JP2019525180A5 - - Google Patents

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Publication number
JP2019525180A5
JP2019525180A5 JP2019506157A JP2019506157A JP2019525180A5 JP 2019525180 A5 JP2019525180 A5 JP 2019525180A5 JP 2019506157 A JP2019506157 A JP 2019506157A JP 2019506157 A JP2019506157 A JP 2019506157A JP 2019525180 A5 JP2019525180 A5 JP 2019525180A5
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JP
Japan
Prior art keywords
measurement spot
scattered light
leading
illumination
lpm
Prior art date
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Application number
JP2019506157A
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English (en)
Japanese (ja)
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JP2019525180A (ja
JP6840224B2 (ja
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Publication date
Priority claimed from US15/230,330 external-priority patent/US10324045B2/en
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Publication of JP2019525180A publication Critical patent/JP2019525180A/ja
Publication of JP2019525180A5 publication Critical patent/JP2019525180A5/ja
Application granted granted Critical
Publication of JP6840224B2 publication Critical patent/JP6840224B2/ja
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JP2019506157A 2016-08-05 2017-08-03 大粒子監視及びレーザパワー制御を伴う表面欠陥検査 Active JP6840224B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US15/230,330 2016-08-05
US15/230,330 US10324045B2 (en) 2016-08-05 2016-08-05 Surface defect inspection with large particle monitoring and laser power control
PCT/US2017/045261 WO2018027010A1 (en) 2016-08-05 2017-08-03 Surface defect inspection with large particle monitoring and laser power control

Publications (3)

Publication Number Publication Date
JP2019525180A JP2019525180A (ja) 2019-09-05
JP2019525180A5 true JP2019525180A5 (enExample) 2020-09-10
JP6840224B2 JP6840224B2 (ja) 2021-03-10

Family

ID=61069145

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2019506157A Active JP6840224B2 (ja) 2016-08-05 2017-08-03 大粒子監視及びレーザパワー制御を伴う表面欠陥検査

Country Status (8)

Country Link
US (1) US10324045B2 (enExample)
JP (1) JP6840224B2 (enExample)
KR (1) KR102228505B1 (enExample)
CN (1) CN109564884B (enExample)
IL (1) IL264450B (enExample)
SG (1) SG11201900803YA (enExample)
TW (1) TWI733873B (enExample)
WO (1) WO2018027010A1 (enExample)

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CN115248531A (zh) * 2021-04-26 2022-10-28 上海微电子装备（集团）股份有限公司 颗粒度检测装置及其检测方法、光刻机
TWI814412B (zh) * 2022-05-31 2023-09-01 合盈光電科技股份有限公司 多方向物件失效檢查系統及其方法
CN118483249B (zh) * 2024-05-07 2024-12-20 无锡卓海科技股份有限公司 一种晶圆检测装置及检测方法

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