JP2020013931A - 載置台及び電極部材 - Google Patents
載置台及び電極部材 Download PDFInfo
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Abstract
Description
まず、図1を参照しながら基板処理装置1の全体構成の一例について説明する。図1は、一実施形態に係る基板処理装置1の概略構成を示す断面図である。なお、本実施形態では、基板処理装置1がRIE(Reactive Ion Etching)型の基板処理装置である例について説明する。ただし、基板処理装置1は、プラズマエッチング装置やプラズマCVD(Chemical Vapor Deposition)装置等であってもよい。
従来、分岐部Aにおいてエッジリング30の載置面側に流れる冷媒と、ウエハWの載置面側に流れる冷媒の分配流量は固定比率であった。しかし、近年のプロセスの多様化に伴い、基板処理装置1にて行われるプロセスに応じてウエハWの載置側とエッジリングの載置側で抜熱量を変え、ウエハW及びエッジリング30の温度制御の精度を高めて基板処理を行うことが重要になっている。
かかる載置台11の構成と同様に、シャワーヘッド24にその内周側と外周側に分岐する冷媒流路を設け、その冷媒流路の分岐部又は合流部の少なくともいずれかに微調整部材を設けてもよい。また、シャワーヘッド24の冷媒流路の分岐部又は合流部の少なくともいずれかに粗調整部材を設けてもよい。
10 処理容器
11 載置台
11a 基台
21a 第1の高周波電源
21b 第2の高周波電源
24 シャワーヘッド
25 静電チャック
25a 中央部
25b 外周部
26 電極
27 直流電源
28 直流電源
29 電極
30 エッジリング
31a、31b 冷媒流路
32 チラーユニット
43 制御部
50 微調整部材
50a1、50a2 開口部
51a、51b、51 粗調整部材
52 Oリング
A 分岐部
B 合流部
W ウエハ
Claims (12)
- 被処理体及びエッジリングを載置する載置台であって、
前記載置台の内部にて流体を流す第1の流路及び第2の流路と、
前記第1の流路の入口と前記第2の流路の入口とを連結する分岐部と、
前記第1の流路の出口と前記第2の流路の出口とを連結する合流部と、
前記分岐部又は前記合流部の少なくともいずれかに設けられ、前記第1の流路と前記第2の流路とに連通する開口部を有する部材と、
を備える載置台。 - 被処理体及びエッジリングを載置する載置台であって、
前記載置台の内部にて流体を流す第1の流路及び第2の流路と、
前記第1の流路の入口と前記第2の流路の入口とを連結する分岐部と、
前記第1の流路の出口と前記第2の流路の出口とを連結する合流部と、
前記分岐部又は前記合流部の少なくともいずれかに設けられた突起状部材と、
を備える載置台。 - 前記分岐部又は前記合流部の少なくともいずれかに設けられた突起状部材を有する、
請求項1に記載の載置台。 - 前記部材が有する開口部は、複数である、
請求項1又は3に記載の載置台。 - 前記開口部を有する部材は、着脱可能に設けられる、
請求項1、3、4のいずれか一項に記載の載置台。 - 前記突起状部材は、複数である、
請求項2又は3に記載の載置台。 - 前記開口部を有する部材と前記突起状部材とは、前記分岐部又は前記合流部のいずれか一方に設けられる、
請求項3に記載の載置台。 - 前記突起状部材は、前記部材が有する開口部から流入する流体の流れを妨げる位置に設けられる、
請求項7に記載の載置台。 - 前記第1の流路は、前記載置台の載置面のうち被処理体を載置する載置面に対応する位置に配置される、
請求項1〜8のいずれか一項に記載の載置台。 - 前記第2の流路は、前記載置台の載置面のうち前記エッジリングを載置する載置面に対応する位置に配置される、
請求項1〜9のいずれか一項に記載の載置台。 - 被処理体を載置する載置台と対向する電極部材であって、
前記電極部材の内部にて流体を流す第1の流路及び第2の流路と、
前記第1の流路の入口と前記第2の流路の入口とを連結する分岐部と、
前記第1の流路の出口と前記第2の流路の出口とを連結する合流部と、
前記分岐部又は前記合流部の少なくともいずれかに設けられ、前記第1の流路と前記第2の流路とに連通する開口部を有する部材と、
を備える電極部材。 - 前記分岐部又は前記合流部の少なくともいずれかに設けられた突起状部材を有する、
請求項11に記載の電極部材。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018136095A JP7175114B2 (ja) | 2018-07-19 | 2018-07-19 | 載置台及び電極部材 |
US16/976,544 US11421323B2 (en) | 2018-07-19 | 2019-07-08 | Stage and electrode member |
CN201980016960.8A CN111801779A (zh) | 2018-07-19 | 2019-07-08 | 载置台及电极部件 |
PCT/JP2019/027041 WO2020017387A1 (ja) | 2018-07-19 | 2019-07-08 | 載置台及び電極部材 |
KR1020207025258A KR20210032302A (ko) | 2018-07-19 | 2019-07-08 | 거치대 및 전극 부재 |
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WO2020017387A1 (ja) | 2020-01-23 |
US20200407840A1 (en) | 2020-12-31 |
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