WO2020253898A8 - System und verfahren zur fokuslagen-kontrolle - Google Patents

System und verfahren zur fokuslagen-kontrolle Download PDF

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Publication number
WO2020253898A8
WO2020253898A8 PCT/DE2020/000134 DE2020000134W WO2020253898A8 WO 2020253898 A8 WO2020253898 A8 WO 2020253898A8 DE 2020000134 W DE2020000134 W DE 2020000134W WO 2020253898 A8 WO2020253898 A8 WO 2020253898A8
Authority
WO
WIPO (PCT)
Prior art keywords
focal position
unit
determining
partial
analysis device
Prior art date
Application number
PCT/DE2020/000134
Other languages
English (en)
French (fr)
Other versions
WO2020253898A1 (de
Inventor
Reinhard Kramer
Otto MÄRTEN
Stefan Wolf
Johannes ROßNAGEL
Roman Niedrig
Original Assignee
Primes GmbH Meßtechnik für die Produktion mit Laserstrahlung
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Primes GmbH Meßtechnik für die Produktion mit Laserstrahlung filed Critical Primes GmbH Meßtechnik für die Produktion mit Laserstrahlung
Priority to JP2021575901A priority Critical patent/JP7273999B2/ja
Priority to CN202080045998.0A priority patent/CN114025906B/zh
Priority to US17/619,904 priority patent/US20220341778A1/en
Publication of WO2020253898A1 publication Critical patent/WO2020253898A1/de
Publication of WO2020253898A8 publication Critical patent/WO2020253898A8/de

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
    • G01J1/4257—Photometry, e.g. photographic exposure meter using electric radiation detectors applied to monitoring the characteristics of a beam, e.g. laser beam, headlamp beam
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
    • B23K26/046—Automatically focusing the laser beam
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0643—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising mirrors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/067—Dividing the beam into multiple beams, e.g. multifocusing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/073—Shaping the laser spot
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/70—Auxiliary operations or equipment
    • B23K26/702—Auxiliary equipment
    • B23K26/705—Beam measuring device
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/02—Details
    • G01J1/04—Optical or mechanical part supplementary adjustable parts
    • G01J1/0407—Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings
    • G01J1/0411—Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings using focussing or collimating elements, i.e. lenses or mirrors; Aberration correction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/02—Details
    • G01J1/04—Optical or mechanical part supplementary adjustable parts
    • G01J1/0407—Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings
    • G01J1/0437—Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings using masks, aperture plates, spatial light modulators, spatial filters, e.g. reflective filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
    • G01J1/4228—Photometry, e.g. photographic exposure meter using electric radiation detectors arrangements with two or more detectors, e.g. for sensitivity compensation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/28—Systems for automatic generation of focusing signals
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/28—Systems for automatic generation of focusing signals
    • G02B7/34—Systems for automatic generation of focusing signals using different areas in a pupil plane

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Laser Beam Processing (AREA)

Abstract

Die Erfindung betrifft eine Strahlanalysevorrichtung zur Bestimmung eines Lichtstrahl-Zustandes, insbesondere zur Bestimmung der Fokuslage eines Lichtstrahls. Die Strahlanalysevorrichtung umfasst eine Teilstrahl-Abbildungsvorrichtung (10) mit wenigstens einer ersten Selektionsvorrichtung (11) zur Bildung eines ersten Teilstrahls (41) aus einem ersten Teil-Aperturbereich des ersten Messstrahls (40), und eine Abbildungseinrichtung (16) zur Abbildung des ersten Teilstrahls (41) zur Erzeugung eines ersten Strahlflecks (45) auf eine Detektoreinheit (20) mit einem ortsauflösenden Detektor (21). Ferner umfasst die Strahlanalysevorrichtung eine Auswertungseinheit (25) zur Verarbeitung der Signale der Detektoreinheit (20), zur Bestimmung einer lateralen Position (a1) des ersten Strahlflecks (45), und zur Bestimmung von zeitlichen Änderungen der lateralen Position (a1, a1') des ersten Strahlflecks (45, 45'). Die Erfindung betrifft auch ein Optisches System zur Fokuslagen-Kontrolle mit einer Laseroptik (60) und mit einer Strahlanalysevorrichtung. Die Erfindung betrifft auch ein entsprechendes Strahlanalyseverfahren sowie Verfahren zur Fokuslagen-Kontrolle einer Laseroptik und zur Fokuslagen-Nachführung einer Laseroptik.
PCT/DE2020/000134 2019-06-21 2020-06-16 System und verfahren zur fokuslagen-kontrolle WO2020253898A1 (de)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2021575901A JP7273999B2 (ja) 2019-06-21 2020-06-16 焦点位置制御のためのシステム及び方法
CN202080045998.0A CN114025906B (zh) 2019-06-21 2020-06-16 用于焦点位置控制的系统和方法
US17/619,904 US20220341778A1 (en) 2019-06-21 2020-06-16 System and method for focal position control

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102019004337.5 2019-06-21
DE102019004337.5A DE102019004337B4 (de) 2019-06-21 2019-06-21 Optisches System und Strahlanalyseverfahren

Publications (2)

Publication Number Publication Date
WO2020253898A1 WO2020253898A1 (de) 2020-12-24
WO2020253898A8 true WO2020253898A8 (de) 2022-01-27

Family

ID=71728529

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/DE2020/000134 WO2020253898A1 (de) 2019-06-21 2020-06-16 System und verfahren zur fokuslagen-kontrolle

Country Status (5)

Country Link
US (1) US20220341778A1 (de)
JP (1) JP7273999B2 (de)
CN (1) CN114025906B (de)
DE (1) DE102019004337B4 (de)
WO (1) WO2020253898A1 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102020134109B3 (de) 2020-12-18 2022-05-25 Primes GmbH Meßtechnik für die Produktion mit Laserstrahlung Vorrichtung und Verfahren zur Fokuslagen-Bestimmung
DE102020134317A1 (de) * 2020-12-18 2022-06-23 Primes GmbH Meßtechnik für die Produktion mit Laserstrahlung Vorrichtung und Verfahren zur Fokuslagen-Bestimmung
DE102021130944A1 (de) 2021-11-25 2023-05-25 Jenoptik Optical Systems Gmbh Vorrichtung und Verfahren zum Bestimmen eines Strahlverlaufs eines Strahls und Laseranlage
DE102022104530A1 (de) * 2022-02-25 2023-08-31 Trumpf Laser Gmbh Verfahren zum Stabilisieren der Strahllage und Lasersystem mit Strahllagebestimmung
DE102022114157B4 (de) 2022-04-25 2024-05-23 Primes GmbH Meßtechnik für die Produktion mit Laserstrahlung Vorrichtung und Verfahren zur Fokuslagen-Bestimmung mit Berücksichtigung von Prozessgas
WO2024099740A1 (en) * 2022-11-07 2024-05-16 Asml Netherlands B.V. Method and apparatus for inspection focus measurement

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Also Published As

Publication number Publication date
CN114025906A (zh) 2022-02-08
US20220341778A1 (en) 2022-10-27
DE102019004337B4 (de) 2024-03-21
DE102019004337A1 (de) 2020-12-24
JP2022538036A (ja) 2022-08-31
JP7273999B2 (ja) 2023-05-15
WO2020253898A1 (de) 2020-12-24
CN114025906B (zh) 2023-12-19

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