JP2018534639A - 物体視野を像視野内に結像するための結像光学ユニット及びそのような結像光学ユニットを含む投影露光装置 - Google Patents
物体視野を像視野内に結像するための結像光学ユニット及びそのような結像光学ユニットを含む投影露光装置 Download PDFInfo
- Publication number
- JP2018534639A JP2018534639A JP2018543437A JP2018543437A JP2018534639A JP 2018534639 A JP2018534639 A JP 2018534639A JP 2018543437 A JP2018543437 A JP 2018543437A JP 2018543437 A JP2018543437 A JP 2018543437A JP 2018534639 A JP2018534639 A JP 2018534639A
- Authority
- JP
- Japan
- Prior art keywords
- optical unit
- mirrors
- mirror
- imaging optical
- imaging
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 177
- 238000003384 imaging method Methods 0.000 title claims abstract description 115
- 238000001459 lithography Methods 0.000 claims abstract description 4
- 238000005286 illumination Methods 0.000 claims description 17
- 238000000034 method Methods 0.000 claims description 8
- 239000002086 nanomaterial Substances 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 abstract description 2
- 230000009467 reduction Effects 0.000 description 17
- 230000000694 effects Effects 0.000 description 16
- 210000001747 pupil Anatomy 0.000 description 15
- 230000004075 alteration Effects 0.000 description 11
- 238000009304 pastoral farming Methods 0.000 description 9
- 239000000758 substrate Substances 0.000 description 9
- 230000006870 function Effects 0.000 description 8
- 230000002093 peripheral effect Effects 0.000 description 8
- 238000006073 displacement reaction Methods 0.000 description 7
- 239000011248 coating agent Substances 0.000 description 6
- 238000000576 coating method Methods 0.000 description 6
- 238000002310 reflectometry Methods 0.000 description 6
- 230000005540 biological transmission Effects 0.000 description 5
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 4
- 229910052750 molybdenum Inorganic materials 0.000 description 4
- 239000011733 molybdenum Substances 0.000 description 4
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 3
- 229910052707 ruthenium Inorganic materials 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000001393 microlithography Methods 0.000 description 2
- 230000000007 visual effect Effects 0.000 description 2
- 206010010071 Coma Diseases 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000003574 free electron Substances 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000001902 propagating effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000004513 sizing Methods 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B17/00—Systems with reflecting surfaces, with or without refracting elements
- G02B17/02—Catoptric systems, e.g. image erecting and reversing system
- G02B17/06—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror
- G02B17/0626—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror using three curved mirrors
- G02B17/0642—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror using three curved mirrors off-axis or unobscured systems in which not all of the mirrors share a common axis of rotational symmetry, e.g. at least one of the mirrors is warped, tilted or decentered with respect to the other elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B17/00—Systems with reflecting surfaces, with or without refracting elements
- G02B17/02—Catoptric systems, e.g. image erecting and reversing system
- G02B17/06—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror
- G02B17/0647—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror using more than three curved mirrors
- G02B17/0663—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror using more than three curved mirrors off-axis or unobscured systems in which not all of the mirrors share a common axis of rotational symmetry, e.g. at least one of the mirrors is warped, tilted or decentered with respect to the other elements
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70233—Optical aspects of catoptric systems, i.e. comprising only reflective elements, e.g. extreme ultraviolet [EUV] projection systems
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70316—Details of optical elements, e.g. of Bragg reflectors, extreme ultraviolet [EUV] multilayer or bilayer mirrors or diffractive optical elements
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Lenses (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Abstract
【選択図】図2
Description
Claims (11)
- 投影リソグラフィのための結像光学ユニット(7;21;22;23;24)であって、
結像光(3)を結像光ビーム経路に沿って物体平面(5)の物体視野(4)から像平面(9)の像視野(8)内に誘導するための複数のミラー(M1からM8)、を含み、
前記物体視野(4)は、
大きめの第1の物体視野寸法に沿う第1の直交物体視野座標(x)と、
前記第1の物体視野寸法よりも小さい第2の物体視野寸法に沿う第2の直交物体視野座標(y)と、
によって張られ、
前記結像光学ユニット(7;21;22;23;24)が、少なくとも2つのGIミラー(M2,M3,M5,M6)を有し、
前記結像光学ユニット(7;21;22;23;24)が、前記結像光ビーム経路内の2つのGIミラー(M3,M5)間に配置された少なくとも1つのNIミラー(M4)を有し、
前記NIミラー(M4)の使用反射面が、
第1の反射面座標(x)に沿う面寸法と、前記第2の物体視野寸法と平行な第2の反射面座標(y)に沿う面寸法と、
の間に4.5よりも小さいアスペクト比(x/y)を有する、
結像光学ユニット(7;21;22;23;24)。 - 少なくとも4つのGIミラー(M2,M3,M6,M7)によって特徴付けられる請求項1に記載の結像光学ユニット。
- 少なくとも3つのGIミラー(M2,M3,M5)であって、
これらの3つのGIミラー(M2,M3,M5)の使用反射面が、
第1の反射面座標(x)に沿う面寸法と、
前記第2の物体視野寸法と平行な第2の反射面座標(y)に沿う面寸法と、
の間に1よりも大きいアスペクト比(x/y)を有する、
少なくとも3つのGIミラー(M2,M3,M5)によって特徴付けられる請求項1又は請求項2に記載の結像光学ユニット。 - 前記結像光学ユニット(7)の前記GIミラーの使用反射面の最も大きい直径が、400mmよりも小さいことを特徴とする請求項1から請求項3のいずれか1項に記載の結像光学ユニット(7;24)。
- 前記結像光学ユニット(22)の各ミラー(M1からM8)の使用反射面の最も大きい直径が、850mmよりも小さいことを特徴とする請求項1から請求項4のいずれか1項に記載の結像光学ユニット。
- 前記結像光学ユニット(21)の前記ミラーの前記使用反射面は、前記第2の直交物体視野座標と平行に延びる像視野座標(y)の方向に2000mmよりも小さいエッジ長さを有する直方体内に受け入れることができることを特徴とする請求項1から請求項5のいずれか1項に記載の結像光学ユニット。
- 少なくとも0.5の像側開口数によって特徴付けられる請求項1から請求項6のいずれか1項に記載の結像光学ユニット。
- 請求項1から請求項7のいずれか1項に記載の結像光学ユニットを含み、
前記物体視野(4)を光源(2)からの照明光(3)で照明するための照明光学ユニット(6)を含む、
光学系。 - 請求項8に記載の光学系を含み、
前記照明光(3)を生成するための光源(2)を含む、
投影露光装置。 - 構造化構成要素を生成する方法であって、
レチクル(10)及びウェーハ(11)を与える段階と、
請求項9に記載の投影露光装置を用いて前記レチクル(10)上の構造を前記ウェーハ(11)の感光層の上に投影する段階と、
前記ウェーハ(11)上にマイクロ構造又はナノ構造を生成する段階と、
を含む方法。 - 請求項10に記載の方法に従って生成された構造化構成要素。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102015221984.4A DE102015221984A1 (de) | 2015-11-09 | 2015-11-09 | Abbildende Optik zur Abbildung eines Objektfeldes in ein Bildfeld sowie Projektionsbelichtungsanlage mit einer derartigen abbildenden Optik |
DE102015221984.4 | 2015-11-09 | ||
PCT/EP2016/076774 WO2017080937A1 (de) | 2015-11-09 | 2016-11-07 | Abbildende optik zur abbildung eines objektfeldes in ein bildfeld sowie projektionsbelichtungsanlage mit einer derartigen abbildenden optik |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2018534639A true JP2018534639A (ja) | 2018-11-22 |
JP6886476B2 JP6886476B2 (ja) | 2021-06-16 |
Family
ID=57233482
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2018543437A Active JP6886476B2 (ja) | 2015-11-09 | 2016-11-07 | 物体視野を像視野内に結像するための結像光学ユニット及びそのような結像光学ユニットを含む投影露光装置 |
Country Status (5)
Country | Link |
---|---|
US (1) | US10330903B2 (ja) |
JP (1) | JP6886476B2 (ja) |
CN (1) | CN108292032B (ja) |
DE (1) | DE102015221984A1 (ja) |
WO (1) | WO2017080937A1 (ja) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102017216893A1 (de) | 2017-09-25 | 2019-03-28 | Carl Zeiss Smt Gmbh | Abbildende Optik zur Abbildung eines Objektfeldes in ein Bildfeld |
DE102018201170A1 (de) * | 2018-01-25 | 2019-07-25 | Carl Zeiss Smt Gmbh | Abbildende Optik für die EUV-Mikrolithographie |
DE102018105404A1 (de) | 2018-03-08 | 2019-09-12 | Wobben Properties Gmbh | Windenergieanlage mit mehrstufigem Magnetgetriebe |
DE102019202759A1 (de) | 2019-02-28 | 2019-04-18 | Carl Zeiss Smt Gmbh | Abbildende Optik zur Abbildung eines Objektfeldes in ein Bildfeld sowie Projek-tionsbelichtungsanlage mit einer derartigen abbildenden Optik |
DE102019208961A1 (de) * | 2019-06-19 | 2020-12-24 | Carl Zeiss Smt Gmbh | Projektionsoptik und Projektionsbelichtungsanlage mit einer solchen Projektionsoptik |
DE102019214979A1 (de) | 2019-09-30 | 2021-04-01 | Carl Zeiss Smt Gmbh | Messvorrichtung zur interferometrischen Bestimmung einer Oberflächenform |
DE102021205774A1 (de) * | 2021-06-08 | 2022-12-08 | Carl Zeiss Smt Gmbh | Abbildende Optik |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000031041A (ja) * | 1998-05-30 | 2000-01-28 | Carl Zeiss:Fa | 縮小オブジェクティブ |
WO2015014753A1 (en) * | 2013-07-29 | 2015-02-05 | Carl Zeiss Smt Gmbh | Projection optical unit for imaging an object field into an image field, and projection exposure apparatus comprising such a projection optical unit |
WO2015124515A1 (en) * | 2014-02-21 | 2015-08-27 | Carl Zeiss Smt Gmbh | Illumination optical unit for projection lithography |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5891806A (en) | 1996-04-22 | 1999-04-06 | Nikon Corporation | Proximity-type microlithography apparatus and method |
JP2002048977A (ja) | 2000-08-01 | 2002-02-15 | Nikon Corp | 反射光学系及びこの光学系を用いたプロキシミティ露光装置 |
DE10155711B4 (de) | 2001-11-09 | 2006-02-23 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Im EUV-Spektralbereich reflektierender Spiegel |
GB0505794D0 (en) * | 2005-03-22 | 2005-04-27 | Keene Laura | Beam transformer |
JP2009508150A (ja) | 2005-09-13 | 2009-02-26 | カール・ツァイス・エスエムティー・アーゲー | マイクロリソグラフィ投影光学系、ある機器を製造するための方法、光学面を設計する方法 |
DE102007023884A1 (de) | 2007-05-23 | 2008-11-27 | Carl Zeiss Ag | Spiegeloptik und Abbildungsverfahren zum seitenrichtigen und aufrechten Abbilden eines Objektes in ein Bildfeld |
EP2136231A1 (en) * | 2008-06-17 | 2009-12-23 | Carl Zeiss SMT AG | High aperture catadioptric system |
US8503109B2 (en) * | 2009-04-06 | 2013-08-06 | Panasonic Corporation | Optical system and imaging device |
DE102009030501A1 (de) * | 2009-06-24 | 2011-01-05 | Carl Zeiss Smt Ag | Abbildende Optik zur Abbildung eines Objektfeldes in ein Bildfeld sowie Beleuchtungsoptik zur Ausleuchtung eines Objektfeldes |
DE102009045096A1 (de) | 2009-09-29 | 2010-10-07 | Carl Zeiss Smt Ag | Beleuchtungssystem mit einer Spiegelanordnung aus zwei Spiegeln |
DE102010062597A1 (de) * | 2010-12-08 | 2012-06-14 | Carl Zeiss Smt Gmbh | Reflektives optisches Abbildungssystem |
DE102011075579A1 (de) | 2011-05-10 | 2012-11-15 | Carl Zeiss Smt Gmbh | Spiegel und Projektionsbelichtungsanlage für die Mikrolithographie mit einem solchen Spiegel |
DE102015209827B4 (de) | 2015-05-28 | 2019-06-06 | Carl Zeiss Smt Gmbh | Abbildende Optik zur Abbildung eines Objektfeldes in ein Bildfeld, optisches System sowie Projektionsbelichtungsanlage mit einer derartigen abbildenden Optik |
-
2015
- 2015-11-09 DE DE102015221984.4A patent/DE102015221984A1/de not_active Ceased
-
2016
- 2016-11-07 WO PCT/EP2016/076774 patent/WO2017080937A1/de active Application Filing
- 2016-11-07 JP JP2018543437A patent/JP6886476B2/ja active Active
- 2016-11-07 CN CN201680065535.4A patent/CN108292032B/zh active Active
-
2018
- 2018-04-30 US US15/966,947 patent/US10330903B2/en active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000031041A (ja) * | 1998-05-30 | 2000-01-28 | Carl Zeiss:Fa | 縮小オブジェクティブ |
WO2015014753A1 (en) * | 2013-07-29 | 2015-02-05 | Carl Zeiss Smt Gmbh | Projection optical unit for imaging an object field into an image field, and projection exposure apparatus comprising such a projection optical unit |
WO2015124515A1 (en) * | 2014-02-21 | 2015-08-27 | Carl Zeiss Smt Gmbh | Illumination optical unit for projection lithography |
Also Published As
Publication number | Publication date |
---|---|
US20180252904A1 (en) | 2018-09-06 |
US10330903B2 (en) | 2019-06-25 |
WO2017080937A1 (de) | 2017-05-18 |
JP6886476B2 (ja) | 2021-06-16 |
CN108292032A (zh) | 2018-07-17 |
CN108292032B (zh) | 2021-03-19 |
DE102015221984A1 (de) | 2017-05-11 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP6799544B2 (ja) | 物体視野を像視野内に結像するための結像光学ユニット及びそのような結像光学ユニットを含む投影露光装置 | |
JP2022176242A (ja) | 物体視野を像視野内に結像するための投影光学ユニット及びそのような投影光学ユニットを含む投影露光装置 | |
JP5319789B2 (ja) | 結像光学系及びこの種の結像光学系を有するマイクロリソグラフィ用の投影露光装置 | |
JP5938043B2 (ja) | 結像光学系 | |
JP6886476B2 (ja) | 物体視野を像視野内に結像するための結像光学ユニット及びそのような結像光学ユニットを含む投影露光装置 | |
CN109478020B (zh) | 用于euv投射光刻的投射光学单元 | |
CN107111242B (zh) | Euv投射光刻的照明光学单元 | |
TW201546564A (zh) | 用於投影微影的照明光學單元 | |
US9535337B2 (en) | Imaging optics, microlithography projection exposure apparatus having same and related methods | |
CN108351499B (zh) | 将物场成像到像场中的成像光学单元以及包括这样的成像光学单元的投射曝光设备 | |
WO2023247238A1 (en) | Imaging euv optical unit for imaging an object field into an image field | |
TWI805619B (zh) | 用於將物場成像至像場的成像光學單元 | |
JP7284766B2 (ja) | Euvマイクロリソグラフィ用の結像光学ユニット | |
CN117441122A (zh) | 成像光学单元 | |
CN117441116A (zh) | 成像光学单元 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20180712 |
|
RD04 | Notification of resignation of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7424 Effective date: 20190123 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20191107 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20200722 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20200831 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20201130 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20210315 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20210414 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20210514 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6886476 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |