JP6139687B2 - 互いに並んで配置された複数の活性領域を有するオプトエレクトロニクス半導体チップ - Google Patents
互いに並んで配置された複数の活性領域を有するオプトエレクトロニクス半導体チップ Download PDFInfo
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- 239000004065 semiconductor Substances 0.000 title claims description 203
- 230000005693 optoelectronics Effects 0.000 title claims description 78
- 238000007789 sealing Methods 0.000 claims description 113
- 229910052751 metal Inorganic materials 0.000 claims description 68
- 239000002184 metal Substances 0.000 claims description 68
- 230000005855 radiation Effects 0.000 claims description 31
- 239000000758 substrate Substances 0.000 claims description 31
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 12
- 239000011159 matrix material Substances 0.000 claims description 9
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 8
- 229910001092 metal group alloy Inorganic materials 0.000 claims description 7
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 6
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 6
- 229910052737 gold Inorganic materials 0.000 claims description 6
- 239000010931 gold Substances 0.000 claims description 6
- 229910052697 platinum Inorganic materials 0.000 claims description 6
- 229910052719 titanium Inorganic materials 0.000 claims description 6
- 239000010936 titanium Substances 0.000 claims description 6
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 4
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 4
- 239000000463 material Substances 0.000 description 14
- 229910052709 silver Inorganic materials 0.000 description 12
- 239000004332 silver Substances 0.000 description 12
- 238000010521 absorption reaction Methods 0.000 description 10
- 238000005538 encapsulation Methods 0.000 description 8
- 238000000034 method Methods 0.000 description 8
- 230000007797 corrosion Effects 0.000 description 7
- 238000005260 corrosion Methods 0.000 description 7
- 230000008569 process Effects 0.000 description 7
- 238000000926 separation method Methods 0.000 description 7
- 230000008021 deposition Effects 0.000 description 5
- 238000000605 extraction Methods 0.000 description 5
- 239000011521 glass Substances 0.000 description 5
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 4
- 230000008901 benefit Effects 0.000 description 4
- 150000001875 compounds Chemical class 0.000 description 4
- 230000003647 oxidation Effects 0.000 description 4
- 238000007254 oxidation reaction Methods 0.000 description 4
- 238000002310 reflectometry Methods 0.000 description 4
- 239000010409 thin film Substances 0.000 description 4
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000035515 penetration Effects 0.000 description 3
- 230000003595 spectral effect Effects 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 238000010292 electrical insulation Methods 0.000 description 2
- 229910052738 indium Inorganic materials 0.000 description 2
- -1 nitride compound Chemical class 0.000 description 2
- 238000000197 pyrolysis Methods 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 229910000679 solder Inorganic materials 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 239000012080 ambient air Substances 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005670 electromagnetic radiation Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000004020 luminiscence type Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/48—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
- H01L33/52—Encapsulations
- H01L33/56—Materials, e.g. epoxy or silicone resin
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/0004—Devices characterised by their operation
- H01L33/0008—Devices characterised by their operation having p-n or hi-lo junctions
- H01L33/0016—Devices characterised by their operation having p-n or hi-lo junctions having at least two p-n junctions
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/08—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a plurality of light emitting regions, e.g. laterally discontinuous light emitting layer or photoluminescent region integrated within the semiconductor body
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/36—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes
- H01L33/40—Materials therefor
- H01L33/405—Reflective materials
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/48—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
- H01L33/58—Optical field-shaping elements
- H01L33/60—Reflective elements
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/15—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components having potential barriers, specially adapted for light emission
- H01L27/153—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components having potential barriers, specially adapted for light emission in a repetitive configuration, e.g. LED bars
- H01L27/156—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components having potential barriers, specially adapted for light emission in a repetitive configuration, e.g. LED bars two-dimensional arrays
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/44—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the coatings, e.g. passivation layer or anti-reflective coating
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Description
Claims (14)
- オプトエレクトロニクス半導体チップ(1)であって、
− 放射を放出するのに適する活性ゾーン(4)を有する半導体積層体(2)と、
− キャリア基板(10)と、
− 前記半導体積層体(2)と前記キャリア基板(10)との間に配置されているミラー層(6)と、
を備えており、
− 前記半導体積層体(2)が、互いに並んで配置されている複数の活性領域(11,12)に分割されており、
− 前記複数の活性領域(11,12)それぞれが、前記半導体積層体(2)における溝(13)によって互いに隔てられており、前記溝それぞれが、前記半導体積層体(2)および前記ミラー層(6)を分断しており、
前記活性領域(11,12)が、少なくとも1つの内側活性領域(12)と、外側活性領域(11)とを備えており、前記内側活性領域(12)において、前記ミラー層(6)の側面(16)すべてがそれぞれ溝(13)に面しており、前記外側活性領域(11)において、前記ミラー層(6)の少なくとも1つの側面(17)が前記半導体チップ(1)の外面(15)に面しており、
− 前記ミラー層(6)が、溝(13)に面する側面(16)と、前記半導体チップ(1)の外面(15)に面する側面(17)とを有し、
− 前記半導体チップ(1)の外面(15)に面する前記ミラー層(6)の前記側面(17)が金属封止層(7)を有し、溝(13)に面する前記ミラー層(6)の前記側面(16)の少なくとも一部分が誘電体封止層(9)を有する、
オプトエレクトロニクス半導体チップ(1)。 - 溝(13)に面する前記ミラー層の前記側面(16)すべてが誘電体封止層(9)を有する、
請求項1に記載のオプトエレクトロニクス半導体チップ。 - 前記外側活性領域(11)における前記ミラー層の側面(16)のうち、溝(13)に面しており、一方の側において前記半導体チップ(1)の外面(15)に隣接している側面(16)が、前記外面(15)に隣接する外側領域(16a)における金属封止層(7)と、内側領域(16b)における誘電体封止層(9)とを有する、
請求項1に記載のオプトエレクトロニクス半導体チップ。 - 前記外面(15)に隣接しておりかつ前記金属封止層(7)を有する前記領域(16a)が、5μm〜10μmの範囲内の幅を有する、
請求項3に記載のオプトエレクトロニクス半導体チップ。 - 前記外側活性領域(11)において、溝(13)に面しており、かつ一方の側において前記半導体チップ(1)の前記外面(15)に隣接している前記ミラー層の側面(16)すべてが、金属封止層(7)を有する、
請求項1に記載のオプトエレクトロニクス半導体チップ。 - 前記外側活性領域(11)において、前記ミラー層(6)の側面(16,17)すべてが金属封止層(7)を有する、
請求項1に記載のオプトエレクトロニクス半導体チップ。 - 前記誘電体封止層(9)がアルミニウム酸化物またはシリコン酸化物を含んでいる、
請求項1から請求項6のいずれかに記載のオプトエレクトロニクス半導体チップ。 - 前記誘電体封止層(9)に微細孔が存在しない、
請求項1から請求項7のいずれかに記載のオプトエレクトロニクス半導体チップ。 - 前記金属封止層(7)が、金属または金属合金から構成されている1層または複数の層を備えている、
請求項1から請求項8のいずれかに記載のオプトエレクトロニクス半導体チップ。 - 前記金属封止層(7)が、白金、チタン、金のうち少なくとも1種類の金属を含んでいる、
請求項1から請求項9のいずれかに記載のオプトエレクトロニクス半導体チップ。 - 前記ミラー層(6)が、前記半導体積層体(2)よりも小さい横方向範囲を有し、前記誘電体封止層(9)の部分領域もしくは前記金属封止層(7)の部分領域またはその両方が前記半導体積層体(2)の下に延在している、
請求項1から請求項10のいずれかに記載のオプトエレクトロニクス半導体チップ。 - 前記半導体積層体(2)が、前記誘電体封止層(9)によって完全に覆われている、
請求項1から請求項11のいずれかに記載のオプトエレクトロニクス半導体チップ。 - 前記複数の活性領域(11,12)が、複数の行および列から構成される行列を形成している、
請求項1から請求項12のいずれかに記載のオプトエレクトロニクス半導体チップ。 - 前記複数の活性領域(11,12)が直列に接続されている、
請求項1から請求項13のいずれかに記載のオプトエレクトロニクス半導体チップ。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
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DE102012108879.9A DE102012108879B4 (de) | 2012-09-20 | 2012-09-20 | Optoelektronischer Halbleiterchip mit mehreren nebeneinander angeordneten aktiven Bereichen |
DE102012108879.9 | 2012-09-20 | ||
PCT/EP2013/069472 WO2014044752A1 (de) | 2012-09-20 | 2013-09-19 | Optoelektronischer halbleiterchip mit mehreren nebeneinander angeordneten aktiven bereichen |
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JP2016246443A Division JP2017098557A (ja) | 2012-09-20 | 2016-12-20 | 互いに並んで配置された複数の活性領域を有するオプトエレクトロニクス半導体チップ |
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JP2015533022A JP2015533022A (ja) | 2015-11-16 |
JP6139687B2 true JP6139687B2 (ja) | 2017-05-31 |
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JP2016246443A Withdrawn JP2017098557A (ja) | 2012-09-20 | 2016-12-20 | 互いに並んで配置された複数の活性領域を有するオプトエレクトロニクス半導体チップ |
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US (1) | US9299897B2 (ja) |
JP (2) | JP6139687B2 (ja) |
KR (1) | KR102075183B1 (ja) |
CN (1) | CN104823287B (ja) |
DE (1) | DE102012108879B4 (ja) |
WO (1) | WO2014044752A1 (ja) |
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DE102014102029A1 (de) * | 2014-02-18 | 2015-08-20 | Osram Opto Semiconductors Gmbh | Verfahren zur Herstellung von Halbleiterbauelementen und Halbleiterbauelement |
DE102014107123A1 (de) * | 2014-05-20 | 2015-11-26 | Osram Opto Semiconductors Gmbh | Verfahren zur Herstellung eines optoelektronischen Halbleiterchips sowie optoelektronischer Halbleiterchip |
KR102197082B1 (ko) | 2014-06-16 | 2020-12-31 | 엘지이노텍 주식회사 | 발광 소자 및 이를 포함하는 발광소자 패키지 |
KR102378952B1 (ko) * | 2015-08-27 | 2022-03-25 | 쑤저우 레킨 세미컨덕터 컴퍼니 리미티드 | 발광소자 및 이를 포함하는 발광소자 패키지 |
DE102015114587A1 (de) * | 2015-09-01 | 2017-03-02 | Osram Opto Semiconductors Gmbh | Optoelektronisches Halbleiterbauelement und Verfahren zu dessen Herstellung |
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DE102017123242A1 (de) | 2017-10-06 | 2019-04-11 | Osram Opto Semiconductors Gmbh | Verfahren zur Herstellung eines oder einer Mehrzahl von Halbleiterchips und Halbleiterchip |
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KR101761385B1 (ko) * | 2010-07-12 | 2017-08-04 | 엘지이노텍 주식회사 | 발광 소자 |
DE102010033137A1 (de) * | 2010-08-03 | 2012-02-09 | Osram Opto Semiconductors Gmbh | Leuchtdiodenchip |
DE102010044986A1 (de) * | 2010-09-10 | 2012-03-15 | Osram Opto Semiconductors Gmbh | Leuchtdiodenchip und Verfahren zur Herstellung eines Leuchtdiodenchips |
DE102010045784B4 (de) | 2010-09-17 | 2022-01-20 | OSRAM Opto Semiconductors Gesellschaft mit beschränkter Haftung | Optoelektronischer Halbleiterchip |
DE102011011140A1 (de) * | 2011-02-14 | 2012-08-16 | Osram Opto Semiconductors Gmbh | Optoelektronischer Halbleiterchip und Verfahren zur Herstellung von optoelektronischen Halbleiterchips |
-
2012
- 2012-09-20 DE DE102012108879.9A patent/DE102012108879B4/de active Active
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2013
- 2013-09-19 CN CN201380049143.5A patent/CN104823287B/zh active Active
- 2013-09-19 JP JP2015532408A patent/JP6139687B2/ja active Active
- 2013-09-19 US US14/428,333 patent/US9299897B2/en active Active
- 2013-09-19 WO PCT/EP2013/069472 patent/WO2014044752A1/de active Application Filing
- 2013-09-19 KR KR1020157007867A patent/KR102075183B1/ko active IP Right Grant
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Publication number | Publication date |
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DE102012108879A1 (de) | 2014-03-20 |
JP2017098557A (ja) | 2017-06-01 |
DE102012108879A8 (de) | 2014-05-15 |
WO2014044752A1 (de) | 2014-03-27 |
US9299897B2 (en) | 2016-03-29 |
CN104823287A (zh) | 2015-08-05 |
DE102012108879B4 (de) | 2024-03-28 |
CN104823287B (zh) | 2017-10-20 |
US20150270458A1 (en) | 2015-09-24 |
KR102075183B1 (ko) | 2020-02-07 |
JP2015533022A (ja) | 2015-11-16 |
KR20150056559A (ko) | 2015-05-26 |
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