JP2021132288A - 水晶振動子の収容ケース - Google Patents
水晶振動子の収容ケース Download PDFInfo
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- JP2021132288A JP2021132288A JP2020026370A JP2020026370A JP2021132288A JP 2021132288 A JP2021132288 A JP 2021132288A JP 2020026370 A JP2020026370 A JP 2020026370A JP 2020026370 A JP2020026370 A JP 2020026370A JP 2021132288 A JP2021132288 A JP 2021132288A
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- 239000013078 crystal Substances 0.000 title claims abstract description 163
- 239000010408 film Substances 0.000 claims description 29
- 238000009434 installation Methods 0.000 claims description 19
- 238000003860 storage Methods 0.000 claims description 12
- 238000000034 method Methods 0.000 claims description 10
- 230000010355 oscillation Effects 0.000 claims description 10
- 239000010409 thin film Substances 0.000 claims description 7
- 238000012544 monitoring process Methods 0.000 claims description 4
- 238000000605 extraction Methods 0.000 abstract description 7
- 230000002093 peripheral effect Effects 0.000 description 18
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 14
- 230000001105 regulatory effect Effects 0.000 description 6
- 229920003002 synthetic resin Polymers 0.000 description 3
- 239000000057 synthetic resin Substances 0.000 description 3
- 230000004308 accommodation Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 1
- 235000012489 doughnuts Nutrition 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000005293 physical law Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67363—Closed carriers specially adapted for containing substrates other than wafers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67386—Closed carriers characterised by the construction of the closed carrier
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B17/00—Measuring arrangements characterised by the use of infrasonic, sonic or ultrasonic vibrations
- G01B17/02—Measuring arrangements characterised by the use of infrasonic, sonic or ultrasonic vibrations for measuring thickness
- G01B17/025—Measuring arrangements characterised by the use of infrasonic, sonic or ultrasonic vibrations for measuring thickness for measuring thickness of coating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D71/00—Bundles of articles held together by packaging elements for convenience of storage or transport, e.g. portable segregating carrier for plural receptacles such as beer cans or pop bottles; Bales of material
- B65D71/70—Trays provided with projections or recesses in order to assemble multiple articles, e.g. intermediate elements for stacking
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D55/00—Accessories for container closures not otherwise provided for
- B65D55/02—Locking devices; Means for discouraging or indicating unauthorised opening or removal of closure
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
- B65D85/30—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D11/00—Component parts of measuring arrangements not specially adapted for a specific variable
- G01D11/24—Housings ; Casings for instruments
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/04—Analysing solids
- G01N29/12—Analysing solids by measuring frequency or resonance of acoustic waves
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/22—Details, e.g. general constructional or apparatus details
- G01N29/223—Supports, positioning or alignment in fixed situation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/30—Structural arrangements specially adapted for testing or measuring during manufacture or treatment, or specially adapted for reliability measurements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/02—Indexing codes associated with the analysed material
- G01N2291/025—Change of phase or condition
- G01N2291/0256—Adsorption, desorption, surface mass change, e.g. on biosensors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/02—Indexing codes associated with the analysed material
- G01N2291/028—Material parameters
- G01N2291/02854—Length, thickness
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Mechanical Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Chemical & Material Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- General Health & Medical Sciences (AREA)
- Biochemistry (AREA)
- Analytical Chemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Health & Medical Sciences (AREA)
- Acoustics & Sound (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
- Length Measuring Devices Characterised By Use Of Acoustic Means (AREA)
- Packaging Frangible Articles (AREA)
- Oscillators With Electromechanical Resonators (AREA)
Abstract
Description
Claims (5)
- 真空雰囲気での成膜処理中に共振周波数を測定することでその表面に成膜される薄膜の膜厚をモニタするために利用される水晶振動子の収容ケースにおいて、
上面に、その主面を上下方向に向けた水平姿勢での水晶振動子の収容を可能とする複数個の第1凹部が第1仮想円周上に間隔を置いて設けられたケース本体と、ケース本体にその上方から着脱自在に装着される第1キャップ体と、ケース本体に対して第1キャップ体を係止する係止手段とを備え、ケース本体に第1キャップ体が係止された状態で第1凹部に収容された水晶振動子の飛び出しが規制されるように構成したことを特徴とする水晶振動子の収容ケース。 - 前記第1凹部の周囲にこれに連続させてこの第1凹部より小面積の第2凹部が設けられていることを特徴とする請求項1記載の水晶振動子の収容ケース。
- 前記第1凹部に、この第1凹部にその上方から落とし込まれた水晶振動子をその外縁部で支持する支持片が形成されていることを特徴とする請求項1または請求項2記載の水晶振動子の収容ケース。
- ケース本体への第1キャップ体の装着に先立って、ケース本体にその上方から着脱自在に装着できる第2キャップ体を備え、ケース本体の上面に対向する第2キャップ体の面に、いずれか1個の第1凹部を臨み、第1凹部に収容された水晶振動子の取り出しを可能とする取出開口が形成されていることを特徴とする請求項1〜請求項3のいずれか1項に記載の水晶振動子の収容ケース。
- 請求項1〜請求項4のいずれか1項に記載の水晶振動子の収容ケースであって、
回転中心を中心とする第2仮想円周上に間隔を置いて複数枚の水晶振動子が設置される設置凹部を備える水晶発振式膜厚モニタ用センサヘッドのホルダに、未使用の水晶振動子をセットできるようにしたものにおいて、
ホルダがその水晶振動子の設置面に回転中心を通る軸線を持つボス部が形成されたものとし、前記第1キャップ体の上面に、ボス部が嵌合して第1仮想円と第2仮想円とを同心に一致させる嵌合凹部が設けられると共に、第1凹部と設置凹部とが上下方向で合致するようにホルダに対する第1キャップ部の位相決めをする位相決め手段が設けられていることを特徴とする水晶振動子の収容ケース。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2020026370A JP6802937B1 (ja) | 2020-02-19 | 2020-02-19 | 水晶振動子の収容ケース |
TW109132676A TWI738519B (zh) | 2020-02-19 | 2020-09-22 | 水晶振盪器之收容盒 |
US17/155,766 US11437256B2 (en) | 2020-02-19 | 2021-01-22 | Housing case for crystal oscillator |
KR1020210015787A KR102538003B1 (ko) | 2020-02-19 | 2021-02-04 | 수정 진동자 수용 케이스 |
CN202110192100.9A CN113277225B (zh) | 2020-02-19 | 2021-02-19 | 石英振荡器的收纳箱 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2020026370A JP6802937B1 (ja) | 2020-02-19 | 2020-02-19 | 水晶振動子の収容ケース |
Publications (2)
Publication Number | Publication Date |
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JP6802937B1 JP6802937B1 (ja) | 2020-12-23 |
JP2021132288A true JP2021132288A (ja) | 2021-09-09 |
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JP2020026370A Active JP6802937B1 (ja) | 2020-02-19 | 2020-02-19 | 水晶振動子の収容ケース |
Country Status (5)
Country | Link |
---|---|
US (1) | US11437256B2 (ja) |
JP (1) | JP6802937B1 (ja) |
KR (1) | KR102538003B1 (ja) |
CN (1) | CN113277225B (ja) |
TW (1) | TWI738519B (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
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CN113124807A (zh) * | 2021-03-05 | 2021-07-16 | 深圳市福浪电子有限公司 | 一种晶振探头用晶振盒 |
CN114393148B (zh) * | 2022-01-19 | 2024-04-05 | 绍兴奥美电子科技有限公司 | 晶体振荡器切脚机构及其切脚方法 |
CN114904436B (zh) * | 2022-04-20 | 2023-11-07 | 重庆医药高等专科学校附属第一医院 | 一种血小板振荡收纳箱 |
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JP2014007290A (ja) * | 2012-06-25 | 2014-01-16 | Shin Etsu Polymer Co Ltd | 水晶ウェーハ用キャリア治具 |
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2020
- 2020-02-19 JP JP2020026370A patent/JP6802937B1/ja active Active
- 2020-09-22 TW TW109132676A patent/TWI738519B/zh active
-
2021
- 2021-01-22 US US17/155,766 patent/US11437256B2/en active Active
- 2021-02-04 KR KR1020210015787A patent/KR102538003B1/ko active IP Right Grant
- 2021-02-19 CN CN202110192100.9A patent/CN113277225B/zh active Active
Patent Citations (6)
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JP2002087490A (ja) * | 2000-09-13 | 2002-03-27 | Sony Corp | 電子部品用トレイ集合体 |
US9920418B1 (en) * | 2010-09-27 | 2018-03-20 | James Stabile | Physical vapor deposition apparatus having a tapered chamber |
JP2012169168A (ja) * | 2011-02-15 | 2012-09-06 | Hitachi High-Technologies Corp | 水晶発振式膜厚モニタ装置、及び、これを用いたel材料の蒸発源装置と薄膜形成装置 |
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JP2014007290A (ja) * | 2012-06-25 | 2014-01-16 | Shin Etsu Polymer Co Ltd | 水晶ウェーハ用キャリア治具 |
Also Published As
Publication number | Publication date |
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TWI738519B (zh) | 2021-09-01 |
CN113277225A (zh) | 2021-08-20 |
KR102538003B1 (ko) | 2023-05-30 |
US20210257238A1 (en) | 2021-08-19 |
CN113277225B (zh) | 2022-05-13 |
US11437256B2 (en) | 2022-09-06 |
JP6802937B1 (ja) | 2020-12-23 |
TW202133552A (zh) | 2021-09-01 |
KR20210105812A (ko) | 2021-08-27 |
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