JP2020120038A - コンデンサ - Google Patents
コンデンサ Download PDFInfo
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- JP2020120038A JP2020120038A JP2019011361A JP2019011361A JP2020120038A JP 2020120038 A JP2020120038 A JP 2020120038A JP 2019011361 A JP2019011361 A JP 2019011361A JP 2019011361 A JP2019011361 A JP 2019011361A JP 2020120038 A JP2020120038 A JP 2020120038A
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- Prior art keywords
- dielectric layer
- metal particles
- capacitor
- internal electrode
- metal
- Prior art date
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- 239000003990 capacitor Substances 0.000 title claims abstract description 87
- 239000002923 metal particle Substances 0.000 claims abstract description 88
- 239000002245 particle Substances 0.000 claims abstract description 41
- 239000013078 crystal Substances 0.000 claims abstract description 32
- 229910052751 metal Inorganic materials 0.000 claims description 16
- 239000002184 metal Substances 0.000 claims description 16
- -1 grain boundaries Substances 0.000 claims 1
- 239000000843 powder Substances 0.000 description 19
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 10
- 239000000919 ceramic Substances 0.000 description 10
- 239000004020 conductor Substances 0.000 description 10
- 239000000654 additive Substances 0.000 description 9
- 230000000996 additive effect Effects 0.000 description 9
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 7
- 229910002113 barium titanate Inorganic materials 0.000 description 7
- 239000000463 material Substances 0.000 description 7
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 5
- 239000000460 chlorine Substances 0.000 description 5
- 229910052801 chlorine Inorganic materials 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 239000002904 solvent Substances 0.000 description 5
- 239000011521 glass Substances 0.000 description 4
- 238000010191 image analysis Methods 0.000 description 4
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- 239000002003 electrode paste Substances 0.000 description 3
- 230000017525 heat dissipation Effects 0.000 description 3
- 239000000395 magnesium oxide Substances 0.000 description 3
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 3
- 239000007769 metal material Substances 0.000 description 3
- 229910052759 nickel Inorganic materials 0.000 description 3
- 238000012360 testing method Methods 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- 239000001856 Ethyl cellulose Substances 0.000 description 2
- ZZSNKZQZMQGXPY-UHFFFAOYSA-N Ethyl cellulose Chemical compound CCOCC1OC(OC)C(OCC)C(OCC)C1OC1C(O)C(O)C(OC)C(CO)O1 ZZSNKZQZMQGXPY-UHFFFAOYSA-N 0.000 description 2
- 101100513612 Microdochium nivale MnCO gene Proteins 0.000 description 2
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 229910003440 dysprosium oxide Inorganic materials 0.000 description 2
- NLQFUUYNQFMIJW-UHFFFAOYSA-N dysprosium(iii) oxide Chemical compound O=[Dy]O[Dy]=O NLQFUUYNQFMIJW-UHFFFAOYSA-N 0.000 description 2
- 229920001249 ethyl cellulose Polymers 0.000 description 2
- 235000019325 ethyl cellulose Nutrition 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- UODXCYZDMHPIJE-UHFFFAOYSA-N menthanol Chemical compound CC1CCC(C(C)(C)O)CC1 UODXCYZDMHPIJE-UHFFFAOYSA-N 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 229920002037 poly(vinyl butyral) polymer Polymers 0.000 description 2
- 238000010405 reoxidation reaction Methods 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- POAOYUHQDCAZBD-UHFFFAOYSA-N 2-butoxyethanol Chemical compound CCCCOCCO POAOYUHQDCAZBD-UHFFFAOYSA-N 0.000 description 1
- 229910018068 Li 2 O Inorganic materials 0.000 description 1
- 239000002202 Polyethylene glycol Substances 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 239000010953 base metal Substances 0.000 description 1
- 238000001354 calcination Methods 0.000 description 1
- AOWKSNWVBZGMTJ-UHFFFAOYSA-N calcium titanate Chemical compound [Ca+2].[O-][Ti]([O-])=O AOWKSNWVBZGMTJ-UHFFFAOYSA-N 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 239000002270 dispersing agent Substances 0.000 description 1
- 238000007606 doctor blade method Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 235000019441 ethanol Nutrition 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 239000011777 magnesium Substances 0.000 description 1
- ZLNQQNXFFQJAID-UHFFFAOYSA-L magnesium carbonate Chemical compound [Mg+2].[O-]C([O-])=O ZLNQQNXFFQJAID-UHFFFAOYSA-L 0.000 description 1
- 239000001095 magnesium carbonate Substances 0.000 description 1
- 229910000021 magnesium carbonate Inorganic materials 0.000 description 1
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 description 1
- 239000011656 manganese carbonate Substances 0.000 description 1
- 229940093474 manganese carbonate Drugs 0.000 description 1
- 235000006748 manganese carbonate Nutrition 0.000 description 1
- 229910000016 manganese(II) carbonate Inorganic materials 0.000 description 1
- XMWCXZJXESXBBY-UHFFFAOYSA-L manganese(ii) carbonate Chemical compound [Mn+2].[O-]C([O-])=O XMWCXZJXESXBBY-UHFFFAOYSA-L 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- IJGRMHOSHXDMSA-UHFFFAOYSA-N nitrogen Substances N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 229910000510 noble metal Inorganic materials 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229920001223 polyethylene glycol Polymers 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000002002 slurry Substances 0.000 description 1
- VEALVRVVWBQVSL-UHFFFAOYSA-N strontium titanate Chemical compound [Sr+2].[O-][Ti]([O-])=O VEALVRVVWBQVSL-UHFFFAOYSA-N 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
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Abstract
Description
i−ii線断面図である。図3は、図2におけるP1部の拡大図である。図4は、図3におけるP2部の拡大図である。図5は、コンデンサの他の態様を示す外観斜視図である。実施形態の一例として示すコンデンサは、コンデンサ本体1と、その端面に設けられた外部電極3とを有する。コンデンサ本体1は、誘電体層5と内部電極層7とを有する。誘電体層5と内部電極層7とは交互に複数層積層されている。外部電極3は内部電極層7と電気的に接続された状態にある。誘電体層5は、結晶粒子9と、粒界11と、金属粒子13とを有する。結晶粒子9の周囲には、粒界11が取り巻いている。言い換えると、複数の結晶粒子9は粒界11を介して存在している。ここで、結晶粒子9は誘電性を示すセラミック粒子である。金属粒子13は主として粒界11に存在している。コンデンサを構成する結晶粒子9、粒界11、および金属粒子13は、以下の関係を有する。金属粒子13の平均粒径D13は結晶粒子9の平均粒径D9よりも小さい。金属粒子13の平均粒径D13は粒界11の平均幅W11よりも大きい。なお、金属粒子13の材料の熱伝導率は結晶粒子9の材料の熱伝導率よりも高い。金属粒子13は、誘電体層5の縦断面を観察したときに、誘電体層5の幅方向および厚み方向に分布している。
なっている。この他、誘電体層5の厚み方向に2つ以上の金属粒子13が並んだ場合に、金属粒子13同士の一部が重なる配置でも良い。
=10(モル%))およびを準備した。誘電体粉末は、チタン酸バリウム粉末100モルに対して、酸化マグネシウム粉末(MgO)をMgO換算で0.8モル、酸化ディスプロシウム粉末(Dy2O3)を0.8モル、MnCO3粉末をMnO換算で0.3モル添加し、さらにガラス成分(SiO2−BaO−CaO系のガラス粉末)をチタン酸バリウム粉末100質量部に対して1質量部添加した組成とした。
た。添加剤の添加量を0.05質量部以上とした試料は、金属粒子が存在していることを確認できるものであった。誘電体層中に存在する金属粒子の割合は、以下のようにして求めた。まず、コンデンサを研磨して図2に示すような断面を露出させた試料を作製した。次に、誘電体層の断面に、結晶粒子、粒界および金属粒子のそれぞれの輪郭が明確に見えるように熱エッチング処理を行った。次に、得られた試料を走査型電子顕微鏡により観察した。次に、図3に示すような断面を選択した。選択した領域は、コンデンサ本体の断面における積層方向の中央部かつコンデンサの長手方向(L寸断面)の中央部である。選択した領域は1箇所である。単位面積とする範囲は、誘電体層の1層の厚み方向の長さをL1、誘電体層の幅方向の長さをL2としたときに、L1とL2との積となる範囲である。L2はL1の長さの5倍の範囲とした。次に、その単位面積の範囲内に存在する個々の金属粒子の面積および合計した面積を求めた。金属粒子の面積は、走査型電子顕微鏡により得られた写真から求めた。金属粒子の面積は、金属粒子の輪郭の画像解析を行って求めた。金属粒子の粒径は、金属粒子の輪郭を画像解析して求めた面積を円の面積に換算することにより求めた。金属粒子の平均粒径は、個々に求めた金属粒子の粒径の平均値から求めた。測定した金属粒子の個数(n数)は20個から25個とした。金属粒子の合計の面積をAm、誘電体層の単位面積をAdとした。金属粒子の誘電体層の単位面積当たりに対する面積比はAm/Ad比から求めた。結晶粒子の平均粒径も金属粒子の場合と同様の方法を用いた。
3・・・・・・・・・・外部電極
5・・・・・・・・・・誘電体層
7・・・・・・・・・・内部電極層
9・・・・・・・・・・結晶粒子
11・・・・・・・・・粒界
13・・・・・・・・・金属粒子
17・・・・・・・・・金属膜
Claims (5)
- 誘電体層と内部電極層とが交互に複数層積層されたコンデンサ本体を備えており、
前記誘電体層は、結晶粒子と、粒界と、金属粒子とを有しており、
該金属粒子の平均粒径は、前記結晶粒子の平均粒径よりも小さく、前記粒界のうち二面間粒界の平均幅よりも大きく、
前記誘電体層の縦断面を観察したときに、前記金属粒子は、前記誘電体層の幅方向および厚み方向に分布している、コンデンサ。 - 前記誘電体層の断面において、前記金属粒子の占める面積が1.2%以上4%以下である、請求項1に記載のコンデンサ。
- 少なくとも一つの前記誘電体層中に、複数の前記金属粒子が前記誘電体層の厚み方向に重なって並んでいる部分が存在する、請求項1または2に記載のコンデンサ。
- 複数の前記内部電極層のうちの少なくとも1層は、平均厚みが前記誘電体層の平均厚みよりも厚い、請求項1乃至3のうちいずれかに記載のコンデンサ。
- 前記コンデンサ本体は、対向する2つの端面に前記内部電極層と電気的に接続された外部電極をそれぞれ有しており、
前記コンデンサ本体の表面の、前記外部電極から離間した位置に金属膜を有する、請求項1乃至4のうちいずれかに記載のコンデンサ。
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