JP2020198431A - ワークを処理する方法およびワークを処理するシステム - Google Patents
ワークを処理する方法およびワークを処理するシステム Download PDFInfo
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Abstract
Description
Claims (12)
- 第1の面(4,104)と、前記第1の面(4,104)に対向する第2の面(6,106)と、前記第1の面(4,104)と前記第2の面(6,106)との間に延在する第3の面(8,108)とを有するワーク(2,102)を処理する方法であって、前記方法が、
前記ワーク(2,102)の内側に改質領域(16)を形成して開口部(18)を前記ワーク(2,102)内に作成するステップであって、前記開口部(18)が、前記第1の面(4,104)、前記第2の面(6,106)および前記第3の面(8,108)のうちの少なくとも1つにまで延在する、ステップと、
前記ワーク(2,102)の内側に前記改質領域(16)を形成した後に、液体媒体(20,120)を少なくともいくつかの前記開口部(18)に導入するステップと、
前記液体媒体(20,120)を少なくともいくつかの前記開口部(18)に導入した後に、外部刺激を前記液体媒体(20,120)に加えて前記液体媒体(20,120)の体積を増加させるステップと
を含む、方法。 - 前記改質領域(16)を前記ワーク(2,102)の内側に形成するステップが、レーザ光(LB)を前記ワーク(2,102)に照射するステップを含むか、または前記レーザ光(LB)を前記ワーク(2,102)に照射する前記ステップで構成される、請求項1に記載の方法。
- 前記ワーク(2,102)が前記レーザ光(LB)に対して透過性のある材料で作られ、前記レーザ光(LB)の焦点が前記ワーク(2,102)の内側に位置する状態、または、前記レーザ光(LB)の前記焦点が第1の面(4,104)上、第2の面(6,106)上または第3の面(8,108)上に位置する状態で、前記レーザ光(LB)が前記ワーク(2,102)に照射される、請求項2に記載の方法。
- 前記外部刺激を液体媒体(20,120)に加えるステップが、前記液体媒体(20,120)を加熱するかもしくは冷却するステップを含むか、または前記液体媒体(20,120)を加熱するかもしくは冷却する前記ステップで構成される、請求項1から3のいずれか一項に記載の方法。
- 前記外部刺激を前記液体媒体(20,120)に加えるステップが、電界および/または磁界を前記液体媒体(20,120)に印加するステップを含むか、または前記電界および/または前記磁界を前記液体媒体(20,120)に印加する前記ステップで構成される、請求項1から4のいずれか一項に記載の方法。
- 前記外部刺激を前記液体媒体(20,120)に加えるステップが、前記液体媒体(20,120)の相転移を誘発して、前記液体媒体(20,120)の体積を増加させる、請求項1から5のいずれか一項に記載の方法。
- 前記開口部(18)が前記ワーク内のクラックである、請求項1〜6のいずれか一項に記載の方法。
- 前記液体媒体(20,120)または前記液体媒体(20,120)の蒸気を、前記開口部(18)が延在する前記第1の面(4,104)、前記第2の面(6,106)および前記第3の面(8,108)のうちの少なくとも1つに加えることによって、前記液体媒体(20,120)が少なくともいくつかの前記開口部(18)に導入され、これにより、前記液体媒体(20,120)の少なくとも一部が、前記開口部(18)に少なくとも部分的に入る、請求項1から7のいずれか一項に記載の方法。
- 前記液体媒体(20,120)が水である、請求項1〜8のいずれか一項に記載の方法。
- 前記液体媒体(20,120)が界面活性剤を含有する、請求項1〜9のいずれか一項に記載の方法。
- 前記改質領域(16)が、非晶質領域またはクラックが形成された領域を含むか、または前記非晶質領域または前記クラックが形成された前記領域で構成される、請求項1から10のいずれか一項に記載の方法。
- 第1の面(4,104)と、前記第1の面(4,104)に対向する第2の面(6,106)と、前記第1の面(4,104)と前記第2の面(6,106)との間に延在する第3の面(8,108)とを有するワーク(2,102)を処理するシステムであって、前記システムが、
前記ワーク(2,102)の内側に改質領域(16)を形成して開口部(18)を前記ワーク(2,102)内に作成するように構成された改質領域形成手段であって、前記開口部(18)が、前記第1の面(4,104)、前記第2の面(6,106)および前記第3の面(8,108)のうちの少なくとも1つにまで延在する、改質領域形成手段と、
液体媒体(20,120)を少なくともいくつかの開口部(18)に導入するように構成された液体媒体供給手段と、
外部刺激を少なくともいくつかの前記開口部(18)に導入された前記液体媒体(20,120)に加えて、前記液体媒体(20,120)の体積を増加させるように構成された外部刺激付与手段と
を含む、システム。
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