JP2019500748A5 - - Google Patents

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Publication number
JP2019500748A5
JP2019500748A5 JP2018528345A JP2018528345A JP2019500748A5 JP 2019500748 A5 JP2019500748 A5 JP 2019500748A5 JP 2018528345 A JP2018528345 A JP 2018528345A JP 2018528345 A JP2018528345 A JP 2018528345A JP 2019500748 A5 JP2019500748 A5 JP 2019500748A5
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JP
Japan
Prior art keywords
component
substrate
voltage
contact
electrostatic charge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
JP2018528345A
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English (en)
Japanese (ja)
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JP2019500748A (ja
JP6811777B2 (ja
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Publication date
Application filed filed Critical
Priority claimed from PCT/US2016/064100 external-priority patent/WO2017095857A1/en
Publication of JP2019500748A publication Critical patent/JP2019500748A/ja
Publication of JP2019500748A5 publication Critical patent/JP2019500748A5/ja
Application granted granted Critical
Publication of JP6811777B2 publication Critical patent/JP6811777B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2018528345A 2015-12-03 2016-11-30 基板の静電荷を測定する方法および装置 Expired - Fee Related JP6811777B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201562262638P 2015-12-03 2015-12-03
US62/262,638 2015-12-03
PCT/US2016/064100 WO2017095857A1 (en) 2015-12-03 2016-11-30 Method and apparatus for measuring electrostatic charge of a substrate

Publications (3)

Publication Number Publication Date
JP2019500748A JP2019500748A (ja) 2019-01-10
JP2019500748A5 true JP2019500748A5 (enExample) 2019-11-28
JP6811777B2 JP6811777B2 (ja) 2021-01-13

Family

ID=58798105

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2018528345A Expired - Fee Related JP6811777B2 (ja) 2015-12-03 2016-11-30 基板の静電荷を測定する方法および装置

Country Status (6)

Country Link
US (1) US10739394B2 (enExample)
JP (1) JP6811777B2 (enExample)
KR (1) KR20180081630A (enExample)
CN (1) CN108291931B (enExample)
TW (1) TWI712803B (enExample)
WO (1) WO2017095857A1 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2021034820A1 (en) * 2019-08-20 2021-02-25 Ascend Performance Materials Operations Llc Method for measuring static attraction propensity
US11881424B2 (en) * 2022-03-10 2024-01-23 Intel Corporation Electrostatic charge measurement tool

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