JP2020503661A - アレイ基板、表示パネル、アレイ基板を備える表示装置及びアレイ基板の製造方法 - Google Patents
アレイ基板、表示パネル、アレイ基板を備える表示装置及びアレイ基板の製造方法 Download PDFInfo
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- JP2020503661A JP2020503661A JP2017564910A JP2017564910A JP2020503661A JP 2020503661 A JP2020503661 A JP 2020503661A JP 2017564910 A JP2017564910 A JP 2017564910A JP 2017564910 A JP2017564910 A JP 2017564910A JP 2020503661 A JP2020503661 A JP 2020503661A
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Abstract
Description
G ゲート電極
CESL 共通電極信号線
GI ゲート絶縁層
AL 活性層
E1 第1電極
N1 第1ノード
N2 第2ノード
CR チャネル領域
NCR1 第1ノードコンタクト領域
NCR2 第2ノードコンタクト領域
ESL エッチング停止層
AESL 補助エッチング停止層
DL データライン
DL1 第1サブ層
DL2 第2サブ層
PVX 不活性化層
V 貫通孔
E2 第2電極
SCML 半導体材料層
Claims (20)
- ベース基板と、
画素電極と共通電極から選ばれる2つの異なる電極である第1電極と第2電極と、
活性層、前記活性層の前記ベース基板から離れる側に位置するエッチング停止層、第1ノードと第2ノードを含む薄膜トランジスタと、
を含み、
前記活性層はチャネル領域、第1ノードコンタクト領域と第2ノードコンタクト領域を含み、前記チャネル領域の前記ベース基板への投影は、前記エッチング停止層の前記ベース基板への投影に実質的に重なり、前記第1ノードコンタクト領域と前記第2ノードコンタクト領域の前記ベース基板への投影は前記エッチング停止層の外側に位置し、前記第1ノードは前記第1ノードコンタクト領域の前記ベース基板から離れる側に位置し、前記第2ノードは前記第2ノードコンタクト領域の前記ベース基板から離れる側に位置し、
前記活性層と前記第1電極とは同一の層に位置し、M1OaNbを含む半導体材料で製作され、ただし、M1は単一の金属または金属の組み合わせであり、かつa>0、b≧0であるアレイ基板。 - 前記第1電極の前記ベース基板から離れる側に位置する補助エッチング停止層をさらに含み、
前記補助エッチング停止層と前記エッチング停止層とは同一の層に位置し、同じ材料で製作されている、請求項1に記載のアレイ基板。 - データラインをさらに含み、
前記データラインは第1サブ層および第2サブ層を含み、前記第1サブ層は、前記第2サブ層の前記ベース基板に近い側に位置し、
前記第1サブ層は、前記活性層と前記第1電極と同様に同一の層に位置し、同じ材料で製作され、
前記第2サブ層は、前記第1ノードと前記第2ノードと同一の層に位置し、前記第1ノードと前記第2ノードと同じ材料で製作されている、請求項1に記載のアレイ基板。 - 前記第2電極は、前記第1電極の前記ベース基板から離れる側に位置する、請求項1に記載のアレイ基板。
- 前記第2電極は、前記第1電極の前記ベース基板に近い側に位置する、請求項1に記載のアレイ基板。
- 前記第1電極は前記画素電極であり、前記第2電極は前記共通電極である、請求項1に記載のアレイ基板。
- 前記ベース基板に設けられたゲート電極と、
前記ゲート電極と同様に同一の層に位置し、同じ材料で製作された共通電極信号線と、
前記ゲート電極と前記共通電極信号線の前記ベース基板から離れる側に位置するゲート絶縁層と、
前記ゲート絶縁層の前記共通電極信号線から離れる側に位置する不活性化層と、
前記ゲート絶縁層および前記不活性化層を通過し延びている貫通孔と、
をさらに含み、
前記共通電極は前記不活性化層の前記ゲート絶縁層から離れる側に位置し、前記貫通孔を介して前記共通電極信号線に電気的に接続されている、請求項6に記載のアレイ基板。 - 前記ベース基板に設けられたゲート電極と、
前記ゲート電極と同様に同一の層に位置する共通電極信号線と、
前記ゲート電極と前記活性層との間に位置するゲート絶縁層と、
をさらに含み、
前記共通電極は前記ゲート絶縁層の前記ベース基板に近い側に位置し、前記共通電極信号線に電気的に接続されている、請求項6に記載のアレイ基板。 - 前記第1電極は前記共通電極であり、前記第2電極は前記画素電極である、請求項1に記載のアレイ基板。
- 前記ベース基板に設けられたゲート電極と、
前記ゲート電極と前記活性層との間に位置するゲート絶縁層と、
前記ゲート絶縁層を通過し延びている貫通孔と、
をさらに含み、
前記画素電極は前記ゲート絶縁層の前記ベース基板に近い側に位置し、前記貫通孔を介して前記第2ノードに電気的に接続されている、請求項9に記載のアレイ基板。 - 前記M1OaNbはインジウムガリウム亜鉛酸化物、インジウム亜鉛ハフニウム、インジウム亜鉛ジルコニウム酸化物、インジウム亜鉛錫酸化物、インジウム亜鉛酸化物、亜鉛インジウムアルミニウム酸化物、酸化亜鉛、亜鉛インジウムアルミニウム酸化物のいずれかである、請求項1に記載のアレイ基板。
- 請求項1〜11の何れか一項に記載のアレイ基板を含む表示装置。
- ベース基板に画素電極と共通電極から選ばれる2つの異なる電極である第1電極と第2電極を形成するステップと、
活性層、前記活性層の前記ベース基板から離れる側に位置するエッチング停止層、第1ノードと第2ノードを含む薄膜トランジスタを形成するステップと、
を含み、
前記活性層はチャネル領域、第1ノードコンタクト領域、第2ノードコンタクト領域を含み、前記チャネル領域の前記ベース基板への投影は、前記エッチング停止層の前記ベース基板への投影に実質的に重なり、前記第1ノードコンタクト領域と前記第2ノードコンタクト領域の前記ベース基板への投影は前記エッチング停止層の外側に位置し、前記第1ノードは前記第1ノードコンタクト領域の前記ベース基板から離れる側に形成され、前記第2ノードは前記第2ノードコンタクト領域の前記ベース基板から離れる側に形成され、
前記活性層と前記第1電極とは同一の層に形成され、M1OaNbを含む半導体材料で形成され、ただし、M1は単一の金属または金属の組み合わせであり、かつa>0、b≧0であるアレイ基板の製造方法。 - 前記第1電極の前記ベース基板から離れる側に補助エッチング停止層を形成するステップをさらに含み、
前記補助エッチング停止層と前記エッチング停止層とは同一の層に形成され、同じ材料で製作されている、請求項13に記載のアレイ基板の製造方法。 - データラインを形成するステップをさらに含み、
前記データラインを形成するステップは第1サブ層および第2サブ層を形成することを含み、前記第1サブ層は、前記第2サブ層の前記ベース基板に近い側に形成され、
前記第1サブ層は、前記活性層と前記第1電極と同一の層に形成され、前記活性層と前記第1電極と同じ材料で形成され、
前記第2サブ層は、前記第1ノードと前記第2ノードと同一の層に形成され、前記第1ノードと前記第2ノードと同じ材料で形成されている、請求項13に記載のアレイ基板の製造方法。 - 前記第2電極は、前記第1電極の前記ベース基板から離れる側に形成されている、請求項13に記載のアレイ基板の製造方法。
- 前記第2電極は、前記第1電極の前記ベース基板に近い側に形成されている、請求項13に記載のアレイ基板の製造方法。
- 前記第1電極は画素電極であり、前記第2電極は共通電極であるアレイ基板の製造方法であって、
前記ベース基板にゲート電極と共通電極信号線を形成するステップと、
前記ゲート電極と前記共通電極信号線の前記ベース基板から離れる側にゲート絶縁層を形成するステップと、
前記ゲート絶縁層の前記ゲート電極と前記共通電極信号線から離れる側に半導体材料層を形成し、ただし、半導体材料はM1OaNbを含み、M1は単一の金属または金属の組み合わせであり、かつa>0、b≧0であるステップと、
前記半導体材料層の前記ゲート絶縁層から離れる側にエッチング停止材料層を形成するステップと、
マスクプレートを用いて前記エッチング停止材料層をパターニングすることで、前記エッチング停止層と補助エッチング停止層を形成するステップと、
前記エッチング停止層と前記補助エッチング停止層の前記半導体材料層から離れる側に電極材料層を形成するステップと、
単一のマスクプレートを用いて前記電極材料層と前記半導体材料層をパターニングすることで、前記第1ノード、前記第2ノード、前記活性層、前記第1電極、第1サブ層と第2サブ層を含むデータラインを形成するステップと、
前記第1ノード、前記第2ノードと前記データラインの前記ゲート絶縁層から離れる側に不活性化層を形成するステップと、
前記不活性化層および前記ゲート絶縁層を通過し延びている貫通孔を形成するステップと、
前記不活性化層の前記ゲート絶縁層から離れる側に前記第2電極を形成するステップと、
を含み、
前記第2電極は前記貫通孔を介して前記共通電極信号線に電気的に接続されているように形成され、前記電極材料層と前記半導体材料層をパターニングするステップは同じエッチング液を用いて前記電極材料層と前記半導体材料層をエッチングすることを含む、請求項13に記載のアレイ基板の製造方法。 - 前記第1電極は前記画素電極であり、前記第2電極は前記共通電極であるアレイ基板の製造方法であって、
前記ベース基板にゲート電極、共通電極信号線と前記共通電極信号線に電気的に接続されているように形成された前記第2電極を形成するステップと、
前記ゲート電極、前記共通電極信号線と前記第2電極の前記ベース基板から離れる側にゲート絶縁層を形成するステップと、
前記ゲート絶縁層の前記ゲート電極、前記共通電極信号線と前記第2電極から離れる側に半導体材料層を形成し、ただし、前記半導体材料はM1OaNbを含み、M1は単一の金属または金属の組み合わせであり、かつa>0、b≧0であるステップと、
前記半導体材料層の前記ゲート絶縁層から離れる側にエッチング停止材料層を形成するステップと、
マスクプレートを用いて前記エッチング停止材料層をパターニングすることで、前記エッチング停止層と補助エッチング停止層を形成するステップと、
前記エッチング停止層と前記補助エッチング停止層の前記半導体材料層から離れる側に電極材料層を形成するステップと、
単一のマスクプレートを用いて前記電極材料層と前記半導体材料層をパターニングすることで、前記第1ノード、前記第2ノード、前記活性層、前記第1電極、第1サブ層と第2サブ層を含むデータラインを形成するステップと、
前記第1ノード、前記第2ノードと前記データラインの前記ゲート絶縁層から離れる側に不活性化層を形成するステップと、
を含み、
前記電極材料層と前記半導体材料層をパターニングするステップは同じエッチング液を用いて前記電極材料層と前記半導体材料層をエッチングすることを含む、請求項13に記載のアレイ基板の製造方法。 - 前記第1電極は前記共通電極であり、前記第2電極は前記画素電極であるアレイ基板の製造方法であって、
前記ベース基板にゲート電極、共通電極信号線と前記第2電極を形成するステップと、
前記ゲート電極、前記共通電極信号線と前記第2電極の前記ベース基板から離れる側にゲート絶縁層を形成するステップと、
前記ゲート絶縁層を通過し延びている第1貫通孔と第2貫通孔を形成するステップと、
前記ゲート絶縁層の前記ゲート電極、前記共通電極信号線と前記第2電極から離れる側に半導体材料層を形成するステップと、
前記半導体材料層の前記ゲート絶縁層から離れる側にエッチング停止材料層を形成するステップと、
マスクプレートを用いて前記エッチング停止材料層をパターニングすることで、前記エッチング停止層と補助エッチング停止層を形成するステップと、
前記エッチング停止層と前記補助エッチング停止層の前記半導体材料層から離れる側に電極材料層を形成するステップと、
単一のマスクプレートを用いて前記電極材料層と前記半導体材料層をパターニングすることで、前記第1ノード、前記第2ノード、前記活性層、前記第1電極、第1サブ層と第2サブ層を含むデータラインを形成し、前記第1電極は前記第1貫通孔を介して前記共通電極信号線に電気的に接続され、前記第2ノードは前記第2貫通孔を介して前記第2電極に電気的に接続されているステップと、
前記第1ノード、前記第2ノードと前記データラインの前記ゲート絶縁層から離れる側に不活性化層を形成するステップと、
を含み、
前記電極材料層と前記半導体材料層をパターニングするステップは同じエッチング液を用いて前記電極材料層と前記半導体材料層をエッチングすることを含む、請求項13に記載のアレイ基板の製造方法。
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CN110729327B (zh) * | 2019-09-11 | 2022-07-08 | 云谷(固安)科技有限公司 | 一种显示面板及其制备方法 |
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CN108886042B (zh) | 2022-07-19 |
EP3535783A1 (en) | 2019-09-11 |
JP7042621B2 (ja) | 2022-03-28 |
US20180331126A1 (en) | 2018-11-15 |
KR102043082B1 (ko) | 2019-11-11 |
US10475822B2 (en) | 2019-11-12 |
KR20180067498A (ko) | 2018-06-20 |
CN108886042A (zh) | 2018-11-23 |
EP3535783A4 (en) | 2020-07-01 |
WO2018081953A1 (en) | 2018-05-11 |
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