JP2020504458A - メモリセル、集積構造およびメモリアレイ - Google Patents
メモリセル、集積構造およびメモリアレイ Download PDFInfo
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Abstract
Description
いる。
一の領域50と中央領域52との間の大体の境界を図示するために提供され、破線53は、第二の領域54と中央領域52との間の大体の境界を図示するために提供される。図示された実施形態においては、領域50、52および54は、全て、相互にほぼ同一の水平方向の幅である。他の実施形態においては、領域50、52および54のうちの一つ以上は、領域50、52および54のうちの他のものと比較して異なる水平方向の幅であってもよい。
の側面47に直接相対し、第二の酸化物56は、電荷通過構造48の第二の側面49に直接相対し、電荷通過構造48の第二の側面49は、電荷通過構造48の第一の側面47に対して逆側にある。幾つかの実施形態においては、第一および第二の酸化物46および56は、相互に実質的に同一の水平方向の厚さを有し得(ここで、“実質的に同一”という用語は、製造および測定の合理的な公差内で同一であることを意味する)、他の実施形態においては、第一および第二の酸化物46および56は、相互に異なる水平方向の厚さを有し得る。
ース62と積層15との間に与えられている。幾つかの用途においては、このようなさらなる集積材料は、例えば、ソース側選択ゲート材料(SGS材料)を含み得る。
示している。
考えられてもよい。このような場合は、図5の電荷通過構造48dを参照して図示される。第一の領域50内の電荷トラップの体積密度は、第二の領域54内の電荷トラップの体積密度と同一であってもよく、または、第二の領域54内の電荷トラップの体積密度とは異なってもよい。
ないことが理解されるべきである。したがって、特許請求の範囲は、文字通り表現されている全範囲に与えられるべきであって、均等論に従って適切に解釈されるべきである。
Claims (33)
- 以下の順序で、
制御ゲートと、
電荷ブロック材料と、
電荷トラップ材料と、
第一の酸化物と、
第一および第二の領域に挟まれた中央領域を有する電荷通過構造であって、前記中央領域が、前記第一および第二の領域よりも低い電荷トラップ確率および/または前記第一および第二の領域よりも低いよりも低い電荷トラップ率を有する、前記電荷通過構造と、
第二の酸化物と、
チャネル材料と、
を含むメモリセル。 - 前記中央領域は、前記第一および第二の領域よりも低い体積密度の電荷トラップを有する、請求項1に記載のメモリセル。
- 前記中央領域は、前記第一および第二の領域よりも浅い電荷トラップ挙動を示す、請求項1に記載のメモリセル。
- 前記中央領域は、前記第一および第二の領域よりも低い体積密度の電荷トラップを有し、前記中央領域は、前記第一および第二の領域よりも浅い電荷トラップ挙動を示す、請求項1に記載のメモリセル。
- 前記第一および第二の領域は、相互に同一の組成物である、請求項1に記載のメモリセル。
- 前記第一および第二の領域は、相互に同一の組成物ではない、請求項1に記載のメモリセル。
- 前記中央領域と、前記第一および第二の領域とは、全て、シリコンおよび窒素を含み、前記中央領域は、前記第一および第二の領域のいずれかよりも高い総酸素濃度を有する、請求項1に記載のメモリセル。
- 前記電荷通過構造は、前記第一の領域に沿った第一の外側の面を有し、前記第二の領域に沿って、前記第一の外側の面について逆側に第二の外側の面を有し、前記第一および第二の外側の面は、シリコン窒化物で構成され、前記中央領域はSiONを含み、この化学式は、具体的な化学量を示すものではなく主要な成分を示す、請求項7に記載のメモリセル。
- 前記第一の面から前記中央領域への方向に沿って伸びると酸素濃度を増加させる第一の勾配を含み、前記第二の面から前記中央領域へ伸びると酸素濃度を増加させる第二の勾配を有する、請求項8に記載のメモリセル。
- 前記電荷通過構造は、前記中央領域の中間を通る、前記第一および第二の面の中間の平面について実質的に鏡面対称である、請求項9に記載のメモリセル。
- 前記電荷通過構造は、前記中央領域の中間を通る、前記第一および第二の面の中間の平面について、鏡面対称ではない、請求項9に記載のメモリセル。
- 前記第一および第二の領域は、シリコン窒化物で構成され、前記中央領域はシリコン酸窒化物を含む、請求項7に記載のメモリセル。
- 前記第一および第二の酸化物は、相互に同一の組成物である、請求項1に記載のメモリセル。
- 前記第一および第二の酸化物は、二酸化シリコンである、請求項13に記載のメモリセル。
- 導電性レベルと絶縁性レベルとの交互の垂直方向の積層と、
前記垂直方向の積層に沿って垂直方向に伸びる電荷ブロック材料と、
前記電荷ブロック材料に沿って垂直方向に伸びる電荷蓄積材料と、
前記電荷蓄積材料に沿って垂直方向に伸びる絶縁性材料と、
前記絶縁性材料に沿って垂直方向に伸び、第一および第二の領域に挟まれた中央領域を有する電荷通過構造であって、前記中央領域が、前記第一および第二の領域よりも低い電荷トラップ確率、および/または、前記第一および第二の領域よりも低い電荷トラップ率を有する、前記電荷通過構造と、
前記電荷通過構造に沿って垂直方向に伸びる誘電性材料と、
前記誘電性材料に沿って垂直方向に伸びるチャネル材料と、
を含む、集積構造。 - 前記中央領域は、前記第一および第二の領域よりも低い体積密度の電荷トラップを有する、請求項15に記載の集積構造。
- 前記中央領域は、前記第一および第二の領域よりも浅い電荷トラップ挙動を示す、請求項15に記載の集積構造。
- 前記中央領域は、前記第一および第二の領域よりも低い体積密度の電荷トラップを有し、前記中央領域は、前記第一および第二の領域よりも浅い電荷トラップ挙動を示す、請求項15に記載の集積構造。
- 前記電荷蓄積材料は、シリコン窒化物で構成される、請求項15に記載の集積構造。
- 前記中央領域と、前記第一の領域および第二の領域とは、全て、シリコンおよび窒素を含み、前記中央領域は、前記第一および第二の領域よりも高い酸素総濃度を有する、請求項15に記載の集積構造。
- 前記第一および第二の領域は、シリコン窒化物で構成され、前記中央領域は、シリコン酸窒化物を含む、請求項15に記載の集積構造。
- 前記電荷通過構造の総厚さは、約20Åから約150Åの範囲内である、請求項21に記載の集積構造。
- 前記中央領域は、約1モノレイヤから約70Åの範囲内の厚さを有する、請求項22に記載の集積構造。
- 前記電荷通過構造の前記総厚さは、約20Åから約100Åの範囲内であり、前記中央領域は、約10Åから約30Åの範囲内の厚さを有する、請求項22に記載の集積構造。
- 絶縁性レベルとワード線レベルとの交互の垂直方向の積層であって、前記ワード線レベ
ルの各々が、外側導電性層によって包囲された導電性コアを含み、前記導電性コアが、前記外側導電性層とは異なる組成物を含む、前記垂直方向の積層と、
前記垂直方向の積層に沿って垂直方向に伸びる電荷ブロック材料と、
前記電荷ブロック材料に沿って垂直方向に伸びる電荷蓄積材料と、
前記電荷蓄積材料に沿って垂直方向に伸びる絶縁性材料と、
前記絶縁性材料に沿って垂直方向に伸び、第一および第二の領域に挟まれた中央領域を有する電荷通過構造であって、前記中央領域が、前記第一および第二の領域よりも浅い電荷トラップ挙動を示す、前記電荷通過構造と、
前記電荷通過構造に沿って垂直方向に伸びる誘電性材料と、
前記誘電性材料に沿って垂直方向に伸びるチャネル材料と、
を含む、NANDメモリアレイ。 - 前記中央領域と、前記第一の領域および第二の領域とは、全て、シリコンおよび窒素を含み、前記中央領域は、前記第一および第二の領域よりも高い酸素濃度を有する、請求項25に記載のNANDメモリアレイ。
- 前記第一および第二の領域は、シリコン窒化物で構成され、前記中央領域は、シリコン酸窒化物を含む、請求項25に記載のNANDメモリアレイ。
- 前記電荷通過構造は、前記第一の領域に沿った第一の外側の面を有し、前記第二の領域に沿って前記第一の外側の面とは逆側に第二の外側の面を有し、前記第一および第二の外側の面はシリコン窒化物で構成され、前記中央領域はSiONを含み、この化学式は、具体的な化学量を示すものではなく主要な成分を示す、請求項25に記載のNANDメモリアレイ。
- 前記電荷通過構造は、前記中央領域の中間を通る、前記第一および第二の面の中間の平面について実質的に鏡面対称である、請求項28に記載のNANDメモリアレイ。
- 前記電荷通過構造は、前記中央領域の中間を通る、前記第一および第二の面の中間の平面について鏡面対称ではない、請求項28に記載のNANDメモリアレイ。
- 絶縁性レベルとワード線レベルとの交互の垂直方向の積層であって、前記ワード線レベルの各々が、外側導電性層によって包囲された導電性コアを含み、前記導電性コアが、前記外側導電性層とは異なる組成を含む、前記垂直方向の積層と、
前記垂直方向の積層に沿って垂直方向に伸びる電荷ブロック材料と、
前記電荷ブロック材料に沿って垂直方向に伸びる電荷蓄積材料と、
前記電荷蓄積材料に沿って垂直方向に伸びる絶縁性材料と、
前記絶縁性材料に沿って垂直方向に伸び、第一および第二の領域に挟まれた中央領域を有する電荷通過構造であって、前記中央領域が、前記第一および第二の領域よりも低い体積密度の電荷トラップを有する、前記電荷通過構造と、
前記電荷通過構造に沿って垂直方向に伸びる誘電性材料と、
前記誘電性材料に沿って垂直方向に伸びるチャネル材料と、
を含む、NANDメモリアレイ。 - 前記電荷通過構造は、前記第一の領域に沿った第一の外側の面を有し、前記第二の領域に沿って前記第一の外側の面とは逆側に第二の外側の面を有し、前記中央領域はSiONを含み、この化学式は、具体的な化学量を示すものではなく主要な成分を示し、前記電荷通過構造は、前記中央領域の中間を通る、前記第一および第二の面の中間の平面について実質的に鏡面対称である、請求項31に記載のNANDメモリアレイ。
- 前記電荷通過構造は、前記第一の領域に沿った第一の外側の面を有し、前記第二の領域に沿って、前記第一の外側の面とは逆側に第二の外側の面を有し、前記中央領域はSiONを含み、この化学式は、具体的な化学量を示すものではなく主要な成分を示し、前記電荷通過構造は、前記中央領域の中間を通る、前記第一および第二の面の中間の平面について鏡面対称ではない、請求項31に記載のNANDメモリアレイ。
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