2の窒素含有ガスが流され、
前記水素含有ガスが、二原子水素ガス(H2)を含み、
前記第2の処理ガスセットを流している間に、約3000sccmから4000sccmの流量で前記水素含有ガスが流される、請求項6に記載の方法。 - 前記チャンバの圧力は8トール以下であり、前記開始層の前記堆積中のチャンバ内の圧力は、前記バルク窒化ケイ素層の前記堆積中の前記チャンバ内の圧力と同じである、請求項6に記載の方法。
- 前記第3の電力レベルは、約50ワット(W)から約100Wであり、
前記第2の周波数は、500キロヘルツ(kHz)未満であり、
前記第3のRF電力は、約10秒から20秒の持続時間にわたって印加され、
前記第1の電力レベルは、約50Wから約100Wであり、
前記第1の周波数は、約10メガヘルツ(MHz)から約20MHzであり、
前記第1のRF電力は、約200秒から300秒の持続時間にわたって印加される、
請求項6に記載の方法。 - 前記第1の処理ガスセットを流す前に、約200sccmから約600sccmのNH3を流すことを更に含む、請求項6に記載の方法。
- 酸素含有ガスを前記チャンバ内に流すことと、前記酸素含有ガスに前記第3のRF電力を印加することを更に含み、前記第3のRF電力は前記開始層の前記堆積中に前記酸素含有ガスに印加される、請求項6に記載の方法。
- 前記酸素含有ガスを前記チャンバ内に流すことと、前記酸素含有ガスに前記第1のRF電力を印加することとを更に含み、前記第1のRF電力は前記バルク窒化ケイ素層の前記堆積中に前記酸素含有ガスに印加される、請求項11に記載の方法。
- 前記第1の処理ガスセットに約1秒から約3秒の持続時間にわたって、前記第1の周波数と約25Wから約75Wの第4の電力レベルの第4のRF電力、及び前記第1の周波数と前記第3の電力レベルの前記第3のRF電力を印加することによって、前記開始層の前記堆積から移行することであって、前記第3の電力レベルは前記第4の電力レベルよりも高い、前記開始層の前記堆積から移行することと、
前記第1の処理ガスセットに約1秒から約3秒の持続時間にわたって、前記第1の周波数と前記第1の電力レベルの前記第1のRF電力、及び前記第1の周波数と約15Wから約45Wの第5の電力レベルの第5のRF電力を印加することによって、前記バルク窒化ケイ素層の前記堆積へ移行することと
を更に含み、
前記開始層の前記堆積から前記移行中の前記第1の窒素含有ガスの流量は、前記バルク窒化ケイ素層の前記堆積への前記移行時の前記第1の窒素含有ガスの流量よりも高い、請求項6に記載の方法。 - 窒化ケイ素膜を形成する方法であって、
表面を含む基板をチャンバ内に配置することと、
ケイ素含有ガス及び第1の窒素含有ガスを含む第1の処理ガスセットを、第1の総流量で前記チャンバ内に流すこと、
前記第1の処理ガスセットに約1秒から約5秒の持続時間にわたって、10メガヘルツ(MHz)及び20MHzの第1の周波数と約50ワット(W)から約100Wの第1の電力レベルの第1の高周波(RF)電力を、8トール未満の前記チャンバの第1の圧力で印加することによって、前記基板の前記表面上にケイ素及び窒化物含有層を堆積させることと、
前記第1の処理ガスセットの流れを中断することと、
第2の窒素含有ガスを含む第2の処理ガスセットを、前記第1の総流量よりも高い第2の総流量で前記チャンバ内に流すことと、
前記第2の処理ガスセットに約5秒から15秒の持続時間にわたって、前記第1の周波数と約80Wから約120Wの第2の電力レベルの第2のRF電力を、前記チャンバの第2の圧力で印加することによって、前記ケイ素及び窒素含有層を処理することであって、前記第2の電力レベルは前記第1の電力レベルよりも高く、前記チャンバの前記第1の圧力は前記チャンバの前記第2の圧力よりも高い、前記ケイ素及び窒素含有層を処理することと、
所定の厚さの第1の開始層が形成されるまで、前記第1の処理ガスセットを流すことと、前記ケイ素及び窒化物含有層を堆積させることと、前記第1の処理ガスセットの流れを中断することと、前記第2の処理ガスセットを流すことと、前記ケイ素及び窒素含有層を処理することとを、繰り返すことと、
前記第2の処理ガスセットの流れを中断して、前記ケイ素含有ガス、第3の窒素含有ガス、及び水素含有ガスを含み、二原子窒素ガスを含まない、第3の処理ガスセットを前記チャンバ内に流すことと、
前記第3の処理ガスセットに約200から約300秒の持続時間にわたって、前記第1の周波数と前記第1の電力レベルの前記第1のRF電力を、前記チャンバの第3の圧力で印加することによって、前記第1の開始層上にバルク窒化ケイ素層を堆積させることであって、前記チャンバの前記第2の圧力は前記チャンバの前記第3の圧力よりも高い、前記第1の開始層上にバルク窒化ケイ素層を堆積させることと
を含む方法。 - 前記ケイ素含有ガスは、シラン(SiH4)を含み、
前記第1の処理ガスセットを流している間に、毎分約10標準立方センチメートル(sccm)から約50sccmの流量で前記ケイ素含有ガスが流され、
前記第1の窒素含有ガスは、アンモニア(NH3)及び二原子窒素ガス(N2)を含み、
前記第1の処理ガスセットを流している間に、約750sccmから約1500sccmの流量で前記アンモニアが流され、約1000から約3000sccmの流量で前記二原子窒素ガス(N2)が流され、
前記第2の窒素含有ガスは、二原子窒素ガス(N2)を含み、
前記第2の処理ガスセットを流している間に、約10000sccmから約20000sccmの流量で前記第2の窒素含有ガスが流され、
前記第3の窒素含有ガスは、アンモニア(NH3)を含み、
前記第3の処理ガスセットを流している間に、約100sccmから約200sccmの流量で前記第2の窒素含有ガスが流され、
前記水素含有ガスは、二原子水素ガス(H2)を含み、
前記第3の処理ガスセットを流している間に、約3000sccmから4000sccmの流量で前記水素含有ガスが流される、請求項14に記載の方法。
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