JP2019517094A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2019517094A5 JP2019517094A5 JP2018537638A JP2018537638A JP2019517094A5 JP 2019517094 A5 JP2019517094 A5 JP 2019517094A5 JP 2018537638 A JP2018537638 A JP 2018537638A JP 2018537638 A JP2018537638 A JP 2018537638A JP 2019517094 A5 JP2019517094 A5 JP 2019517094A5
- Authority
- JP
- Japan
- Prior art keywords
- cathode
- atomic mass
- atomic
- tantalum
- zirconium
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims 4
- 229910052751 metal Inorganic materials 0.000 claims 4
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims 3
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 claims 3
- 239000000203 mixture Substances 0.000 claims 3
- 229910052715 tantalum Inorganic materials 0.000 claims 3
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims 3
- 239000010936 titanium Substances 0.000 claims 3
- 229910052719 titanium Inorganic materials 0.000 claims 3
- 229910052726 zirconium Inorganic materials 0.000 claims 3
- 108010083687 Ion Pumps Proteins 0.000 claims 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims 2
- 229910052735 hafnium Inorganic materials 0.000 claims 2
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 claims 2
- 229910052750 molybdenum Inorganic materials 0.000 claims 2
- 239000011733 molybdenum Substances 0.000 claims 2
- 229910052759 nickel Inorganic materials 0.000 claims 2
- 229910052758 niobium Inorganic materials 0.000 claims 2
- 239000010955 niobium Substances 0.000 claims 2
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 claims 2
- 229910052761 rare earth metal Inorganic materials 0.000 claims 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims 1
- 229910052782 aluminium Inorganic materials 0.000 claims 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 1
- 229910017052 cobalt Inorganic materials 0.000 claims 1
- 239000010941 cobalt Substances 0.000 claims 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 claims 1
- 229910052802 copper Inorganic materials 0.000 claims 1
- 239000010949 copper Substances 0.000 claims 1
- 230000001186 cumulative effect Effects 0.000 claims 1
- 229910052742 iron Inorganic materials 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 238000005086 pumping Methods 0.000 claims 1
- 229910052720 vanadium Inorganic materials 0.000 claims 1
- LEONUFNNVUYDNQ-UHFFFAOYSA-N vanadium atom Chemical compound [V] LEONUFNNVUYDNQ-UHFFFAOYSA-N 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2021173171A JP2022009412A (ja) | 2016-02-19 | 2021-10-22 | 焼結非多孔質カソードおよびこれを含むスパッタイオン真空ポンプ |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| ITUB2016A000885A ITUB20160885A1 (it) | 2016-02-19 | 2016-02-19 | Catodi sinterizzati non porosi e pompe a vuoto ioniche contenenti gli stessi |
| ITUB2016A000885 | 2016-02-19 | ||
| PCT/EP2017/053407 WO2017140730A1 (en) | 2016-02-19 | 2017-02-15 | Sintered non-porous cathode and sputter ion vacuum pump containing the same |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021173171A Division JP2022009412A (ja) | 2016-02-19 | 2021-10-22 | 焼結非多孔質カソードおよびこれを含むスパッタイオン真空ポンプ |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2019517094A JP2019517094A (ja) | 2019-06-20 |
| JP2019517094A5 true JP2019517094A5 (enExample) | 2020-03-26 |
| JP7010830B2 JP7010830B2 (ja) | 2022-01-26 |
Family
ID=55948996
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2018537638A Active JP7010830B2 (ja) | 2016-02-19 | 2017-02-15 | 焼結非多孔質カソードおよびこれを含むスパッタイオン真空ポンプ |
| JP2021173171A Pending JP2022009412A (ja) | 2016-02-19 | 2021-10-22 | 焼結非多孔質カソードおよびこれを含むスパッタイオン真空ポンプ |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021173171A Pending JP2022009412A (ja) | 2016-02-19 | 2021-10-22 | 焼結非多孔質カソードおよびこれを含むスパッタイオン真空ポンプ |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US11056326B2 (enExample) |
| EP (1) | EP3417471B1 (enExample) |
| JP (2) | JP7010830B2 (enExample) |
| KR (1) | KR102419940B1 (enExample) |
| CN (1) | CN108475613B (enExample) |
| IT (1) | ITUB20160885A1 (enExample) |
| RU (1) | RU2721379C2 (enExample) |
| WO (1) | WO2017140730A1 (enExample) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10580629B2 (en) * | 2017-07-31 | 2020-03-03 | Agilent Technologies, Inc. | Ion pump shield |
| US11355327B2 (en) * | 2017-07-31 | 2022-06-07 | Agilent Technologies, Inc. | Ion pump shield |
| US10121627B1 (en) * | 2017-10-26 | 2018-11-06 | Edwards Vacuum Llc | Ion pump noble gas stability using small grain sized cathode material |
| CN115121799B (zh) * | 2021-03-24 | 2024-11-12 | 新奥科技发展有限公司 | 等离子体炬阴极及其制备方法 |
Family Cites Families (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3150819A (en) * | 1962-06-07 | 1964-09-29 | Varian Associates | High vacuum apparatus and method |
| GB1171141A (en) * | 1965-12-03 | 1969-11-19 | Ultek Corp | Asymmetric Ion Pump |
| US3542488A (en) * | 1968-10-28 | 1970-11-24 | Andar Iti Inc | Method and apparatus for producing alloyed getter films in sputter-ion pumps |
| US3684401A (en) * | 1970-11-17 | 1972-08-15 | Westinghouse Electric Corp | Cathode-getter materials for sputter-ion pumps |
| US4097195A (en) * | 1975-02-12 | 1978-06-27 | Varian Associates, Inc. | High vacuum pump |
| JPS5641342A (en) * | 1979-09-11 | 1981-04-18 | Ulvac Corp | Electrode material for sputtering ion pump |
| JPH03245449A (ja) * | 1990-02-23 | 1991-11-01 | Hitachi Ltd | 放電安定化ペニング放電電極 |
| RU2034359C1 (ru) * | 1990-05-03 | 1995-04-30 | Научно-исследовательский и конструкторский институт энерготехники | Электроразрядный вакуумный насос |
| CN2165528Y (zh) * | 1993-06-18 | 1994-05-18 | 南京理工大学 | 微型冷阴极溅射离子泵 |
| JP2001357814A (ja) * | 2000-06-15 | 2001-12-26 | Jeol Ltd | 極高真空スパッタイオンポンプ |
| US6509588B1 (en) * | 2000-11-03 | 2003-01-21 | Cardiac Pacemakers, Inc. | Method for interconnecting anodes and cathodes in a flat capacitor |
| US20060045754A1 (en) * | 2004-08-27 | 2006-03-02 | Peter Lukens | Ion pump for cryogenic magnet apparatus |
| CN201106064Y (zh) * | 2007-09-28 | 2008-08-27 | 安徽华东光电技术研究所 | 一种三极溅射离子泵结构 |
| FR2982618B1 (fr) * | 2011-11-10 | 2014-08-01 | Institut Nat Des Sciences Appliquees De Rennes Insa De Rennes | Procede de fabrication d'un alliage a base de titane pour dispositifs biomedicaux |
| JP7059943B2 (ja) * | 2019-01-15 | 2022-04-26 | 株式会社豊田自動織機 | ロッカアーム |
-
2016
- 2016-02-19 IT ITUB2016A000885A patent/ITUB20160885A1/it unknown
-
2017
- 2017-02-15 EP EP17705850.0A patent/EP3417471B1/en active Active
- 2017-02-15 US US16/068,803 patent/US11056326B2/en active Active
- 2017-02-15 RU RU2018133004A patent/RU2721379C2/ru active
- 2017-02-15 JP JP2018537638A patent/JP7010830B2/ja active Active
- 2017-02-15 WO PCT/EP2017/053407 patent/WO2017140730A1/en not_active Ceased
- 2017-02-15 CN CN201780007048.7A patent/CN108475613B/zh active Active
- 2017-02-15 KR KR1020187020298A patent/KR102419940B1/ko active Active
-
2021
- 2021-10-22 JP JP2021173171A patent/JP2022009412A/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP2019517094A5 (enExample) | ||
| US20180044770A1 (en) | (ZrM)-(CuN)-Ni-Al-RE amorphous alloy and manufacturing method and application thereof | |
| CN106086580A (zh) | 激光熔覆用高熵合金粉末及熔覆层制备方法 | |
| JP2020536174A5 (enExample) | ||
| JP2013509217A5 (enExample) | ||
| RU2018133004A (ru) | Спеченные непористые катодные электроды и содержащие их ионно-распылительные вакуумные насосы | |
| TW200523376A (en) | Tantalum sputtering target | |
| TWI537395B (zh) | 鎂合金 | |
| MY187208A (en) | Refractory object, glass overflow forming block, and process for glass object manufacture | |
| CN117385231B (zh) | 一种宽温区高强超弹合金及其制备方法 | |
| CN107075666A (zh) | 溅射靶用母合金和溅射靶的制造方法 | |
| JP2017020112A5 (enExample) | ||
| JP2020500266A5 (enExample) | ||
| JP2015165563A5 (enExample) | ||
| WO2016003627A3 (en) | Self-repairing metal alloy matrix composites, methods of manufacture and use thereof and articles comprising the same | |
| JP2019536897A5 (enExample) | ||
| JP4576001B2 (ja) | 電解コンデンサ電極用アルミニウム箔 | |
| CN104499029B (zh) | 高转化率的化成液、化成箔及其化成方法 | |
| CN106349135B (zh) | 一种提高二氧化硫脲稳定性的高岭土稳定剂及其使用方法 | |
| CN103127558B (zh) | 用于封闭形宫内节育器的钛合金 | |
| WO2014131151A8 (zh) | 一种电容器级钽铌合金丝及其制造方法 | |
| JP2013163840A (ja) | チタン合金およびその製造方法 | |
| Okamoto | Supplemental Literature Review of Binary Phase Diagrams: Bi-Ga, Bi-Y, Ca-H, Cd-Fe, Cd-Mn, Cr-La, Ge-Ru, H-Li, Mn-Sr, Ni-Sr, Sm-Sn, and Sr-Ti | |
| Bromley et al. | Positronic complexes with unnatural parity | |
| RU2007112796A (ru) | Восстановление порошков клапанных металлов |