JP2020187352A - フォトレジスト組成物及びこの組成物を用いてレジストパターンを形成する方法 - Google Patents
フォトレジスト組成物及びこの組成物を用いてレジストパターンを形成する方法 Download PDFInfo
- Publication number
- JP2020187352A JP2020187352A JP2020082083A JP2020082083A JP2020187352A JP 2020187352 A JP2020187352 A JP 2020187352A JP 2020082083 A JP2020082083 A JP 2020082083A JP 2020082083 A JP2020082083 A JP 2020082083A JP 2020187352 A JP2020187352 A JP 2020187352A
- Authority
- JP
- Japan
- Prior art keywords
- group
- branched
- linear
- photoresist composition
- monocyclic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000203 mixture Substances 0.000 title claims abstract description 91
- 229920002120 photoresistant polymer Polymers 0.000 title claims abstract description 87
- 238000000034 method Methods 0.000 title claims description 36
- 239000002904 solvent Substances 0.000 claims abstract description 26
- 229920000642 polymer Polymers 0.000 claims abstract description 22
- RWSOTUBLDIXVET-UHFFFAOYSA-N Dihydrogen sulfide Chemical class S RWSOTUBLDIXVET-UHFFFAOYSA-N 0.000 claims abstract description 10
- 125000002950 monocyclic group Chemical group 0.000 claims description 38
- 125000003367 polycyclic group Chemical group 0.000 claims description 38
- 125000003118 aryl group Chemical group 0.000 claims description 27
- 239000000758 substrate Substances 0.000 claims description 26
- 229910052739 hydrogen Inorganic materials 0.000 claims description 20
- 125000000217 alkyl group Chemical group 0.000 claims description 18
- 239000001257 hydrogen Substances 0.000 claims description 18
- 229910052731 fluorine Inorganic materials 0.000 claims description 15
- 125000004432 carbon atom Chemical group C* 0.000 claims description 14
- 125000003837 (C1-C20) alkyl group Chemical group 0.000 claims description 13
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 12
- 229910052760 oxygen Inorganic materials 0.000 claims description 12
- 125000001153 fluoro group Chemical group F* 0.000 claims description 11
- 125000006651 (C3-C20) cycloalkyl group Chemical group 0.000 claims description 10
- 239000002253 acid Substances 0.000 claims description 10
- 238000005530 etching Methods 0.000 claims description 10
- 125000003709 fluoroalkyl group Chemical group 0.000 claims description 10
- 125000001072 heteroaryl group Chemical group 0.000 claims description 10
- 125000003358 C2-C20 alkenyl group Chemical group 0.000 claims description 8
- 125000004407 fluoroaryl group Chemical group 0.000 claims description 8
- 238000010438 heat treatment Methods 0.000 claims description 8
- 229910052799 carbon Inorganic materials 0.000 claims description 7
- 230000005855 radiation Effects 0.000 claims description 7
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 claims description 6
- 125000000392 cycloalkenyl group Chemical group 0.000 claims description 6
- 239000011737 fluorine Substances 0.000 claims description 6
- 125000005348 fluorocycloalkyl group Chemical group 0.000 claims description 6
- 125000000524 functional group Chemical group 0.000 claims description 6
- 150000002431 hydrogen Chemical class 0.000 claims description 6
- 229910052717 sulfur Inorganic materials 0.000 claims description 6
- 229910052794 bromium Inorganic materials 0.000 claims description 5
- 229910052801 chlorine Inorganic materials 0.000 claims description 5
- 239000000460 chlorine Substances 0.000 claims description 5
- 229910052736 halogen Inorganic materials 0.000 claims description 5
- 150000002367 halogens Chemical class 0.000 claims description 5
- 125000004366 heterocycloalkenyl group Chemical group 0.000 claims description 5
- 125000000592 heterocycloalkyl group Chemical group 0.000 claims description 5
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 claims description 5
- WKBOTKDWSSQWDR-UHFFFAOYSA-N Bromine atom Chemical compound [Br] WKBOTKDWSSQWDR-UHFFFAOYSA-N 0.000 claims description 4
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 claims description 4
- GDTBXPJZTBHREO-UHFFFAOYSA-N bromine Substances BrBr GDTBXPJZTBHREO-UHFFFAOYSA-N 0.000 claims description 4
- 125000004122 cyclic group Chemical group 0.000 claims description 4
- 238000001035 drying Methods 0.000 claims description 4
- 125000005647 linker group Chemical group 0.000 claims description 4
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 claims description 4
- 125000006373 (C2-C10) alkyl group Chemical group 0.000 claims description 3
- 125000006649 (C2-C20) alkynyl group Chemical group 0.000 claims description 3
- 229910052711 selenium Inorganic materials 0.000 claims description 3
- 125000001424 substituent group Chemical group 0.000 claims description 3
- 229910052714 tellurium Inorganic materials 0.000 claims description 3
- 125000005913 (C3-C6) cycloalkyl group Chemical group 0.000 claims description 2
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical group C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 claims description 2
- PNDPGZBMCMUPRI-UHFFFAOYSA-N iodine Chemical compound II PNDPGZBMCMUPRI-UHFFFAOYSA-N 0.000 claims description 2
- 239000000126 substance Substances 0.000 abstract description 4
- 230000035945 sensitivity Effects 0.000 abstract description 3
- 239000010410 layer Substances 0.000 description 45
- 235000012431 wafers Nutrition 0.000 description 18
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 17
- 230000008569 process Effects 0.000 description 14
- BZLVMXJERCGZMT-UHFFFAOYSA-N Methyl tert-butyl ether Chemical compound COC(C)(C)C BZLVMXJERCGZMT-UHFFFAOYSA-N 0.000 description 12
- -1 hydroxynaphthyl group Chemical group 0.000 description 12
- 239000010703 silicon Substances 0.000 description 12
- 229910052710 silicon Inorganic materials 0.000 description 12
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 11
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 10
- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical compound COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 description 10
- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 description 10
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 9
- MSXVEPNJUHWQHW-UHFFFAOYSA-N 2-methylbutan-2-ol Chemical compound CCC(C)(C)O MSXVEPNJUHWQHW-UHFFFAOYSA-N 0.000 description 9
- YMWUJEATGCHHMB-UHFFFAOYSA-N Dichloromethane Chemical compound ClCCl YMWUJEATGCHHMB-UHFFFAOYSA-N 0.000 description 9
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 9
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 9
- ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 description 9
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 9
- VLKZOEOYAKHREP-UHFFFAOYSA-N n-Hexane Chemical compound CCCCCC VLKZOEOYAKHREP-UHFFFAOYSA-N 0.000 description 9
- 150000004767 nitrides Chemical class 0.000 description 9
- BDERNNFJNOPAEC-UHFFFAOYSA-N propan-1-ol Chemical compound CCCO BDERNNFJNOPAEC-UHFFFAOYSA-N 0.000 description 9
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 8
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 8
- DKPFZGUDAPQIHT-UHFFFAOYSA-N butyl acetate Chemical compound CCCCOC(C)=O DKPFZGUDAPQIHT-UHFFFAOYSA-N 0.000 description 8
- LZCLXQDLBQLTDK-UHFFFAOYSA-N ethyl 2-hydroxypropanoate Chemical compound CCOC(=O)C(C)O LZCLXQDLBQLTDK-UHFFFAOYSA-N 0.000 description 8
- 238000001459 lithography Methods 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 8
- 238000006243 chemical reaction Methods 0.000 description 7
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 7
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 7
- IAZDPXIOMUYVGZ-UHFFFAOYSA-N Dimethylsulphoxide Chemical compound CS(C)=O IAZDPXIOMUYVGZ-UHFFFAOYSA-N 0.000 description 6
- DKGAVHZHDRPRBM-UHFFFAOYSA-N Tert-Butanol Chemical compound CC(C)(C)O DKGAVHZHDRPRBM-UHFFFAOYSA-N 0.000 description 6
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 6
- 150000001338 aliphatic hydrocarbons Chemical class 0.000 description 6
- RDOXTESZEPMUJZ-UHFFFAOYSA-N anisole Chemical compound COC1=CC=CC=C1 RDOXTESZEPMUJZ-UHFFFAOYSA-N 0.000 description 6
- MVPPADPHJFYWMZ-UHFFFAOYSA-N chlorobenzene Chemical compound ClC1=CC=CC=C1 MVPPADPHJFYWMZ-UHFFFAOYSA-N 0.000 description 6
- OPQARKPSCNTWTJ-UHFFFAOYSA-L copper(ii) acetate Chemical compound [Cu+2].CC([O-])=O.CC([O-])=O OPQARKPSCNTWTJ-UHFFFAOYSA-L 0.000 description 6
- JHIVVAPYMSGYDF-UHFFFAOYSA-N cyclohexanone Chemical compound O=C1CCCCC1 JHIVVAPYMSGYDF-UHFFFAOYSA-N 0.000 description 6
- CATSNJVOTSVZJV-UHFFFAOYSA-N heptan-2-one Chemical compound CCCCCC(C)=O CATSNJVOTSVZJV-UHFFFAOYSA-N 0.000 description 6
- GEWWCWZGHNIUBW-UHFFFAOYSA-N 1-(4-nitrophenyl)propan-2-one Chemical compound CC(=O)CC1=CC=C([N+]([O-])=O)C=C1 GEWWCWZGHNIUBW-UHFFFAOYSA-N 0.000 description 5
- 150000004945 aromatic hydrocarbons Chemical class 0.000 description 5
- 150000002148 esters Chemical class 0.000 description 5
- 150000002576 ketones Chemical class 0.000 description 5
- 238000000059 patterning Methods 0.000 description 5
- 239000007787 solid Substances 0.000 description 5
- 238000009966 trimming Methods 0.000 description 5
- ARXJGSRGQADJSQ-UHFFFAOYSA-N 1-methoxypropan-2-ol Chemical compound COCC(C)O ARXJGSRGQADJSQ-UHFFFAOYSA-N 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 4
- 238000005266 casting Methods 0.000 description 4
- 125000000753 cycloalkyl group Chemical group 0.000 description 4
- 229940116333 ethyl lactate Drugs 0.000 description 4
- 238000011156 evaluation Methods 0.000 description 4
- 125000004991 fluoroalkenyl group Chemical group 0.000 description 4
- FFUAGWLWBBFQJT-UHFFFAOYSA-N hexamethyldisilazane Chemical compound C[Si](C)(C)N[Si](C)(C)C FFUAGWLWBBFQJT-UHFFFAOYSA-N 0.000 description 4
- 150000002596 lactones Chemical class 0.000 description 4
- 150000002825 nitriles Chemical class 0.000 description 4
- 238000002360 preparation method Methods 0.000 description 4
- 239000000047 product Substances 0.000 description 4
- 229920006395 saturated elastomer Polymers 0.000 description 4
- 239000000243 solution Substances 0.000 description 4
- WSLDOOZREJYCGB-UHFFFAOYSA-N 1,2-Dichloroethane Chemical compound ClCCCl WSLDOOZREJYCGB-UHFFFAOYSA-N 0.000 description 3
- RYHBNJHYFVUHQT-UHFFFAOYSA-N 1,4-Dioxane Chemical compound C1COCCO1 RYHBNJHYFVUHQT-UHFFFAOYSA-N 0.000 description 3
- MLRVZFYXUZQSRU-UHFFFAOYSA-N 1-chlorohexane Chemical compound CCCCCCCl MLRVZFYXUZQSRU-UHFFFAOYSA-N 0.000 description 3
- 238000001644 13C nuclear magnetic resonance spectroscopy Methods 0.000 description 3
- 238000005160 1H NMR spectroscopy Methods 0.000 description 3
- WVYWICLMDOOCFB-UHFFFAOYSA-N 4-methyl-2-pentanol Chemical compound CC(C)CC(C)O WVYWICLMDOOCFB-UHFFFAOYSA-N 0.000 description 3
- WEVYAHXRMPXWCK-UHFFFAOYSA-N Acetonitrile Chemical compound CC#N WEVYAHXRMPXWCK-UHFFFAOYSA-N 0.000 description 3
- NTIZESTWPVYFNL-UHFFFAOYSA-N Methyl isobutyl ketone Chemical compound CC(C)CC(C)=O NTIZESTWPVYFNL-UHFFFAOYSA-N 0.000 description 3
- UIHCLUNTQKBZGK-UHFFFAOYSA-N Methyl isobutyl ketone Natural products CCC(C)C(C)=O UIHCLUNTQKBZGK-UHFFFAOYSA-N 0.000 description 3
- XYVQFUJDGOBPQI-UHFFFAOYSA-N Methyl-2-hydoxyisobutyric acid Chemical compound COC(=O)C(C)(C)O XYVQFUJDGOBPQI-UHFFFAOYSA-N 0.000 description 3
- IMNFDUFMRHMDMM-UHFFFAOYSA-N N-Heptane Chemical compound CCCCCCC IMNFDUFMRHMDMM-UHFFFAOYSA-N 0.000 description 3
- 238000005481 NMR spectroscopy Methods 0.000 description 3
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 description 3
- 229910052581 Si3N4 Inorganic materials 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 150000001450 anions Chemical class 0.000 description 3
- 125000004429 atom Chemical group 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 239000008367 deionised water Substances 0.000 description 3
- 229910021641 deionized water Inorganic materials 0.000 description 3
- 150000008282 halocarbons Chemical class 0.000 description 3
- 239000004615 ingredient Substances 0.000 description 3
- 239000012528 membrane Substances 0.000 description 3
- UZKWTJUDCOPSNM-UHFFFAOYSA-N methoxybenzene Substances CCCCOC=C UZKWTJUDCOPSNM-UHFFFAOYSA-N 0.000 description 3
- 239000012044 organic layer Substances 0.000 description 3
- 238000001556 precipitation Methods 0.000 description 3
- FVSKHRXBFJPNKK-UHFFFAOYSA-N propionitrile Chemical compound CCC#N FVSKHRXBFJPNKK-UHFFFAOYSA-N 0.000 description 3
- 239000011541 reaction mixture Substances 0.000 description 3
- 238000010992 reflux Methods 0.000 description 3
- 150000003839 salts Chemical class 0.000 description 3
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 3
- 238000004528 spin coating Methods 0.000 description 3
- 238000003756 stirring Methods 0.000 description 3
- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 3
- 239000008096 xylene Substances 0.000 description 3
- PAPBSGBWRJIAAV-UHFFFAOYSA-N ε-Caprolactone Chemical compound O=C1CCCCCO1 PAPBSGBWRJIAAV-UHFFFAOYSA-N 0.000 description 3
- JGTNAGYHADQMCM-UHFFFAOYSA-M 1,1,2,2,3,3,4,4,4-nonafluorobutane-1-sulfonate Chemical compound [O-]S(=O)(=O)C(F)(F)C(F)(F)C(F)(F)C(F)(F)F JGTNAGYHADQMCM-UHFFFAOYSA-M 0.000 description 2
- JUJWROOIHBZHMG-UHFFFAOYSA-N Pyridine Chemical compound C1=CC=NC=C1 JUJWROOIHBZHMG-UHFFFAOYSA-N 0.000 description 2
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 2
- 239000004809 Teflon Substances 0.000 description 2
- 229920006362 Teflon® Polymers 0.000 description 2
- SLINHMUFWFWBMU-UHFFFAOYSA-N Triisopropanolamine Chemical compound CC(O)CN(CC(C)O)CC(C)O SLINHMUFWFWBMU-UHFFFAOYSA-N 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 2
- 150000001298 alcohols Chemical class 0.000 description 2
- 125000003342 alkenyl group Chemical group 0.000 description 2
- 125000000304 alkynyl group Chemical group 0.000 description 2
- 230000006399 behavior Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 125000005587 carbonate group Chemical group 0.000 description 2
- 150000001768 cations Chemical class 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 238000010511 deprotection reaction Methods 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 230000018109 developmental process Effects 0.000 description 2
- 238000004090 dissolution Methods 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 125000001033 ether group Chemical group 0.000 description 2
- XYIBRDXRRQCHLP-UHFFFAOYSA-N ethyl acetoacetate Chemical compound CCOC(=O)CC(C)=O XYIBRDXRRQCHLP-UHFFFAOYSA-N 0.000 description 2
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 2
- 229910052740 iodine Inorganic materials 0.000 description 2
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- IVMHDOBGNQOUHO-UHFFFAOYSA-N oxathiane Chemical compound C1CCSOC1 IVMHDOBGNQOUHO-UHFFFAOYSA-N 0.000 description 2
- 230000035699 permeability Effects 0.000 description 2
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 2
- 239000004014 plasticizer Substances 0.000 description 2
- 239000011148 porous material Substances 0.000 description 2
- BWHMMNNQKKPAPP-UHFFFAOYSA-L potassium carbonate Chemical compound [K+].[K+].[O-]C([O-])=O BWHMMNNQKKPAPP-UHFFFAOYSA-L 0.000 description 2
- 239000002244 precipitate Substances 0.000 description 2
- 238000007639 printing Methods 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- 150000003462 sulfoxides Chemical class 0.000 description 2
- 239000004094 surface-active agent Substances 0.000 description 2
- PWQLFIKTGRINFF-UHFFFAOYSA-N tert-butyl 4-hydroxypiperidine-1-carboxylate Chemical compound CC(C)(C)OC(=O)N1CCC(O)CC1 PWQLFIKTGRINFF-UHFFFAOYSA-N 0.000 description 2
- 150000008027 tertiary esters Chemical class 0.000 description 2
- VDZOOKBUILJEDG-UHFFFAOYSA-M tetrabutylammonium hydroxide Chemical compound [OH-].CCCC[N+](CCCC)(CCCC)CCCC VDZOOKBUILJEDG-UHFFFAOYSA-M 0.000 description 2
- 150000003573 thiols Chemical class 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 125000006552 (C3-C8) cycloalkyl group Chemical group 0.000 description 1
- NWUYHJFMYQTDRP-UHFFFAOYSA-N 1,2-bis(ethenyl)benzene;1-ethenyl-2-ethylbenzene;styrene Chemical compound C=CC1=CC=CC=C1.CCC1=CC=CC=C1C=C.C=CC1=CC=CC=C1C=C NWUYHJFMYQTDRP-UHFFFAOYSA-N 0.000 description 1
- IWSZDQRGNFLMJS-UHFFFAOYSA-N 2-(dibutylamino)ethanol Chemical compound CCCCN(CCO)CCCC IWSZDQRGNFLMJS-UHFFFAOYSA-N 0.000 description 1
- XHJGXOOOMKCJPP-UHFFFAOYSA-N 2-[tert-butyl(2-hydroxyethyl)amino]ethanol Chemical compound OCCN(C(C)(C)C)CCO XHJGXOOOMKCJPP-UHFFFAOYSA-N 0.000 description 1
- ADSOSINJPNKUJK-UHFFFAOYSA-N 2-butylpyridine Chemical compound CCCCC1=CC=CC=N1 ADSOSINJPNKUJK-UHFFFAOYSA-N 0.000 description 1
- 125000003903 2-propenyl group Chemical group [H]C([*])([H])C([H])=C([H])[H] 0.000 description 1
- ZCYVEMRRCGMTRW-UHFFFAOYSA-N 7553-56-2 Chemical compound [I] ZCYVEMRRCGMTRW-UHFFFAOYSA-N 0.000 description 1
- WDJHALXBUFZDSR-UHFFFAOYSA-N Acetoacetic acid Natural products CC(=O)CC(O)=O WDJHALXBUFZDSR-UHFFFAOYSA-N 0.000 description 1
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- YNAVUWVOSKDBBP-UHFFFAOYSA-N Morpholine Chemical compound C1COCCN1 YNAVUWVOSKDBBP-UHFFFAOYSA-N 0.000 description 1
- CWNSVVHTTQBGQB-UHFFFAOYSA-N N,N-Diethyldodecanamide Chemical compound CCCCCCCCCCCC(=O)N(CC)CC CWNSVVHTTQBGQB-UHFFFAOYSA-N 0.000 description 1
- ZWXPDGCFMMFNRW-UHFFFAOYSA-N N-methylcaprolactam Chemical compound CN1CCCCCC1=O ZWXPDGCFMMFNRW-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 1
- GSEJCLTVZPLZKY-UHFFFAOYSA-N Triethanolamine Chemical compound OCCN(CCO)CCO GSEJCLTVZPLZKY-UHFFFAOYSA-N 0.000 description 1
- 239000007983 Tris buffer Substances 0.000 description 1
- QYKIQEUNHZKYBP-UHFFFAOYSA-N Vinyl ether Chemical compound C=COC=C QYKIQEUNHZKYBP-UHFFFAOYSA-N 0.000 description 1
- VZPPHXVFMVZRTE-UHFFFAOYSA-N [Kr]F Chemical compound [Kr]F VZPPHXVFMVZRTE-UHFFFAOYSA-N 0.000 description 1
- 150000007513 acids Chemical class 0.000 description 1
- 150000001252 acrylic acid derivatives Chemical class 0.000 description 1
- 125000005073 adamantyl group Chemical group C12(CC3CC(CC(C1)C3)C2)* 0.000 description 1
- 125000003545 alkoxy group Chemical group 0.000 description 1
- 125000002877 alkyl aryl group Chemical group 0.000 description 1
- 125000005248 alkyl aryloxy group Chemical group 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 150000001408 amides Chemical class 0.000 description 1
- 150000001412 amines Chemical class 0.000 description 1
- 239000000908 ammonium hydroxide Substances 0.000 description 1
- 150000008064 anhydrides Chemical class 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 125000004104 aryloxy group Chemical group 0.000 description 1
- 125000006267 biphenyl group Chemical group 0.000 description 1
- FGLZFXDJHLJUIA-UHFFFAOYSA-N bis(2,4,6-trimethylphenyl)iodanium Chemical compound CC1=CC(C)=CC(C)=C1[I+]C1=C(C)C=C(C)C=C1C FGLZFXDJHLJUIA-UHFFFAOYSA-N 0.000 description 1
- DNFSNYQTQMVTOK-UHFFFAOYSA-N bis(4-tert-butylphenyl)iodanium Chemical compound C1=CC(C(C)(C)C)=CC=C1[I+]C1=CC=C(C(C)(C)C)C=C1 DNFSNYQTQMVTOK-UHFFFAOYSA-N 0.000 description 1
- VGZKCAUAQHHGDK-UHFFFAOYSA-M bis(4-tert-butylphenyl)iodanium;trifluoromethanesulfonate Chemical compound [O-]S(=O)(=O)C(F)(F)F.C1=CC(C(C)(C)C)=CC=C1[I+]C1=CC=C(C(C)(C)C)C=C1 VGZKCAUAQHHGDK-UHFFFAOYSA-M 0.000 description 1
- 238000009954 braiding Methods 0.000 description 1
- 150000001721 carbon Chemical group 0.000 description 1
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 description 1
- 150000001732 carboxylic acid derivatives Chemical class 0.000 description 1
- 150000001735 carboxylic acids Chemical class 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000003153 chemical reaction reagent Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000004132 cross linking Methods 0.000 description 1
- 150000003950 cyclic amides Chemical class 0.000 description 1
- 125000001995 cyclobutyl group Chemical group [H]C1([H])C([H])([H])C([H])(*)C1([H])[H] 0.000 description 1
- 125000000582 cycloheptyl group Chemical group [H]C1([H])C([H])([H])C([H])([H])C([H])([H])C([H])(*)C([H])([H])C1([H])[H] 0.000 description 1
- 125000000113 cyclohexyl group Chemical group [H]C1([H])C([H])([H])C([H])([H])C([H])(*)C([H])([H])C1([H])[H] 0.000 description 1
- 125000000640 cyclooctyl group Chemical group [H]C1([H])C([H])([H])C([H])([H])C([H])([H])C([H])(*)C([H])([H])C([H])([H])C1([H])[H] 0.000 description 1
- 125000001511 cyclopentyl group Chemical group [H]C1([H])C([H])([H])C([H])([H])C([H])(*)C1([H])[H] 0.000 description 1
- 125000001559 cyclopropyl group Chemical group [H]C1([H])C([H])([H])C1([H])* 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- HEDRZPFGACZZDS-MICDWDOJSA-N deuterated chloroform Substances [2H]C(Cl)(Cl)Cl HEDRZPFGACZZDS-MICDWDOJSA-N 0.000 description 1
- WOWBFOBYOAGEEA-UHFFFAOYSA-N diafenthiuron Chemical compound CC(C)C1=C(NC(=S)NC(C)(C)C)C(C(C)C)=CC(OC=2C=CC=CC=2)=C1 WOWBFOBYOAGEEA-UHFFFAOYSA-N 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 125000001028 difluoromethyl group Chemical group [H]C(F)(F)* 0.000 description 1
- 238000003618 dip coating Methods 0.000 description 1
- 150000002019 disulfides Chemical class 0.000 description 1
- YROXEBCFDJQGOH-UHFFFAOYSA-N ditert-butyl piperazine-1,4-dicarboxylate Chemical compound CC(C)(C)OC(=O)N1CCN(C(=O)OC(C)(C)C)CC1 YROXEBCFDJQGOH-UHFFFAOYSA-N 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 1
- 239000007888 film coating Substances 0.000 description 1
- 238000009501 film coating Methods 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 238000003682 fluorination reaction Methods 0.000 description 1
- 238000009472 formulation Methods 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 230000014509 gene expression Effects 0.000 description 1
- 229910000449 hafnium oxide Inorganic materials 0.000 description 1
- WIHZLLGSGQNAGK-UHFFFAOYSA-N hafnium(4+);oxygen(2-) Chemical compound [O-2].[O-2].[Hf+4] WIHZLLGSGQNAGK-UHFFFAOYSA-N 0.000 description 1
- 125000005842 heteroatom Chemical group 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 125000004464 hydroxyphenyl group Chemical group 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 239000011630 iodine Substances 0.000 description 1
- 238000005342 ion exchange Methods 0.000 description 1
- 239000003456 ion exchange resin Substances 0.000 description 1
- 229920003303 ion-exchange polymer Polymers 0.000 description 1
- 150000002734 metacrylic acid derivatives Chemical class 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000000178 monomer Substances 0.000 description 1
- QTVRIQFMPJRJAK-UHFFFAOYSA-N n,n,n',n'-tetrabutylpropanediamide Chemical compound CCCCN(CCCC)C(=O)CC(=O)N(CCCC)CCCC QTVRIQFMPJRJAK-UHFFFAOYSA-N 0.000 description 1
- CZKBFNIVILPSPZ-UHFFFAOYSA-N n,n-bis(2-hydroxyethyl)-2,2-dimethylpropanamide Chemical compound CC(C)(C)C(=O)N(CCO)CCO CZKBFNIVILPSPZ-UHFFFAOYSA-N 0.000 description 1
- AJFDBNQQDYLMJN-UHFFFAOYSA-N n,n-diethylacetamide Chemical compound CCN(CC)C(C)=O AJFDBNQQDYLMJN-UHFFFAOYSA-N 0.000 description 1
- 125000001624 naphthyl group Chemical group 0.000 description 1
- 125000000449 nitro group Chemical group [O-][N+](*)=O 0.000 description 1
- 125000003518 norbornenyl group Chemical group C12(C=CC(CC1)C2)* 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000005693 optoelectronics Effects 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 229910000027 potassium carbonate Inorganic materials 0.000 description 1
- CHWRSCGUEQEHOH-UHFFFAOYSA-N potassium oxide Chemical compound [O-2].[K+].[K+] CHWRSCGUEQEHOH-UHFFFAOYSA-N 0.000 description 1
- 229910001950 potassium oxide Inorganic materials 0.000 description 1
- 108010001861 pregnancy-associated glycoprotein 1 Proteins 0.000 description 1
- 125000002924 primary amino group Chemical group [H]N([H])* 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
- UMJSCPRVCHMLSP-UHFFFAOYSA-N pyridine Natural products COC1=CC=CN=C1 UMJSCPRVCHMLSP-UHFFFAOYSA-N 0.000 description 1
- 125000004076 pyridyl group Chemical group 0.000 description 1
- 125000001453 quaternary ammonium group Chemical group 0.000 description 1
- 125000002943 quinolinyl group Chemical group N1=C(C=CC2=CC=CC=C12)* 0.000 description 1
- 230000007261 regionalization Effects 0.000 description 1
- 239000013557 residual solvent Substances 0.000 description 1
- 235000021003 saturated fats Nutrition 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 238000004513 sizing Methods 0.000 description 1
- 229910000029 sodium carbonate Inorganic materials 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 150000003440 styrenes Chemical class 0.000 description 1
- 125000000547 substituted alkyl group Chemical group 0.000 description 1
- 150000003457 sulfones Chemical class 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 description 1
- COBURCRUNDBUGQ-UHFFFAOYSA-N tert-butyl 2-ethylimidazole-1-carboxylate Chemical compound CCC1=NC=CN1C(=O)OC(C)(C)C COBURCRUNDBUGQ-UHFFFAOYSA-N 0.000 description 1
- 125000000999 tert-butyl group Chemical group [H]C([H])([H])C(*)(C([H])([H])[H])C([H])([H])[H] 0.000 description 1
- LPQZERIRKRYGGM-UHFFFAOYSA-N tert-butyl pyrrolidine-1-carboxylate Chemical compound CC(C)(C)OC(=O)N1CCCC1 LPQZERIRKRYGGM-UHFFFAOYSA-N 0.000 description 1
- 229940073455 tetraethylammonium hydroxide Drugs 0.000 description 1
- LRGJRHZIDJQFCL-UHFFFAOYSA-M tetraethylazanium;hydroxide Chemical compound [OH-].CC[N+](CC)(CC)CC LRGJRHZIDJQFCL-UHFFFAOYSA-M 0.000 description 1
- 125000001544 thienyl group Chemical group 0.000 description 1
- 150000003568 thioethers Chemical class 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- 125000002023 trifluoromethyl group Chemical group FC(F)(F)* 0.000 description 1
- 229960004418 trolamine Drugs 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 1
- 229920002554 vinyl polymer Polymers 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/0045—Photosensitive materials with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F212/00—Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by an aromatic carbocyclic ring
- C08F212/02—Monomers containing only one unsaturated aliphatic radical
- C08F212/04—Monomers containing only one unsaturated aliphatic radical containing one ring
- C08F212/14—Monomers containing only one unsaturated aliphatic radical containing one ring substituted by heteroatoms or groups containing heteroatoms
- C08F212/22—Oxygen
- C08F212/24—Phenols or alcohols
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K5/00—Use of organic ingredients
- C08K5/36—Sulfur-, selenium-, or tellurium-containing compounds
- C08K5/45—Heterocyclic compounds having sulfur in the ring
- C08K5/46—Heterocyclic compounds having sulfur in the ring with oxygen or nitrogen in the ring
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L25/00—Compositions of, homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by an aromatic carbocyclic ring; Compositions of derivatives of such polymers
- C08L25/02—Homopolymers or copolymers of hydrocarbons
- C08L25/04—Homopolymers or copolymers of styrene
- C08L25/08—Copolymers of styrene
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
- C09D125/00—Coating compositions based on homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by an aromatic carbocyclic ring; Coating compositions based on derivatives of such polymers
- C09D125/18—Homopolymers or copolymers of aromatic monomers containing elements other than carbon and hydrogen
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/0041—Photosensitive materials providing an etching agent upon exposure
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/0042—Photosensitive materials with inorganic or organometallic light-sensitive compounds not otherwise provided for, e.g. inorganic resists
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/0046—Photosensitive materials with perfluoro compounds, e.g. for dry lithography
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
- G03F7/0392—Macromolecular compounds which are photodegradable, e.g. positive electron resists the macromolecular compound being present in a chemically amplified positive photoresist composition
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
- G03F7/0392—Macromolecular compounds which are photodegradable, e.g. positive electron resists the macromolecular compound being present in a chemically amplified positive photoresist composition
- G03F7/0397—Macromolecular compounds which are photodegradable, e.g. positive electron resists the macromolecular compound being present in a chemically amplified positive photoresist composition the macromolecular compound having an alicyclic moiety in a side chain
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2002—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image
- G03F7/2012—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image using liquid photohardening compositions, e.g. for the production of reliefs such as flexographic plates or stamps
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2037—Exposure with X-ray radiation or corpuscular radiation, through a mask with a pattern opaque to that radiation
- G03F7/2039—X-ray radiation
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Organic Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Medicinal Chemistry (AREA)
- Polymers & Plastics (AREA)
- Engineering & Computer Science (AREA)
- Toxicology (AREA)
- Structural Engineering (AREA)
- Life Sciences & Earth Sciences (AREA)
- Materials Engineering (AREA)
- Wood Science & Technology (AREA)
- Architecture (AREA)
- Emergency Medicine (AREA)
- Materials For Photolithography (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Abstract
Description
ポリマーと、
溶媒と、
式(I)
Rは、非置換又は置換C2−20アルケニル基、非置換又は置換C3−20シクロアルキル基、非置換又は置換C5−30芳香族基、或いは非置換又は置換C4−30ヘテロ芳香族基であり、Rは、pH<7.0で加水分解できる酸感受性官能基を任意に含み、
R1からR8は、それぞれ独立して、水素、フッ素、塩素、臭素、及びヨウ素から選択されるハロゲン、直鎖又は分枝C1−20アルキル基、直鎖又は分枝C1−20フルオロアルキル基、直鎖又は分枝C2−20アルケニル基、直鎖又は分枝C2−20フルオロアルケニル基、単環式又は多環式C3−20シクロアルキル基、単環式又は多環式C3−20フルオロシクロアルキル基、単環式又は多環式C3−20シクロアルケニル基、単環式又は多環式C3−20フルオロシクロアルケニル基、単環式又は多環式C3−20ヘテロシクロアルキル基、単環式又は多環式C3−20ヘテロシクロアルケニル基、単環式又は多環式C6−20アリール基、単環式又は多環式C6−20フルオロアリール基、単環式又は多環式C4−20ヘテロアリール基、或いは単環式又は多環式C4−20フルオロヘテロアリール基であり、水素を除いて、これらのそれぞれは置換又は非置換され、
R1からR8の任意の2つは、Zを介して任意に接続されて環を形成し、Zは、単結合、又は−C(=O)−、−S(=O)−、−S(=O)2−、−C(=O)O−、−C(=O)NR’−、−(C=O)−C(=O)−、−O−、−CH(OH)−、−CH2−、−S−、及び−BR’−から選択される少なくとも1つの連結基であり、R’は、水素又はC1−20アルキル基であり、
R1からR8のそれぞれは、−OY、−NO2、−CF3、−C(=O)−C(=O)−Y、−CH2OY、−CH2Y、−SY、−B(Y)n、−C(=O)NRY、−NRC(=O)Y、−(C=O)OY、及び−O(C=O)Yから選択される少なくとも1つで任意に置換され、Yは、直鎖又は分枝C1−20アルキル基、直鎖又は分枝C1−20フルオロアルキル基、直鎖又は分枝C2−20アルケニル基、直鎖又は分枝C2−20フルオロアルケニル基、直鎖又は分枝C2−20アルキニル基、直鎖又は分枝C2−20フルオロアルキニル基、C6−20アリール基、C6−20フルオロアリール基、又はpH<7.0で加水分解できる酸感受性官能基であり、
Xは、O、S、Se、Te、NR’’、S=O、S(=O)2、C=O、(C=O)O、O(C=O)、(C=O)NR’’、又はNR’’(C=O)であり、R’’は、水素又はC1−20アルキル基であり、
nは、0〜5の整数であり、
Rfは、直鎖又は分枝又は環式C1−6フッ素化アルキル基である)を有するスルホニウム塩と、を含む。
Rは水素、C1−20アルキル基、C1−20フルオロアルキル基、C6−20アリール基、又はC6−20フルオロアリール基であり得、これらのそれぞれは、水素を除いて、置換されていても置換されていなくてもよい。
Wは、水素、フッ素、塩素、臭素、及びヨウ素から選択されるハロゲン、カルボン酸又はエステル、ヒドロキシ基、チオール、直鎖又は分枝C1−20アルキル基、直鎖又は分枝C1−20フルオロアルキル基、直鎖又は分枝C2−20アルケニル基、直鎖又は分枝C2−20フルオロアルケニル基、単環式又は多環式C3−20シクロアルキル基、単環式又は多環式C3−20フルオロシクロアルキル基、単環式又は多環式C3−20シクロアルケニル基、単環式又は多環式C3−20フルオロシクロアルケニル基、単環式又は多環式C3−20ヘテロシクロアルキル基、単環式又は多環式C3−20ヘテロシクロアルケニル基、単環式又は多環式C6−20アリール基、或いは単環式又は多環式C4−20ヘテロアリール基であり得、これらのそれぞれは、水素を除いて、置換されていても置換されていなくてもよく、mは0〜4の整数であり得る。
実施例1:PAG−1の合成
1H−NMR(600MHz,CDCl3)δ7.88(d,2H),7.69(d,2H),4.38(m,2H),4.11(m,2H),3.93(m,2H),3.67(m,2H),1.34(s,9H)ppm.19F−NMR(600MHz,CDCl3)δ80.9,114.66,12.59,126.0.13C−NMR(150MHz,CDCl3)δ159.3,129.8,128.6,119.0,64.2,39.3,35.6,30.9ppm.
1H−NMR(600MHz,CDCl3)δ7.88(d,2H),7.69(d,2H),4.38(m,2H),4.11(m,2H),3.93(m,2H),3.67(m,2H),1.34(s,9H)ppm.19F−NMR(600MHz,CDCl3)δ78.4ppm.13C−NMR(150MHz−CDCl3)δ159.3,129.8,128.7,118.9,64.2,39.52,35.6,31.0ppm.
1H−NMR(600MHz,CDCl3)7.07(s,2H),4.53(m,2H),4.16(m,2H),4.06(m,2H),3.75(m,2H),2.72(s,6H),2.34(s,3H)ppm.19F−NMR(600MHz−CDCl3)81.0,114.9,121.8,126.1ppm.13C−NMR(150MHz−CDCl3)146.6,143.2,132.7,115.0,65.9,36.5,21.4,21.2ppm.
15.392gのポリマーA1、0.008gのPOLYFOX(登録商標)PF−656界面活性剤(Omnova Solutions Inc.)、0.006gのN,N−ジエチルドデカンアミド(DDA)、0.314gのPAG X1を19.424gのプロピレングリコールモノメチルエーテルアセテート(PGMEA)、3.642gのプロピレングリコールモノメチルエーテル(PGME)、及び1.214gのγ−ブチロラクトン(GBL)に溶解した。得られた混合物をローラー上で12時間回転させ、次いで、1ミクロンの孔径を有するテフロンフィルターを通して濾過した。
フォトレジスト組成物は、表1に示される成分及び量を使用して、実施例1と同じ手順を使用することによって調製した。
15.787gのポリマーAと3.947gのポリマーB、0.010gのPOLYFOX(登録商標)PF−656界面活性剤(Omnova Solutions Inc.)、及び0.007gの1−アリルアゼパン−2−オンを、24.000gのプロピレングリコールモノメチルエーテルアセテート(PGMEA)に溶解した。この混合物に、4.500gのプロピレングリコールモノメチルエーテル(PGME)に溶解した上記の0.200gのPAG X1及び0.050gのPAG X3を加えた。1.500gのγ−ブチロラクトン(GBL)を、得られた混合物に加えた。最終的な混合物を、ローラー上で12時間回転させ、次いで1ミクロンの孔径を有するテフロンフィルターを通して濾過した。
Claims (13)
- ポリマーと、
溶媒と、
式(I)
Rは、非置換又は置換C2−20アルケニル基、非置換又は置換C3−20シクロアルキル基、非置換又は置換C5−30芳香族基、或いは非置換又は置換C4−30ヘテロ芳香族基であり、Rは、pH<7.0で加水分解できる酸感受性官能基を任意選択的に含み、
R1からR8は、それぞれ独立して、水素、フッ素、塩素、臭素、及びヨウ素から選択されるハロゲン、直鎖又は分枝C1−20アルキル基、直鎖又は分枝C1−20フルオロアルキル基、直鎖又は分枝C2−20アルケニル基、直鎖又は分枝C2−20フルオロアルケニル基、単環式又は多環式C3−20シクロアルキル基、単環式又は多環式C3−20フルオロシクロアルキル基、単環式又は多環式C3−20シクロアルケニル基、単環式又は多環式C3−20フルオロシクロアルケニル基、単環式又は多環式C3−20ヘテロシクロアルキル基、単環式又は多環式C3−20ヘテロシクロアルケニル基、単環式又は多環式C6−20アリール基、単環式又は多環式C6−20フルオロアリール基、単環式又は多環式C4−20ヘテロアリール基、或いは単環式又は多環式C4−20フルオロヘテロアリール基であり、水素を除いて、これらのそれぞれは置換又は非置換され、
R1からR8の任意の2つは、Zを介して任意選択的に接続されて環を形成し、Zは、単結合、又は−C(=O)−、−S(=O)−、−S(=O)2−、−C(=O)O−、−C(=O)NR’−、−C(=O)−C(=O)−、−O−、−CH(OH)−、−CH2−、−S−、及び−BR’−から選択される少なくとも1つの連結基であり、R’は、水素又はC1−20アルキル基であり、
R1からR8のそれぞれは、−OY、−NO2、−CF3、−C(=O)−C(=O)−Y、−CH2OY、−CH2Y、−SY、−B(Y)n、−C(=O)NRY、−NRC(=O)Y、−(C=O)OY、及び−O(C=O)Yから選択される少なくとも1つで任意選択的に置換され、Yは、直鎖又は分枝C1−20アルキル基、直鎖又は分枝C1−20フルオロアルキル基、直鎖又は分枝C2−20アルケニル基、直鎖又は分枝C2−20フルオロアルケニル基、直鎖又は分枝C2−20アルキニル基、直鎖又は分枝C2−20フルオロアルキニル基、C6−20アリール基、C6−20フルオロアリール基、又はpH<7.0で加水分解できる酸感受性官能基であり、
Xは、O、S、Se、Te、NR’’、S=O、S(=O)2、C=O、(C=O)O、O(C=O)、(C=O)NR’’、又はNR’’(C=O)であり、R’’は、水素又はC1−20アルキル基であり、
nは、0〜5の整数であり、
Rfは、直鎖又は分枝又は環式C1−6フッ素化アルキル基である)を有するスルホニウム塩と、を含むフォトレジスト組成物。 - 式(I)におけるRfは、C(R9)y(R10)zであり、式中、R9は、F及びフッ素化メチルから独立して選択され、R10は、H、C1−5直鎖又は分枝又は環式アルキル及びC1−5直鎖又は分枝又は環式フッ素化アルキルから独立して選択され、y及びzは、独立して0〜3の整数であり、但し、yとzの合計が3であり、R9及びR10の少なくとも1つはフッ素を含み、Rfの炭素原子の総数は1〜6である、請求項1に記載のフォトレジスト組成物。
- Rは、非置換又は置換C5−30芳香族基或いは非置換又は置換C4−30ヘテロ芳香族基である、請求項1に記載のフォトレジスト組成物。
- Rは、置換フェニル基である、請求項3に記載のフォトレジスト組成物。
- Rの1つ以上の置換基は、C1−5アルキル、C3−6シクロアルキル、及びそれらの組み合わせから選択される、請求項4に記載のフォトレジスト組成物。
- R1からR8のそれぞれは、水素である、請求項1に記載のフォトレジスト組成物。
- 前記ポリマーは、前記ポリマーにおける構造単位の総量の100重量パーセントに基づいて、50重量パーセント以上の量の置換又は非置換スチレンモノマーから形成される構造単位を含む、請求項1に記載のフォトレジスト組成物。
- XはOである、請求項1に記載のフォトレジスト組成物。
- 前記フォトレジスト組成物は、1回の塗布で5.0ミクロン超及び30ミクロン未満の乾燥状態の厚さにコーティングされることができる、請求項1に記載のフォトレジスト組成物。
- (a)基板と、(b)前記基板に渡り配置された請求項1〜9のいずれか一項に記載のフォトレジスト組成物の層を含む、コーティングされた基板。
- (a)基板に請求項1〜9のいずれか一項に記載のフォトレジスト組成物の層を塗布する工程と、(b)前記塗布されたフォトレジスト組成物を乾燥させて組成物層を形成する工程と、(c)前記組成物層を活性化放射線に露光する工程と、(d)前記露光された組成物層を加熱する工程と、(e)前記露光された組成物層を現像する工程とを含む、レジストパターンを形成する方法。
- 前記フォトレジスト組成物の層は、1回の塗布で5.0ミクロン超30ミクロン未満の厚さにコーティングされる、請求項11に記載の方法。
- 前記組成物層をエッチングマスクとして使用して前記基板に階段パターンを形成する工程を更に含み、前記階段パターンは複数の階段を含む、請求項11又は12に記載の方法。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2023070148A JP2023100726A (ja) | 2019-05-10 | 2023-04-21 | フォトレジスト組成物及びこの組成物を用いてレジストパターンを形成する方法 |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US16/409,093 | 2019-05-10 | ||
US16/409,093 US20200356001A1 (en) | 2019-05-10 | 2019-05-10 | Photoresist compositions and methods of forming resist patterns with such compositions |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2023070148A Division JP2023100726A (ja) | 2019-05-10 | 2023-04-21 | フォトレジスト組成物及びこの組成物を用いてレジストパターンを形成する方法 |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2020187352A true JP2020187352A (ja) | 2020-11-19 |
Family
ID=73047360
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2020082083A Pending JP2020187352A (ja) | 2019-05-10 | 2020-05-07 | フォトレジスト組成物及びこの組成物を用いてレジストパターンを形成する方法 |
JP2023070148A Pending JP2023100726A (ja) | 2019-05-10 | 2023-04-21 | フォトレジスト組成物及びこの組成物を用いてレジストパターンを形成する方法 |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2023070148A Pending JP2023100726A (ja) | 2019-05-10 | 2023-04-21 | フォトレジスト組成物及びこの組成物を用いてレジストパターンを形成する方法 |
Country Status (5)
Country | Link |
---|---|
US (1) | US20200356001A1 (ja) |
JP (2) | JP2020187352A (ja) |
KR (1) | KR102503409B1 (ja) |
CN (1) | CN111913351A (ja) |
TW (1) | TW202102471A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2023095563A1 (ja) * | 2021-11-25 | 2023-06-01 | Jsr株式会社 | 感放射線性樹脂組成物及びパターン形成方法 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102515739B1 (ko) | 2022-12-07 | 2023-03-30 | 타코마테크놀러지 주식회사 | 감광성 수지 및 이를 포함하는 포토레지스트 조성물 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH1097075A (ja) * | 1996-06-07 | 1998-04-14 | Fuji Photo Film Co Ltd | ポジ型フォトレジスト組成物 |
WO2018212079A1 (ja) * | 2017-05-19 | 2018-11-22 | 富士フイルム株式会社 | 感活性光線性又は感放射線性樹脂組成物、レジスト膜、パターン形成方法、及び電子デバイスの製造方法 |
WO2019054311A1 (ja) * | 2017-09-13 | 2019-03-21 | 富士フイルム株式会社 | 感活性光線性又は感放射線性樹脂組成物、レジスト膜、パターン形成方法、及び電子デバイスの製造方法 |
WO2020049859A1 (ja) * | 2018-09-05 | 2020-03-12 | 富士フイルム株式会社 | 感活性光線性又は感放射線性樹脂組成物、レジスト膜、パターン形成方法、及び電子デバイスの製造方法 |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3588822B2 (ja) * | 1994-07-07 | 2004-11-17 | Jsr株式会社 | 新規オニウム塩およびそれを含有する感放射線性樹脂 組成物 |
JPH1130864A (ja) * | 1997-07-10 | 1999-02-02 | Fuji Photo Film Co Ltd | 遠紫外線露光用ポジ型フォトレジスト組成物 |
US6303266B1 (en) * | 1998-09-24 | 2001-10-16 | Kabushiki Kaisha Toshiba | Resin useful for resist, resist composition and pattern forming process using the same |
JP2001290275A (ja) * | 2000-02-03 | 2001-10-19 | Fuji Photo Film Co Ltd | ポジ型フォトレジスト組成物 |
JP2003241386A (ja) * | 2001-12-13 | 2003-08-27 | Fuji Photo Film Co Ltd | ポジ型レジスト組成物 |
US7297616B2 (en) * | 2003-04-09 | 2007-11-20 | Rohm And Haas Electronic Materials Llc | Methods, photoresists and substrates for ion-implant lithography |
EP1621927B1 (en) * | 2004-07-07 | 2018-05-23 | FUJIFILM Corporation | Positive type resist composition for use in liquid immersion exposure and a method of forming the pattern using the same |
WO2006043257A1 (en) * | 2004-10-18 | 2006-04-27 | New Lake International Limited | A coating composition |
JP4665810B2 (ja) * | 2005-03-29 | 2011-04-06 | Jsr株式会社 | ポジ型感放射線性樹脂組成物 |
US7718344B2 (en) * | 2006-09-29 | 2010-05-18 | Fujifilm Corporation | Resist composition and pattern forming method using the same |
US8715918B2 (en) * | 2007-09-25 | 2014-05-06 | Az Electronic Materials Usa Corp. | Thick film resists |
JP5977594B2 (ja) * | 2011-07-19 | 2016-08-24 | 住友化学株式会社 | レジスト組成物及びレジストパターンの製造方法 |
JP5739497B2 (ja) * | 2012-09-15 | 2015-06-24 | ローム アンド ハース エレクトロニック マテリアルズ エルエルシーRohm and Haas Electronic Materials LLC | 酸発生剤化合物およびそれを含むフォトレジスト |
CN105207798B (zh) * | 2014-06-26 | 2020-03-13 | 中兴通讯股份有限公司 | 软件定义网络中的业务编排方法及装置 |
JP6637750B2 (ja) * | 2014-12-15 | 2020-01-29 | 住友化学株式会社 | レジスト組成物及びレジストパターンの製造方法 |
JP6451469B2 (ja) * | 2015-04-07 | 2019-01-16 | 信越化学工業株式会社 | フォトマスクブランク、レジストパターン形成方法、及びフォトマスクの製造方法 |
US9887347B2 (en) * | 2015-11-27 | 2018-02-06 | Canon Kabushiki Kaisha | Piezoelectric element, piezoelectric actuator and electronic instrument using the same |
JP6932943B2 (ja) * | 2016-02-29 | 2021-09-08 | 住友化学株式会社 | 塩、レジスト組成物及びレジストパターンの製造方法 |
-
2019
- 2019-05-10 US US16/409,093 patent/US20200356001A1/en active Pending
-
2020
- 2020-05-04 TW TW109114767A patent/TW202102471A/zh unknown
- 2020-05-04 KR KR1020200053221A patent/KR102503409B1/ko active IP Right Grant
- 2020-05-06 CN CN202010371226.8A patent/CN111913351A/zh active Pending
- 2020-05-07 JP JP2020082083A patent/JP2020187352A/ja active Pending
-
2023
- 2023-04-21 JP JP2023070148A patent/JP2023100726A/ja active Pending
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH1097075A (ja) * | 1996-06-07 | 1998-04-14 | Fuji Photo Film Co Ltd | ポジ型フォトレジスト組成物 |
WO2018212079A1 (ja) * | 2017-05-19 | 2018-11-22 | 富士フイルム株式会社 | 感活性光線性又は感放射線性樹脂組成物、レジスト膜、パターン形成方法、及び電子デバイスの製造方法 |
WO2019054311A1 (ja) * | 2017-09-13 | 2019-03-21 | 富士フイルム株式会社 | 感活性光線性又は感放射線性樹脂組成物、レジスト膜、パターン形成方法、及び電子デバイスの製造方法 |
WO2020049859A1 (ja) * | 2018-09-05 | 2020-03-12 | 富士フイルム株式会社 | 感活性光線性又は感放射線性樹脂組成物、レジスト膜、パターン形成方法、及び電子デバイスの製造方法 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2023095563A1 (ja) * | 2021-11-25 | 2023-06-01 | Jsr株式会社 | 感放射線性樹脂組成物及びパターン形成方法 |
Also Published As
Publication number | Publication date |
---|---|
US20200356001A1 (en) | 2020-11-12 |
JP2023100726A (ja) | 2023-07-19 |
KR20200130146A (ko) | 2020-11-18 |
KR102503409B1 (ko) | 2023-02-23 |
CN111913351A (zh) | 2020-11-10 |
TW202102471A (zh) | 2021-01-16 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP6334900B2 (ja) | 低温適用のためのイオン性熱酸発生剤 | |
TWI790417B (zh) | 光阻組成物及圖案形成方法 | |
TWI541226B (zh) | 鹼反應性光酸產生劑及包含該光酸產生劑之光阻劑 | |
TWI618690B (zh) | 酸產生劑化合物及包括所述化合物之光阻劑 | |
KR101809582B1 (ko) | 열산 발생제 및 포토레지스트 패턴 트리밍 조성물 및 방법 | |
TWI638230B (zh) | 單體、高分子化合物、光阻材料及圖案形成方法 | |
JP2023100726A (ja) | フォトレジスト組成物及びこの組成物を用いてレジストパターンを形成する方法 | |
TWI567052B (zh) | 新穎鎓鹽化合物及光阻組成物與圖案形成方法 | |
JP2018013776A (ja) | 光酸発生剤、フォトレジスト、コーティング基板、および電子デバイスの形成方法 | |
TW201312277A (zh) | 光阻圖型之形成方法 | |
TW201917115A (zh) | 聚合性單體、聚合物、光阻材料及圖案形成方法 | |
TW201725450A (zh) | 光致抗蝕劑組合物、包含光致抗蝕劑組合物的經塗佈基板及形成電子裝置的方法 | |
US20200209743A1 (en) | Composition for preparing thick film photorest, thick film photoresist, and process of preparing the same | |
KR20180052119A (ko) | 광산-발생 모노머, 상기 모노머로부터 유도된 폴리머, 상기 폴리머를 포함하는 포토레지스트 조성물, 및 상기 포토레지스트 조성물을 사용하여 포토레지스트 릴리프 이미지를 형성하는 방법 | |
KR20180018603A (ko) | 열산 발생제 및 포토레지스트 패턴 트리밍 조성물 및 방법 | |
TWI656111B (zh) | 光酸產生劑 | |
KR102389492B1 (ko) | 레지스트 조성물, 이의 제조 방법 및 이를 함유하는 물품 | |
JP7065164B2 (ja) | ポリマー及びフォトレジスト組成物 | |
TW202340126A (zh) | 光活性化合物、包含其的光阻劑組成物及圖案形成方法 | |
JP2023051781A (ja) | フォトレジスト組成物及びパターン形成方法 | |
JP2023051872A (ja) | フォトレジスト組成物及びパターン形成方法 | |
JP2022074080A (ja) | フォトレジスト組成物及びパターン形成方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20200507 |
|
RD02 | Notification of acceptance of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7422 Effective date: 20200509 |
|
RD04 | Notification of resignation of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7424 Effective date: 20200907 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20210519 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20210611 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20210911 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20211111 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20220324 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20220624 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20220823 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20220926 |
|
A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20221223 |