JP2021140144A - マイクロledを基板に組み付けるための方法及びシステム - Google Patents
マイクロledを基板に組み付けるための方法及びシステム Download PDFInfo
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Abstract
Description
Claims (24)
- エピタキシーウェハから第1のクーポン基板に、マイクロLEDチップを移送することであって、前記第1のクーポン基板は、前記マイクロLEDチップを一時的に保持する第1の軟質接着層を有する、ことと、
1つ以上の移送基板を介して前記マイクロLEDチップのサブセットを、前記第1のクーポン基板から前記マイクロLEDチップのサブセットを一時的に保持する第2の軟質接着層を有する第2のクーポン基板に移送することと、
前記1つ以上の移送基板を介して前記マイクロLEDチップのパターンを、別の基板から前記第2のクーポン基板に移送して、前記マイクロLEDチップのサブセット内の空孔を充填することであって、前記第1の移送基板及び前記第2の移送基板は、複数の微小物体を同時に保持し、解放するように動作可能である、ことと、を含む方法。 - 前記第1のクーポン基板から前記第2のクーポンへの前記マイクロLEDチップの前記サブセットは、前記第1のクーポン基板上の前記マイクロLEDチップのピッチと比較して、前記第2のクーポン基板上に増加したピッチを有する、請求項1に記載の方法。
- 前記第1のクーポン基板上で不良マイクロLEDを検出することを更に含み、前記マイクロLEDの前記サブセットは、前記不良マイクロLEDを除外するように選択される、請求項1に記載の方法。
- 前記不良マイクロLEDを検出することは、フォトルミネッセンス検査、エレクトロルミネッセンス検査、及び顕微鏡を用いた目視検査のうちの1つ以上を含む、請求項3に記載の方法。
- 前記第1の移送基板及び前記第2の移送基板は、それぞれの複数の前記マイクロLEDチップを同時に保持し、解放するように個別に作動する複数の移送要素を有する、請求項1に記載の方法。
- 各移送要素は、前記移送要素の接着性及びヤング率のうちの少なくとも1つを変化させるそれぞれの加熱要素を介して起動させられる、請求項5に記載の方法。
- 前記第1の軟質接着層及び前記第2の軟質接着層は、前記移送要素の保持力よりも小さく、かつ前記移送要素の剥離力よりも大きい接着力を及ぼす、請求項5に記載の方法。
- 前記空孔は、前記第1のクーポン基板から前記第2のクーポン基板に1つ以上のマイクロLEDチップが移送されなかったことから生じる、請求項1に記載の方法。
- 前記空孔は、前記第1のクーポン基板から前記第2のクーポン基板に不良マイクロLEDチップを意図的に移送しないことから生じる、請求項1に記載の方法。
- 前記第2のクーポン基板から1つ以上の不良マイクロLEDチップを選択的に除去して、前記第2のクーポン基板上に前記空孔をもたらすことを更に含む、請求項1に記載の方法。
- 前記不良マイクロLEDチップを選択的に除去すること及び前記空孔を充填することは、前記クーポン基板上の全てのマイクロLEDチップが収率閾値を満たすまで繰り返される、請求項10に記載の方法。
- 前記エピタキシーウェハから前記第1のクーポン基板に前記マイクロLEDチップを移送することは、
キャリア基板上に接着剤をコーティングすることと、
前記マイクロLEDチップが前記接着剤に接合されるように、前記エピタキシーウェハを移動して前記キャリア基板に接触させることと、
前記エピタキシー層の基板を前記マイクロLEDチップから熱的又は光学的に解放することと、
前記マイクロLEDチップが前記第1の軟質接着層に付着するように、前記キャリア基板を移動して前記第1のクーポン基板に接触させることと、
前記マイクロLEDチップを前記キャリア基板から前記第1のクーポン基板に移送することと、を含む、請求項1に記載の方法。 - 前記エピタキシーウェハから前記キャリア基板に前記マイクロLEDチップを移送することは、前記キャリア基板及び前記エピタキシーウェハのうちの1つを介してレーザ光を当てることを含む、請求項12に記載の方法。
- 前記キャリア基板から前記第1のクーポン基板に前記マイクロLEDチップを移送することは、前記キャリア基板を反転させて前記第1のクーポン基板と向き合わせることを含む、請求項12に記載の方法。
- 前記キャリア基板から前記第1のクーポン基板に前記マイクロLEDチップを移送することは、紫外線、熱、又は機械的力を適用することのうちの少なくとも1つを含む、請求項12に記載の方法。
- 前記キャリア基板上の前記マイクロLEDチップを試験することを更に含み、前記試験することは、前記マイクロLEDチップのエレクトロルミネッセンス測定及びフォトルミネッセンス測定のうちの1つ以上を含む、請求項12に記載の方法。
- 前記第1の軟質接着層及び前記第2の軟質接着層は、シリコーンゲル及びポリジメチルシロキサンのうちの少なくとも1つを含む、請求項1に記載の方法。
- 前記第2のクーポン基板からバックプレーン基板に前記マイクロLEDチップの全てを移送してディスプレイを形成することを更に含む、請求項1に記載の方法。
- 前記バックプレーンは、薄膜トランジスタが上に形成されている基板を含む、請求項18に記載の方法。
- 前記バックプレーンは、PCB基板又はシリコン基板を含む、請求項18に記載の方法。
- 前記マイクロLEDは、1マイクロメートル〜1ミリメートルの最大寸法を有する、請求項1に記載の方法。
- 前記他の基板は、前記マイクロLEDチップのパターンを保持する第3の軟質接着層を含む、請求項1に記載の方法。
- 複数の微小物体を同時に保持し、解放するように個々に作動する複数の移送要素をそれぞれ有する1つ以上の移送基板と、
複数のマイクロLEDが形成されるエピタキシーウェハと、
それぞれの第1の軟質接着層及び第2の軟質接着層を含む、第1のクーポン基板及び第2のクーポン基板と、
前記1つ以上の移送基板に連結されたコントローラであって、
前記エピタキシーウェハから前記第1のクーポン基板の前記第1の軟質接着層に前記マイクロLEDチップを移送し、
前記1つ以上の移送基板を介して、前記第1のクーポン基板から前記第2のクーポン基板の前記第2の軟質接着層に前記マイクロLEDチップのサブセットを移送し、
前記1つ以上の移送基板を介して、別の基板から前記第2のクーポン基板にマイクロLEDチップのパターンを移送して、前記マイクロLEDチップのサブセット内の空孔を充填するように動作可能である、コントローラと、を備える、システム。 - ディスプレイのバックプレーン基板を更に備え、前記コントローラは、前記第2のクーポン基板から前記バックプレーン基板に前記マイクロLEDチップの全てを移送して、前記ディスプレイを形成するように更に動作可能である、請求項23に記載のシステム。
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