JP2020004824A - 半導体装置、半導体装置の製造方法 - Google Patents
半導体装置、半導体装置の製造方法 Download PDFInfo
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Abstract
Description
図1は半導体装置100の平面図である。半導体装置100は例えばRC−IGBTである。図2は半導体装置100の底面図である。図1、2において、半導体装置100の表面構造と裏面構造は省略されている。図3は、図1のA−A´線における断面図である。図1のA−A´線は半導体装置100のp+型の拡散層5を通る線である。図4は、図1のB−B´線における断面図である。図1のB−B´線は半導体装置100のn+型のエミッタ層6を通る線である。図1−4には、トランジスタ領域1とダイオード領域2が同一基板に隣接して形成されたことが示されている。図1は図3、4の半導体基板30の平面図であり、図2は図3、4の半導体基板30の底面図である。半導体基板30の材料は例えばシリコンである。
図8、9は、実施の形態2に係る半導体装置101の断面図である。p+型の拡散層5を含む断面図が図8であり、エミッタ層6を含む断面図が図9である。実施の形態2の半導体装置101は、ドリフト層3とベース層4の間に、ドリフト層3よりもn型の不純物濃度が高いn型のキャリアストア層24を備えている。つまり、トランジスタ領域1においてp型のベース層4の下面側にn型のキャリアストア層24が設けられている。キャリアストア層24を設けることによる第1の効果は、p+型の拡散層5およびp型のベース層4からドリフト層3に提供されるホールキャリアを抑制できることである。キャリアストア層24を設けることによる第2の効果は、トランジスタの導通時にp型のベース層4とn−型のドリフト層3のオン抵抗を下げ、オン電圧を下げ、定常損失を小さくできることである。
Claims (9)
- 第1導電型のドリフト層を有する半導体基板に形成されたトランジスタ領域と、
前記半導体基板に前記トランジスタ領域と隣接して形成されたダイオード領域と、を備え、
前記トランジスタ領域は、前記ドリフト層の上に形成された第2導電型のベース層と、前記ベース層の上に形成され前記ベース層よりも第2導電型の不純物濃度が高い拡散層と、前記ベース層の上に形成された第1導電型のエミッタ層と、前記ベース層に絶縁膜を介して接するゲート電極と、前記ドリフト層の下側に形成された第2導電型のコレクタ層とを有し、
前記ダイオード領域は、前記ドリフト層の上に形成された第2導電型のアノード層と、前記ドリフト層の下側に形成された第1導電型のカソード層とを有し、
前記カソード層は、前記トランジスタ領域に接する隣接領域を有し、前記隣接領域は前記トランジスタ領域に近づくほど前記半導体基板の下面からの深さが浅くなり、かつ第1導電型不純物濃度が小さくなることを特徴とする半導体装置。 - 前記カソード層は、前記隣接領域に接し、前記半導体基板の下面からの深さが一定である非隣接領域を備えたことを特徴とする請求項1に記載の半導体装置。
- 前記隣接領域の上面は傾斜したことを特徴とする請求項1又は2に記載の半導体装置。
- 前記隣接領域の上に、前記コレクタ層と同じ不純物濃度のp型層を備えたことを特徴とする請求項1から3のいずれか1項に記載の半導体装置。
- 前記コレクタ層の上面、前記p型層の上面及び前記カソード層の上面に接する第1導電型のバッファ層を備えたことを特徴とする請求項4に記載の半導体装置。
- 前記拡散層と前記エミッタ層の上に形成されたバリアメタルと、
前記バリアメタル及び前記アノード層に直接接する上部電極と、を備えたことを特徴とする請求項1から5のいずれか1項に記載の半導体装置。 - 前記ドリフト層と前記ベース層の間に、前記ドリフト層よりも第1導電型の不純物濃度が高い第1導電型のキャリアストア層を備えたことを特徴とする請求項1から6のいずれか1項に記載の半導体装置。
- 半導体基板の下面側にトランジスタ領域のコレクタ層を形成することと、
前記半導体基板の下面側に前記トランジスタ領域に隣接するダイオード領域のカソード層を形成することと、を備え、
前記カソード層の形成では、前記トランジスタ領域の下面の少なくとも一部を覆い、前記ダイオード領域の下面のうち前記トランジスタ領域に隣接する隣接領域では前記トランジスタ領域に近づくほど開口密度が小さくなるレジストマスクを用いて前記半導体基板の下面にイオン注入することを特徴とする半導体装置の製造方法。 - 前記レジストマスクは、前記半導体基板の下面の前記隣接領域に接する領域である非隣接領域を露出させることを特徴とする請求項8に記載の半導体装置の製造方法。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
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JP2018122257A JP7024626B2 (ja) | 2018-06-27 | 2018-06-27 | 半導体装置、半導体装置の製造方法 |
US16/225,186 US11398563B2 (en) | 2018-06-27 | 2018-12-19 | Semiconductor device and method for manufacturing semiconductor device |
DE102019202117.4A DE102019202117A1 (de) | 2018-06-27 | 2019-02-18 | Halbleitervorrichtung und Verfahren zum Herstellen einer Halbleitervorrichtung |
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WO2021220965A1 (ja) * | 2020-04-28 | 2021-11-04 | 株式会社デンソー | 半導体装置 |
JP7410900B2 (ja) | 2021-03-17 | 2024-01-10 | 株式会社東芝 | 半導体装置 |
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JP7342742B2 (ja) * | 2020-03-11 | 2023-09-12 | 三菱電機株式会社 | 半導体装置 |
CN214848639U (zh) * | 2021-05-26 | 2021-11-23 | 珠海格力电器股份有限公司 | 半导体器件的元胞结构及半导体器件 |
CN115985852B (zh) * | 2023-03-22 | 2023-06-23 | 上海鼎阳通半导体科技有限公司 | 半导体器件及其制备方法 |
CN116759445B (zh) * | 2023-08-21 | 2023-10-20 | 捷捷半导体有限公司 | 低压降二极管及其制造方法 |
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