JP2021140144A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2021140144A5 JP2021140144A5 JP2021015246A JP2021015246A JP2021140144A5 JP 2021140144 A5 JP2021140144 A5 JP 2021140144A5 JP 2021015246 A JP2021015246 A JP 2021015246A JP 2021015246 A JP2021015246 A JP 2021015246A JP 2021140144 A5 JP2021140144 A5 JP 2021140144A5
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- led chips
- micro led
- coupon
- micro
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims 57
- 238000000034 method Methods 0.000 claims 22
- 239000012790 adhesive layer Substances 0.000 claims 12
- 230000002950 deficient Effects 0.000 claims 6
- 238000000407 epitaxy Methods 0.000 claims 6
- 239000000853 adhesive Substances 0.000 claims 3
- 230000001070 adhesive effect Effects 0.000 claims 3
- 238000005401 electroluminescence Methods 0.000 claims 2
- 238000007689 inspection Methods 0.000 claims 2
- 238000005259 measurement Methods 0.000 claims 2
- 238000005424 photoluminescence Methods 0.000 claims 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 1
- 239000011248 coating agent Substances 0.000 claims 1
- 238000000576 coating method Methods 0.000 claims 1
- 239000004205 dimethyl polysiloxane Substances 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
- 239000010410 layer Substances 0.000 claims 1
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 claims 1
- -1 polydimethylsiloxane Polymers 0.000 claims 1
- 229920001296 polysiloxane Polymers 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- 238000011179 visual inspection Methods 0.000 claims 1
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US16/805,911 US11348905B2 (en) | 2020-03-02 | 2020-03-02 | Method and system for assembly of micro-LEDs onto a substrate |
| US16/805,911 | 2020-03-02 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2021140144A JP2021140144A (ja) | 2021-09-16 |
| JP2021140144A5 true JP2021140144A5 (https=) | 2024-02-13 |
| JP7514777B2 JP7514777B2 (ja) | 2024-07-11 |
Family
ID=74668620
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021015246A Active JP7514777B2 (ja) | 2020-03-02 | 2021-02-02 | マイクロledを基板に組み付けるための方法及びシステム |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US11348905B2 (https=) |
| EP (1) | EP3876270B1 (https=) |
| JP (1) | JP7514777B2 (https=) |
| KR (1) | KR102804109B1 (https=) |
| CN (1) | CN113345878B (https=) |
| TW (1) | TWI858227B (https=) |
Families Citing this family (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11842989B2 (en) * | 2020-03-10 | 2023-12-12 | Meta Platforms Technologies, Llc | Integrating control circuits with light emissive circuits with dissimilar wafer sizes |
| TWI872235B (zh) * | 2020-03-30 | 2025-02-11 | 加拿大商弗瑞爾公司 | 微裝置轉移中之偏移對齊及修復 |
| US11677060B2 (en) * | 2020-04-13 | 2023-06-13 | Electronics and Teleocmmunications Research Institute | Method for transferring and bonding of devices |
| TW202310323A (zh) * | 2021-04-27 | 2023-03-01 | 日商昭和電工材料股份有限公司 | Led轉移構件及led裝置的製造方法 |
| US12263576B2 (en) | 2021-08-19 | 2025-04-01 | Hyundai Mobis Co., Ltd. | Robot system for automated assembly of modular component |
| CN115771214A (zh) * | 2021-09-09 | 2023-03-10 | 日月光半导体制造股份有限公司 | 用于形成多个分离组件的模具及装置 |
| KR20240070671A (ko) * | 2021-09-30 | 2024-05-21 | 보드 오브 리전츠, 더 유니버시티 오브 텍사스 시스템 | 픽앤플레이스 조립 툴 및 프로세스 |
| TWI807544B (zh) * | 2021-12-17 | 2023-07-01 | 友達光電股份有限公司 | 顯示面板及其製造方法 |
| KR102700929B1 (ko) * | 2021-12-21 | 2024-08-30 | 한국광기술원 | Led 측정장치 |
| CN114709163A (zh) * | 2022-03-30 | 2022-07-05 | 北京石油化工学院 | 液气双态Mini/Micro LED芯片巨量转移用晶膜及制作方法 |
| CN115101439B (zh) * | 2022-05-27 | 2025-05-02 | 黄招凤 | 物料传送系统及方法 |
| KR102787169B1 (ko) * | 2022-09-06 | 2025-03-26 | 삼성전자주식회사 | 마이크로 반도체 칩의 대량 전사 방법 및 대량 전사 장치 |
| CN117976569A (zh) * | 2022-10-25 | 2024-05-03 | 群创光电股份有限公司 | 电子装置及其制作方法 |
| WO2024193797A1 (en) * | 2023-03-17 | 2024-09-26 | Ams-Osram International Gmbh | Method for evaluating optoelectronic components and test arrangement |
| KR20260041820A (ko) * | 2023-07-18 | 2026-03-27 | 뷰리얼 인크. | 디스플레이 백플레인 상에 집적된 led를 갖는 칩렛 |
| TWI872659B (zh) * | 2023-08-23 | 2025-02-11 | 雷傑科技股份有限公司 | 晶粒填補方法 |
| CN121773762A (zh) * | 2023-09-11 | 2026-03-31 | 东京毅力科创株式会社 | 接合装置、接合系统、接合方法、换载装置以及换载方法 |
| TWI879346B (zh) * | 2023-12-26 | 2025-04-01 | 前源科技股份有限公司 | 電子元件的接合方法與巨量轉移電子元件的方法 |
| TWI890245B (zh) * | 2023-12-27 | 2025-07-11 | 錼創顯示科技股份有限公司 | 元件加工設備 |
Family Cites Families (50)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3994681B2 (ja) * | 2001-04-11 | 2007-10-24 | ソニー株式会社 | 素子の配列方法及び画像表示装置の製造方法 |
| JP4701537B2 (ja) * | 2001-05-16 | 2011-06-15 | ソニー株式会社 | 素子の転写方法及び画像表示装置の製造方法 |
| JP2003162231A (ja) | 2001-11-26 | 2003-06-06 | Sony Corp | 素子の製造方法、素子の配列方法及び画像表示装置の製造方法 |
| US7959261B2 (en) | 2007-05-08 | 2011-06-14 | Lexmark International, Inc. | Micro-fluid ejection devices having reduced input/output addressable heaters |
| WO2009143462A2 (en) * | 2008-05-22 | 2009-11-26 | Vi Systems Gmbh | Method for attaching optical components onto silicon-based integrated circuits |
| US8198369B2 (en) | 2008-08-05 | 2012-06-12 | GM Global Technology Operations LLC | Shape memory polymers with surface having dangling adhesive polymeric chains and methods of making and using the same |
| CN101656233B (zh) | 2008-08-22 | 2012-10-24 | 群康科技(深圳)有限公司 | 薄膜晶体管基板的制造方法 |
| JP2010129700A (ja) | 2008-11-26 | 2010-06-10 | Nitto Denko Corp | ダイシング・ダイボンドフィルム及び半導体装置の製造方法 |
| WO2011123285A1 (en) | 2010-03-29 | 2011-10-06 | Semprius, Inc. | Selective transfer of active components |
| KR100998087B1 (ko) | 2010-04-01 | 2010-12-03 | 한국기계연구원 | 능동 탈부착 척 |
| WO2013010113A1 (en) | 2011-07-14 | 2013-01-17 | The Board Of Trustees Of The University Of Illinois | Non-contact transfer printing |
| US9412727B2 (en) | 2011-09-20 | 2016-08-09 | Semprius, Inc. | Printing transferable components using microstructured elastomeric surfaces with pressure modulated reversible adhesion |
| DE102012112965A1 (de) | 2012-12-21 | 2014-06-26 | Leibniz-Institut Für Neue Materialien Gemeinnützige Gesellschaft Mit Beschränkter Haftung | Gegenstand mit schaltbarer Adhäsion |
| US10046353B2 (en) | 2014-06-06 | 2018-08-14 | The Board Of Trustees Of The University Of Illinois | Microscale stamp with reversible adhesion for transfer printing |
| US9698134B2 (en) * | 2014-11-27 | 2017-07-04 | Sct Technology, Ltd. | Method for manufacturing a light emitted diode display |
| US20160175238A1 (en) | 2014-12-19 | 2016-06-23 | L'oreal | Hair cosmetic composition containing a polyurethane latex polymer and a silicone-organic polymer compound |
| CN113410146A (zh) | 2015-01-23 | 2021-09-17 | 维耶尔公司 | 到受体衬底的选择性微型器件转移 |
| CN107852794B (zh) * | 2015-07-23 | 2020-03-10 | 首尔半导体株式会社 | 显示装置及其制造方法 |
| GB2541970B (en) * | 2015-09-02 | 2020-08-19 | Facebook Tech Llc | Display manufacture |
| WO2017037475A1 (en) * | 2015-09-02 | 2017-03-09 | Oculus Vr, Llc | Assembly of semiconductor devices |
| US10252083B2 (en) | 2015-09-23 | 2019-04-09 | Varian Medical Systems Inc. | Systems, methods, and devices for high-energy irradiation |
| US20170215280A1 (en) | 2016-01-21 | 2017-07-27 | Vuereal Inc. | Selective transfer of micro devices |
| US10698986B2 (en) * | 2016-05-12 | 2020-06-30 | Markany Inc. | Method and apparatus for embedding and extracting text watermark |
| EP3469424A4 (en) * | 2016-06-10 | 2020-01-15 | Applied Materials, Inc. | MASKLESS PARALLEL ASSEMBLY TRANSMISSION OF MICRO COMPONENTS |
| US10533080B2 (en) | 2016-07-26 | 2020-01-14 | The Board Of Trustees Of The University Of Illinois | Transfer printing using shape memory polymers |
| CN107833526B (zh) * | 2016-09-15 | 2021-05-28 | 伊乐视有限公司 | 拾取-移除系统以及发光显示器的修复方法 |
| DE102016221281A1 (de) | 2016-10-28 | 2018-05-03 | Osram Opto Semiconductors Gmbh | Verfahren zum transferieren von halbleiterchips und transferwerkzeug |
| JP2020513681A (ja) * | 2016-11-11 | 2020-05-14 | キューエムエイティ・インコーポレーテッド | 層転写によるマイクロ発光ダイオード(led)製造 |
| US10978530B2 (en) * | 2016-11-25 | 2021-04-13 | Vuereal Inc. | Integration of microdevices into system substrate |
| US10325893B2 (en) * | 2016-12-13 | 2019-06-18 | Hong Kong Beida Jade Bird Display Limited | Mass transfer of micro structures using adhesives |
| US10403537B2 (en) | 2017-03-10 | 2019-09-03 | Facebook Technologies, Llc | Inorganic light emitting diode (ILED) assembly via direct bonding |
| TWI681472B (zh) | 2017-04-10 | 2020-01-01 | 英屬開曼群島商錼創科技股份有限公司 | 傳輸微小元件的方法 |
| TWI661533B (zh) * | 2017-06-07 | 2019-06-01 | Asti Global Inc., Taiwan | 晶片安裝系統以及晶片安裝方法 |
| JP6720333B2 (ja) | 2017-06-12 | 2020-07-08 | ユニカルタ・インコーポレイテッド | 基板上に個別部品を並列に組み立てる方法 |
| US20190043843A1 (en) * | 2017-08-01 | 2019-02-07 | Innolux Corporation | Methods for manufacturing a display device |
| US20190058081A1 (en) * | 2017-08-18 | 2019-02-21 | Khaled Ahmed | Micro light-emitting diode (led) display and assembly apparatus |
| TWI653694B (zh) * | 2017-09-13 | 2019-03-11 | 英屬開曼群島商錼創科技股份有限公司 | 微型發光元件陣列製造方法、轉移載板以及微型發光元件陣列 |
| US10615063B2 (en) | 2017-11-08 | 2020-04-07 | Facebook Technologies, Llc | Vacuum pick-up head for semiconductor chips |
| TWI689105B (zh) | 2017-12-19 | 2020-03-21 | 優顯科技股份有限公司 | 光電半導體戳記及其製造方法、與光電半導體裝置 |
| US11538785B2 (en) * | 2017-12-19 | 2022-12-27 | Ultra Display Technology Corp. | Method of using optoelectronic semiconductor stamp to manufacture optoelectronic semiconductor device |
| KR102428029B1 (ko) * | 2017-12-20 | 2022-08-02 | (주)포인트엔지니어링 | 마이크로 led 전사헤드 |
| CN111615749B (zh) | 2018-01-24 | 2024-11-19 | 苹果公司 | 发光结构 |
| JP6916525B2 (ja) | 2018-02-06 | 2021-08-11 | 株式会社ブイ・テクノロジー | Ledディスプレイの製造方法 |
| KR20190114334A (ko) * | 2018-03-29 | 2019-10-10 | (주)포인트엔지니어링 | 마이크로 led 검사 및 리페어 방법 |
| WO2019237228A1 (zh) * | 2018-06-11 | 2019-12-19 | 厦门三安光电有限公司 | 发光组件 |
| US10985046B2 (en) | 2018-06-22 | 2021-04-20 | Veeco Instruments Inc. | Micro-LED transfer methods using light-based debonding |
| CN109473532B (zh) * | 2018-11-20 | 2020-11-06 | 合肥京东方光电科技有限公司 | 一种Micro LED显示基板的制作方法 |
| JP2019140400A (ja) | 2019-04-08 | 2019-08-22 | ゴルテック.インク | マイクロ発光ダイオードの事前排除方法、製造方法、装置及び電子機器 |
| US11521887B2 (en) * | 2019-12-18 | 2022-12-06 | Seoul Viosys Co., Ltd. | Method of transferring micro LED and micro LED transferring apparatus |
| JP2021110875A (ja) | 2020-01-14 | 2021-08-02 | 三星電子株式会社Samsung Electronics Co., Ltd. | ディスプレイ装置の製造方法、ディスプレイ装置、およびディスプレイ装置製造用中間体 |
-
2020
- 2020-03-02 US US16/805,911 patent/US11348905B2/en active Active
-
2021
- 2021-01-29 TW TW110103438A patent/TWI858227B/zh active
- 2021-02-01 CN CN202110136931.4A patent/CN113345878B/zh active Active
- 2021-02-02 JP JP2021015246A patent/JP7514777B2/ja active Active
- 2021-02-09 KR KR1020210017940A patent/KR102804109B1/ko active Active
- 2021-02-17 EP EP21157734.1A patent/EP3876270B1/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP2021140144A5 (https=) | ||
| JP7514777B2 (ja) | マイクロledを基板に組み付けるための方法及びシステム | |
| TWI546934B (zh) | Led陣列擴張方法及led陣列單元 | |
| US11062936B1 (en) | Transfer stamps with multiple separate pedestals | |
| TWI659486B (zh) | 轉移載板與晶粒載板 | |
| JP2021077877A5 (https=) | ||
| US20220410550A1 (en) | Transfer method of devices | |
| JP2013138152A (ja) | 搬送治具、搬送方法、および搬送治具材料 | |
| CN112735972B (zh) | 一种微元件的转移基板及其制造方法 | |
| JP2021077877A (ja) | 剛性の変化に基づいて物体を選択的に保持及び解放する移送要素 | |
| CN112967971A (zh) | 一种Micro-LED的转移基板及其制备方法 | |
| KR20210019374A (ko) | 레이저를 이용한 개별 소자들의 전사 방법 | |
| CN110391165A (zh) | 转移载板与晶粒载板 | |
| JP2019175978A5 (https=) | ||
| JP2020145243A (ja) | チップ転写板ならびにチップ転写方法、画像表示装置の製造方法および半導体装置の製造方法 | |
| CN112820752B (zh) | 微发光二极管阵列基板及微发光二极管的转移方法 | |
| CN114203616B (zh) | 微型发光二极管的转移装置和转移方法 | |
| CN113745137A (zh) | 微型发光二极管的转移方法与显示面板 | |
| CN116978849A (zh) | 一种新的微型led巨量转移方法 | |
| US10457032B2 (en) | Methods and systems for separating a plurality of directed self-assembled diamagnetic components | |
| CN116995017A (zh) | 一种基于激光工艺的微型led巨量转移装置及方法 | |
| KR102463048B1 (ko) | 자화 방식을 이용한 개별 소자들의 전사 방법 | |
| WO2023108449A1 (zh) | 寻址转移设备和寻址转移方法 | |
| JP2018078132A (ja) | 精密部品用の保持治具及びその製造方法 | |
| TWI888106B (zh) | 用於全彩顯示器之微型發光二極體巨量轉移方法 |