JP2020092154A - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
- Publication number
- JP2020092154A JP2020092154A JP2018227786A JP2018227786A JP2020092154A JP 2020092154 A JP2020092154 A JP 2020092154A JP 2018227786 A JP2018227786 A JP 2018227786A JP 2018227786 A JP2018227786 A JP 2018227786A JP 2020092154 A JP2020092154 A JP 2020092154A
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- Prior art keywords
- solder
- semiconductor device
- solders
- bonding
- different
- Prior art date
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 66
- 229910000679 solder Inorganic materials 0.000 claims abstract description 154
- 230000020169 heat generation Effects 0.000 claims abstract description 11
- 239000000758 substrate Substances 0.000 claims abstract description 11
- 230000008014 freezing Effects 0.000 claims description 12
- 238000007710 freezing Methods 0.000 claims description 12
- 239000010949 copper Substances 0.000 claims description 9
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 8
- 229910052802 copper Inorganic materials 0.000 claims description 8
- 229910052709 silver Inorganic materials 0.000 claims description 8
- 239000004332 silver Substances 0.000 claims description 8
- 229910052797 bismuth Inorganic materials 0.000 claims description 7
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 claims description 7
- 229910052738 indium Inorganic materials 0.000 claims description 7
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims description 7
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 5
- 229910052787 antimony Inorganic materials 0.000 claims description 2
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 claims description 2
- 229910052759 nickel Inorganic materials 0.000 claims description 2
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 claims 1
- 229910052725 zinc Inorganic materials 0.000 claims 1
- 239000011701 zinc Substances 0.000 claims 1
- 230000017525 heat dissipation Effects 0.000 abstract description 20
- 230000035882 stress Effects 0.000 description 14
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 6
- 239000000470 constituent Substances 0.000 description 4
- 238000012986 modification Methods 0.000 description 4
- 230000004048 modification Effects 0.000 description 4
- 238000000034 method Methods 0.000 description 2
- 239000012141 concentrate Substances 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- JBQYATWDVHIOAR-UHFFFAOYSA-N tellanylidenegermanium Chemical compound [Te]=[Ge] JBQYATWDVHIOAR-UHFFFAOYSA-N 0.000 description 1
- 230000008646 thermal stress Effects 0.000 description 1
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Abstract
Description
図1は、本発明の実施の形態1に係る半導体装置1の構成を示す平面図であり、図2は図1のA−A線に沿った断面図である。図1及び図2に示すように、半導体装置1は、基板6と、複数のはんだ7a,7b,7cと、半導体チップ8とを備える。
図3は、本発明の実施の形態2に係る半導体装置1の構成を示す平面図である。以下、本実施の形態2に係る構成要素のうち、上述の構成要素と同じまたは類似する構成要素については同じ参照符号を付し、異なる構成要素について主に説明する。
以上の説明では、図1のようなはんだの配置が、半導体チップ8の発熱が互いに異なる複数の接合領域に適用されたが、図3のようなはんだの配置が当該接合領域に適用されてもよい。同様に、図3のようなはんだの配置が、接合対象への応力が互いに異なる複数の接合領域に適用されたが、図1のようなはんだの配置が当該接合領域に適用されてもよい。
Claims (8)
- 基板と、
前記基板上に配設され、成分及び濃度の少なくとも1つが互いに異なり、かつ互いに隣接する複数のはんだと、
前記複数のはんだによって前記基板に接合される接合面を有する半導体チップと
を備え、
前記半導体チップの前記接合面は、前記半導体チップの発熱、または、接合対象への応力が互いに異なる複数の接合領域を含み、
前記複数のはんだは前記複数の接合領域に対応して配設されている、半導体装置。 - 請求項1に記載の半導体装置であって、
前記複数のはんだは、
第1はんだ及び第2はんだを含み、
前記第1はんだは、平面視で前記第1はんだが存在しない空間を有し、かつ、前記空間と連通する開口を除いて前記空間を平面視で囲繞し、
前記第2はんだは、前記開口に配設される、半導体装置。 - 請求項1に記載の半導体装置であって、
前記複数のはんだは、
第1はんだ及び第2はんだを含み、
前記第1はんだは、平面視で前記第1はんだが存在しない空間を有し、かつ、前記空間を平面視で囲繞し、
前記第2はんだは、前記空間に配設される、半導体装置。 - 請求項3に記載の半導体装置であって、
前記第1はんだの凝固点は、前記第2はんだの凝固点よりも高く、
前記複数の接合領域は、
前記第1はんだに対応し、前記第1はんだに第1応力を加える第1接合領域と、
前記第2はんだに対応し、前記第2はんだに前記第1応力と異なる第2応力を加える第2接合領域と
を含む、半導体装置。 - 請求項2または請求項3に記載の半導体装置であって、
前記複数の接合領域は、応力が異なる第1接合領域及び第2接合領域を含み、
機械的強度が異なる前記第1はんだ及び前記第2はんだが、前記第1接合領域及び前記第2接合領域に選択的に配設されている、半導体装置。 - 請求項2または請求項3に記載の半導体装置であって、
前記複数の接合領域は、応力が異なる第1接合領域及び第2接合領域を含み、
熱伝導率が異なる前記第1はんだ及び前記第2はんだが、前記第1接合領域及び前記第2接合領域に選択的に配設されている、半導体装置。 - 請求項1から請求項6のうちのいずれか1項に記載の半導体装置であって、
前記複数のはんだは、銅または銀を含み、
前記複数のはんだの銅または銀の濃度が互いに0.5%以上異なる、半導体装置。 - 請求項1から請求項7のうちのいずれか1項に記載の半導体装置であって、
前記複数のはんだは、アンチモン、ニッケル、ビスマス、インジウム、及び、亜鉛を互いに異なる組み合わせで含む、半導体装置。
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