JP2020534576A - 投影リソグラフィ用の投影露光装置の光学系の光学コンポーネントとしてのミラーを製造する方法 - Google Patents
投影リソグラフィ用の投影露光装置の光学系の光学コンポーネントとしてのミラーを製造する方法 Download PDFInfo
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- JP2020534576A JP2020534576A JP2020515970A JP2020515970A JP2020534576A JP 2020534576 A JP2020534576 A JP 2020534576A JP 2020515970 A JP2020515970 A JP 2020515970A JP 2020515970 A JP2020515970 A JP 2020515970A JP 2020534576 A JP2020534576 A JP 2020534576A
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- 230000003287 optical effect Effects 0.000 title claims abstract description 45
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 33
- 238000001459 lithography Methods 0.000 title claims abstract description 6
- 230000001133 acceleration Effects 0.000 claims abstract description 40
- 239000000758 substrate Substances 0.000 claims abstract description 24
- 230000005484 gravity Effects 0.000 claims abstract description 4
- 238000000034 method Methods 0.000 claims description 10
- 238000005286 illumination Methods 0.000 claims description 8
- 239000002086 nanomaterial Substances 0.000 claims description 6
- 230000000007 visual effect Effects 0.000 description 12
- 238000003384 imaging method Methods 0.000 description 9
- 238000006073 displacement reaction Methods 0.000 description 5
- 230000006870 function Effects 0.000 description 4
- 238000001393 microlithography Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 3
- 206010010071 Coma Diseases 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 210000001747 pupil Anatomy 0.000 description 2
- 239000006094 Zerodur Substances 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 239000003574 free electron Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000002241 glass-ceramic Substances 0.000 description 1
- 230000012447 hatching Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70058—Mask illumination systems
- G03F7/7015—Details of optical elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/0025—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for optical correction, e.g. distorsion, aberration
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q5/00—Driving or feeding mechanisms; Control arrangements therefor
- B23Q5/02—Driving main working members
- B23Q5/04—Driving main working members rotary shafts, e.g. working-spindles
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B17/00—Systems with reflecting surfaces, with or without refracting elements
- G02B17/02—Catoptric systems, e.g. image erecting and reversing system
- G02B17/06—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/62—Optical apparatus specially adapted for adjusting optical elements during the assembly of optical systems
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
- G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
- G02B7/1822—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors comprising means for aligning the optical axis
- G02B7/1824—Manual alignment
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70233—Optical aspects of catoptric systems, i.e. comprising only reflective elements, e.g. extreme ultraviolet [EUV] projection systems
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Lenses (AREA)
- Microscoopes, Condenser (AREA)
Abstract
Description
Claims (7)
- 投影リソグラフィ用の投影露光装置(1)の光学系の光学コンポーネントとしてのミラー(M1〜M10)を製造する方法において、
地球重力加速度の平均値を求めるステップと、
製造場所における前記重力加速度と前記重力加速度平均値との間の重力加速度差を求めるステップと、
前記ミラーの反射面(20)の目標表面形状を求めるステップと、
前記重力加速度平均値の影響下でミラー基板(18)の前記反射面(20)の現在の表面形状が前記目標表面形状から所定の表面形状誤差量許容値(Pmax)よりも大きく外れないように、前記重力定数差を考慮して前記製造場所において前記ミラー基板(18)を加工するステップと
を含む方法。 - 請求項1に記載の方法において、前記重力加速度平均値の影響下で、前記反射面(20)の前記現在の表面形状と前記目標表面形状との間の偏差が前記表面形状誤差量許容値(Pmax)内にある否かを確認するために、
前記重力加速度平均値の影響下で前記ミラー(M1〜M10)の使用位置において前記目標表面形状が生じるように前記ミラー(M1〜M10)の前記反射面(20)が前記製造場所で有しなければならない目標見込み表面形状を計算するステップと、
前記ミラー基板(18)の前記反射面(20)の現在の表面形状が前記目標見込み表面形状から所定の表面形状誤差量見込み許容値よりも大きく外れないように、前記製造場所において前記ミラー基板(18)を加工するステップと
の手順を踏む方法。 - ミラー(M1〜M10)であって、請求項1又は2に記載の方法により製造されたミラー。
- 請求項3に記載のミラーを有する投影リソグラフィ用の投影露光装置(10)の光学系。
- 請求項4に記載の光学系を備え且つ照明光(3)を生成する光源(2)を備えた投影露光装置。
- 構造化コンポーネントを製造する方法において、
レチクル(10)及びウェハ(11)を用意するステップと、
請求項5に記載の投影露光装置を用いて前記レチクル(10)上の構造を前記ウェハ(11)の感光層に投影するステップと、
前記ウェハ(11)上のマイクロ構造又はナノ構造を作製するステップと
を含む方法。 - 請求項6に記載の方法により製造された構造化コンポーネント。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102017216458.1A DE102017216458A1 (de) | 2017-09-18 | 2017-09-18 | Verfahren zur Herstellung eines Spiegels als optischer Komponente für ein optisches System einer Projektionsbelichtungsanlage für die Projektionslithographie |
DE102017216458.1 | 2017-09-18 | ||
PCT/EP2018/072597 WO2019052790A1 (en) | 2017-09-18 | 2018-08-22 | METHOD FOR MANUFACTURING A MIRROR AS AN OPTICAL COMPONENT FOR AN OPTICAL SYSTEM OF A PROJECTION EXPOSURE APPARATUS FOR PROJECTION LITHOGRAPHY |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2020534576A true JP2020534576A (ja) | 2020-11-26 |
JP7242642B2 JP7242642B2 (ja) | 2023-03-20 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2020515970A Active JP7242642B2 (ja) | 2017-09-18 | 2018-08-22 | 投影リソグラフィ用の投影露光装置の光学系の光学コンポーネントとしてのミラーを製造する方法 |
Country Status (6)
Country | Link |
---|---|
US (1) | US11092897B2 (ja) |
JP (1) | JP7242642B2 (ja) |
KR (1) | KR20200054976A (ja) |
DE (1) | DE102017216458A1 (ja) |
TW (1) | TWI798263B (ja) |
WO (1) | WO2019052790A1 (ja) |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2000292613A (ja) * | 1999-04-06 | 2000-10-20 | Canon Inc | 光学素子 |
JP2003332200A (ja) * | 2002-05-09 | 2003-11-21 | Nikon Corp | 光学系の測定方法、光学系の補正方法、光学系の評価方法、投影光学系の製造方法、及び投影光学系 |
DE102012212953A1 (de) * | 2012-07-24 | 2013-06-06 | Carl Zeiss Smt Gmbh | Spiegelanordnung für eine Lithographieanlage |
JP2014123131A (ja) * | 2004-12-23 | 2014-07-03 | Carl Zeiss Smt Gmbh | 遮光瞳を有する高開口率対物光学系 |
JP2014521204A (ja) * | 2011-07-01 | 2014-08-25 | カール・ツァイス・エスエムティー・ゲーエムベーハー | 個々に能動的に支持されたコンポーネントを有する光学結像装置 |
JP2014526792A (ja) * | 2012-03-05 | 2014-10-06 | カール・ツァイス・エスエムティー・ゲーエムベーハー | 振動遮断支持ユニットを有する光学結像装置 |
DE102016206113A1 (de) * | 2016-04-13 | 2017-03-30 | Carl Zeiss Smt Gmbh | Spiegel, lithographieanlage und verfahren zum herstellen einer lithographieanlage |
Family Cites Families (12)
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JP4717382B2 (ja) * | 2004-06-15 | 2011-07-06 | キヤノン株式会社 | 光学機器 |
CN103076723A (zh) | 2005-09-13 | 2013-05-01 | 卡尔蔡司Smt有限责任公司 | 微光刻投影光学系统 |
KR101645142B1 (ko) | 2007-10-26 | 2016-08-02 | 칼 짜이스 에스엠티 게엠베하 | 결상 광학 시스템 및 이러한 유형의 결상 광학 시스템을 구비하는 마이크로리소그래피용 투영 노광 장치 |
DE102008049616B4 (de) * | 2008-09-30 | 2012-03-29 | Carl Zeiss Smt Gmbh | Projektionsbelichtungsanlage für die Mikrolithographie zur Herstellung von Halbleiterbauelementen |
US8092031B2 (en) * | 2009-03-03 | 2012-01-10 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Systems and methods for mirror mounting with minimized distortion |
DE102010029050A1 (de) | 2010-05-18 | 2011-03-31 | Carl Zeiss Smt Gmbh | Vergrößernde abbildende Optik sowie Metrologiesystem mit einer derartigen abbildenden Optik |
DE102011075393B4 (de) * | 2011-05-06 | 2013-08-14 | Carl Zeiss Smt Gmbh | Anordnung zur Aktuierung eines Elementes in einer Projektionsbelichtungsanlage |
DE102012202536A1 (de) * | 2012-02-20 | 2013-08-22 | Carl Zeiss Smt Gmbh | Projektionsbelichtungsverfahren und Projektionsbelichtungsanlage für die Mikrolithographie |
DE102013214989A1 (de) | 2013-07-31 | 2014-08-14 | Carl Zeiss Smt Gmbh | Variabel einstellbare Spiegelanordnung mit Magnetaktuatoren |
DE102015226531A1 (de) | 2015-04-14 | 2016-10-20 | Carl Zeiss Smt Gmbh | Abbildende Optik zur Abbildung eines Objektfeldes in ein Bildfeld sowie Projektionsbelichtungsanlage mit einer derartigen abbildenden Optik |
KR20180014740A (ko) | 2015-05-28 | 2018-02-09 | 칼 짜이스 에스엠테 게엠베하 | 대물 필드를 이미지 필드 내로 이미징하기 위한 이미징 광학 유닛, 및 이러한 이미징 광학 유닛을 포함하는 투영 노광 장치 |
JP6980660B2 (ja) * | 2015-12-15 | 2021-12-15 | カール・ツァイス・エスエムティー・ゲーエムベーハー | リソグラフィ装置用の光学デバイス及びリソグラフィ装置 |
-
2017
- 2017-09-18 DE DE102017216458.1A patent/DE102017216458A1/de not_active Ceased
-
2018
- 2018-08-22 KR KR1020207007738A patent/KR20200054976A/ko not_active Application Discontinuation
- 2018-08-22 JP JP2020515970A patent/JP7242642B2/ja active Active
- 2018-08-22 WO PCT/EP2018/072597 patent/WO2019052790A1/en active Application Filing
- 2018-09-14 TW TW107132481A patent/TWI798263B/zh active
-
2020
- 2020-03-06 US US16/811,378 patent/US11092897B2/en active Active
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JP2000292613A (ja) * | 1999-04-06 | 2000-10-20 | Canon Inc | 光学素子 |
JP2003332200A (ja) * | 2002-05-09 | 2003-11-21 | Nikon Corp | 光学系の測定方法、光学系の補正方法、光学系の評価方法、投影光学系の製造方法、及び投影光学系 |
JP2014123131A (ja) * | 2004-12-23 | 2014-07-03 | Carl Zeiss Smt Gmbh | 遮光瞳を有する高開口率対物光学系 |
JP2014521204A (ja) * | 2011-07-01 | 2014-08-25 | カール・ツァイス・エスエムティー・ゲーエムベーハー | 個々に能動的に支持されたコンポーネントを有する光学結像装置 |
JP2014526792A (ja) * | 2012-03-05 | 2014-10-06 | カール・ツァイス・エスエムティー・ゲーエムベーハー | 振動遮断支持ユニットを有する光学結像装置 |
DE102012212953A1 (de) * | 2012-07-24 | 2013-06-06 | Carl Zeiss Smt Gmbh | Spiegelanordnung für eine Lithographieanlage |
DE102016206113A1 (de) * | 2016-04-13 | 2017-03-30 | Carl Zeiss Smt Gmbh | Spiegel, lithographieanlage und verfahren zum herstellen einer lithographieanlage |
Also Published As
Publication number | Publication date |
---|---|
US11092897B2 (en) | 2021-08-17 |
TW201921033A (zh) | 2019-06-01 |
DE102017216458A1 (de) | 2019-03-21 |
JP7242642B2 (ja) | 2023-03-20 |
TWI798263B (zh) | 2023-04-11 |
US20200206855A1 (en) | 2020-07-02 |
KR20200054976A (ko) | 2020-05-20 |
WO2019052790A1 (en) | 2019-03-21 |
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