RU2018133004A - Спеченные непористые катодные электроды и содержащие их ионно-распылительные вакуумные насосы - Google Patents
Спеченные непористые катодные электроды и содержащие их ионно-распылительные вакуумные насосы Download PDFInfo
- Publication number
- RU2018133004A RU2018133004A RU2018133004A RU2018133004A RU2018133004A RU 2018133004 A RU2018133004 A RU 2018133004A RU 2018133004 A RU2018133004 A RU 2018133004A RU 2018133004 A RU2018133004 A RU 2018133004A RU 2018133004 A RU2018133004 A RU 2018133004A
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- Prior art keywords
- cathode
- atomic mass
- atoms
- metal elements
- tantalum
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Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
- C23C14/165—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon by cathodic sputtering
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/02—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by absorption or adsorption
- F04B37/04—Selection of specific absorption or adsorption materials
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
- F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
- H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
- H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
- H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
- H01J41/20—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2300/00—Materials; Properties thereof
- F05D2300/10—Metals, alloys or intermetallic compounds
- F05D2300/13—Refractory metals, i.e. Ti, V, Cr, Zr, Nb, Mo, Hf, Ta, W
- F05D2300/133—Titanium
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2300/00—Materials; Properties thereof
- F05D2300/10—Metals, alloys or intermetallic compounds
- F05D2300/13—Refractory metals, i.e. Ti, V, Cr, Zr, Nb, Mo, Hf, Ta, W
- F05D2300/134—Zirconium
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2300/00—Materials; Properties thereof
- F05D2300/60—Properties or characteristics given to material by treatment or manufacturing
- F05D2300/611—Coating
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Powder Metallurgy (AREA)
- Electron Tubes For Measurement (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Claims (9)
1. Непористый катод (22, 22'), имеющий среднюю атомную массу W, причем упомянутый катод пригоден для использования в качестве электрода в ионно-распылительном насосе (3), и содержащий в своем химическом составе спеченную объемную смесь двух разных металлических элементов:
i) M1, имеющего атомную массу W1, в количестве q1, выраженном как атомный процент суммарного количества атомов Q катода, и
ii) M2, имеющего атомную массу W2, в количестве q2, выраженном как атомный процент суммарного количества атомов Q катода,
причем упомянутый химический состав содержит дополнительные металлические элементы, отличные от M1 и M2 в совокупном количестве, более низком, чем 3% атомов относительно суммарного количества атомов Q
причем M1 и M2 оба выбраны из титана, тантала, циркония, ниобия, гафния, редкоземельных элементов, никеля или молибдена и q1, q2, W1 и W2 выбираются таким образом, что атомная масса катода, заданная как W=W1*q1+W2*q2, заключена в пределах от 80 до 160 а.е.м.
2. Катод (22, 22') по п. 1, в котором его средняя атомная масса W заключена в пределах от 100 до 160 а.е.м.
3. Катод (22, 22') по п. 1, в котором упомянутые металлические элементы, отличные от M1 и M2, выбираются из алюминия, меди, титана, тантала, циркония, ниобия, молибдена, никеля, редкоземельных элементов, гафния, железа, кобальта, ванадия.
4. Катод (22, 22') по п. 1, в котором упомянутые два металлических элемента M1 и M2 оба выбираются из титана, тантала и циркония.
5. Ионно-распылительная насосная система (3), содержащая в качестве активных нагнетательных элементов, по меньшей мере, пару катодов (22, 22') по любому из предыдущих пунктов.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| ITUB2016A000885 | 2016-02-19 | ||
| ITUB2016A000885A ITUB20160885A1 (it) | 2016-02-19 | 2016-02-19 | Catodi sinterizzati non porosi e pompe a vuoto ioniche contenenti gli stessi |
| PCT/EP2017/053407 WO2017140730A1 (en) | 2016-02-19 | 2017-02-15 | Sintered non-porous cathode and sputter ion vacuum pump containing the same |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| RU2018133004A3 RU2018133004A3 (ru) | 2020-03-19 |
| RU2018133004A true RU2018133004A (ru) | 2020-03-19 |
| RU2721379C2 RU2721379C2 (ru) | 2020-05-19 |
Family
ID=55948996
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| RU2018133004A RU2721379C2 (ru) | 2016-02-19 | 2017-02-15 | Спеченные непористые катодные электроды и содержащие их ионно-распылительные вакуумные насосы |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US11056326B2 (ru) |
| EP (1) | EP3417471B1 (ru) |
| JP (2) | JP7010830B2 (ru) |
| KR (1) | KR102419940B1 (ru) |
| CN (1) | CN108475613B (ru) |
| IT (1) | ITUB20160885A1 (ru) |
| RU (1) | RU2721379C2 (ru) |
| WO (1) | WO2017140730A1 (ru) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11355327B2 (en) | 2017-07-31 | 2022-06-07 | Agilent Technologies, Inc. | Ion pump shield |
| US10580629B2 (en) * | 2017-07-31 | 2020-03-03 | Agilent Technologies, Inc. | Ion pump shield |
| US10121627B1 (en) * | 2017-10-26 | 2018-11-06 | Edwards Vacuum Llc | Ion pump noble gas stability using small grain sized cathode material |
| CN115121799A (zh) * | 2021-03-24 | 2022-09-30 | 新奥科技发展有限公司 | 等离子体炬阴极及其制备方法 |
Family Cites Families (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3150819A (en) * | 1962-06-07 | 1964-09-29 | Varian Associates | High vacuum apparatus and method |
| GB1171141A (en) * | 1965-12-03 | 1969-11-19 | Ultek Corp | Asymmetric Ion Pump |
| US3542488A (en) * | 1968-10-28 | 1970-11-24 | Andar Iti Inc | Method and apparatus for producing alloyed getter films in sputter-ion pumps |
| US3684401A (en) * | 1970-11-17 | 1972-08-15 | Westinghouse Electric Corp | Cathode-getter materials for sputter-ion pumps |
| US4097195A (en) * | 1975-02-12 | 1978-06-27 | Varian Associates, Inc. | High vacuum pump |
| JPS5641342A (en) * | 1979-09-11 | 1981-04-18 | Ulvac Corp | Electrode material for sputtering ion pump |
| JPH03245449A (ja) * | 1990-02-23 | 1991-11-01 | Hitachi Ltd | 放電安定化ペニング放電電極 |
| RU2034359C1 (ru) * | 1990-05-03 | 1995-04-30 | Научно-исследовательский и конструкторский институт энерготехники | Электроразрядный вакуумный насос |
| CN2165528Y (zh) * | 1993-06-18 | 1994-05-18 | 南京理工大学 | 微型冷阴极溅射离子泵 |
| JP2001357814A (ja) * | 2000-06-15 | 2001-12-26 | Jeol Ltd | 極高真空スパッタイオンポンプ |
| US6509588B1 (en) * | 2000-11-03 | 2003-01-21 | Cardiac Pacemakers, Inc. | Method for interconnecting anodes and cathodes in a flat capacitor |
| US20060045754A1 (en) * | 2004-08-27 | 2006-03-02 | Peter Lukens | Ion pump for cryogenic magnet apparatus |
| CN201106064Y (zh) * | 2007-09-28 | 2008-08-27 | 安徽华东光电技术研究所 | 一种三极溅射离子泵结构 |
| FR2982618B1 (fr) * | 2011-11-10 | 2014-08-01 | Institut Nat Des Sciences Appliquees De Rennes Insa De Rennes | Procede de fabrication d'un alliage a base de titane pour dispositifs biomedicaux |
| JP7059943B2 (ja) * | 2019-01-15 | 2022-04-26 | 株式会社豊田自動織機 | ロッカアーム |
-
2016
- 2016-02-19 IT ITUB2016A000885A patent/ITUB20160885A1/it unknown
-
2017
- 2017-02-15 EP EP17705850.0A patent/EP3417471B1/en active Active
- 2017-02-15 JP JP2018537638A patent/JP7010830B2/ja active Active
- 2017-02-15 US US16/068,803 patent/US11056326B2/en active Active
- 2017-02-15 CN CN201780007048.7A patent/CN108475613B/zh active Active
- 2017-02-15 WO PCT/EP2017/053407 patent/WO2017140730A1/en active Application Filing
- 2017-02-15 KR KR1020187020298A patent/KR102419940B1/ko active IP Right Grant
- 2017-02-15 RU RU2018133004A patent/RU2721379C2/ru active
-
2021
- 2021-10-22 JP JP2021173171A patent/JP2022009412A/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| US11056326B2 (en) | 2021-07-06 |
| JP2022009412A (ja) | 2022-01-14 |
| KR20180115679A (ko) | 2018-10-23 |
| CN108475613B (zh) | 2020-06-23 |
| ITUB20160885A1 (it) | 2017-08-19 |
| KR102419940B1 (ko) | 2022-07-13 |
| RU2018133004A3 (ru) | 2020-03-19 |
| RU2721379C2 (ru) | 2020-05-19 |
| EP3417471A1 (en) | 2018-12-26 |
| CN108475613A (zh) | 2018-08-31 |
| JP2019517094A (ja) | 2019-06-20 |
| US20190051504A1 (en) | 2019-02-14 |
| EP3417471B1 (en) | 2021-06-02 |
| WO2017140730A1 (en) | 2017-08-24 |
| JP7010830B2 (ja) | 2022-01-26 |
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