JP2019511844A - オプトエレクトロニクス半導体チップ - Google Patents
オプトエレクトロニクス半導体チップ Download PDFInfo
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 218
- 230000005693 optoelectronics Effects 0.000 title claims abstract description 86
- 229910052751 metal Inorganic materials 0.000 claims abstract description 226
- 239000002184 metal Substances 0.000 claims abstract description 226
- 238000001465 metallisation Methods 0.000 claims abstract description 46
- 239000000463 material Substances 0.000 claims description 46
- 238000002310 reflectometry Methods 0.000 claims description 18
- 229910052709 silver Inorganic materials 0.000 claims description 16
- 239000004332 silver Substances 0.000 claims description 16
- 239000010948 rhodium Substances 0.000 claims description 13
- 229910052782 aluminium Inorganic materials 0.000 claims description 11
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 10
- 229910052703 rhodium Inorganic materials 0.000 claims description 10
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 claims description 10
- 239000012777 electrically insulating material Substances 0.000 claims description 9
- 239000010931 gold Substances 0.000 claims description 9
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 7
- 229910052737 gold Inorganic materials 0.000 claims description 7
- 230000000149 penetrating effect Effects 0.000 claims description 3
- 239000004020 conductor Substances 0.000 description 20
- 230000005670 electromagnetic radiation Effects 0.000 description 19
- 229910000679 solder Inorganic materials 0.000 description 16
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 14
- 238000009792 diffusion process Methods 0.000 description 14
- 150000002500 ions Chemical class 0.000 description 13
- 230000007480 spreading Effects 0.000 description 13
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 8
- 229910052814 silicon oxide Inorganic materials 0.000 description 6
- 230000005684 electric field Effects 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- -1 nitride compound Chemical class 0.000 description 5
- 229910004298 SiO 2 Inorganic materials 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 239000003989 dielectric material Substances 0.000 description 3
- 239000002019 doping agent Substances 0.000 description 3
- 239000007769 metal material Substances 0.000 description 3
- 230000035699 permeability Effects 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- 150000001768 cations Chemical class 0.000 description 2
- 239000002800 charge carrier Substances 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 239000000470 constituent Substances 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 150000002736 metal compounds Chemical class 0.000 description 2
- 230000005012 migration Effects 0.000 description 2
- 238000013508 migration Methods 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 241000597800 Gulella radius Species 0.000 description 1
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 230000032683 aging Effects 0.000 description 1
- VXAUWWUXCIMFIM-UHFFFAOYSA-M aluminum;oxygen(2-);hydroxide Chemical compound [OH-].[O-2].[Al+3] VXAUWWUXCIMFIM-UHFFFAOYSA-M 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 239000011777 magnesium Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 229910052755 nonmetal Inorganic materials 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 230000008092 positive effect Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000006798 recombination Effects 0.000 description 1
- 238000005215 recombination Methods 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 239000004408 titanium dioxide Substances 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
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- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/36—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes
- H01L33/40—Materials therefor
- H01L33/405—Reflective materials
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- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
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- H01L33/04—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a quantum effect structure or superlattice, e.g. tunnel junction
- H01L33/06—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a quantum effect structure or superlattice, e.g. tunnel junction within the light emitting region, e.g. quantum confinement structure or tunnel barrier
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- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/20—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a particular shape, e.g. curved or truncated substrate
- H01L33/22—Roughened surfaces, e.g. at the interface between epitaxial layers
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- H01L33/26—Materials of the light emitting region
- H01L33/30—Materials of the light emitting region containing only elements of Group III and Group V of the Periodic Table
- H01L33/32—Materials of the light emitting region containing only elements of Group III and Group V of the Periodic Table containing nitrogen
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- H01L33/38—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes with a particular shape
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Abstract
Description
10 第1のミラー
101 第1の金属層
102 第1の誘電体
20 p−メタライズ部
201 第2の金属層
202 第2の誘電体
30 半導体ボディ
301 n型導電領域
302 p型導電領域
303 活性領域
40 はんだ領域
41 キャリア
402 第3の誘電体
421 第1のコンタクト構造
422 第2のコンタクト構造
431 第1の電流拡散層
432 第2の電流拡散層
61 第1のビア
62 第2のビア
63 第3のビア
64 第4のビア
65 凹部
Claims (15)
- オプトエレクトロニクス半導体チップ(1)であって、
n型導電領域(301)と、p型導電領域(302)と、前記n型導電領域(301)と前記p型導電領域(302)との間の活性領域(303)と、を有する半導体ボディ(30)と、
第1の金属層(101)を含む第1のミラー(10)と、
第2の金属層(201)を含むp−メタライズ部(20)と、
を備えており、
前記半導体チップ(1)の動作時、前記第1のミラー(10)が前記p型導電領域(302)と同じ電位になく、
前記半導体チップの動作時、前記p−メタライズ部(20)が前記p型導電領域(302)と同じ電位にあり、
前記第1のミラー(10)が少なくとも1つの開口部を有し、前記開口部を介して前記p−メタライズ部(20)が前記p型導電領域(302)に導電接続されている、
オプトエレクトロニクス半導体チップ(1)。 - 前記第1の金属層(101)が、前記n型導電領域(301)と同じ電位にある、
請求項1に記載のオプトエレクトロニクス半導体チップ(1)。 - 前記第1の金属層(101)が、次の元素、すなわち、Ag(銀)、Al(アルミニウム)、Rh(ロジウム)、Au(金)、のうちの1種類を含む、または1種類からなる、
請求項1または請求項2のいずれか1項に記載のオプトエレクトロニクス半導体チップ(1)。 - 前記活性領域(303)の側の前記第1のミラー(10)の表面部分が、前記活性領域(303)の側の前記p−メタライズ部(20)の表面部分より大きい、
請求項1から請求項3のいずれか1項に記載のオプトエレクトロニクス半導体チップ(1)。 - 前記第1のミラー(10)が、前記p−メタライズ部(20)の反射率より大きい反射率を有する、
請求項1から請求項4のいずれか1項に記載のオプトエレクトロニクス半導体チップ(1)。 - 前記第1のミラー(10)の主延在面が、前記半導体ボディ(30)と前記p−メタライズ部(20)との間に配置されている、
請求項1から請求項5のいずれか1項に記載のオプトエレクトロニクス半導体チップ(1)。 - 前記第1のミラー(10)が開口部を有し、前記p−メタライズ部(20)が、少なくとも部分的に、前記第1のミラー(10)の前記開口部の中に配置されている、
請求項1から請求項6のいずれか1項に記載のオプトエレクトロニクス半導体チップ(1)。 - 前記第1の金属層(101)が、前記活性領域(303)の側の面において第1の誘電体(102)によって覆われている、
請求項1から請求項7のいずれか1項に記載のオプトエレクトロニクス半導体チップ(1)。 - 前記第1のミラー(10)が、横方向において前記半導体ボディ(30)を超えて突き出している、
請求項1から請求項8のいずれか1項に記載のオプトエレクトロニクス半導体チップ(1)。 - 前記p−メタライズ部(20)が、少なくとも部分的に、前記第1のミラー(10)と同じ材料から形成されている、
請求項1から請求項9のいずれか1項に記載のオプトエレクトロニクス半導体チップ(1)。 - 前記第1のミラー(10)と前記n型導電領域(301)とが、第3のビア(63)によって互いに導電接続されており、前記ビアが、前記半導体ボディ(30)の主延在面に垂直に、または横切るように、前記半導体ボディを完全に貫いている、
請求項1から請求項10のいずれか1項に記載のオプトエレクトロニクス半導体チップ(1)。 - 前記p−メタライズ部(20)が、第1のコンタクト構造(421)が中を貫いている第4のビア(64)、を有し、
前記第1のコンタクト構造(421)が前記第1のミラー(10)に導電接続されている、
請求項1から請求項11のいずれか1項に記載のオプトエレクトロニクス半導体チップ(1)。 - 前記活性領域(303)が、横方向において前記第1のミラー(10)によって完全に囲まれている、
請求項1から請求項12のいずれか1項に記載のオプトエレクトロニクス半導体チップ(1)。 - 前記第1の金属層(101)が、すべての側面において電気絶縁材料によって覆われている、
請求項1から請求項13のいずれか1項に記載のオプトエレクトロニクス半導体チップ(1)。 - 前記第2の金属層(201)が銀を含まない、
請求項1から請求項14のいずれか1項に記載のオプトエレクトロニクス半導体チップ(1)。
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DE102016106831.4 | 2016-04-13 | ||
DE102016106831.4A DE102016106831A1 (de) | 2016-04-13 | 2016-04-13 | Optoelektronischer Halbleiterchip |
PCT/EP2017/059022 WO2017178627A1 (de) | 2016-04-13 | 2017-04-13 | Optoelektronischer halbleiterchip |
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US (1) | US10629777B2 (ja) |
JP (1) | JP2019511844A (ja) |
CN (1) | CN109075227B (ja) |
DE (1) | DE102016106831A1 (ja) |
WO (1) | WO2017178627A1 (ja) |
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DE102018111168A1 (de) * | 2018-05-09 | 2019-11-14 | Osram Opto Semiconductors Gmbh | Optoelektronisches halbleiterbauelement mit einer ersten und einer zweiten stromverteilungsstruktur |
DE102018125281A1 (de) * | 2018-10-12 | 2020-04-16 | Osram Opto Semiconductors Gmbh | Optoelektronisches Halbleiterbauteil |
US20220384395A1 (en) * | 2021-05-27 | 2022-12-01 | Meta Platforms Technologies, Llc | High reflectivity wide bonding pad electrodes |
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CN109075227A (zh) | 2018-12-21 |
CN109075227B (zh) | 2021-12-10 |
US20190165215A1 (en) | 2019-05-30 |
WO2017178627A1 (de) | 2017-10-19 |
US10629777B2 (en) | 2020-04-21 |
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