JP2020026532A - 酸化物材料を研磨するための化学機械平坦化組成物及びその使用方法 - Google Patents
酸化物材料を研磨するための化学機械平坦化組成物及びその使用方法 Download PDFInfo
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- 238000000034 method Methods 0.000 title claims description 32
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- CETPSERCERDGAM-UHFFFAOYSA-N ceric oxide Chemical compound O=[Ce]=O CETPSERCERDGAM-UHFFFAOYSA-N 0.000 claims abstract description 79
- 229910000422 cerium(IV) oxide Inorganic materials 0.000 claims abstract description 79
- 229910052814 silicon oxide Inorganic materials 0.000 claims abstract description 36
- -1 pyridine compound Chemical class 0.000 claims abstract description 22
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- ABLZXFCXXLZCGV-UHFFFAOYSA-N phosphonic acid group Chemical group P(O)(O)=O ABLZXFCXXLZCGV-UHFFFAOYSA-N 0.000 claims abstract description 15
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- 239000004065 semiconductor Substances 0.000 claims abstract description 14
- UMJSCPRVCHMLSP-UHFFFAOYSA-N pyridine Natural products COC1=CC=CN=C1 UMJSCPRVCHMLSP-UHFFFAOYSA-N 0.000 claims abstract description 10
- 125000000542 sulfonic acid group Chemical group 0.000 claims abstract description 10
- 239000002245 particle Substances 0.000 claims description 65
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- 239000000654 additive Substances 0.000 claims description 31
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- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 claims description 9
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- WJJMNDUMQPNECX-UHFFFAOYSA-N dipicolinic acid Chemical compound OC(=O)C1=CC=CC(C(O)=O)=N1 WJJMNDUMQPNECX-UHFFFAOYSA-N 0.000 claims description 8
- TWBYWOBDOCUKOW-UHFFFAOYSA-N isonicotinic acid Chemical compound OC(=O)C1=CC=NC=C1 TWBYWOBDOCUKOW-UHFFFAOYSA-N 0.000 claims description 8
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- DVLFYONBTKHTER-UHFFFAOYSA-N 3-(N-morpholino)propanesulfonic acid Chemical compound OS(=O)(=O)CCCN1CCOCC1 DVLFYONBTKHTER-UHFFFAOYSA-N 0.000 claims description 7
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- SRSXLGNVWSONIS-UHFFFAOYSA-N benzenesulfonic acid Chemical compound OS(=O)(=O)C1=CC=CC=C1 SRSXLGNVWSONIS-UHFFFAOYSA-N 0.000 claims description 7
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- 239000005304 optical glass Substances 0.000 claims description 7
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- GJAWHXHKYYXBSV-UHFFFAOYSA-N pyridinedicarboxylic acid Natural products OC(=O)C1=CC=CN=C1C(O)=O GJAWHXHKYYXBSV-UHFFFAOYSA-N 0.000 claims description 7
- 239000000758 substrate Substances 0.000 claims description 7
- IHPYMWDTONKSCO-UHFFFAOYSA-N 2,2'-piperazine-1,4-diylbisethanesulfonic acid Chemical compound OS(=O)(=O)CCN1CCN(CCS(O)(=O)=O)CC1 IHPYMWDTONKSCO-UHFFFAOYSA-N 0.000 claims description 6
- PDSOJBZKKTTWHS-UHFFFAOYSA-N 2-hydroxy-3-[4-(2-hydroxy-3-sulfopropyl)piperazin-1-yl]propane-1-sulfonic acid;dihydrate Chemical compound O.O.OS(=O)(=O)CC(O)CN1CCN(CC(O)CS(O)(=O)=O)CC1 PDSOJBZKKTTWHS-UHFFFAOYSA-N 0.000 claims description 6
- NUFBIAUZAMHTSP-UHFFFAOYSA-N 3-(n-morpholino)-2-hydroxypropanesulfonic acid Chemical compound OS(=O)(=O)CC(O)CN1CCOCC1 NUFBIAUZAMHTSP-UHFFFAOYSA-N 0.000 claims description 6
- OWXMKDGYPWMGEB-UHFFFAOYSA-N HEPPS Chemical compound OCCN1CCN(CCCS(O)(=O)=O)CC1 OWXMKDGYPWMGEB-UHFFFAOYSA-N 0.000 claims description 6
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- QLZHNIAADXEJJP-UHFFFAOYSA-N Phenylphosphonic acid Chemical compound OP(O)(=O)C1=CC=CC=C1 QLZHNIAADXEJJP-UHFFFAOYSA-N 0.000 claims description 6
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- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 6
- SXGZJKUKBWWHRA-UHFFFAOYSA-N 2-(N-morpholiniumyl)ethanesulfonate Chemical compound [O-]S(=O)(=O)CC[NH+]1CCOCC1 SXGZJKUKBWWHRA-UHFFFAOYSA-N 0.000 claims description 5
- LBLYYCQCTBFVLH-UHFFFAOYSA-N 2-Methylbenzenesulfonic acid Chemical compound CC1=CC=CC=C1S(O)(=O)=O LBLYYCQCTBFVLH-UHFFFAOYSA-N 0.000 claims description 5
- YBMRDBCBODYGJE-UHFFFAOYSA-N germanium oxide Inorganic materials O=[Ge]=O YBMRDBCBODYGJE-UHFFFAOYSA-N 0.000 claims description 5
- 239000001257 hydrogen Substances 0.000 claims description 5
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- 235000001968 nicotinic acid Nutrition 0.000 claims description 5
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- 239000011664 nicotinic acid Substances 0.000 claims description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 5
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 claims description 4
- 229910019142 PO4 Inorganic materials 0.000 claims description 4
- 239000003125 aqueous solvent Substances 0.000 claims description 4
- WPYMKLBDIGXBTP-UHFFFAOYSA-N benzoic acid Chemical compound OC(=O)C1=CC=CC=C1 WPYMKLBDIGXBTP-UHFFFAOYSA-N 0.000 claims description 4
- AFAXGSQYZLGZPG-UHFFFAOYSA-N ethanedisulfonic acid Chemical compound OS(=O)(=O)CCS(O)(=O)=O AFAXGSQYZLGZPG-UHFFFAOYSA-N 0.000 claims description 4
- 230000009969 flowable effect Effects 0.000 claims description 4
- 229940089468 hydroxyethylpiperazine ethane sulfonic acid Drugs 0.000 claims description 4
- 229940098779 methanesulfonic acid Drugs 0.000 claims description 4
- YZMHQCWXYHARLS-UHFFFAOYSA-N naphthalene-1,2-disulfonic acid Chemical compound C1=CC=CC2=C(S(O)(=O)=O)C(S(=O)(=O)O)=CC=C21 YZMHQCWXYHARLS-UHFFFAOYSA-N 0.000 claims description 4
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- 239000007995 HEPES buffer Substances 0.000 claims description 3
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- XHCLAFWTIXFWPH-UHFFFAOYSA-N [O-2].[O-2].[O-2].[O-2].[O-2].[V+5].[V+5] Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[V+5].[V+5] XHCLAFWTIXFWPH-UHFFFAOYSA-N 0.000 claims description 3
- 150000003857 carboxamides Chemical class 0.000 claims description 3
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- MUYSADWCWFFZKR-UHFFFAOYSA-N cinchomeronic acid Chemical compound OC(=O)C1=CC=NC=C1C(O)=O MUYSADWCWFFZKR-UHFFFAOYSA-N 0.000 claims description 3
- 150000002823 nitrates Chemical class 0.000 claims description 3
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 3
- PVADDRMAFCOOPC-UHFFFAOYSA-N oxogermanium Chemical compound [Ge]=O PVADDRMAFCOOPC-UHFFFAOYSA-N 0.000 claims description 3
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 claims description 3
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- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 claims description 3
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- 229910001935 vanadium oxide Inorganic materials 0.000 claims description 3
- 229910001928 zirconium oxide Inorganic materials 0.000 claims description 3
- GFQYVLUOOAAOGM-UHFFFAOYSA-N zirconium(iv) silicate Chemical compound [Zr+4].[O-][Si]([O-])([O-])[O-] GFQYVLUOOAAOGM-UHFFFAOYSA-N 0.000 claims description 3
- IAUGBVWVWDTCJV-UHFFFAOYSA-N 1-(prop-2-enoylamino)propane-1-sulfonic acid Chemical compound CCC(S(O)(=O)=O)NC(=O)C=C IAUGBVWVWDTCJV-UHFFFAOYSA-N 0.000 claims description 2
- 125000000954 2-hydroxyethyl group Chemical group [H]C([*])([H])C([H])([H])O[H] 0.000 claims description 2
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- MPFLRYZEEAQMLQ-UHFFFAOYSA-N dinicotinic acid Chemical compound OC(=O)C1=CN=CC(C(O)=O)=C1 MPFLRYZEEAQMLQ-UHFFFAOYSA-N 0.000 claims description 2
- 150000002170 ethers Chemical class 0.000 claims description 2
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- STTPRIBCABBCBE-UHFFFAOYSA-N pentanedioic acid propanedioic acid Chemical compound C(CC(=O)O)(=O)O.C(=O)(O)CCCC(=O)O STTPRIBCABBCBE-UHFFFAOYSA-N 0.000 claims 1
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- DBMJMQXJHONAFJ-UHFFFAOYSA-M Sodium laurylsulphate Chemical compound [Na+].CCCCCCCCCCCCOS([O-])(=O)=O DBMJMQXJHONAFJ-UHFFFAOYSA-M 0.000 description 2
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- 150000001413 amino acids Chemical class 0.000 description 2
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- 229910052796 boron Inorganic materials 0.000 description 2
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- BHJHVDDOCMGCDD-UHFFFAOYSA-N piperazin-1-ium-1-sulfonate Chemical class OS(=O)(=O)N1CCNCC1 BHJHVDDOCMGCDD-UHFFFAOYSA-N 0.000 description 1
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- YMBCJWGVCUEGHA-UHFFFAOYSA-M tetraethylammonium chloride Chemical compound [Cl-].CC[N+](CC)(CC)CC YMBCJWGVCUEGHA-UHFFFAOYSA-M 0.000 description 1
- FBEVECUEMUUFKM-UHFFFAOYSA-M tetrapropylazanium;chloride Chemical compound [Cl-].CCC[N+](CCC)(CCC)CCC FBEVECUEMUUFKM-UHFFFAOYSA-M 0.000 description 1
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Classifications
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09G—POLISHING COMPOSITIONS; SKI WAXES
- C09G1/00—Polishing compositions
- C09G1/02—Polishing compositions containing abrasives or grinding agents
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
- B24B37/042—Lapping machines or devices; Accessories designed for working plane surfaces operating processes therefor
- B24B37/044—Lapping machines or devices; Accessories designed for working plane surfaces operating processes therefor characterised by the composition of the lapping agent
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09G—POLISHING COMPOSITIONS; SKI WAXES
- C09G1/00—Polishing compositions
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09G—POLISHING COMPOSITIONS; SKI WAXES
- C09G1/00—Polishing compositions
- C09G1/04—Aqueous dispersions
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09G—POLISHING COMPOSITIONS; SKI WAXES
- C09G1/00—Polishing compositions
- C09G1/06—Other polishing compositions
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K13/00—Etching, surface-brightening or pickling compositions
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K3/00—Materials not provided for elsewhere
- C09K3/14—Anti-slip materials; Abrasives
- C09K3/1436—Composite particles, e.g. coated particles
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K3/00—Materials not provided for elsewhere
- C09K3/14—Anti-slip materials; Abrasives
- C09K3/1454—Abrasive powders, suspensions and pastes for polishing
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K3/00—Materials not provided for elsewhere
- C09K3/14—Anti-slip materials; Abrasives
- C09K3/1454—Abrasive powders, suspensions and pastes for polishing
- C09K3/1463—Aqueous liquid suspensions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
- H01L21/02123—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon
- H01L21/02164—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon the material being a silicon oxide, e.g. SiO2
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
- H01L21/0226—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process
- H01L21/02263—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase
- H01L21/02271—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
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Abstract
Description
無機酸化物粒子、ドープ無機酸化物粒子、表面コート複合無機酸化物粒子、有機ポリマー粒子、無機酸化物コート有機ポリマー粒子、及びこれらの組み合わせからなる群から選択される研磨材と、
除去速度加速剤と、
溶媒とを含み、
5超のpHをさらに含む、酸化物材料を研磨するための化学機械平坦化(CMP)組成物。
の構造を有するピリジン基を有する有機酸である、側面8に記載のCMP組成物。
(a)第一の材料の少なくとも1つの表面と、CMP研磨パッドとを接触させる工程と、
(b)側面1〜21のいずれかに記載のCMP研磨組成物を少なくとも1つの表面に輸送する工程と、
(c)研磨組成物により少なくとも1つの表面を研磨して、10000オングストローム/分超の除去速度にて第一の材料を除去する工程と
を含む、第一の材料と、第二の材料とを含む半導体デバイスの化学機械平坦化(CMP)研磨方法。
(a)第一の材料と第二の材料とを有する少なくとも1つの表面を含むパターン化基材と、
(b)研磨パッドと、
(c)側面1〜21のいずれかに記載のCMP研磨組成物とを含む化学機械平坦化装置であって、
少なくとも1つの表面が研磨パッド及び研磨組成物と接触しており、第一の材料が、熱酸化物、テトラエチルオルトシリケート(TEOS)前駆体を用いて堆積させたTEOS膜、高密度プラズマ(HDP)酸化物、高アスペクト比プロセス(HARP)膜、フッ化酸化物膜、ドープ酸化物膜、スピンオンガラス(SOG)、流動性化学気相堆積(CVD)膜、光学ガラス、ディスプレイガラス、及びこれらの組み合わせからなる群から選択される酸化ケイ素材料である、装置。
の構造を有する1つ又はそれより多くのカルボン酸基で置換されたピリジン化合物を含む。
Å:オングストローム−長さの単位
BP:背圧、psi単位
CMP:化学機械平坦化=化学機械研磨
CS:キャリア速度
DF:下向き力:CMP中に適用される圧力、psi単位
min:分
ml:ミリリットル
mV:ミリボルト
psi:ポンド毎平方インチ
PS:研磨ツールのプラテン回転速度又はテーブル速度、rpm(回転数毎分)
SF:研磨組成物流量、ml/min
2質量パーセント濃度のセリアコートシリカ粒子を含むCMP組成物が、pH調節剤として水酸化アンモニウムを用いて種々のpHにおいて、または伝導率調節剤として硝酸カリウムを用いて配合された。表2Bに、200mmツールで得られた、pHの関数としてのTEOS膜の除去速度をまとめる。結果は、より高いpHが、スラリーの高速に適していることを示す。同じpHでは、より高い伝導率が、より高いTEOS除去速度に適している。
Claims (25)
- 無機酸化物粒子、ドープ無機酸化物粒子、表面コート複合無機酸化物粒子、有機ポリマー粒子、無機酸化物コート有機ポリマー粒子、及びこれらの組み合わせからなる群から選択される研磨材と、
除去速度加速剤と、
溶媒とを含み、
5超のpHをさらに含む、酸化物材料を研磨するための化学機械平坦化(CMP)組成物。 - 前記研磨材が、酸化セリウム(セリア)、酸化アルミニウム、酸化ジルコニウム、ケイ酸ジルコニウム、酸化スズ、二酸化ケイ素、酸化チタン、酸化ゲルマニウム、酸化バナジウム、ドープ無機酸化物、複合無機酸化物、及びこれらの組み合わせからなる群から選択される、請求項1に記載のCMP組成物。
- 前記研磨材が、焼成セリア、コロイダルセリア、セリアコートシリカ粒子、及びこれらの組み合わせからなる群から選択される酸化セリウムを含む、請求項2に記載のCMP組成物。
- 前記研磨材が、結晶性セリアナノ粒子で被覆されたアモルファスシリカコア粒子を含むセリアコートシリカ粒子を含む、請求項3に記載のCMP組成物。
- 前記結晶性セリアナノ粒子が単結晶を含む、請求項4に記載のCMP組成物。
- セリアナノ粒子とアモルファスシリカコア粒子の質量比が、0.01〜1.5又はそれより大きい、請求項4に記載のCMP組成物。
- アモルファスシリカコア粒子が、20〜550ナノメートルの範囲の直径を含み、セリアナノ粒子が10ナノメートル超の直径を含み、アモルファスシリカコア粒子の直径がセリアナノ粒子の直径より大きい、請求項4に記載のCMP組成物。
- 前記除去速度加速剤が、スルホン酸基、ホスホン酸基、ピリジン基、及びこれらの組み合わせからなる群から選択される1つを有する有機酸又は有機酸塩である、請求項1に記載のCMP組成物。
- 前記除去速度加速剤が、硝酸塩、リン酸塩、硫酸塩からなる群から選択される塩である、請求項1に記載のCMP組成物。
- 前記溶媒が、水、極性非水性溶媒、及びこれらの混合物からなる群から選択される、請求項1に記載のCMP組成物。
- 前記非水性溶媒が、アルコール、エーテル、ケトン、及びこれらの組み合わせからなる群から選択される、請求項10に記載のCMP組成物。
- 前記除去速度加速剤が、硝酸、スルホン酸、硫酸、ホスホン酸、カルボン酸、及びこれらの組み合わせからなる群から選択される酸である、請求項1に記載のCMP組成物。
- 前記除去速度加速剤が、フェニルホスホン酸、安息香酸、酢酸、マロン酸グルタル酸、シュウ酸、及びこれらの組み合わせからなる群から選択される酸である、請求項1に記載のCMP組成物。
- 前記除去速度加速剤が、メタンスルホン酸、ベンゼンスルホン酸、トルエンスルホン酸、p−トルエンスルホン酸、エタンジスルホン酸、ナフタレンジスルホン酸、アクリルアミドプロパンスルホン酸、モルホリノプロパンスルホン酸、3−(N−モルホリノ)プロパンスルホン酸(MOPS)、4−モルホリンエタンスルホン酸(MES)、ベータ−ヒドロキシ−4−モルホリンプロパンスルホン酸(MOPSO)、4−(2−ヒドロキシエチル)ピペラジン−1−エタンスルホン酸(HEPES)、1,4−ピペラジンジエタンスルホン酸(PIPES)、ピペラジン−1,4−ビス(2−ヒドロキシプロパンスルホン酸)二水和物(POPSO)、4−(2−ヒドロキシエチル)−1−ピペラジンプロパンスルホン酸(EPPS)、ピペラジンジエタンスルホン酸、ヒドロキシエチルピペラジンエタンスルホン酸、及びこれらの組み合わせからなる群から選択されるスルホン酸である、請求項1に記載のCMP組成物。
- R1、R2、R3、R4及びR5の少なくとも1つが、カルボン酸である、請求項15に記載のCMP組成物。
- 前記除去速度加速剤が、ピリジン、ピリジンモノカルボン酸、ピリジンジカルボン酸、ピコリン酸、ニコチン酸、イソニコチン酸、ジピコリン酸、2,5−ピリジンジカルボン酸、3,5−ピリジンジカルボン酸、2,3−ピリジンジカルボン酸、及び3,4−ピリジンジカルボン酸からなる群から選択されるピリジン化合物である、請求項1に記載のCMP組成物。
- 前記CMP組成物のpHが、7〜11の範囲である、請求項1に記載のCMP組成物。
- 前記CMP組成物の伝導率が、0.3〜9ミリジーメンス毎センチメートルの範囲である、請求項1に記載のCMP組成物。
- 前記組成物が、除去速度選択性に関する添加剤、pH調節剤、界面活性剤、分散剤、及び生物学的成長抑制剤からなる群から選択される少なくとも1種の添加剤を含む、請求項1に記載のCMP組成物。
- 前記研磨材が、−25ミリボルトより負のゼータ電位を有する粒子を含む、請求項1に記載のCMP組成物。
- (a)第一の材料の少なくとも1つの表面と、CMP研磨パッドとを接触させる工程と、
(b)請求項1に記載のCMP研磨組成物を少なくとも前記1つの表面に輸送する工程と、
(c)前記研磨組成物により前記少なくとも1つの表面を研磨して、10000オングストローム/分超の除去速度にて第一の材料を除去する工程と
を含む、第一の材料と、第二の材料とを含む半導体デバイスの化学機械平坦化(CMP)研磨方法。 - 前記第一の材料が、熱酸化物、テトラエチルオルトシリケート(TEOS)前駆体を用いて堆積させたTEOS膜、高密度プラズマ(HDP)酸化物、高アスペクト比プロセス(HARP)膜、フッ化酸化物膜、ドープ酸化物膜、スピンオンガラス(SOG)、流動性化学気相堆積(CVD)膜、光学ガラス、ディスプレイガラス、及びこれらの組み合わせからなる群から選択される酸化ケイ素材料である、請求項22に記載の研磨方法。
- 前記第二の材料が、窒化ケイ素、ポリシリコン、及びこれらの組み合わせの群から選択される、請求項23に記載の研磨方法。
- (d)第一の材料と第二の材料とを有する少なくとも1つの表面を含むパターン化基材と、
(e)研磨パッドと、
(f)請求項1に記載のCMP研磨組成物とを含む化学機械平坦化装置であって、
前記少なくとも1つの表面が前記研磨パッド及び前記研磨組成物と接触しており、前記第一の材料が、熱酸化物、テトラエチルオルトシリケート(TEOS)前駆体を用いて堆積させたTEOS膜、高密度プラズマ(HDP)酸化物、高アスペクト比プロセス(HARP)膜、フッ化酸化物膜、ドープ酸化物膜、スピンオンガラス(SOG)、流動性化学気相堆積(CVD)膜、光学ガラス、ディスプレイガラス、及びこれらの組み合わせからなる群から選択される酸化ケイ素材料である、装置。
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EP3608379A1 (en) | 2020-02-12 |
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US11549034B2 (en) | 2023-01-10 |
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